WO2005078772A3 - Method and apparatus for making a mems scanner - Google Patents

Method and apparatus for making a mems scanner Download PDF

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Publication number
WO2005078772A3
WO2005078772A3 PCT/US2005/004068 US2005004068W WO2005078772A3 WO 2005078772 A3 WO2005078772 A3 WO 2005078772A3 US 2005004068 W US2005004068 W US 2005004068W WO 2005078772 A3 WO2005078772 A3 WO 2005078772A3
Authority
WO
WIPO (PCT)
Prior art keywords
mems scanners
mounting pads
making
interdigitated
neighboring
Prior art date
Application number
PCT/US2005/004068
Other languages
French (fr)
Other versions
WO2005078772A2 (en
WO2005078772A8 (en
Inventor
Kelly D Linden
Mark P Helsel
Dean R Brown
Randall B Sprague
Wyatt O Davis
Original Assignee
Microvision Inc
Kelly D Linden
Mark P Helsel
Dean R Brown
Randall B Sprague
Wyatt O Davis
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microvision Inc, Kelly D Linden, Mark P Helsel, Dean R Brown, Randall B Sprague, Wyatt O Davis filed Critical Microvision Inc
Priority to JP2006552358A priority Critical patent/JP2007525025A/en
Priority to EP05713180A priority patent/EP1719154A2/en
Publication of WO2005078772A2 publication Critical patent/WO2005078772A2/en
Publication of WO2005078772A8 publication Critical patent/WO2005078772A8/en
Publication of WO2005078772A3 publication Critical patent/WO2005078772A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

Abstract

Devices are formed on a semiconductor wafer in an interdigitated relationship and are released by deep reactive ion etching. MEMS scanners are formed without a surrounding frame. Mounting pads extend outward from torsion arms. Neighboring MEMS scanners are formed with their mounting pads interdigitated such that a regular polygon cannot be formed around a device without also intersecting a portion of one or more neighboring devices. MEMS scanners may be held in their outlines by a metal layer, by small semiconductor bridges, or a combination.
PCT/US2005/004068 2004-02-09 2005-02-09 Method and apparatus for making a mems scanner WO2005078772A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006552358A JP2007525025A (en) 2004-02-09 2005-02-09 Method and apparatus for manufacturing MEMS scanner
EP05713180A EP1719154A2 (en) 2004-02-09 2005-02-09 Method and apparatus for making a mens scanner

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US54289604P 2004-02-09 2004-02-09
US60/542,896 2004-02-09
US57113304P 2004-05-14 2004-05-14
US60/571,133 2004-05-14

Publications (3)

Publication Number Publication Date
WO2005078772A2 WO2005078772A2 (en) 2005-08-25
WO2005078772A8 WO2005078772A8 (en) 2006-02-09
WO2005078772A3 true WO2005078772A3 (en) 2009-03-05

Family

ID=34864506

Family Applications (4)

Application Number Title Priority Date Filing Date
PCT/US2005/004068 WO2005078772A2 (en) 2004-02-09 2005-02-09 Method and apparatus for making a mems scanner
PCT/US2005/004071 WO2005078509A2 (en) 2004-02-09 2005-02-09 Mems scanning system with improved performance
PCT/US2005/004067 WO2005078508A2 (en) 2004-02-09 2005-02-09 Method and apparatus for scanning a beam of light
PCT/US2005/004065 WO2005078506A2 (en) 2004-02-09 2005-02-09 High performance mems scanner

Family Applications After (3)

Application Number Title Priority Date Filing Date
PCT/US2005/004071 WO2005078509A2 (en) 2004-02-09 2005-02-09 Mems scanning system with improved performance
PCT/US2005/004067 WO2005078508A2 (en) 2004-02-09 2005-02-09 Method and apparatus for scanning a beam of light
PCT/US2005/004065 WO2005078506A2 (en) 2004-02-09 2005-02-09 High performance mems scanner

Country Status (6)

Country Link
US (3) US7482730B2 (en)
EP (4) EP1719010A2 (en)
JP (4) JP2007522528A (en)
KR (4) KR101088501B1 (en)
AT (1) ATE551293T1 (en)
WO (4) WO2005078772A2 (en)

Families Citing this family (139)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL165212A (en) 2004-11-15 2012-05-31 Elbit Systems Electro Optics Elop Ltd Device for scanning light
US7271821B2 (en) 2004-12-16 2007-09-18 Marvell International Technology Ltd. Laser printer with reduced banding artifacts
US7636101B2 (en) * 2005-02-09 2009-12-22 Microvision, Inc. MEMS scanner adapted to a laser printer
KR100629488B1 (en) * 2005-02-28 2006-09-28 삼성전자주식회사 Resonator
KR100707194B1 (en) * 2005-05-31 2007-04-13 삼성전자주식회사 Laser scanner having reduced dynamic deformation
US7301689B2 (en) * 2005-10-31 2007-11-27 Advanced Numicro Systems, Inc. MEMS mirror with parallel springs and arched support for beams
US7361900B2 (en) * 2005-12-14 2008-04-22 Northrop Grumman Corporation “I” beam bridge interconnection for ultra-sensitive silicon sensor
WO2007069165A2 (en) * 2005-12-15 2007-06-21 Koninklijke Philips Electronics, N.V. Mems beam scanner system and method
WO2007100690A2 (en) * 2006-02-23 2007-09-07 Microvision, Inc. Scanned beam source and systems using a scanned beam source for producing a wavelength-compensated composite beam of light
JP2007322466A (en) 2006-05-30 2007-12-13 Canon Inc Optical deflector and optical equipment using the same
JP4316590B2 (en) 2006-06-23 2009-08-19 株式会社東芝 Piezoelectric drive MEMS actuator
US7405853B2 (en) * 2006-08-03 2008-07-29 Inphase Technologies, Inc. Miniature single actuator scanner for angle multiplexing with circularizing and pitch correction capability
US8363296B2 (en) * 2006-10-04 2013-01-29 Ricoh Company, Ltd. Optical scanning device, image forming apparatus, mirror, housing, mirror attaching method, mirror arrangement adjusting device, and mirror arrangement adjusting method
DE102006051207B4 (en) 2006-10-30 2019-09-12 Robert Bosch Gmbh Micromechanical component with a micro-vibrating device and method for adjusting a component
US7411989B2 (en) * 2006-12-13 2008-08-12 Coherent, Inc. Mechanically Q-switched CO2 laser
JP5092406B2 (en) * 2007-01-10 2012-12-05 セイコーエプソン株式会社 Actuator, optical scanner and image forming apparatus
US20080197964A1 (en) * 2007-02-21 2008-08-21 Simpler Networks Inc. Mems actuators and switches
US8553306B2 (en) * 2007-03-15 2013-10-08 Ricoh Company, Ltd. Optical deflector and optical device
DE102008013098B4 (en) 2007-04-02 2012-02-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromechanical system with temperature stabilization
WO2009023635A1 (en) * 2007-08-10 2009-02-19 Board Of Regents, The University Of Texas System Forward-imaging optical coherence tomography (oct) systems and probe
JP2009058616A (en) * 2007-08-30 2009-03-19 Canon Inc Oscillating body apparatus, light deflector and image forming apparatus using the same
JP5007648B2 (en) * 2007-10-12 2012-08-22 セイコーエプソン株式会社 Actuator, optical scanner and image forming apparatus
JP2009122383A (en) * 2007-11-14 2009-06-04 Canon Inc Method for manufacturing oscillator device, and optical deflector and optical device comprising oscillator device manufactured by this method
TWI345381B (en) * 2007-12-31 2011-07-11 E Pin Optical Industry Co Ltd Mems scan controller with clock frequency and method of control thereof
JP5554895B2 (en) 2008-02-20 2014-07-23 キヤノン株式会社 Oscillator structure and oscillator device using the oscillator structure
WO2009148677A2 (en) * 2008-03-11 2009-12-10 The Regents Of The University Of California Microelectromechanical system (mems) resonant switches and applications for power converters and amplifiers
DE102008001056A1 (en) 2008-04-08 2009-10-15 Robert Bosch Gmbh Deflection device for a beam of an electromagnetic wave
TW200947164A (en) * 2008-05-09 2009-11-16 E Pin Optical Industry Co Ltd MEMS scan controller with inherence frequency and method of control thereof
DE102008001893A1 (en) 2008-05-21 2009-11-26 Robert Bosch Gmbh Deflection device for electromagnetic radiation
DE102008001896B4 (en) 2008-05-21 2023-02-02 Robert Bosch Gmbh Micromechanical component and manufacturing method for a micromechanical component
JP5296424B2 (en) * 2008-06-19 2013-09-25 キヤノン電子株式会社 Optical scanning device, image forming device, display device, and input device
JP5491004B2 (en) * 2008-06-20 2014-05-14 キヤノン電子株式会社 OPTICAL SCANNING DEVICE, IMAGE FORMING DEVICE USING THE OPTICAL SCANNING DEVICE, IMAGE READING DEVICE, AND DISPLAY DEVICE
JP5296427B2 (en) * 2008-06-20 2013-09-25 キヤノン電子株式会社 Optical scanning device, control method therefor, image reading device, and display device
KR100987779B1 (en) 2008-06-30 2010-10-13 경원훼라이트공업 주식회사 Actuator for holographic information storage apparatus
KR100987781B1 (en) * 2008-09-10 2010-10-13 경원훼라이트공업 주식회사 Actuator using a piezoelectric element and method of driving the same
EP2163936B1 (en) * 2008-09-16 2012-12-12 Ziemer Holding AG Device for deflecting a laser beam
US8059322B1 (en) 2008-09-16 2011-11-15 National Semiconductor Corporation System for suppressing undesirable oscillations in a MEMS scanner
JP5095569B2 (en) 2008-09-17 2012-12-12 株式会社リコー Optical scanning apparatus and image forming apparatus
US7952783B2 (en) 2008-09-22 2011-05-31 Microvision, Inc. Scanning mirror control
DE102008042346A1 (en) 2008-09-25 2010-04-01 Robert Bosch Gmbh Magnetic yoke, micromechanical component and manufacturing method for a magnetic yoke and a micromechanical component
DE102008049477A1 (en) * 2008-09-29 2010-04-08 Osram Gesellschaft mit beschränkter Haftung Method and device for projecting at least one light beam
EP2169464A1 (en) 2008-09-29 2010-03-31 Carl Zeiss SMT AG Illumination system of a microlithographic projection exposure apparatus
US8154782B1 (en) 2008-10-01 2012-04-10 Texas Instruments Incorporated Method and system for generating a drive signal for a MEMS scanner
US7907019B1 (en) * 2008-10-01 2011-03-15 National Semiconductor Corporation Method and system for operating a MEMS scanner on a resonant mode frequency
JP5157835B2 (en) * 2008-11-12 2013-03-06 セイコーエプソン株式会社 Image display device
JP5709839B2 (en) * 2009-04-17 2015-04-30 シーウェア システムズＳｉ−Ｗａｒｅ Ｓｙｓｔｅｍｓ Super wide angle MEMS scanner
US8331005B2 (en) * 2009-04-24 2012-12-11 National Semiconductor Corporation Method and system for providing resonant frequency change compensation in a drive signal for a MEMS scanner
US8248541B2 (en) 2009-07-02 2012-08-21 Microvision, Inc. Phased locked resonant scanning display projection
JP4569932B1 (en) * 2009-07-16 2010-10-27 シナノケンシ株式会社 Assembly method of optical scanning device
JP5216715B2 (en) * 2009-08-05 2013-06-19 日本信号株式会社 Planar actuator
US20120228460A1 (en) 2009-11-19 2012-09-13 Pioneer Corporation Driving apparatus
JP4849497B2 (en) * 2009-11-19 2012-01-11 パイオニア株式会社 Drive device
US8305672B2 (en) * 2010-02-23 2012-11-06 Microvision, Inc. Magnetically actuated system
US8624679B2 (en) 2010-04-14 2014-01-07 Analog Devices, Inc. Method and apparatus for MEMS phase locked loop
US8072664B1 (en) 2010-05-26 2011-12-06 Hong Kong Applied Science & Technology Research Institute, Ltd. Biaxial scanning mirror having resonant frequency adjustment
US8606410B2 (en) * 2010-06-29 2013-12-10 Headway Technologies, Inc. Drive method for starting and operating a resonant scanning MEMS device at its resonant frequency
JP5585874B2 (en) * 2010-09-13 2014-09-10 株式会社リコー Laser radar equipment
JP5565270B2 (en) * 2010-10-27 2014-08-06 株式会社リコー Scanning method, video projection device, and image acquisition device
DE102010062591A1 (en) * 2010-12-08 2012-06-14 Robert Bosch Gmbh Magnetic actuator
JP2013034301A (en) * 2011-08-02 2013-02-14 Nippon Signal Co Ltd:The Planar type electromagnetic actuator
CN102349717B (en) * 2011-08-25 2013-07-24 东华大学 Non-contact type three-dimensional scanner based on micro mirror
JP6180074B2 (en) * 2011-08-30 2017-08-16 日本信号株式会社 Planar type electromagnetic actuator
US9523909B2 (en) 2011-09-04 2016-12-20 Maradin Technologies Ltd. Apparatus and methods for locking resonating frequency of a miniature system
NL2007554C2 (en) * 2011-10-10 2013-04-11 Innoluce B V Mems scanning micromirror.
US8928969B2 (en) 2011-12-06 2015-01-06 Ostendo Technologies, Inc. Spatio-optical directional light modulator
US8854724B2 (en) 2012-03-27 2014-10-07 Ostendo Technologies, Inc. Spatio-temporal directional light modulator
EP2788813A1 (en) 2011-12-06 2014-10-15 Ostendo Technologies, Inc. Spatio-optical and temporal spatio-optical directional light modulators
US9435638B2 (en) 2012-03-22 2016-09-06 Apple Inc. Gimbaled scanning mirror array
US9715107B2 (en) 2012-03-22 2017-07-25 Apple Inc. Coupling schemes for gimbaled scanning mirror arrays
DE102012206280B4 (en) 2012-04-17 2023-12-21 Robert Bosch Gmbh Micromechanical component and manufacturing process for a micromechanical component
WO2013168264A1 (en) 2012-05-10 2013-11-14 パイオニア株式会社 Drive device
US9179126B2 (en) 2012-06-01 2015-11-03 Ostendo Technologies, Inc. Spatio-temporal light field cameras
KR101653117B1 (en) * 2012-07-26 2016-08-31 애플 인크. Dual-axis scanning mirror
US9482863B2 (en) 2012-10-23 2016-11-01 Apple Inc. Production of micro-mechanical devices
US9876418B2 (en) * 2013-02-08 2018-01-23 Pioneer Corporation Actuator
EP2973619A1 (en) * 2013-03-12 2016-01-20 Koninklijke Philips N.V. A horseshoe magnet for a biosensor
WO2014144989A1 (en) 2013-03-15 2014-09-18 Ostendo Technologies, Inc. 3d light field displays and methods with improved viewing angle depth and resolution
JP2014182226A (en) 2013-03-18 2014-09-29 Seiko Epson Corp Optical scanner, actuator, image display device, and head-mounted display
JP2014182225A (en) * 2013-03-18 2014-09-29 Seiko Epson Corp Optical scanner, actuator, image display device, and head-mounted display
DE102013206788B4 (en) * 2013-04-16 2018-02-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. DEVICE WITH A VIBRATING OPTICAL ELEMENT AND METHOD OF REMOVING THE SAME
JP5873836B2 (en) * 2013-05-31 2016-03-01 京セラドキュメントソリューションズ株式会社 Optical deflector, manufacturing method thereof, and optical scanning device
JP6261923B2 (en) * 2013-09-17 2018-01-17 スタンレー電気株式会社 Optical deflection mirror and optical deflector using the same
CN104049361A (en) * 2014-06-06 2014-09-17 无锡微奥科技有限公司 In-plane MEMS drive motion device
US9784838B1 (en) 2014-11-26 2017-10-10 Apple Inc. Compact scanner with gimbaled optics
US9835853B1 (en) 2014-11-26 2017-12-05 Apple Inc. MEMS scanner with mirrors of different sizes
KR20160082719A (en) 2014-12-26 2016-07-11 (주)아이엠 Laser beam scan system
JP6544507B2 (en) * 2015-02-09 2019-07-17 日本精機株式会社 Head-up display device
JP2016148763A (en) * 2015-02-12 2016-08-18 スタンレー電気株式会社 Picture projection device
US9798135B2 (en) 2015-02-16 2017-10-24 Apple Inc. Hybrid MEMS scanning module
JP6492914B2 (en) * 2015-04-15 2019-04-03 株式会社デンソー Optical scanning device
DE102015209030B4 (en) 2015-05-18 2023-06-07 Robert Bosch Gmbh Micromechanical device and method of making a micromechanical device
US9703096B2 (en) 2015-09-30 2017-07-11 Apple Inc. Asymmetric MEMS mirror assembly
US9897801B2 (en) 2015-09-30 2018-02-20 Apple Inc. Multi-hinge mirror assembly
US11609427B2 (en) 2015-10-16 2023-03-21 Ostendo Technologies, Inc. Dual-mode augmented/virtual reality (AR/VR) near-eye wearable displays
US11106273B2 (en) 2015-10-30 2021-08-31 Ostendo Technologies, Inc. System and methods for on-body gestural interfaces and projection displays
ITUB20156009A1 (en) * 2015-11-30 2017-05-30 St Microelectronics Srl BIASAL MEMS REFLECTOR WITH PIEZOELECTRIC ACTUATORS AND MEMS SYSTEM INCLUDING THE MEDIUM
US9869858B2 (en) 2015-12-01 2018-01-16 Apple Inc. Electrical tuning of resonant scanning
US10345594B2 (en) 2015-12-18 2019-07-09 Ostendo Technologies, Inc. Systems and methods for augmented near-eye wearable displays
LU92924B1 (en) 2015-12-23 2017-08-07 Leica Microsystems Scanning device for scanning an object for use in a scanning microscope
US10168194B2 (en) 2015-12-24 2019-01-01 Analog Devices, Inc. Method and apparatus for driving a multi-oscillator system
US10578882B2 (en) 2015-12-28 2020-03-03 Ostendo Technologies, Inc. Non-telecentric emissive micro-pixel array light modulators and methods of fabrication thereof
US10353203B2 (en) 2016-04-05 2019-07-16 Ostendo Technologies, Inc. Augmented/virtual reality near-eye displays with edge imaging lens comprising a plurality of display devices
US10453431B2 (en) 2016-04-28 2019-10-22 Ostendo Technologies, Inc. Integrated near-far light field display systems
US10522106B2 (en) 2016-05-05 2019-12-31 Ostendo Technologies, Inc. Methods and apparatus for active transparency modulation
KR101894375B1 (en) 2016-07-13 2018-09-04 이화여자대학교 산학협력단 Scanning micromirror
DE102016009936A1 (en) * 2016-08-08 2018-02-08 Blickfeld GmbH LIDAR system with moving light fiber
DE102016010236A1 (en) 2016-08-23 2018-03-01 Blickfeld GmbH LIDAR SYSTEM WITH MOBILE FIBER
DE102016216938A1 (en) 2016-09-07 2018-03-08 Robert Bosch Gmbh Micromirror device and method of operating a micromirror device
US10488652B2 (en) 2016-09-21 2019-11-26 Apple Inc. Prism-based scanner
JP6874321B2 (en) 2016-10-14 2021-05-19 富士通株式会社 Distance measuring device, distance measuring method, and distance measuring program
JP6814892B2 (en) 2017-01-27 2021-01-20 フラウンホーファーゲゼルシャフト ツール フォルデルング デル アンゲヴァンテン フォルシユング エー．フアー． Methods for Providing MMS, MMS Arrays, MEMS Actuators and MMS
EP4220917A1 (en) 2017-03-13 2023-08-02 Pioneer Corporation Drive device and distance measuring device
JP7035358B2 (en) 2017-07-28 2022-03-15 セイコーエプソン株式会社 Piezoelectric drive device, drive method of piezoelectric drive device, and robot
DE102017119038A1 (en) * 2017-08-21 2019-02-21 Jenoptik Advanced Systems Gmbh LIDAR scanner with MEMS mirror and at least two scan angle ranges
US10921431B2 (en) * 2017-10-19 2021-02-16 Cepton Technologies Inc. Apparatuses for scanning a lidar system in two dimensions
US10578861B2 (en) 2017-10-25 2020-03-03 Microsoft Technology Licensing, Llc Piezoelectric mirror system
CN107817045B (en) * 2017-11-28 2023-06-23 吉林大学 Magnetic coupling resonant frequency detection device and frequency detection method
TWI737875B (en) * 2017-12-25 2021-09-01 揚明光學股份有限公司 Light path adjustment mechanism and fabrication method thereof
KR102177333B1 (en) * 2018-03-08 2020-11-10 주식회사 에스오에스랩 Lidar scanning device capable of front and rear measurement
WO2019135494A1 (en) 2018-01-08 2019-07-11 주식회사 에스오에스랩 Lidar device
US10591598B2 (en) 2018-01-08 2020-03-17 SOS Lab co., Ltd Lidar device
JP2019154815A (en) * 2018-03-13 2019-09-19 株式会社リコー Device for detecting inclination position of eyeball, display device and optometry device
CN112771406A (en) * 2018-10-04 2021-05-07 创新科技有限公司 Electro-optical system with heating element
CN109348104B (en) * 2018-10-30 2021-01-08 维沃移动通信（杭州）有限公司 Camera module, electronic equipment and shooting method
US10514446B1 (en) * 2018-12-07 2019-12-24 Didi Research America, Llc System and methods for controlling micro-mirror array
US10484656B1 (en) 2018-12-12 2019-11-19 Microsoft Technology Licensing, Llc Driver system resonant frequency determination
US11218506B2 (en) 2018-12-17 2022-01-04 Microsoft Technology Licensing, Llc Session maturity model with trusted sources
US11204493B2 (en) * 2019-03-07 2021-12-21 Microsoft Technology Licensing, Llc Display device having scanning mirror system
US11360299B2 (en) 2019-04-02 2022-06-14 Microsoft Technology Licensing, Llc Display device with compact scanning mirror
US11221478B2 (en) 2019-04-15 2022-01-11 Microsoft Technology Licensing, Llc MEMS scanner
IT201900007219A1 (en) * 2019-05-24 2020-11-24 St Microelectronics Srl PIEZOELECTRIC MEMS ACTUATOR FOR THE COMPENSATION OF UNWANTED MOVEMENTS AND RELATED MANUFACTURING PROCESS
CN114208006A (en) 2019-08-18 2022-03-18 苹果公司 Force-balanced micromirror with electromagnetic actuation
US11556000B1 (en) 2019-08-22 2023-01-17 Red Creamery Llc Distally-actuated scanning mirror
CN115210664A (en) * 2020-02-24 2022-10-18 萨卡德视觉有限公司 System and method for controlling automated inspection of an article
JP7109673B2 (en) 2020-06-26 2022-07-29 三菱電機株式会社 Optical scanning device and rangefinder
US11016197B1 (en) 2020-06-29 2021-05-25 Aurora Innovation, Inc. LIDAR system
CN113193782B (en) * 2021-04-19 2022-07-12 南京航空航天大学 Piezoelectric-driven high-precision optical deflection servo device and working mode thereof
JPWO2022224573A1 (en) * 2021-04-23 2022-10-27
DE102022119946B3 (en) * 2022-08-08 2024-02-01 OQmented GmbH METHOD, CONTROL DEVICE and COMPUTER PROGRAM FOR TRAJECTORY CONTROL OF A LISSAJOUS MICROSCANNER AND BEAM DEFLECTION SYSTEM WITH THE CONTROL DEVICE

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6285485B1 (en) * 1998-01-16 2001-09-04 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College Induction microscanner
US20020164110A1 (en) * 1999-12-21 2002-11-07 Neukermans Arnold P. Flexible,modular, compact fiber optic switch
US6573156B1 (en) * 2001-12-13 2003-06-03 Omm, Inc. Low defect method for die singulation and for structural support for handling thin film devices
WO2003104141A1 (en) * 2002-06-10 2003-12-18 Institute Of Materials Research And Engineering Method for forming a released microstructure suitable for a microelectromechanical device

Family Cites Families (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4510390A (en) * 1982-01-11 1985-04-09 Jan Rajchman Electronic method and apparatus for distance measurement through the use of equidistant thermal fiducial markings
US4530138A (en) 1982-09-30 1985-07-23 Westinghouse Electric Corp. Method of making a transducer assembly
US4856858A (en) 1987-01-30 1989-08-15 Citizen Watch Co., Ltd. Optical scanner
US5109276A (en) 1988-05-27 1992-04-28 The University Of Connecticut Multi-dimensional multi-spectral imaging system
US6390370B1 (en) 1990-11-15 2002-05-21 Symbol Technologies, Inc. Light beam scanning pen, scan module for the device and method of utilization
JP3003429B2 (en) * 1992-10-08 2000-01-31 富士電機株式会社 Torsional vibrator and optical deflector
JP3123301B2 (en) 1993-04-16 2001-01-09 株式会社村田製作所 Angular velocity sensor
US5861979A (en) * 1994-01-18 1999-01-19 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors having an improved optical efficiency and an increased performance
JP2657769B2 (en) 1994-01-31 1997-09-24 正喜 江刺 Planar type galvanometer mirror having displacement detection function and method of manufacturing the same
JP2987750B2 (en) * 1995-05-26 1999-12-06 日本信号株式会社 Planar type electromagnetic actuator
DE69637351T2 (en) 1995-06-05 2008-11-27 Nihon Shingo K.K. ELECTROMAGNETIC ACTUATOR
US5999306A (en) * 1995-12-01 1999-12-07 Seiko Epson Corporation Method of manufacturing spatial light modulator and electronic device employing it
JP2981600B2 (en) 1996-01-17 1999-11-22 オムロン株式会社 Optical scanner and optical sensor device using the same
US6850475B1 (en) * 1996-07-30 2005-02-01 Seagate Technology, Llc Single frequency laser source for optical data storage system
US5694237A (en) 1996-09-25 1997-12-02 University Of Washington Position detection of mechanical resonant scanner mirror
JP2001519726A (en) * 1997-04-01 2001-10-23 クセロス・インク Adjustment of dynamic characteristics of micromachined torsional vibrator
US5982528A (en) * 1998-01-20 1999-11-09 University Of Washington Optical scanner having piezoelectric drive
US6049407A (en) * 1997-05-05 2000-04-11 University Of Washington Piezoelectric scanner
US6053520A (en) * 1998-07-07 2000-04-25 Wu; Chun-Sheng Bicycle pedal crank mounting arrangement
US6417502B1 (en) 1998-08-05 2002-07-09 Microvision, Inc. Millimeter wave scanning imaging system having central reflectors
US6140979A (en) 1998-08-05 2000-10-31 Microvision, Inc. Scanned display with pinch, timing, and distortion correction
JP4776779B2 (en) 1998-09-02 2011-09-21 カイロス・インク Microfabricated members that are connected by torsional flexure and rotate relatively
US6463085B1 (en) * 1998-09-09 2002-10-08 Coretek, Inc. Compact external cavity tunable lasers using hybrid integration with micromachined and electrooptic tunable elements
US6069726A (en) * 1998-10-20 2000-05-30 Lockheed Martin Corporation Optical scanner
JP3552601B2 (en) * 1998-11-16 2004-08-11 日本ビクター株式会社 Optical deflector and display device using the same
DE19857946C1 (en) * 1998-12-16 2000-01-20 Bosch Gmbh Robert Micro vibrating mirror for displays, scanners and optical monitoring systems
JP3575373B2 (en) * 1999-04-19 2004-10-13 株式会社村田製作所 Manufacturing method of external force detection sensor
JP3065611B1 (en) 1999-05-28 2000-07-17 三菱電機株式会社 Micromirror device and manufacturing method thereof
DE19941045A1 (en) 1999-08-28 2001-04-12 Bosch Gmbh Robert Micro vibrating device
US6525310B2 (en) 1999-08-05 2003-02-25 Microvision, Inc. Frequency tunable resonant scanner
US6245590B1 (en) 1999-08-05 2001-06-12 Microvision Inc. Frequency tunable resonant scanner and method of making
WO2001046741A1 (en) 1999-12-23 2001-06-28 Calient Networks, Inc. A micromachined reflective arrangement
US6753638B2 (en) * 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
US6963679B1 (en) 2000-05-24 2005-11-08 Active Optical Networks, Inc. Micro-opto-electro-mechanical switching system
US6388789B1 (en) 2000-09-19 2002-05-14 The Charles Stark Draper Laboratory, Inc. Multi-axis magnetically actuated device
US6431714B1 (en) 2000-10-10 2002-08-13 Nippon Telegraph And Telephone Corporation Micro-mirror apparatus and production method therefor
JP2002148536A (en) * 2000-11-09 2002-05-22 Olympus Optical Co Ltd Actuator and its driving method
JP4602542B2 (en) 2000-12-18 2010-12-22 オリンパス株式会社 Mirror oscillator for optical deflector
US7423787B2 (en) 2001-03-01 2008-09-09 Ricoh Company, Ltd. Optical scanning module, device, and method, and imaging apparatus
WO2002079853A1 (en) * 2001-03-16 2002-10-10 Corning Intellisense Corporation Electrostatically actuated micro-electro-mechanical devices and method of manufacture
JP2002307396A (en) * 2001-04-13 2002-10-23 Olympus Optical Co Ltd Actuator
JP3740444B2 (en) 2001-07-11 2006-02-01 キヤノン株式会社 Optical deflector, optical equipment using the same, torsional oscillator
US6632698B2 (en) 2001-08-07 2003-10-14 Hewlett-Packard Development Company, L.P. Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS
US7068296B2 (en) 2001-09-14 2006-06-27 Ricoh Company, Ltd. Optical scanning device for reducing a dot position displacement at a joint of scanning lines
US6882455B2 (en) 2001-09-19 2005-04-19 Olympus Corporation Movable structure, and deflection mirror element, optical switch element and shape variable mirror including the movable structure
US6760144B2 (en) 2001-12-05 2004-07-06 Jds Uniphase Corporation Articulated MEMS electrostatic rotary actuator
US6897990B2 (en) * 2001-12-28 2005-05-24 Canon Kabushiki Kaisha Rocking member apparatus
US20050094931A1 (en) 2002-01-21 2005-05-05 Kazuo Yokoyama Optical switch and production method therefor, information transmission device using it
US6838661B2 (en) * 2002-03-08 2005-01-04 Lexmark International, Inc. Torsion oscillator stabilization including maintaining the amplitude of the oscillator without changing its drive frequency
US20030209073A1 (en) * 2002-04-17 2003-11-13 Raymond Carroll Tuned flexure accelerometer
JP4379331B2 (en) * 2002-05-17 2009-12-09 マイクロビジョン，インク． Apparatus and method for sweeping an image beam in one dimension and bi-directionally sweeping an image beam in a second dimension
CA2429508C (en) * 2002-05-28 2013-01-08 Jds Uniphase Inc. Piano mems micromirror
JP4003552B2 (en) * 2002-06-26 2007-11-07 株式会社デンソー Optical scanner and display device
US6964196B2 (en) * 2002-07-08 2005-11-15 Texas Instruments Incorporated Resonant pivoting surface with inertially coupled activation
JP4172627B2 (en) 2002-08-01 2008-10-29 株式会社リコー Vibration mirror, optical writing device, and image forming apparatus
US6872319B2 (en) * 2002-09-30 2005-03-29 Rockwell Scientific Licensing, Llc Process for high yield fabrication of MEMS devices
JP4102158B2 (en) 2002-10-24 2008-06-18 富士通株式会社 Manufacturing method of microstructure
US7050211B2 (en) * 2002-11-08 2006-05-23 Texas Instruments Incorporated Torsional hinged mirror assembly with central spines and perimeter ridges to reduce flexing
US6999215B2 (en) * 2002-11-08 2006-02-14 Texas Instruments Incorporated Multilayered oscillating functional surface
US6769616B2 (en) * 2002-11-22 2004-08-03 Advanced Nano Systems Bidirectional MEMS scanning mirror with tunable natural frequency
US20050018322A1 (en) * 2003-05-28 2005-01-27 Terraop Ltd. Magnetically actuated fast MEMS mirrors and microscanners
US6965177B2 (en) 2003-06-18 2005-11-15 Texas Instruments Incorporated Pulse drive of resonant MEMS devices
US7053520B2 (en) * 2003-07-18 2006-05-30 The Regents Of The University Of California Rotational actuator or motor based on carbon nanotubes
JP4222895B2 (en) * 2003-07-23 2009-02-12 オリンパス株式会社 Optical deflector and scanning optical microscope using the optical deflector
US7014115B2 (en) * 2003-08-25 2006-03-21 Advanced Nano Systems, Inc. MEMS scanning mirror with distributed hinges and multiple support attachments
US6839172B1 (en) * 2003-11-15 2005-01-04 Manouchehr E. Motamedi Enhanced sampling rate in time domain imaging using MOEMS scanning optical delay line

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6285485B1 (en) * 1998-01-16 2001-09-04 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College Induction microscanner
US20020164110A1 (en) * 1999-12-21 2002-11-07 Neukermans Arnold P. Flexible,modular, compact fiber optic switch
US6573156B1 (en) * 2001-12-13 2003-06-03 Omm, Inc. Low defect method for die singulation and for structural support for handling thin film devices
WO2003104141A1 (en) * 2002-06-10 2003-12-18 Institute Of Materials Research And Engineering Method for forming a released microstructure suitable for a microelectromechanical device

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