WO2005089299A3 - Interferometer having an auxiliary reference surface - Google Patents

Interferometer having an auxiliary reference surface Download PDF

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Publication number
WO2005089299A3
WO2005089299A3 PCT/US2005/008515 US2005008515W WO2005089299A3 WO 2005089299 A3 WO2005089299 A3 WO 2005089299A3 US 2005008515 W US2005008515 W US 2005008515W WO 2005089299 A3 WO2005089299 A3 WO 2005089299A3
Authority
WO
WIPO (PCT)
Prior art keywords
reference surface
interferometer
primary
main cavity
auxiliary
Prior art date
Application number
PCT/US2005/008515
Other languages
French (fr)
Other versions
WO2005089299A2 (en
Inventor
Groot Peter J De
Original Assignee
Zygo Corp
Groot Peter J De
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp, Groot Peter J De filed Critical Zygo Corp
Publication of WO2005089299A2 publication Critical patent/WO2005089299A2/en
Publication of WO2005089299A3 publication Critical patent/WO2005089299A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Abstract

In general, in a first aspect, the invention features apparatus that include an interferometer having a main cavity and an auxiliary reference surface, the main cavity including a primary reference surface and a test surface. The interferometer is configured to direct a primary portion of input electromagnetic radiation to the main cavity and an auxiliary portion of the input electromagnetic radiation to reflect from the auxiliary reference surface, wherein a first portion of the primary portion in the main cavity reflects from the primary reference surface and a second portion of the primary portion in the main cavity reflects from the test surface. The interferometer is further configured to direct the electromagnetic radiation reflected from the test surface, the primary reference surface, and the auxiliary reference to a multi-element detector to interfere with one another to form an interference pattern.
PCT/US2005/008515 2004-03-15 2005-03-15 Interferometer having an auxiliary reference surface WO2005089299A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US55331204P 2004-03-15 2004-03-15
US60/553,312 2004-03-15

Publications (2)

Publication Number Publication Date
WO2005089299A2 WO2005089299A2 (en) 2005-09-29
WO2005089299A3 true WO2005089299A3 (en) 2007-06-07

Family

ID=34994252

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/008515 WO2005089299A2 (en) 2004-03-15 2005-03-15 Interferometer having an auxiliary reference surface

Country Status (2)

Country Link
US (1) US7417743B2 (en)
WO (1) WO2005089299A2 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7057738B2 (en) * 2003-08-28 2006-06-06 A D Technology Corporation Simultaneous phase-shifting Fizeau interferometer
US7492469B2 (en) 2004-03-15 2009-02-17 Zygo Corporation Interferometry systems and methods using spatial carrier fringes
WO2006080923A1 (en) * 2005-01-27 2006-08-03 4D Technology Corporation Simultaneous phase-shifting fizeau interferometer
JP5558005B2 (en) * 2006-01-23 2014-07-23 ザイゴ コーポレーション Interferometer system for monitoring objects
US8345258B2 (en) * 2006-09-07 2013-01-01 4 D Technology Corporation Synchronous frequency-shift mechanism in fizeau interferometer
US7675628B2 (en) * 2006-09-07 2010-03-09 4D Technology Corporation Synchronous frequency-shift mechanism in Fizeau interferometer
US8120781B2 (en) 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
US8107084B2 (en) * 2009-01-30 2012-01-31 Zygo Corporation Interference microscope with scan motion detection using fringe motion in monitor patterns
US8599383B2 (en) * 2009-05-06 2013-12-03 The Regents Of The University Of California Optical cytometry
US9164397B2 (en) 2010-08-03 2015-10-20 Kla-Tencor Corporation Optics symmetrization for metrology
US8379219B2 (en) 2011-05-27 2013-02-19 Corning Incorporated Compound interferometer with monolithic measurement cavity
US10203331B2 (en) 2011-08-02 2019-02-12 The Regents Of The University Of California Single cell drug response measurements via live cell interferometry
US9103649B2 (en) 2011-09-08 2015-08-11 Zygo Corporation In situ calibration of interferometers
KR102330741B1 (en) * 2012-06-26 2021-11-23 케이엘에이 코포레이션 Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
EP3004373B1 (en) 2013-05-24 2018-03-14 The Regents of The University of California Identifying desirable t lymphocytes by change in mass responses
WO2016183761A1 (en) * 2015-05-18 2016-11-24 北京大学 Method for testing local mechanics-magnetic coupling coefficient of magnetic material
US11513080B2 (en) * 2016-09-09 2022-11-29 Hamilton Sundstrand Corporation Inspection systems for additive manufacturing systems
WO2018140703A1 (en) * 2017-01-27 2018-08-02 The Uab Research Foundation Common-path phase-sensitive optical coherence tomography
JP6979391B2 (en) * 2018-07-11 2021-12-15 株式会社日立製作所 Distance measuring device, distance measuring method, and three-dimensional shape measuring device
US11262191B1 (en) * 2018-07-12 2022-03-01 Onto Innovation Inc. On-axis dynamic interferometer and optical imaging systems employing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6882432B2 (en) * 2000-08-08 2005-04-19 Zygo Corporation Frequency transform phase shifting interferometry

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
US4468122A (en) * 1981-09-01 1984-08-28 Vysshee Voennoe Tekhnicheskoe Uchilische Imeni N.E. Baumana Interferometer for checking the shape of convex surfaces of optical components
US6359692B1 (en) * 1999-07-09 2002-03-19 Zygo Corporation Method and system for profiling objects having multiple reflective surfaces using wavelength-tuning phase-shifting interferometry
US6924898B2 (en) * 2000-08-08 2005-08-02 Zygo Corporation Phase-shifting interferometry method and system
JP4583619B2 (en) * 2000-09-13 2010-11-17 富士フイルム株式会社 Method for detecting fringe image analysis error and method for correcting fringe image analysis error
US6744522B2 (en) * 2001-02-01 2004-06-01 Zygo Corporation Interferometer for measuring the thickness profile of thin transparent substrates
US6624894B2 (en) * 2001-06-25 2003-09-23 Veeco Instruments Inc. Scanning interferometry with reference signal
US7050175B1 (en) * 2003-08-08 2006-05-23 Carl Zeiss Smt Ag Method for calibrating an interferometer apparatus, for qualifying an optical surface, and for manufacturing a substrate having an optical surface
US7057738B2 (en) * 2003-08-28 2006-06-06 A D Technology Corporation Simultaneous phase-shifting Fizeau interferometer
US7042578B2 (en) * 2003-12-18 2006-05-09 Zygo Corporation Method and apparatus for absolute figure metrology
US7268887B2 (en) * 2004-12-23 2007-09-11 Corning Incorporated Overlapping common-path interferometers for two-sided measurement

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6882432B2 (en) * 2000-08-08 2005-04-19 Zygo Corporation Frequency transform phase shifting interferometry

Also Published As

Publication number Publication date
WO2005089299A2 (en) 2005-09-29
US7417743B2 (en) 2008-08-26
US20050200856A1 (en) 2005-09-15

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