WO2005099972A3 - Split assembly robotic arm - Google Patents

Split assembly robotic arm Download PDF

Info

Publication number
WO2005099972A3
WO2005099972A3 PCT/US2005/012145 US2005012145W WO2005099972A3 WO 2005099972 A3 WO2005099972 A3 WO 2005099972A3 US 2005012145 W US2005012145 W US 2005012145W WO 2005099972 A3 WO2005099972 A3 WO 2005099972A3
Authority
WO
WIPO (PCT)
Prior art keywords
robotic arm
split assembly
assembly robotic
arm segment
arm
Prior art date
Application number
PCT/US2005/012145
Other languages
French (fr)
Other versions
WO2005099972A2 (en
Inventor
Richard J Kent
Original Assignee
Fabworx Solutions Inc
Richard J Kent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fabworx Solutions Inc, Richard J Kent filed Critical Fabworx Solutions Inc
Publication of WO2005099972A2 publication Critical patent/WO2005099972A2/en
Publication of WO2005099972A3 publication Critical patent/WO2005099972A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0019—End effectors other than grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/30—End effector

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A robotic arm assembly (101) is provided which comprises a hub (103), a first arm segment (105) which is attached to the hub, and a second arm segment (107) which is attached to the first arm segment such that said second arm segment can rotate at least partially about its longitudinal axis.
PCT/US2005/012145 2004-04-08 2005-04-08 Split assembly robotic arm WO2005099972A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US56040604P 2004-04-08 2004-04-08
US60/560,406 2004-04-08

Publications (2)

Publication Number Publication Date
WO2005099972A2 WO2005099972A2 (en) 2005-10-27
WO2005099972A3 true WO2005099972A3 (en) 2007-02-08

Family

ID=35150519

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/012145 WO2005099972A2 (en) 2004-04-08 2005-04-08 Split assembly robotic arm

Country Status (4)

Country Link
KR (1) KR20070015166A (en)
CN (1) CN101124070A (en)
TW (1) TWI262120B (en)
WO (1) WO2005099972A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8459140B2 (en) * 2007-04-18 2013-06-11 Fabworx Solutions, Inc. Adjustable wrist design for robotic arm
TWI498202B (en) * 2013-01-29 2015-09-01 Compal Electronics Inc Robot with connection member
CN115182927B (en) * 2022-08-03 2023-07-07 郑州机械研究所有限公司 Self-adaptive working condition sliding bearing, gearbox and selection method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555217A (en) * 1983-01-06 1985-11-26 Intelledex Incorporated Robot arm with split wrist motion
US20020166404A1 (en) * 2000-05-26 2002-11-14 Ross-Hime Designs, Incorporated Robotic manipulator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555217A (en) * 1983-01-06 1985-11-26 Intelledex Incorporated Robot arm with split wrist motion
US20020166404A1 (en) * 2000-05-26 2002-11-14 Ross-Hime Designs, Incorporated Robotic manipulator

Also Published As

Publication number Publication date
TW200602169A (en) 2006-01-16
WO2005099972A2 (en) 2005-10-27
CN101124070A (en) 2008-02-13
KR20070015166A (en) 2007-02-01
TWI262120B (en) 2006-09-21

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