WO2006078734A3 - Method and apparatus for cleaning and surface conditioning objects using plasma - Google Patents

Method and apparatus for cleaning and surface conditioning objects using plasma Download PDF

Info

Publication number
WO2006078734A3
WO2006078734A3 PCT/US2006/001762 US2006001762W WO2006078734A3 WO 2006078734 A3 WO2006078734 A3 WO 2006078734A3 US 2006001762 W US2006001762 W US 2006001762W WO 2006078734 A3 WO2006078734 A3 WO 2006078734A3
Authority
WO
WIPO (PCT)
Prior art keywords
dielectric barrier
cleaning
barrier members
objects
elongated dielectric
Prior art date
Application number
PCT/US2006/001762
Other languages
French (fr)
Other versions
WO2006078734A2 (en
Inventor
Peter Frank Kurunczi
Original Assignee
Cerionx Inc
Peter Frank Kurunczi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/039,628 external-priority patent/US7017594B2/en
Priority claimed from US11/040,222 external-priority patent/US20060162740A1/en
Priority claimed from US11/043,787 external-priority patent/US20060162741A1/en
Priority claimed from US11/143,552 external-priority patent/US20060272675A1/en
Application filed by Cerionx Inc, Peter Frank Kurunczi filed Critical Cerionx Inc
Publication of WO2006078734A2 publication Critical patent/WO2006078734A2/en
Publication of WO2006078734A3 publication Critical patent/WO2006078734A3/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/14Plasma, i.e. ionised gases
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L13/00Cleaning or rinsing apparatus
    • B01L13/02Cleaning or rinsing apparatus for receptacle or instruments
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348Dielectric barrier discharge
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02Burettes; Pipettes
    • B01L3/021Pipettes, i.e. with only one conduit for withdrawing and redistributing liquids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02Burettes; Pipettes
    • B01L3/021Pipettes, i.e. with only one conduit for withdrawing and redistributing liquids
    • B01L3/0217Pipettes, i.e. with only one conduit for withdrawing and redistributing liquids of the plunger pump type
    • B01L3/022Capillary pipettes, i.e. having very small bore
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02Burettes; Pipettes
    • B01L3/0241Drop counters; Drop formers
    • B01L3/0244Drop counters; Drop formers using pins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02Burettes; Pipettes
    • B01L3/0275Interchangeable or disposable dispensing tips

Abstract

An apparatus and method for cleaning objects using plasma are disclosed. The apparatus provides a plurality of elongated dielectric barrier members arranged adjacent each other; a first set of electrodes arranged to be coupled to a voltage source at a first voltage, each electrode of the first set contained within, and extending substantially along the length of, a first set of the elongated dielectric barrier members; and a second set of electrodes arranged to be coupled to a voltage source at a second voltage, each electrode of the second set contained within, and extending substantially along the length of, a second set of the elongated dielectric barrier members; whereby, when the first and second voltages are applied, dielectric barrier discharges are created to form plasma between adjacent elongated dielectric barrier members for cleaning at least a portion of the objects. The method provides a plurality of elongated dielectric barrier members having a first and second set of electrodes arranged therein; introducing the objects proximate the elongated dielectric barrier members; and generating a dielectric barrier discharge to form plasma between the elongated dielectric barrier members for cleaning at least a portion of each of the objects.
PCT/US2006/001762 2005-01-20 2006-01-19 Method and apparatus for cleaning and surface conditioning objects using plasma WO2006078734A2 (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US11/039,628 2005-01-20
US11/039,628 US7017594B2 (en) 2003-06-16 2005-01-20 Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads
US11/040,222 2005-01-21
US11/040,222 US20060162740A1 (en) 2005-01-21 2005-01-21 Method and apparatus for cleaning and surface conditioning objects using non-equilibrium atmospheric pressure plasma
US11/043,787 2005-01-26
US11/043,787 US20060162741A1 (en) 2005-01-26 2005-01-26 Method and apparatus for cleaning and surface conditioning objects with plasma
US11/143,552 2005-06-02
US11/143,552 US20060272675A1 (en) 2005-06-02 2005-06-02 Method and apparatus for cleaning and surface conditioning objects using plasma

Publications (2)

Publication Number Publication Date
WO2006078734A2 WO2006078734A2 (en) 2006-07-27
WO2006078734A3 true WO2006078734A3 (en) 2007-07-26

Family

ID=36692827

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2006/001268 WO2006091285A2 (en) 2005-01-20 2006-01-13 Method and apparatus for cleaning and surface conditioning objects using plasma
PCT/US2006/001762 WO2006078734A2 (en) 2005-01-20 2006-01-19 Method and apparatus for cleaning and surface conditioning objects using plasma

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2006/001268 WO2006091285A2 (en) 2005-01-20 2006-01-13 Method and apparatus for cleaning and surface conditioning objects using plasma

Country Status (1)

Country Link
WO (2) WO2006091285A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060162741A1 (en) * 2005-01-26 2006-07-27 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects with plasma
EP3335760B1 (en) * 2015-08-10 2021-09-29 Ajou University Industry-Academic Cooperation Foundation Nitrogen-based, low-temperature atmospheric pressure plasma for treating muscle damage

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225659A (en) * 1991-04-12 1993-07-06 Bridgestone Corporation Method and apparatus for surface treating an axially symmetric substrate at atmosphere pressure
US6283130B1 (en) * 1995-05-30 2001-09-04 Anelva Corporation Plasma cleaning method and placement area protector used in the method
US20020124867A1 (en) * 2001-01-08 2002-09-12 Apl Co., Ltd. Apparatus and method for surface cleaning using plasma
US6666928B2 (en) * 2001-09-13 2003-12-23 Micell Technologies, Inc. Methods and apparatus for holding a substrate in a pressure chamber

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5133986A (en) * 1990-10-05 1992-07-28 International Business Machines Corporation Plasma enhanced chemical vapor processing system using hollow cathode effect
JPH05136094A (en) * 1991-11-11 1993-06-01 Ramuko Kk Plasma reactor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225659A (en) * 1991-04-12 1993-07-06 Bridgestone Corporation Method and apparatus for surface treating an axially symmetric substrate at atmosphere pressure
US6283130B1 (en) * 1995-05-30 2001-09-04 Anelva Corporation Plasma cleaning method and placement area protector used in the method
US20020124867A1 (en) * 2001-01-08 2002-09-12 Apl Co., Ltd. Apparatus and method for surface cleaning using plasma
US6666928B2 (en) * 2001-09-13 2003-12-23 Micell Technologies, Inc. Methods and apparatus for holding a substrate in a pressure chamber

Also Published As

Publication number Publication date
WO2006078734A2 (en) 2006-07-27
WO2006091285A2 (en) 2006-08-31
WO2006091285A3 (en) 2007-07-26

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