WO2005093813A8 - Method for manufacturing thin film transistor - Google Patents
Method for manufacturing thin film transistorInfo
- Publication number
- WO2005093813A8 WO2005093813A8 PCT/JP2005/005063 JP2005005063W WO2005093813A8 WO 2005093813 A8 WO2005093813 A8 WO 2005093813A8 JP 2005005063 W JP2005005063 W JP 2005005063W WO 2005093813 A8 WO2005093813 A8 WO 2005093813A8
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- thin film
- film transistor
- predetermined shape
- organic resin
- resin film
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000010409 thin film Substances 0.000 title abstract 2
- 239000010408 film Substances 0.000 abstract 3
- 239000011347 resin Substances 0.000 abstract 3
- 229920005989 resin Polymers 0.000 abstract 3
- 238000007599 discharging Methods 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
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Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020067021678A KR101058176B1 (en) | 2004-03-25 | 2005-03-15 | Manufacturing Method of Thin Film Transistor |
US10/592,527 US7476572B2 (en) | 2004-03-25 | 2005-03-15 | Method for manufacturing thin film transistor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004088848 | 2004-03-25 | ||
JP2004-088848 | 2004-03-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005093813A1 WO2005093813A1 (en) | 2005-10-06 |
WO2005093813A8 true WO2005093813A8 (en) | 2005-11-24 |
Family
ID=35056472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/005063 WO2005093813A1 (en) | 2004-03-25 | 2005-03-15 | Method for manufacturing thin film transistor |
Country Status (4)
Country | Link |
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US (1) | US7476572B2 (en) |
KR (1) | KR101058176B1 (en) |
CN (1) | CN100573833C (en) |
WO (1) | WO2005093813A1 (en) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2003124215A (en) | 2001-10-15 | 2003-04-25 | Seiko Epson Corp | Patterning method, semiconductor device, electric circuit, display module, color filter and light emitting element |
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-
2005
- 2005-03-15 US US10/592,527 patent/US7476572B2/en not_active Expired - Fee Related
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US20070196962A1 (en) | 2007-08-23 |
CN100573833C (en) | 2009-12-23 |
CN1934687A (en) | 2007-03-21 |
US7476572B2 (en) | 2009-01-13 |
KR20070009631A (en) | 2007-01-18 |
KR101058176B1 (en) | 2011-08-22 |
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