WO2005054955A3 - Lithographic apparatus and device manufacturing method - Google Patents

Lithographic apparatus and device manufacturing method Download PDF

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Publication number
WO2005054955A3
WO2005054955A3 PCT/EP2004/013310 EP2004013310W WO2005054955A3 WO 2005054955 A3 WO2005054955 A3 WO 2005054955A3 EP 2004013310 W EP2004013310 W EP 2004013310W WO 2005054955 A3 WO2005054955 A3 WO 2005054955A3
Authority
WO
WIPO (PCT)
Prior art keywords
joint
device manufacturing
lithographic apparatus
lens
support
Prior art date
Application number
PCT/EP2004/013310
Other languages
French (fr)
Other versions
WO2005054955A2 (en
Inventor
Bob Streefkerk
Johannes Jacobus Mat Baselmans
Paul Graupner
Jan Haisma
Nicodemus Hattu
Christaan Alexander Hoogendam
Erik Roelof Loopstra
Johannes Catharinus Hu Mulkens
Bernard Gellrich
Original Assignee
Asml Netherlands Bv
Zeiss Carl Smt Ag
Bob Streefkerk
Johannes Jacobus Mat Baselmans
Paul Graupner
Jan Haisma
Nicodemus Hattu
Christaan Alexander Hoogendam
Erik Roelof Loopstra
Johannes Catharinus Hu Mulkens
Bernard Gellrich
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv, Zeiss Carl Smt Ag, Bob Streefkerk, Johannes Jacobus Mat Baselmans, Paul Graupner, Jan Haisma, Nicodemus Hattu, Christaan Alexander Hoogendam, Erik Roelof Loopstra, Johannes Catharinus Hu Mulkens, Bernard Gellrich filed Critical Asml Netherlands Bv
Publication of WO2005054955A2 publication Critical patent/WO2005054955A2/en
Publication of WO2005054955A3 publication Critical patent/WO2005054955A3/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient

Abstract

The joint between the lens (21) and its support (22) comprises an inorganic layer or a direct bond and is thus liquid tight which prevents deformation by the immersion liquid. The joint can be made either warm or cold. Solders, glue, and glue protection can all be used in the formation of this joint. The lens (21) and its support (22) are preferably made of quartz.
PCT/EP2004/013310 2003-11-24 2004-11-24 Lithographic apparatus and device manufacturing method WO2005054955A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/719,683 2003-11-24
US10/719,683 US7545481B2 (en) 2003-11-24 2003-11-24 Lithographic apparatus and device manufacturing method

Publications (2)

Publication Number Publication Date
WO2005054955A2 WO2005054955A2 (en) 2005-06-16
WO2005054955A3 true WO2005054955A3 (en) 2006-01-05

Family

ID=34591399

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2004/013310 WO2005054955A2 (en) 2003-11-24 2004-11-24 Lithographic apparatus and device manufacturing method

Country Status (4)

Country Link
US (2) US7545481B2 (en)
CN (1) CN1906541A (en)
TW (1) TWI261150B (en)
WO (1) WO2005054955A2 (en)

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US9104117B2 (en) 2004-07-07 2015-08-11 Bob Streefkerk Lithographic apparatus having a liquid detection system
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US9256136B2 (en) 2010-04-22 2016-02-09 Asml Netherlands B.V. Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply
US9366972B2 (en) 2002-11-12 2016-06-14 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US9429495B2 (en) 2004-06-04 2016-08-30 Carl Zeiss Smt Gmbh System for measuring the image quality of an optical imaging system
US9477160B2 (en) 2003-05-13 2016-10-25 Asml Netherland B.V. Lithographic apparatus and device manufacturing method
US9482966B2 (en) 2002-11-12 2016-11-01 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
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US20090214986A1 (en) 2009-08-27

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