WO2006039561A3 - Silicon inertial sensors formed using mems - Google Patents
Silicon inertial sensors formed using mems Download PDFInfo
- Publication number
- WO2006039561A3 WO2006039561A3 PCT/US2005/035315 US2005035315W WO2006039561A3 WO 2006039561 A3 WO2006039561 A3 WO 2006039561A3 US 2005035315 W US2005035315 W US 2005035315W WO 2006039561 A3 WO2006039561 A3 WO 2006039561A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mems
- inertial sensors
- sensors formed
- silicon inertial
- sense
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5628—Manufacturing; Trimming; Mounting; Housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49004—Electrical device making including measuring or testing of device or component part
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49007—Indicating transducer
Abstract
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US61490904P | 2004-09-30 | 2004-09-30 | |
US61485804P | 2004-09-30 | 2004-09-30 | |
US60/614,909 | 2004-09-30 | ||
US60/614,858 | 2004-09-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006039561A2 WO2006039561A2 (en) | 2006-04-13 |
WO2006039561A3 true WO2006039561A3 (en) | 2006-10-19 |
Family
ID=36143112
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/035313 WO2006039560A2 (en) | 2004-09-30 | 2005-09-30 | Silicon inertial sensors formed using mems |
PCT/US2005/035315 WO2006039561A2 (en) | 2004-09-30 | 2005-09-30 | Silicon inertial sensors formed using mems |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/035313 WO2006039560A2 (en) | 2004-09-30 | 2005-09-30 | Silicon inertial sensors formed using mems |
Country Status (2)
Country | Link |
---|---|
US (2) | US7360422B2 (en) |
WO (2) | WO2006039560A2 (en) |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2006039560A2 (en) | 2004-09-30 | 2006-04-13 | University Of Southern California | Silicon inertial sensors formed using mems |
US20060280202A1 (en) * | 2005-06-13 | 2006-12-14 | Analog Devices, Inc. | MEMS sensor with configuration module |
US7594440B2 (en) * | 2006-10-05 | 2009-09-29 | Endevco Corporation | Highly sensitive piezoresistive element |
US8013289B2 (en) * | 2006-11-15 | 2011-09-06 | Ether Precision, Inc. | Lens array block for image capturing unit and methods of fabrication |
TWI323826B (en) * | 2006-11-15 | 2010-04-21 | Ether Precision Inc | The manufacturing process of the combine of optical lens and chip |
FR2910635B1 (en) * | 2006-12-20 | 2009-03-06 | Thales Sa | TEST MASS GUIDING BLADE AND MICRO-FACTORY ELECTROMECHANICAL SYSTEM COMPRISING SUCH A BLADE |
US7719170B1 (en) | 2007-01-11 | 2010-05-18 | University Of Southern California | Self-focusing acoustic transducer with fresnel lens |
JP2008190931A (en) * | 2007-02-02 | 2008-08-21 | Wacoh Corp | Sensor for detecting both acceleration and angular velocity |
WO2008103659A1 (en) * | 2007-02-19 | 2008-08-28 | Solidica, Inc. | Vehicle rollover detection and prevention system |
US7813043B2 (en) | 2008-08-15 | 2010-10-12 | Ether Precision, Inc. | Lens assembly and method of manufacture |
US8640541B2 (en) * | 2009-05-27 | 2014-02-04 | King Abdullah University Of Science And Technology | MEMS mass-spring-damper systems using an out-of-plane suspension scheme |
US8322213B2 (en) * | 2009-06-12 | 2012-12-04 | The Regents Of The University Of California | Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection |
US20100318257A1 (en) * | 2009-06-15 | 2010-12-16 | Deep Kalinadhabhotla | Method and system for automatically calibrating a three-axis accelerometer device |
US8090250B2 (en) * | 2009-06-23 | 2012-01-03 | Ether Precision, Inc. | Imaging device with focus offset compensation |
FR2957414B1 (en) * | 2010-03-15 | 2012-09-28 | Commissariat Energie Atomique | FORCE SENSOR WITH REDUCED NOISE |
US8530985B2 (en) * | 2010-03-18 | 2013-09-10 | Chia-Ming Cheng | Chip package and method for forming the same |
DE102010002994A1 (en) * | 2010-03-18 | 2011-09-22 | Robert Bosch Gmbh | Piezoresistive micromechanical sensor component and corresponding measuring method |
CN102141576B (en) * | 2010-12-28 | 2012-06-06 | 中北大学 | High-gravity (g) acceleration sensor in plane of micro-electromechanical system (MEMS) based on resonance tunnelling structure (RTS) |
WO2012096416A1 (en) * | 2011-01-10 | 2012-07-19 | 한국표준과학연구원 | Electrodynamic complex sensor for nanomaterials |
EP2527788A1 (en) * | 2011-05-26 | 2012-11-28 | Maxim Integrated Products, Inc. | Quadrature error compensation |
CN103596874A (en) | 2011-06-28 | 2014-02-19 | 惠普发展公司,有限责任合伙企业 | Out-of-plane travel restriction structures |
US8991250B2 (en) * | 2012-09-11 | 2015-03-31 | The United States Of America As Represented By Secretary Of The Navy | Tuning fork gyroscope time domain inertial sensor |
JP6198595B2 (en) * | 2013-12-11 | 2017-09-20 | 京セラ株式会社 | Piezoelectric sensor and manufacturing method thereof |
US10571484B2 (en) * | 2014-04-16 | 2020-02-25 | Cirrus Logic, Inc. | Systems and methods for determining acceleration based on phase demodulation of an electrical signal |
US9581614B2 (en) * | 2014-06-02 | 2017-02-28 | Meggit (Orange County), Inc. | High-output MEMS accelerometer |
US9689888B2 (en) * | 2014-11-14 | 2017-06-27 | Honeywell International Inc. | In-plane vibrating beam accelerometer |
US10823754B2 (en) | 2014-11-14 | 2020-11-03 | Honeywell International Inc. | Accelerometer with strain compensation |
KR20160071844A (en) * | 2014-12-12 | 2016-06-22 | 삼성전기주식회사 | Rotation detecting sensor |
TWI650558B (en) | 2015-05-20 | 2019-02-11 | 美商路梅戴尼科技公司 | Method and system for determining inertia parameters |
US10724897B2 (en) | 2015-06-17 | 2020-07-28 | National Science Foundation | Cascaded gapped cantilever for low-frequency vibration sensing |
US10234477B2 (en) | 2016-07-27 | 2019-03-19 | Google Llc | Composite vibratory in-plane accelerometer |
JP6627912B2 (en) | 2017-05-24 | 2020-01-08 | 株式会社村田製作所 | Piezoelectric rotating MEMS resonator |
JP6610706B2 (en) | 2017-05-24 | 2019-11-27 | 株式会社村田製作所 | Piezoelectric gyroscope with lateral drive transducer |
JP6627911B2 (en) | 2017-05-24 | 2020-01-08 | 株式会社村田製作所 | Piezoelectric rotating MEMS resonator |
JP6696530B2 (en) | 2017-05-24 | 2020-05-20 | 株式会社村田製作所 | Coupling suspension in a piezoelectric gyroscope |
GB2565298B (en) | 2017-08-07 | 2022-03-16 | Atlantic Inertial Systems Ltd | Angular rate sensors |
JP6673979B2 (en) * | 2018-05-28 | 2020-04-01 | ファナック株式会社 | Displacement detection type force sensor |
JP6958533B2 (en) | 2018-11-28 | 2021-11-02 | 横河電機株式会社 | Vibration type sensor device |
JP7188311B2 (en) * | 2019-07-31 | 2022-12-13 | セイコーエプソン株式会社 | Gyro sensors, electronic devices, and mobile objects |
FR3102855B1 (en) * | 2019-11-06 | 2021-12-03 | Commissariat Energie Atomique | HIGH-PERFORMANCE ACCELEROMETER WITH REDUCED DIMENSIONS |
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US4951510A (en) * | 1988-07-14 | 1990-08-28 | University Of Hawaii | Multidimensional force sensor |
US20030041668A1 (en) * | 1997-08-14 | 2003-03-06 | Hulsing Rand H. | Force-sensing transducers, accelerometers, rate sensors, methods of forming force-sensing transducers, and methods of forming vibrating-beam force transducers |
US20040016307A1 (en) * | 2002-07-24 | 2004-01-29 | Albert William C. | Vibration isolation mechanism for a vibrating beam force sensor |
US20040025590A1 (en) * | 2002-08-07 | 2004-02-12 | Schaad Theo P. | Triaxial acceleration sensor |
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EP0608879B1 (en) * | 1993-01-29 | 1999-10-27 | Canon Kabushiki Kaisha | Ink jet apparatus |
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EP0760285B1 (en) * | 1995-09-04 | 1999-03-03 | Sharp Kabushiki Kaisha | Ink jet head utilizing electroviscous fluid for control of ink discharge |
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WO2006039560A2 (en) | 2004-09-30 | 2006-04-13 | University Of Southern California | Silicon inertial sensors formed using mems |
-
2005
- 2005-09-30 WO PCT/US2005/035313 patent/WO2006039560A2/en active Application Filing
- 2005-09-30 WO PCT/US2005/035315 patent/WO2006039561A2/en active Application Filing
- 2005-09-30 US US11/241,869 patent/US7360422B2/en active Active
- 2005-09-30 US US11/240,804 patent/US7481112B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4951510A (en) * | 1988-07-14 | 1990-08-28 | University Of Hawaii | Multidimensional force sensor |
US20030041668A1 (en) * | 1997-08-14 | 2003-03-06 | Hulsing Rand H. | Force-sensing transducers, accelerometers, rate sensors, methods of forming force-sensing transducers, and methods of forming vibrating-beam force transducers |
US20040016307A1 (en) * | 2002-07-24 | 2004-01-29 | Albert William C. | Vibration isolation mechanism for a vibrating beam force sensor |
US20040025590A1 (en) * | 2002-08-07 | 2004-02-12 | Schaad Theo P. | Triaxial acceleration sensor |
Also Published As
Publication number | Publication date |
---|---|
US7481112B2 (en) | 2009-01-27 |
WO2006039560A3 (en) | 2007-08-09 |
US20070193353A1 (en) | 2007-08-23 |
WO2006039560A2 (en) | 2006-04-13 |
US7360422B2 (en) | 2008-04-22 |
WO2006039561A2 (en) | 2006-04-13 |
US20060225506A1 (en) | 2006-10-12 |
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