WO2005084211B1

WO2005084211B1 - Hybrid micro/macro plate valve

Info

Publication number: WO2005084211B1
Application number: PCT/US2005/005963
Authority: WO
Filing date: 2005-02-25
Publication date: 2006-02-16

Abstract

A microvalve device includes a pilot valve and a pilot operated valve. The pilot valve includes a first layer having openings and a second layer having a chamber in communication with the openings, and a movable member for controlling fluid flow. The pilot operated valve includes three plates. Two the openings, and pressure apply and release channels in communication with a spool portion of the pilot operated valve. The spool is movable to allow from a second fluid source to a load. The third plate includes a first source port in communication with a first fluid, the pressure apply and release channel, one of the first plate ports, one of the openings, a first port in communication with a first reservoir, a second port is in communication with the second fluid source and a load port in communication with a load.

Claims

AMENDED CLAIMS[(received by the International Bureau on 20 December 2005 (20.12.05); original claims 1-6 amended; remaining claims unchanged (2 pages)]+ STATEMENT

1. A raicrovalve device comprising: a macro-sized first valve including: a plurality of layers defining a body, the body having a chamber and a plurality of ports in fluid communication with the chamber, at least two of the plurality of ports forming a portion of a first fluid circuit, and at least two of the plurality of ports forming a portion of a second fluid circuit; and a movable portion positioned within the chamber by a control pressure acting thereon, the movable portion being selectively movable to control a fluid flow in the second fluid circuit, said movable portion being one of a flat spool or a round spool; and a multiport microvalve for controlling fluid flow in the first fluid circuit to affect the control pressure acting upon the rnoveable portion, the control pressure determined by a position of the multiport microvalve; wherein the movable portion of the first valve is selectively controllable between a first position where there is fluid communication between the ports of the second fluid circuit and a second position where fluid communication between the ports of the second fluid circuit is prevented.

2. The microvalve device defined in Claim 1 wherein the first fluid circuit comprises a first fluid source and a first fluid reservoir; wherein the multiport microvalve is selectively movable to: a first position to allow fluid flow from the first fluid source to the chamber to close the first valve; and a second position to allow fluid flow from the chamber to the reservoir to open the first valve.

3. The raicrovalve device defined in Claim 1 wherein in a first position of the microvalve fluid flows from the chamber to a reservoir to decrease the control pressure and open the first valve, and in a second position of the microvalve fluid flows from a supply to the chamber to increase the control pressure and close the first valve.

4. The microvalve device defined in Claim 3 wherein a first port of the second fluid circuit is connected to a load and a second port of the second fluid circuit is connected to a source.

5. The microvalve device defined in Claim 4 wherein opening of the first valve by the microvalve allows fluid flow from the source through the first valve to the load.

6. The microvalve device defined in Claim 5 wherein closing of the first valve by the microvalve prevents fluid flow from the source through the first valve to the load.