WO2005078508A3 - Method and apparatus for scanning a beam of light - Google Patents

Method and apparatus for scanning a beam of light Download PDF

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Publication number
WO2005078508A3
WO2005078508A3 PCT/US2005/004067 US2005004067W WO2005078508A3 WO 2005078508 A3 WO2005078508 A3 WO 2005078508A3 US 2005004067 W US2005004067 W US 2005004067W WO 2005078508 A3 WO2005078508 A3 WO 2005078508A3
Authority
WO
WIPO (PCT)
Prior art keywords
resonant frequency
loop
servo control
scan angle
resonant
Prior art date
Application number
PCT/US2005/004067
Other languages
French (fr)
Other versions
WO2005078508A2 (en
Inventor
Gregory T Gibson
Wyatt O Davis
Dean R Brown
Randall B Sprague
Original Assignee
Microvision Inc
Gregory T Gibson
Wyatt O Davis
Dean R Brown
Randall B Sprague
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microvision Inc, Gregory T Gibson, Wyatt O Davis, Dean R Brown, Randall B Sprague filed Critical Microvision Inc
Priority to JP2006552357A priority Critical patent/JP2007527551A/en
Priority to EP05722862A priority patent/EP1719011A2/en
Publication of WO2005078508A2 publication Critical patent/WO2005078508A2/en
Publication of WO2005078508A3 publication Critical patent/WO2005078508A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

Abstract

A resonant MEMS scanning system operates a MEMS scanner at its resonant frequency to maximize scan angle and minimize power consumption. A controller includes a phase locked loop, an amplitude servo control loop, and a resonant frequency servo control loop. A microprocessor controls the loops and provides override during conditions such as start-up. Resonant frequency is dynamically thermally trimmed, allowing the device to be operated at higher Q. The phase lock loop operates in a pre-lock condition to allow faster start-up. Resonant frequency is controlled open loop during idle and start-up. Drive voltage is set high during start-up to achieve a rapid rise in scan angle.
PCT/US2005/004067 2004-02-09 2005-02-09 Method and apparatus for scanning a beam of light WO2005078508A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006552357A JP2007527551A (en) 2004-02-09 2005-02-09 Method and apparatus for scanning light beams
EP05722862A EP1719011A2 (en) 2004-02-09 2005-02-09 Method and apparatus for scanning a beam of light

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US54289604P 2004-02-09 2004-02-09
US60/542,896 2004-02-09
US57113304P 2004-05-14 2004-05-14
US60/571,133 2004-05-14

Publications (2)

Publication Number Publication Date
WO2005078508A2 WO2005078508A2 (en) 2005-08-25
WO2005078508A3 true WO2005078508A3 (en) 2006-04-27

Family

ID=34864506

Family Applications (4)

Application Number Title Priority Date Filing Date
PCT/US2005/004068 WO2005078772A2 (en) 2004-02-09 2005-02-09 Method and apparatus for making a mems scanner
PCT/US2005/004065 WO2005078506A2 (en) 2004-02-09 2005-02-09 High performance mems scanner
PCT/US2005/004071 WO2005078509A2 (en) 2004-02-09 2005-02-09 Mems scanning system with improved performance
PCT/US2005/004067 WO2005078508A2 (en) 2004-02-09 2005-02-09 Method and apparatus for scanning a beam of light

Family Applications Before (3)

Application Number Title Priority Date Filing Date
PCT/US2005/004068 WO2005078772A2 (en) 2004-02-09 2005-02-09 Method and apparatus for making a mems scanner
PCT/US2005/004065 WO2005078506A2 (en) 2004-02-09 2005-02-09 High performance mems scanner
PCT/US2005/004071 WO2005078509A2 (en) 2004-02-09 2005-02-09 Mems scanning system with improved performance

Country Status (6)

Country Link
US (3) US20050280879A1 (en)
EP (4) EP1719010A2 (en)
JP (4) JP2007522529A (en)
KR (4) KR20070012364A (en)
AT (1) ATE551293T1 (en)
WO (4) WO2005078772A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
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CN102165759A (en) * 2008-09-29 2011-08-24 奥斯兰姆有限公司 Image projection through grid scanning of a modulated light beam using mirrors

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