WO2005078506A3 - High performance mems scanner - Google Patents
High performance mems scanner Download PDFInfo
- Publication number
- WO2005078506A3 WO2005078506A3 PCT/US2005/004065 US2005004065W WO2005078506A3 WO 2005078506 A3 WO2005078506 A3 WO 2005078506A3 US 2005004065 W US2005004065 W US 2005004065W WO 2005078506 A3 WO2005078506 A3 WO 2005078506A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- scanner
- torsion arms
- mirror
- high performance
- mems scanner
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006553201A JP2007522528A (en) | 2004-02-09 | 2005-02-09 | High performance MEM scanner |
EP05713178A EP1719010A2 (en) | 2004-02-09 | 2005-02-09 | High performance mems scanner |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US54289604P | 2004-02-09 | 2004-02-09 | |
US60/542,896 | 2004-02-09 | ||
US57113304P | 2004-05-14 | 2004-05-14 | |
US60/571,133 | 2004-05-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005078506A2 WO2005078506A2 (en) | 2005-08-25 |
WO2005078506A3 true WO2005078506A3 (en) | 2006-04-27 |
Family
ID=34864506
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/004068 WO2005078772A2 (en) | 2004-02-09 | 2005-02-09 | Method and apparatus for making a mems scanner |
PCT/US2005/004065 WO2005078506A2 (en) | 2004-02-09 | 2005-02-09 | High performance mems scanner |
PCT/US2005/004071 WO2005078509A2 (en) | 2004-02-09 | 2005-02-09 | Mems scanning system with improved performance |
PCT/US2005/004067 WO2005078508A2 (en) | 2004-02-09 | 2005-02-09 | Method and apparatus for scanning a beam of light |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/004068 WO2005078772A2 (en) | 2004-02-09 | 2005-02-09 | Method and apparatus for making a mems scanner |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/004071 WO2005078509A2 (en) | 2004-02-09 | 2005-02-09 | Mems scanning system with improved performance |
PCT/US2005/004067 WO2005078508A2 (en) | 2004-02-09 | 2005-02-09 | Method and apparatus for scanning a beam of light |
Country Status (6)
Country | Link |
---|---|
US (3) | US20050280879A1 (en) |
EP (4) | EP1719010A2 (en) |
JP (4) | JP2007522529A (en) |
KR (4) | KR20070012364A (en) |
AT (1) | ATE551293T1 (en) |
WO (4) | WO2005078772A2 (en) |
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Also Published As
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JP2007525025A (en) | 2007-08-30 |
WO2005078506A2 (en) | 2005-08-25 |
EP1719012B1 (en) | 2012-03-28 |
KR101088501B1 (en) | 2011-12-01 |
ATE551293T1 (en) | 2012-04-15 |
US7485485B2 (en) | 2009-02-03 |
WO2005078508A2 (en) | 2005-08-25 |
KR20070012650A (en) | 2007-01-26 |
WO2005078508A3 (en) | 2006-04-27 |
US20050179976A1 (en) | 2005-08-18 |
JP2007522528A (en) | 2007-08-09 |
WO2005078772A3 (en) | 2009-03-05 |
EP1719010A2 (en) | 2006-11-08 |
WO2005078509A3 (en) | 2006-02-16 |
US20050280879A1 (en) | 2005-12-22 |
KR20070012649A (en) | 2007-01-26 |
US20050173770A1 (en) | 2005-08-11 |
WO2005078772A2 (en) | 2005-08-25 |
US7482730B2 (en) | 2009-01-27 |
KR20070012364A (en) | 2007-01-25 |
EP1719011A2 (en) | 2006-11-08 |
JP2007522529A (en) | 2007-08-09 |
KR20070012651A (en) | 2007-01-26 |
WO2005078772A8 (en) | 2006-02-09 |
EP1719012A2 (en) | 2006-11-08 |
JP2007527551A (en) | 2007-09-27 |
EP1719154A2 (en) | 2006-11-08 |
WO2005078509A2 (en) | 2005-08-25 |
EP1719012B9 (en) | 2012-06-27 |
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