WO2005078772A8 - Method and apparatus for making a mems scanner - Google Patents

Method and apparatus for making a mems scanner

Info

Publication number
WO2005078772A8
WO2005078772A8 PCT/US2005/004068 US2005004068W WO2005078772A8 WO 2005078772 A8 WO2005078772 A8 WO 2005078772A8 US 2005004068 W US2005004068 W US 2005004068W WO 2005078772 A8 WO2005078772 A8 WO 2005078772A8
Authority
WO
WIPO (PCT)
Prior art keywords
mems scanners
mounting pads
making
interdigitated
neighboring
Prior art date
Application number
PCT/US2005/004068
Other languages
French (fr)
Other versions
WO2005078772A3 (en
WO2005078772A2 (en
Inventor
Kelly D Linden
Mark P Helsel
Dean R Brown
Randall B Sprague
Wyatt O Davis
Original Assignee
Microvision Inc
Kelly D Linden
Mark P Helsel
Dean R Brown
Randall B Sprague
Wyatt O Davis
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microvision Inc, Kelly D Linden, Mark P Helsel, Dean R Brown, Randall B Sprague, Wyatt O Davis filed Critical Microvision Inc
Priority to JP2006552358A priority Critical patent/JP2007525025A/en
Priority to EP05713180A priority patent/EP1719154A2/en
Publication of WO2005078772A2 publication Critical patent/WO2005078772A2/en
Publication of WO2005078772A8 publication Critical patent/WO2005078772A8/en
Publication of WO2005078772A3 publication Critical patent/WO2005078772A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

Abstract

Devices are formed on a semiconductor wafer in an interdigitated relationship and are released by deep reactive ion etching. MEMS scanners are formed without a surrounding frame. Mounting pads extend outward from torsion arms. Neighboring MEMS scanners are formed with their mounting pads interdigitated such that a regular polygon cannot be formed around a device without also intersecting a portion of one or more neighboring devices. MEMS scanners may be held in their outlines by a metal layer, by small semiconductor bridges, or a combination.
PCT/US2005/004068 2004-02-09 2005-02-09 Method and apparatus for making a mems scanner WO2005078772A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006552358A JP2007525025A (en) 2004-02-09 2005-02-09 Method and apparatus for manufacturing MEMS scanner
EP05713180A EP1719154A2 (en) 2004-02-09 2005-02-09 Method and apparatus for making a mens scanner

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US54289604P 2004-02-09 2004-02-09
US60/542,896 2004-02-09
US57113304P 2004-05-14 2004-05-14
US60/571,133 2004-05-14

Publications (3)

Publication Number Publication Date
WO2005078772A2 WO2005078772A2 (en) 2005-08-25
WO2005078772A8 true WO2005078772A8 (en) 2006-02-09
WO2005078772A3 WO2005078772A3 (en) 2009-03-05

Family

ID=34864506

Family Applications (4)

Application Number Title Priority Date Filing Date
PCT/US2005/004068 WO2005078772A2 (en) 2004-02-09 2005-02-09 Method and apparatus for making a mems scanner
PCT/US2005/004065 WO2005078506A2 (en) 2004-02-09 2005-02-09 High performance mems scanner
PCT/US2005/004071 WO2005078509A2 (en) 2004-02-09 2005-02-09 Mems scanning system with improved performance
PCT/US2005/004067 WO2005078508A2 (en) 2004-02-09 2005-02-09 Method and apparatus for scanning a beam of light

Family Applications After (3)

Application Number Title Priority Date Filing Date
PCT/US2005/004065 WO2005078506A2 (en) 2004-02-09 2005-02-09 High performance mems scanner
PCT/US2005/004071 WO2005078509A2 (en) 2004-02-09 2005-02-09 Mems scanning system with improved performance
PCT/US2005/004067 WO2005078508A2 (en) 2004-02-09 2005-02-09 Method and apparatus for scanning a beam of light

Country Status (6)

Country Link
US (3) US20050280879A1 (en)
EP (4) EP1719010A2 (en)
JP (4) JP2007522529A (en)
KR (4) KR20070012364A (en)
AT (1) ATE551293T1 (en)
WO (4) WO2005078772A2 (en)

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