WO2006039506A3 - Cantilevered probe detector with piezoelectric element - Google Patents

Cantilevered probe detector with piezoelectric element Download PDF

Info

Publication number
WO2006039506A3
WO2006039506A3 PCT/US2005/035216 US2005035216W WO2006039506A3 WO 2006039506 A3 WO2006039506 A3 WO 2006039506A3 US 2005035216 W US2005035216 W US 2005035216W WO 2006039506 A3 WO2006039506 A3 WO 2006039506A3
Authority
WO
WIPO (PCT)
Prior art keywords
cantilevered probe
piezoelectric element
detection system
probe
probe detector
Prior art date
Application number
PCT/US2005/035216
Other languages
French (fr)
Other versions
WO2006039506A2 (en
Inventor
Jesse D Adams
Todd A Sulchek
Stuart C Feigin
Original Assignee
No Board Of Regents Of The Nev
Jesse D Adams
Todd A Sulchek
Stuart C Feigin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by No Board Of Regents Of The Nev, Jesse D Adams, Todd A Sulchek, Stuart C Feigin filed Critical No Board Of Regents Of The Nev
Priority to US11/576,443 priority Critical patent/US7694346B2/en
Priority to GB0708212A priority patent/GB2437753B8/en
Publication of WO2006039506A2 publication Critical patent/WO2006039506A2/en
Publication of WO2006039506A3 publication Critical patent/WO2006039506A3/en
Priority to US12/748,788 priority patent/US8220067B2/en
Priority to US13/539,608 priority patent/US8434161B1/en
Priority to US13/539,604 priority patent/US8434160B1/en
Priority to US13/833,410 priority patent/US8713711B2/en
Priority to US14/258,752 priority patent/US20140219315A1/en
Priority to US14/643,641 priority patent/US9702861B2/en
Priority to US15/614,331 priority patent/US10473636B2/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/22Fuels, explosives
    • G01N33/227Explosives, e.g. combustive properties thereof
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/007Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the electric dipolar moment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/022Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/036Analysing fluids by measuring frequency or resonance of acoustic waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036Specially adapted to detect a particular component
    • G01N33/0057Specially adapted to detect a particular component for warfare agents or explosives
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/22Fuels, explosives
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/025Change of phase or condition
    • G01N2291/0256Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound

Abstract

A disclosed chemical detection system (10) for detecting a target material, such as an explosive material (13), can include a cantilevered probe (30), a probe heater thermally coupled to the cantilevered probe (36), and a piezoelectric element (32) disposed on the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption or desorption, reaction or phase change of the target material which is detected. The piezoelectric element can be configured as a detector and/or actuator. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
PCT/US2005/035216 2004-10-01 2005-09-30 Cantilevered probe detector with piezoelectric element WO2006039506A2 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
US11/576,443 US7694346B2 (en) 2004-10-01 2005-09-30 Cantilevered probe detector with piezoelectric element
GB0708212A GB2437753B8 (en) 2004-10-01 2005-09-30 Cantilevered probe detector with piezoelectric element
US12/748,788 US8220067B2 (en) 2004-10-01 2010-03-29 Cantilevered probe detector with piezoelectric element
US13/539,608 US8434161B1 (en) 2004-10-01 2012-07-02 Cantilevered probe detector with piezoelectric element
US13/539,604 US8434160B1 (en) 2004-10-01 2012-07-02 Cantilevered probe detector with piezoelectric element
US13/833,410 US8713711B2 (en) 2004-10-01 2013-03-15 Cantilevered probe detector with piezoelectric element
US14/258,752 US20140219315A1 (en) 2004-10-01 2014-04-22 Cantilevered probe detector with piezoelectric element
US14/643,641 US9702861B2 (en) 2004-10-01 2015-03-10 Cantilevered probe detector with piezoelectric element
US15/614,331 US10473636B2 (en) 2004-10-01 2017-06-05 Cantilevered probe detector with piezoelectric element

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61459204P 2004-10-01 2004-10-01
US60/614,592 2004-10-01

Related Child Applications (3)

Application Number Title Priority Date Filing Date
US11/576,443 A-371-Of-International US7694346B2 (en) 2004-10-01 2005-09-30 Cantilevered probe detector with piezoelectric element
US11/845,661 Continuation US8136385B2 (en) 2003-03-11 2007-08-27 Cantilevered probes having piezoelectric layer, treated section, and resistive heater, and method of use for chemical detection
US12/748,788 Continuation US8220067B2 (en) 2003-03-11 2010-03-29 Cantilevered probe detector with piezoelectric element

Publications (2)

Publication Number Publication Date
WO2006039506A2 WO2006039506A2 (en) 2006-04-13
WO2006039506A3 true WO2006039506A3 (en) 2006-10-19

Family

ID=36143092

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/035216 WO2006039506A2 (en) 2004-10-01 2005-09-30 Cantilevered probe detector with piezoelectric element

Country Status (3)

Country Link
US (8) US7694346B2 (en)
GB (1) GB2437753B8 (en)
WO (1) WO2006039506A2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7694346B2 (en) 2004-10-01 2010-04-06 Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada Cantilevered probe detector with piezoelectric element
US8136385B2 (en) 2003-03-11 2012-03-20 Board of Regents of the Nevada System of Higher Education, on Behalf of the University of the University of Nevada, Reno Cantilevered probes having piezoelectric layer, treated section, and resistive heater, and method of use for chemical detection
US8524501B2 (en) 2003-10-17 2013-09-03 Board Of Regents Of The Nevada System Of Higher Education Self-sensing array of microcantilevers for chemical detection

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7521257B2 (en) 2003-02-11 2009-04-21 The Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada, Reno Chemical sensor with oscillating cantilevered probe and mechanical stop
US7757863B2 (en) 2003-11-17 2010-07-20 Casella Waste Systems, Inc. Systems and methods for glass recycling at a beneficiator and/or a material recovery facility
US7264124B2 (en) 2003-11-17 2007-09-04 Casella Waste Systems, Inc. Systems and methods for sorting recyclables at a material recovery facility
WO2006055238A2 (en) 2004-11-12 2006-05-26 Casella Waste Systems, Inc. Method of providing contaminant-free, uniformly colored mixed-color cullet
US8292496B1 (en) 2005-07-27 2012-10-23 L-3 Communications Cyterra Corporation Energetic material detector
US20110151575A1 (en) * 2005-07-27 2011-06-23 L-3 Communications Cyterra Corporation Energetic Material Detector
CA2617191A1 (en) * 2005-07-27 2007-01-27 L-3 Communications Cyterra Corporation Energetic material detector
DE102006008584A1 (en) * 2006-02-24 2007-09-06 Atmel Germany Gmbh Manufacturing process for integrated piezo components
HUP0600488A2 (en) * 2006-06-13 2008-05-28 Mta Mueszaki Fiz Es Anyagtudom Method for producing micromechanical elements can be integrated into cmos technology, carrying monolith si and monolith sio produced by porous si micromanufacturing process
EP2115448A4 (en) * 2007-02-01 2013-01-30 Univ Drexel A hand-held phase-shift detector for sensor applications
US8459466B2 (en) * 2007-05-23 2013-06-11 Re Community Energy, Llc Systems and methods for optimizing a single-stream materials recovery facility
EP2212682B1 (en) * 2007-10-25 2018-06-13 M.S. Tech LTD. System and method for detection of foreign substances
EP2409153B1 (en) * 2009-03-20 2014-05-14 Attana AB Method of detecting ligand binding making use of a mass-sensitive sensor comprising immobilised cells on its surface
US8762075B2 (en) * 2009-09-29 2014-06-24 Lawrence Livermore National Security, Llc Microcantilever-based gas sensor employing two simultaneous physical sensing modes
US20110113856A1 (en) * 2009-11-13 2011-05-19 Honeywell International All-differential resonant nanosensor apparatus and method
EP2333531A1 (en) * 2009-12-11 2011-06-15 Honeywell Romania SRL Differential resonators for NO2 detection and methods related thereto
WO2011116473A1 (en) * 2010-03-26 2011-09-29 Teknoscan Systems, Inc. Non-invasive method and apparatus for detecting the presence of illicit substances
US8479560B2 (en) * 2010-03-30 2013-07-09 Honeywell International Inc. Differential resonant sensor apparatus and method for detecting relative humidity
TR201006134A2 (en) * 2010-07-26 2010-12-21 Zeng�N Ahmet Nitrogen gas measurement and land mine detection method and device.
WO2012061338A1 (en) * 2010-11-01 2012-05-10 The Trustees Of The University Of Pennsylvania Devices and methods for gravimetric sensing in liquid environments
US9222867B2 (en) 2011-01-05 2015-12-29 Brian L. Norling Resonant micromachined biochemical sensor
GB2491806B (en) * 2011-05-25 2013-07-10 Microvisk Ltd Apparatus and method for measuring properties of a fluid
US9448198B2 (en) * 2011-07-05 2016-09-20 Stmicroelectronics Pte Ltd. Microsensor with integrated temperature control
WO2013115175A1 (en) 2012-01-30 2013-08-08 京セラ株式会社 Specimen sensor and specimen-sensing method
US9259708B2 (en) 2012-07-11 2016-02-16 Battelle Memorial Institute Device and method for enhanced collection and assay of chemicals with high surface area ceramic
GB2520457B (en) * 2012-09-13 2018-05-02 Nevada Nanotech Systems Inc Molecular analysis using micro electro-mechanical sensor devices
JP5546651B1 (en) * 2013-01-28 2014-07-09 株式会社エリオニクス Surface force measuring method and surface force measuring apparatus
US9411069B1 (en) 2013-03-15 2016-08-09 Consolidated Nuclear Security, LLC Wireless radiation sensor
US9255920B1 (en) * 2013-03-15 2016-02-09 Consolidated Nuclear Security, LLC Wireless sensor
US8871523B1 (en) * 2013-03-15 2014-10-28 Consolidated Nuclear Security, LLC Wireless sensor for detecting explosive material
JP6042774B2 (en) * 2013-05-30 2016-12-14 京セラ株式会社 Sample sensor and sample sensing method
GB2517701A (en) * 2013-08-28 2015-03-04 Nokia Technologies Oy Sensing
US9297828B2 (en) 2014-03-27 2016-03-29 Ut-Battelle, Llc High heating rate thermal desorption for molecular surface sampling
KR101556378B1 (en) * 2014-05-13 2015-10-01 고려대학교 산학협력단 Multisensing platform using nanoporous cantilever sensor
US10117642B2 (en) * 2015-02-24 2018-11-06 Fujifilm Sonosite, Inc. Ultrasound transducer with sealed, active cooling
WO2017051430A2 (en) * 2015-03-05 2017-03-30 Nanosniff Technologies Pvt. Ltd. System and method of detecting explosive compounds based on rapid deflagration and differential micro-calorimetry
EP3081921B1 (en) * 2015-04-16 2019-08-14 Heraeus Electro-Nite International N.V. Spectrometer calibration method
FR3046244A1 (en) 2015-12-23 2017-06-30 Commissariat Energie Atomique GAS SENSOR WITH IMPROVED SELECTIVITY AND INCREASED COMPACITY
JP6764281B2 (en) * 2016-08-09 2020-09-30 太陽誘電株式会社 Gas sensor
US10634646B2 (en) * 2017-01-20 2020-04-28 GTBM, Inc. Acoustic frequency based system with crystalline transducer module for non-invasive detection of explosives, contraband, and other elements
DE102017202918A1 (en) 2017-02-23 2018-08-23 Robert Bosch Gmbh Sensor device and method for detecting substances in a fluid
WO2018213280A2 (en) 2017-05-15 2018-11-22 Gas Activated Systems Engine overspeed device and method
US10571445B2 (en) * 2017-05-15 2020-02-25 Hamilton Sundstrand Corporation Fielded chemical threat detectors
AU2018370858B2 (en) 2017-11-22 2023-04-27 Magic Leap, Inc. Thermally actuated cantilevered beam optical scanner
US10775258B2 (en) * 2018-03-13 2020-09-15 International Business Machines Corporation Heuristic based analytics for gas leak source identification
US10191036B1 (en) * 2018-03-22 2019-01-29 NUB4U, Inc. System for detecting and removing biological analytes in fluids
WO2019215588A1 (en) 2018-05-07 2019-11-14 King Abdullah University Of Science And Technology Combined vapor and/or gas concentration sensor and switch
US10653002B2 (en) * 2018-07-30 2020-05-12 Honeywell International Inc. Actively sensing and cancelling vibration in a printed circuit board or other platform
JP7081814B2 (en) * 2018-10-22 2022-06-07 国立大学法人 香川大学 Tactile sensor
FR3094089B1 (en) * 2019-03-20 2021-07-23 Commissariat Energie Atomique Gravimetric gas sensor
US11906546B2 (en) 2019-07-03 2024-02-20 Massachusetts Institute Of Technology Coated active cantilever probes for use in topography imaging in opaque liquid environments, and methods of performing topography imaging
DE102019123874A1 (en) * 2019-09-05 2021-03-11 Truedyne Sensors AG Device for determining a thermophysical property of a gas
US11320453B2 (en) * 2019-12-30 2022-05-03 Texas Instruments Incorporated Aging compensation of a ferroelectric piezoelectric shock sensor
US20210255082A1 (en) * 2020-02-19 2021-08-19 Tdk Corporation Methods and Devices for Detecting Particles Using a Cantilever Sensor
DE102020209856A1 (en) 2020-08-05 2022-02-10 Robert Bosch Gesellschaft mit beschränkter Haftung Method for evaluating the condition of a sensor and sensor system and method for operating the sensor system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6185992B1 (en) * 1999-07-15 2001-02-13 Veeco Instruments Inc. Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample
US20050009197A1 (en) * 2003-02-11 2005-01-13 Adams Jesse D. Chemical sensor with oscillating cantilevered probe and mechanical stop

Family Cites Families (126)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE631020A (en) * 1961-05-15
US3266291A (en) * 1962-10-29 1966-08-16 Exxon Research Engineering Co Piezo crystal fluid analyzer
US3478573A (en) 1965-07-29 1969-11-18 Exxon Research Engineering Co Integral heater piezoelectric devices
US3715911A (en) * 1970-05-11 1973-02-13 Susquehanna Corp Apparatus for sensing air-borne particulate matter
US4312288A (en) * 1978-09-12 1982-01-26 Dyckerhoff & Widmann Aktiengesellschaft Floating structure for effecting energy transformation from sea water
US4350446A (en) * 1980-11-03 1982-09-21 E. I. Du Pont De Nemours And Company Method and apparatus for calorimetric differential thermal analysis
US4549427A (en) * 1983-09-19 1985-10-29 The United States Of America As Represented By The Secretary Of The Air Force Electronic nerve agent detector
US4637987A (en) * 1984-05-07 1987-01-20 Gould Inc. Gas monitoring device and method
US4674319A (en) * 1985-03-20 1987-06-23 The Regents Of The University Of California Integrated circuit sensor
US4747698A (en) * 1986-04-30 1988-05-31 International Business Machines Corp. Scanning thermal profiler
US4928513A (en) * 1986-07-29 1990-05-29 Sharp Kabushiki Kaisha Sensor
GB8705757D0 (en) 1987-03-11 1987-04-15 Schlumberger Electronics Uk Fluid transducer
US4992244A (en) * 1988-09-27 1991-02-12 The United States Of America As Represented By The Secretary Of The Navy Films of dithiolene complexes in gas-detecting microsensors
US4935634A (en) * 1989-03-13 1990-06-19 The Regents Of The University Of California Atomic force microscope with optional replaceable fluid cell
US5266801A (en) 1989-06-05 1993-11-30 Digital Instruments, Inc. Jumping probe microscope
ATE155579T1 (en) * 1990-08-14 1997-08-15 Canon Kk BENDING BEAM PROBE AND INFORMATION PROCESSING DEVICE EQUIPPED WITH THE PROBE
US5411709A (en) * 1991-03-25 1995-05-02 Fuji Xerox Co., Ltd. Gas detector
US5846708A (en) * 1991-11-19 1998-12-08 Massachusetts Institiute Of Technology Optical and electrical methods and apparatus for molecule detection
US5412980A (en) * 1992-08-07 1995-05-09 Digital Instruments, Inc. Tapping atomic force microscope
US5519212A (en) * 1992-08-07 1996-05-21 Digital Instruments, Incorporated Tapping atomic force microscope with phase or frequency detection
US5345213A (en) * 1992-10-26 1994-09-06 The United States Of America, As Represented By The Secretary Of Commerce Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation
US5356756A (en) * 1992-10-26 1994-10-18 The United States Of America As Represented By The Secretary Of Commerce Application of microsubstrates for materials processing
US5469369A (en) 1992-11-02 1995-11-21 The United States Of America As Represented By The Secretary Of The Navy Smart sensor system and method using a surface acoustic wave vapor sensor array and pattern recognition for selective trace organic vapor detection
US8087288B1 (en) * 1993-08-17 2012-01-03 Bruker Nano, Inc. Scanning stylus atomic force microscope with cantilever tracking and optical access
US5965452A (en) * 1996-07-09 1999-10-12 Nanogen, Inc. Multiplexed active biologic array
US5445008A (en) * 1994-03-24 1995-08-29 Martin Marietta Energy Systems, Inc. Microbar sensor
US6075585A (en) * 1994-04-12 2000-06-13 The Board Of Trustees Of The Leland Stanford, Jr. University Vibrating probe for a scanning probe microscope
US5742377A (en) * 1994-04-12 1998-04-21 The Board Of Trustees Of The Leland Stanford, Jr. University Cantilever for scanning probe microscope including piezoelectric element and method of using the same
US5883705A (en) * 1994-04-12 1999-03-16 The Board Of Trustees Of The Leland Stanford, Jr. University Atomic force microscope for high speed imaging including integral actuator and sensor
US5753814A (en) * 1994-05-19 1998-05-19 Molecular Imaging Corporation Magnetically-oscillated probe microscope for operation in liquids
US5756631A (en) * 1994-05-27 1998-05-26 The United States Of America As Represented By The Secretary Of The Navy Siloxanes with strong hydrogen bond donating functionalities
US5750989A (en) * 1995-02-10 1998-05-12 Molecular Imaging Corporation Scanning probe microscope for use in fluids
US5719324A (en) * 1995-06-16 1998-02-17 Lockheed Martin Energy Systems, Inc. Microcantilever sensor
US5807758A (en) * 1995-07-21 1998-09-15 Lee; Gil U. Chemical and biological sensor using an ultra-sensitive force transducer
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
US6118124A (en) * 1996-01-18 2000-09-12 Lockheed Martin Energy Research Corporation Electromagnetic and nuclear radiation detector using micromechanical sensors
WO1998015813A1 (en) * 1996-10-09 1998-04-16 Symyx Technologies Infrared spectroscopy and imaging of libraries
US6005400A (en) 1997-08-22 1999-12-21 Lockheed Martin Energy Research Corporation High resolution three-dimensional doping profiler
US6465934B1 (en) 1997-09-08 2002-10-15 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device
US6494079B1 (en) 2001-03-07 2002-12-17 Symyx Technologies, Inc. Method and apparatus for characterizing materials by using a mechanical resonator
US6393895B1 (en) * 1997-10-08 2002-05-28 Symyx Technologies, Inc. Method and apparatus for characterizing materials by using a mechanical resonator
US6598459B1 (en) * 1998-01-09 2003-07-29 Chi Yung Fu Artificial olfactory system
US6016686A (en) * 1998-03-16 2000-01-25 Lockheed Martin Energy Research Corporation Micromechanical potentiometric sensors
US6096559A (en) * 1998-03-16 2000-08-01 Lockheed Martin Energy Research Corporation Micromechanical calorimetric sensor
US6015869A (en) * 1998-03-17 2000-01-18 Battelle Memorial Institute Strongly hydrogen-bond acidic polymer and methods of making and using
US6050722A (en) * 1998-03-25 2000-04-18 Thundat; Thomas G. Non-contact passive temperature measuring system and method of operation using micro-mechanical sensors
US5918263A (en) * 1998-03-31 1999-06-29 Lockheed Martin Energy Research Corporation Microcantilever detector for explosives
US6029500A (en) * 1998-05-19 2000-02-29 Advanced Technology Materials, Inc. Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same
US6156578A (en) 1998-06-01 2000-12-05 Advanced Technology Materials, Inc. Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream
US6041642A (en) * 1998-06-04 2000-03-28 Lockheed Martin Energy Systems, Inc. Method and apparatus for sensing the natural frequency of a cantilevered body
US6437328B1 (en) * 1998-08-03 2002-08-20 The Regents Of The University Of California Hyperbaric hydrothermal atomic force microscope
US6167748B1 (en) * 1998-08-31 2001-01-02 Lockheed Martin Energy Research Corporation Capacitively readout multi-element sensor array with common-mode cancellation
US6280939B1 (en) * 1998-09-01 2001-08-28 Veeco Instruments, Inc. Method and apparatus for DNA sequencing using a local sensitive force detector
IT1302616B1 (en) 1998-10-07 2000-09-29 Uni Degli Studi Brescia MULTISENSOR DEVICE FOR GRAVIMETRIC CHEMICAL MEASUREMENTS USING PIEZOELECTRIC RESONANT THICK FILM TECHNOLOGY.
US6477479B1 (en) * 1998-12-11 2002-11-05 Symyx Technologies Sensor array for rapid materials characterization
CA2317743A1 (en) * 1998-12-11 2000-06-22 Paul Mansky Sensor array-based system and method for rapid materials characterization
US6295861B1 (en) * 1999-01-28 2001-10-02 Advanced Technology Materials, Inc. Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same
US6852968B1 (en) 1999-03-08 2005-02-08 Canon Kabushiki Kaisha Surface-type optical apparatus
JP2000266658A (en) * 1999-03-16 2000-09-29 Seiko Instruments Inc Multiprobe and scanning probe microscope
EP1037058B1 (en) * 1999-03-18 2005-02-02 Nanosurf AG Electronic frequency measuring device and its utilisation
US6189374B1 (en) 1999-03-29 2001-02-20 Nanodevices, Inc. Active probe for an atomic force microscope and method of use thereof
US6672144B2 (en) * 1999-03-29 2004-01-06 Veeco Instruments Inc. Dynamic activation for an atomic force microscope and method of use thereof
US6289717B1 (en) * 1999-03-30 2001-09-18 U. T. Battelle, Llc Micromechanical antibody sensor
US6312959B1 (en) 1999-03-30 2001-11-06 U.T. Battelle, Llc Method using photo-induced and thermal bending of MEMS sensors
US6253162B1 (en) * 1999-04-07 2001-06-26 Battelle Memorial Institute Method of identifying features in indexed data
US6487523B2 (en) 1999-04-07 2002-11-26 Battelle Memorial Institute Model for spectral and chromatographic data
US6575020B1 (en) * 1999-05-03 2003-06-10 Cantion A/S Transducer for microfluid handling system
AU6046700A (en) * 1999-05-10 2000-11-21 California Institute Of Technology Use of spatiotemporal response behavior in sensor arrays to detect analytes in fluids
US7097973B1 (en) 1999-06-14 2006-08-29 Alpha Mos Method for monitoring molecular species within a medium
US6408250B1 (en) * 1999-08-10 2002-06-18 Battelle Memorial Institute Methods for characterizing, classifying, and identifying unknowns in samples
US6436346B1 (en) * 1999-09-14 2002-08-20 U T Battelle, Llc Micro-machined calorimetric biosensors
US6311549B1 (en) 1999-09-23 2001-11-06 U T Battelle Llc Micromechanical transient sensor for measuring viscosity and density of a fluid
US6269685B1 (en) * 1999-09-23 2001-08-07 Ut Battelle, Llc Viscosity measuring using microcantilevers
US6311557B1 (en) 1999-09-24 2001-11-06 Ut-Battelle, Llc Magnetically tunable resonance frequency beam utilizing a stress-sensitive film
US6336366B1 (en) * 1999-09-24 2002-01-08 Ut-Battelle, Llc Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film
US6212939B1 (en) * 1999-09-24 2001-04-10 Lockheed Martin Energy Research Corporation Uncoated microcantilevers as chemical sensors
US6263736B1 (en) * 1999-09-24 2001-07-24 Ut-Battelle, Llc Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film
JP4992000B2 (en) 1999-11-03 2012-08-08 インターナショナル・ビジネス・マシーンズ・コーポレーション Sensor system and method for detecting target oligonucleotide strands
US6523392B2 (en) * 2000-01-25 2003-02-25 Arizona Board Of Regents Microcantilever sensor
US6953977B2 (en) * 2000-02-08 2005-10-11 Boston Microsystems, Inc. Micromechanical piezoelectric device
US7375321B2 (en) 2000-08-09 2008-05-20 California Institute Of Technology Dynamics bionems sensors and arrays of bionems sensor immersed in fluids
US7401976B1 (en) * 2000-08-25 2008-07-22 Art Advanced Research Technologies Inc. Detection of defects by thermographic analysis
US6583411B1 (en) 2000-09-13 2003-06-24 Europaisches Laboratorium Für Molekularbiologie (Embl) Multiple local probe measuring device and method
EP1197726A1 (en) * 2000-10-04 2002-04-17 Eidgenössische Technische Hochschule Zürich Multipurpose Sensor and cantilever for it
US6457360B1 (en) * 2001-02-21 2002-10-01 Conel Ltd. High-precision integrated semiconductor peizoresistive detector devices and methods using the same
US6545495B2 (en) * 2001-04-17 2003-04-08 Ut-Battelle, Llc Method and apparatus for self-calibration of capacitive sensors
WO2002099414A1 (en) * 2001-06-06 2002-12-12 Symyx Technologies, Inc. Flow detectors having mechanical oscillators, and use thereof in flow characterization systems
US7366704B2 (en) 2001-06-28 2008-04-29 Waters Investments, Limited System and method for deconvoluting the effect of topography on scanning probe microscopy measurements
US6797631B2 (en) 2001-08-07 2004-09-28 Korea Institute Of Science And Technology High sensitive micro-cantilever sensor and fabricating method thereof
US6650102B2 (en) * 2001-08-24 2003-11-18 Symyx Technologies, Inc. High throughput mechanical property testing of materials libraries using a piezoelectric
TWI220423B (en) 2001-08-30 2004-08-21 Hrl Lab Llc A method of fabrication of a sensor
US20030062193A1 (en) * 2001-09-07 2003-04-03 Jacob Thaysen Flexible structure with integrated sensor/actuator
US6866819B1 (en) * 2001-11-13 2005-03-15 Raytheon Company Sensor for detecting small concentrations of a target matter
AU2002350427A1 (en) 2001-11-19 2003-06-10 Cantion A/S Sensor system with a reference surface mimicking the detection surface but with low ligand binding capacity
KR100517496B1 (en) 2002-01-04 2005-09-28 삼성전자주식회사 Cantilever having step-up structure and method for manufacturing the same
EP1467948A1 (en) 2002-01-24 2004-10-20 Cantion A/S A sensor
WO2003067248A1 (en) 2002-02-08 2003-08-14 Cantion A/S Scion.Dtu A sensor comprising mechanical amplification of surface stress sensitive cantilever
EP1476742A1 (en) 2002-02-22 2004-11-17 Cantion A/S Scion.DTU Sensor comprising an array of piezoresistors
DE10209245B4 (en) * 2002-03-04 2005-12-22 Concentris Gmbh Device and method for the detection of microorganisms
CA2479861A1 (en) * 2002-03-20 2003-10-02 Purdue Research Foundation Microscale sensor element and related device and method of manufacture
US6811133B2 (en) 2002-04-30 2004-11-02 The Regents Of The University Of California Hydraulically amplified PZT mems actuator
AU2003241377A1 (en) 2002-05-07 2003-11-11 California Institute Of Technology Dynamics bionems sensors and arrays of bionems sensor immersed in fluids
US6928877B2 (en) * 2002-05-24 2005-08-16 Symyx Technologies, Inc. High throughput microbalance and methods of using same
WO2003102218A2 (en) 2002-06-03 2003-12-11 Arizona Board Of Regents Hybrid microcantilever sensors
WO2003104784A1 (en) 2002-06-07 2003-12-18 Cantion A/S A cantilever sensor with a current shield and a method for its production
US7282329B2 (en) 2002-08-22 2007-10-16 Massachusetts Institute Of Technology Suspended microchannel detectors
US6994777B2 (en) * 2002-09-04 2006-02-07 Lynntech, Inc. Chemical sensors utilizing conducting polymer compositions
US7043969B2 (en) * 2002-10-18 2006-05-16 Symyx Technologies, Inc. Machine fluid sensor and method
AU2003287928A1 (en) 2002-12-27 2004-07-22 Cantion A/S Scion.Dtu A cantilever sensor using both the longitudinal and the transversal piezoresistive coefficients
US7260980B2 (en) 2003-03-11 2007-08-28 Adams Jesse D Liquid cell and passivated probe for atomic force microscopy and chemical sensing
EP1604197A2 (en) 2003-03-18 2005-12-14 Cantion A/S A cantilever array chemical sensor
US7210332B2 (en) 2003-03-21 2007-05-01 Symyx Technologies, Inc. Mechanical resonator
ATE546720T1 (en) 2003-03-21 2012-03-15 MEAS France RESONATOR SENSOR UNIT
US20040223884A1 (en) 2003-05-05 2004-11-11 Ing-Shin Chen Chemical sensor responsive to change in volume of material exposed to target particle
US7794657B2 (en) * 2003-06-03 2010-09-14 Cantimer, Inc. Phase change sensor
US20050016276A1 (en) * 2003-06-06 2005-01-27 Palo Alto Sensor Technology Innovation Frequency encoding of resonant mass sensors
US6763705B1 (en) * 2003-06-16 2004-07-20 Ut-Battelle, Llc High throughput microcantilever detector
US20050069461A1 (en) 2003-09-29 2005-03-31 Thundat Thomas G. Multi-purpose multi-function surface-tension microfluidic manipulator
US6955787B1 (en) * 2003-10-11 2005-10-18 William Paynter Hanson Integrated biological and chemical sensors
US20060257286A1 (en) 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection
US7340960B2 (en) * 2004-01-30 2008-03-11 Analatom Inc. Miniature sensor
WO2005083409A1 (en) 2004-02-26 2005-09-09 Nanonord A/S A sensor for use in detection of a target substance in a sample
US20060032289A1 (en) * 2004-08-11 2006-02-16 Pinnaduwage Lal A Non-optical explosive sensor based on two-track piezoresistive microcantilever
US20060062734A1 (en) 2004-09-20 2006-03-23 Melker Richard J Methods and systems for preventing diversion of prescription drugs
GB2437753B8 (en) * 2004-10-01 2009-05-20 Nevada System Of Higher Education Cantilevered probe detector with piezoelectric element
US20060257296A1 (en) 2005-05-13 2006-11-16 Sarnoff Corporation Alkali metal dispensers and uses for same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6185992B1 (en) * 1999-07-15 2001-02-13 Veeco Instruments Inc. Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample
US20050009197A1 (en) * 2003-02-11 2005-01-13 Adams Jesse D. Chemical sensor with oscillating cantilevered probe and mechanical stop

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8136385B2 (en) 2003-03-11 2012-03-20 Board of Regents of the Nevada System of Higher Education, on Behalf of the University of the University of Nevada, Reno Cantilevered probes having piezoelectric layer, treated section, and resistive heater, and method of use for chemical detection
US8524501B2 (en) 2003-10-17 2013-09-03 Board Of Regents Of The Nevada System Of Higher Education Self-sensing array of microcantilevers for chemical detection
US7694346B2 (en) 2004-10-01 2010-04-06 Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada Cantilevered probe detector with piezoelectric element
US8434160B1 (en) 2004-10-01 2013-04-30 Board Of Regents Of The Nevada System Of Higher Education, On Behalf Of The University Of Nevada Cantilevered probe detector with piezoelectric element
US8434161B1 (en) 2004-10-01 2013-04-30 Board Of Regents Of The Nevada System Of Higher Education, On Behalf Of The University Of Nevada Cantilevered probe detector with piezoelectric element
US8713711B2 (en) 2004-10-01 2014-04-29 Board Of Regents Of The Nevada System Of Higher Education, On Behalf Of The University Of Nevada Cantilevered probe detector with piezoelectric element

Also Published As

Publication number Publication date
GB2437753A (en) 2007-11-07
US8434160B1 (en) 2013-04-30
GB2437753B (en) 2009-04-15
US20130116137A1 (en) 2013-05-09
US20150177216A1 (en) 2015-06-25
US9702861B2 (en) 2017-07-11
GB2437753B8 (en) 2009-05-20
US20140219315A1 (en) 2014-08-07
US8434161B1 (en) 2013-04-30
US10473636B2 (en) 2019-11-12
US7694346B2 (en) 2010-04-06
US8713711B2 (en) 2014-04-29
WO2006039506A2 (en) 2006-04-13
US20130101466A1 (en) 2013-04-25
US8220067B2 (en) 2012-07-10
US20170269052A1 (en) 2017-09-21
US20140079093A1 (en) 2014-03-20
US20080085212A1 (en) 2008-04-10
GB0708212D0 (en) 2007-06-06
US20100288015A1 (en) 2010-11-18

Similar Documents

Publication Publication Date Title
WO2006039506A3 (en) Cantilevered probe detector with piezoelectric element
US10191023B2 (en) Gas-measuring device
WO2006127963A3 (en) Chemical sensor
WO2007002084A3 (en) Medical tube system with position sensing
WO2008045568A3 (en) Hydrogen sensitive composite material, tubular sensor for detecting hydrogen and other gases
WO2006113177A3 (en) Portable and cartridge-based surface plasmon resonance sensing systems
WO2010004436A8 (en) Enhanced immunoassay sensor
WO2006137913A3 (en) Remote sensor and in-situ sensor system for improved detection of chemicals in the atmosphere
CA2590645A1 (en) Temperature-based breakthrough detection and pressure swing adsorption systems and fuel processing systems including the same
WO2007011404A3 (en) Infrared sensors
WO2006080024A3 (en) Device, system and method for in vivo analysis
WO2007106560A3 (en) Methods for detecting a mycobacterium tuberculosis infection
WO2004070020A3 (en) Glyphosate tolerant alfalfa events and methods for detection thereof
WO2007092909A3 (en) Molecular interaction sensors
GB2435790A (en) Device for detecting an enzyme in a sample
WO2010011733A3 (en) Electro-mechanical switches and methods of use thereof
TW200706863A (en) Gated gas sensor
WO2002099386A3 (en) Microcalorimetric detection of analytes and binding events
WO2008136805A3 (en) Sensor of species including toxins and chemical warfare agents
WO2006014712A3 (en) Sensing media temperature in an hvac valve
WO2007010438A3 (en) Detector for electric cooking appliance detecting presence of a bowl and its temperature
MX2010004335A (en) Method and system for detection of a selected type of molecules in a sample.
WO2007135554A3 (en) Sampling device for introduction of samples into analysis system
WO2008148987A3 (en) Process for detecting gaseous halogenated compounds
WO2010106331A3 (en) Mass-sensitive sensor comprising immobilised cells on its surface and method of detecting ligand binding making use of the sensor

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KM KP KR KZ LC LK LR LS LT LU LV LY MA MD MG MK MN MW MX MZ NA NG NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SM SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU LV MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 11576443

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 0708212

Country of ref document: GB

Kind code of ref document: A

Free format text: PCT FILING DATE = 20050930

WWE Wipo information: entry into national phase

Ref document number: 0708212.6

Country of ref document: GB

122 Ep: pct application non-entry in european phase