WO2006091285A3 - Method and apparatus for cleaning and surface conditioning objects using plasma - Google Patents

Method and apparatus for cleaning and surface conditioning objects using plasma Download PDF

Info

Publication number
WO2006091285A3
WO2006091285A3 PCT/US2006/001268 US2006001268W WO2006091285A3 WO 2006091285 A3 WO2006091285 A3 WO 2006091285A3 US 2006001268 W US2006001268 W US 2006001268W WO 2006091285 A3 WO2006091285 A3 WO 2006091285A3
Authority
WO
WIPO (PCT)
Prior art keywords
plasma
dielectric barrier
cleaning
barrier members
elongated dielectric
Prior art date
Application number
PCT/US2006/001268
Other languages
French (fr)
Other versions
WO2006091285A2 (en
Inventor
Peter Kurunczi
Original Assignee
Cerionx Inc
Peter Kurunczi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/039,628 external-priority patent/US7017594B2/en
Priority claimed from US11/040,222 external-priority patent/US20060162740A1/en
Priority claimed from US11/043,787 external-priority patent/US20060162741A1/en
Priority claimed from US11/143,552 external-priority patent/US20060272675A1/en
Application filed by Cerionx Inc, Peter Kurunczi filed Critical Cerionx Inc
Publication of WO2006091285A2 publication Critical patent/WO2006091285A2/en
Publication of WO2006091285A3 publication Critical patent/WO2006091285A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/14—Plasma, i.e. ionised gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L13/00—Cleaning or rinsing apparatus
    • B01L13/02—Cleaning or rinsing apparatus for receptacle or instruments
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/021—Pipettes, i.e. with only one conduit for withdrawing and redistributing liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/021—Pipettes, i.e. with only one conduit for withdrawing and redistributing liquids
    • B01L3/0217—Pipettes, i.e. with only one conduit for withdrawing and redistributing liquids of the plunger pump type
    • B01L3/022—Capillary pipettes, i.e. having very small bore
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/0241—Drop counters; Drop formers
    • B01L3/0244—Drop counters; Drop formers using pins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/0275—Interchangeable or disposable dispensing tips

Abstract

An apparatus for cleaning objects using plasma is disclosed. The apparatus includes a first plurality of elongated dielectric barrier members arranged adjacent each other; a second plurality of elongated dielectric barrier members arranged adjacent each other and stacked juxtaposed the first plurality of elongated dielectric barrier members; and a plurality of electrodes, each contained within, and extending substantially along the length of, respective ones of the first and second plurality of stacked elongated dielectric barrier members.
PCT/US2006/001268 2005-01-20 2006-01-13 Method and apparatus for cleaning and surface conditioning objects using plasma WO2006091285A2 (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US11/039,628 US7017594B2 (en) 2003-06-16 2005-01-20 Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads
US11/039,628 2005-01-20
US11/040,222 US20060162740A1 (en) 2005-01-21 2005-01-21 Method and apparatus for cleaning and surface conditioning objects using non-equilibrium atmospheric pressure plasma
US11/040,222 2005-01-21
US11/043,787 US20060162741A1 (en) 2005-01-26 2005-01-26 Method and apparatus for cleaning and surface conditioning objects with plasma
US11/043,787 2005-01-26
US11/143,552 US20060272675A1 (en) 2005-06-02 2005-06-02 Method and apparatus for cleaning and surface conditioning objects using plasma
US11/143,552 2005-06-02

Publications (2)

Publication Number Publication Date
WO2006091285A2 WO2006091285A2 (en) 2006-08-31
WO2006091285A3 true WO2006091285A3 (en) 2007-07-26

Family

ID=36692827

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2006/001268 WO2006091285A2 (en) 2005-01-20 2006-01-13 Method and apparatus for cleaning and surface conditioning objects using plasma
PCT/US2006/001762 WO2006078734A2 (en) 2005-01-20 2006-01-19 Method and apparatus for cleaning and surface conditioning objects using plasma

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US2006/001762 WO2006078734A2 (en) 2005-01-20 2006-01-19 Method and apparatus for cleaning and surface conditioning objects using plasma

Country Status (1)

Country Link
WO (2) WO2006091285A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060162741A1 (en) * 2005-01-26 2006-07-27 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects with plasma
WO2017026804A1 (en) * 2015-08-10 2017-02-16 아주대학교산학협력단 Nitrogen-based, low-temperature atmospheric pressure plasma for treating muscle damage

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5133986A (en) * 1990-10-05 1992-07-28 International Business Machines Corporation Plasma enhanced chemical vapor processing system using hollow cathode effect
US5225659A (en) * 1991-04-12 1993-07-06 Bridgestone Corporation Method and apparatus for surface treating an axially symmetric substrate at atmosphere pressure
US5292396A (en) * 1991-11-11 1994-03-08 M. C. Electronics Co., Ltd. Plasma processing chamber
US20020124867A1 (en) * 2001-01-08 2002-09-12 Apl Co., Ltd. Apparatus and method for surface cleaning using plasma

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6283130B1 (en) * 1995-05-30 2001-09-04 Anelva Corporation Plasma cleaning method and placement area protector used in the method
US6666928B2 (en) * 2001-09-13 2003-12-23 Micell Technologies, Inc. Methods and apparatus for holding a substrate in a pressure chamber

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5133986A (en) * 1990-10-05 1992-07-28 International Business Machines Corporation Plasma enhanced chemical vapor processing system using hollow cathode effect
US5225659A (en) * 1991-04-12 1993-07-06 Bridgestone Corporation Method and apparatus for surface treating an axially symmetric substrate at atmosphere pressure
US5292396A (en) * 1991-11-11 1994-03-08 M. C. Electronics Co., Ltd. Plasma processing chamber
US20020124867A1 (en) * 2001-01-08 2002-09-12 Apl Co., Ltd. Apparatus and method for surface cleaning using plasma

Also Published As

Publication number Publication date
WO2006091285A2 (en) 2006-08-31
WO2006078734A2 (en) 2006-07-27
WO2006078734A3 (en) 2007-07-26

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