WO2006007042A3 - Improved mems device - Google Patents

Improved mems device Download PDF

Info

Publication number
WO2006007042A3
WO2006007042A3 PCT/US2005/015483 US2005015483W WO2006007042A3 WO 2006007042 A3 WO2006007042 A3 WO 2006007042A3 US 2005015483 W US2005015483 W US 2005015483W WO 2006007042 A3 WO2006007042 A3 WO 2006007042A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
mems device
support frame
electrostatic shield
shield layer
Prior art date
Application number
PCT/US2005/015483
Other languages
French (fr)
Other versions
WO2006007042A2 (en
Inventor
Harvey C Nathanson
Christopher Kirby
Robert Tranchini
Robert M Young
Original Assignee
Northrop Grumman Corp
Harvey C Nathanson
Christopher Kirby
Robert Tranchini
Robert M Young
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Grumman Corp, Harvey C Nathanson, Christopher Kirby, Robert Tranchini, Robert M Young filed Critical Northrop Grumman Corp
Publication of WO2006007042A2 publication Critical patent/WO2006007042A2/en
Publication of WO2006007042A3 publication Critical patent/WO2006007042A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0018—Special provisions for avoiding charge trapping, e.g. insulation layer between actuating electrodes being permanently polarised by charge trapping so that actuating or release voltage is altered

Abstract

A MEMS device having a support frame (44) positioned on a substrate (34) surrounding a first electrode (30). A rigid flange portion (48) at the top of the support frame is closely space from, and is connected to, a second electrode (31) by relatively short spring members (50). RF conductors (52, 53) connected to respective first and second electrodes complete an RF switch. A dielectric layer (38) on the first electrode forms a capacitive type device and includes an electrostatic shield layer (40) on its surface. This electrostatic shield layer is connected to ground by a multi megohm bleeder resistance (60).
PCT/US2005/015483 2004-05-06 2005-05-04 Improved mems device WO2006007042A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/839,241 2004-05-06
US10/839,241 US7102472B1 (en) 2004-05-06 2004-05-06 MEMS device

Publications (2)

Publication Number Publication Date
WO2006007042A2 WO2006007042A2 (en) 2006-01-19
WO2006007042A3 true WO2006007042A3 (en) 2006-04-06

Family

ID=35784278

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/015483 WO2006007042A2 (en) 2004-05-06 2005-05-04 Improved mems device

Country Status (2)

Country Link
US (1) US7102472B1 (en)
WO (1) WO2006007042A2 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7381583B1 (en) * 2004-05-24 2008-06-03 The United States Of America As Represented By The Secretary Of The Air Force MEMS RF switch integrated process
CN1922755A (en) * 2004-07-29 2007-02-28 日立视听媒体股份有限公司 Condenser type MEMS element and its manufacturing method, high-frequency device
DE102004050384B4 (en) * 2004-10-15 2010-08-12 Siemens Ag Signal transmission device for transmitting signals between two relatively moving elements using an optically readable stripline
EP1808046B1 (en) * 2004-10-27 2010-09-22 Epcos Ag Reduction of air damping in mems device
US7361900B2 (en) * 2005-12-14 2008-04-22 Northrop Grumman Corporation “I” beam bridge interconnection for ultra-sensitive silicon sensor
US7550810B2 (en) * 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
US8581678B2 (en) * 2006-07-19 2013-11-12 University Of Florida Research Foundation, Inc. Method and apparatus for electromagnetic actuation
KR100882148B1 (en) * 2007-06-22 2009-02-06 한국과학기술원 Electrostatic actuator, the method of actuating the same and applicable devices using thereof
EP2249365A1 (en) 2009-05-08 2010-11-10 Nxp B.V. RF MEMS switch with a grating as middle electrode
EP2264763A1 (en) * 2009-06-15 2010-12-22 Imec Breakdown protection for electrostatically actuated MEMS devices
EP2320444A1 (en) * 2009-11-09 2011-05-11 Nxp B.V. MEMS Switch
CN102686508B (en) * 2010-01-04 2014-04-16 上海丽恒光微电子科技有限公司 A tri wavelength diffraction modulator and a method for modulation
US8368491B2 (en) * 2010-04-22 2013-02-05 Raytheon Company Systems and methods for providing high-capacitance RF MEMS switches
US9016133B2 (en) * 2011-01-05 2015-04-28 Nxp, B.V. Pressure sensor with pressure-actuated switch
EP2674392B1 (en) 2012-06-12 2017-12-27 ams international AG Integrated circuit with pressure sensor and manufacturing method
US9281128B2 (en) * 2012-07-24 2016-03-08 Raytheon Company Switchable capacitor
US9269497B2 (en) * 2014-05-30 2016-02-23 Raytheon Company Integrated capacitively-coupled bias circuit for RF MEMS switches
US9866200B2 (en) * 2014-10-22 2018-01-09 Microchip Technology Incorporated Multiple coil spring MEMS resonator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5673785A (en) * 1994-10-18 1997-10-07 Siemens Aktiengesellschaft Micromechanical relay
US6396372B1 (en) * 1997-10-21 2002-05-28 Omron Corporation Electrostatic micro relay
US6486425B2 (en) * 1998-11-26 2002-11-26 Omron Corporation Electrostatic microrelay
US6628183B2 (en) * 2001-05-10 2003-09-30 Samsung Electronics Co., Ltd. Micro-electro mechanical system having single anchor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5673785A (en) * 1994-10-18 1997-10-07 Siemens Aktiengesellschaft Micromechanical relay
US6396372B1 (en) * 1997-10-21 2002-05-28 Omron Corporation Electrostatic micro relay
US6486425B2 (en) * 1998-11-26 2002-11-26 Omron Corporation Electrostatic microrelay
US6628183B2 (en) * 2001-05-10 2003-09-30 Samsung Electronics Co., Ltd. Micro-electro mechanical system having single anchor

Also Published As

Publication number Publication date
WO2006007042A2 (en) 2006-01-19
US7102472B1 (en) 2006-09-05

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