WO2006119252A3 - Ultrathin nanoscale membranes, methods of making, and uses thereof - Google Patents
Ultrathin nanoscale membranes, methods of making, and uses thereof Download PDFInfo
- Publication number
- WO2006119252A3 WO2006119252A3 PCT/US2006/016744 US2006016744W WO2006119252A3 WO 2006119252 A3 WO2006119252 A3 WO 2006119252A3 US 2006016744 W US2006016744 W US 2006016744W WO 2006119252 A3 WO2006119252 A3 WO 2006119252A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- making
- methods
- membranes
- disclosed
- devices
- Prior art date
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
- B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/0213—Silicon
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/0215—Silicon carbide; Silicon nitride; Silicon oxycarbide
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/022—Metals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/022—Metals
- B01D71/0221—Group 4 or 5 metals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/022—Metals
- B01D71/0223—Group 8, 9 or 10 metals
- B01D71/02231—Palladium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/024—Oxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/024—Oxides
- B01D71/027—Silicium oxide
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0015—Production of aperture devices, microporous systems or stamps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/94—Non-porous diffusion electrodes, e.g. palladium membranes, ion exchange membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/08—Patterned membranes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M2250/00—Fuel cells for particular applications; Specific features of fuel cell system
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Abstract
A nanoscale membrane exposed on opposite sides thereof and having an average thickness of less than about 100 nm, and a lateral length to thickness aspect ratio that is more than 10,000 to 1 is disclosed. Also disclosed are methods of making such membranes, and use thereof in a number of devices including fuel cells, sensor devices, electrospray devices, and supports for examining a sample under electron microscopy.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US67637505P | 2005-04-29 | 2005-04-29 | |
US60/676,375 | 2005-04-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006119252A2 WO2006119252A2 (en) | 2006-11-09 |
WO2006119252A3 true WO2006119252A3 (en) | 2007-11-29 |
Family
ID=37308607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/016744 WO2006119252A2 (en) | 2005-04-29 | 2006-05-01 | Ultrathin nanoscale membranes, methods of making, and uses thereof |
Country Status (2)
Country | Link |
---|---|
US (1) | US7922795B2 (en) |
WO (1) | WO2006119252A2 (en) |
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CA2606440A1 (en) * | 2005-04-29 | 2006-11-09 | University Of Rochester | Ultrathin porous nanoscale membranes, methods of making, and uses thereof |
US7482587B1 (en) * | 2005-11-23 | 2009-01-27 | Dudley S. Finch | Circular silicon substrates with thin film membranes for electron microscopy |
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EP2527497A1 (en) * | 2009-02-17 | 2012-11-28 | McAlister Technologies, LLC | Apparatus and method for controlling nucleation during electrolysis |
JP5411299B2 (en) * | 2009-02-17 | 2014-02-12 | マクアリスター テクノロジーズ エルエルシー | Electrolytic cell and method of use thereof |
US9040012B2 (en) | 2009-02-17 | 2015-05-26 | Mcalister Technologies, Llc | System and method for renewable resource production, for example, hydrogen production by microbial electrolysis, fermentation, and/or photosynthesis |
US8075750B2 (en) | 2009-02-17 | 2011-12-13 | Mcalister Technologies, Llc | Electrolytic cell and method of use thereof |
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US8361196B2 (en) * | 2010-04-09 | 2013-01-29 | Inficon Gmbh | Gas-selective membrane and method of its production |
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US9127244B2 (en) | 2013-03-14 | 2015-09-08 | Mcalister Technologies, Llc | Digester assembly for providing renewable resources and associated systems, apparatuses, and methods |
US20140298762A1 (en) * | 2013-04-03 | 2014-10-09 | William A Kelley | Nano Filter Pump |
US10315164B2 (en) | 2013-04-03 | 2019-06-11 | William A. Kelley | Nanoscale gaseous material filtering and pumping systems and methods of use thereof |
JP2015187974A (en) * | 2014-03-14 | 2015-10-29 | 日本電子株式会社 | Method of producing sample support film |
US9861920B1 (en) | 2015-05-01 | 2018-01-09 | Imagine Tf, Llc | Three dimensional nanometer filters and methods of use |
US10730047B2 (en) | 2014-06-24 | 2020-08-04 | Imagine Tf, Llc | Micro-channel fluid filters and methods of use |
US9515181B2 (en) | 2014-08-06 | 2016-12-06 | Qualcomm Incorporated | Semiconductor device with self-aligned back side features |
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2006
- 2006-05-01 WO PCT/US2006/016744 patent/WO2006119252A2/en active Application Filing
- 2006-05-01 US US11/415,014 patent/US7922795B2/en active Active
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US5413679A (en) * | 1993-06-30 | 1995-05-09 | The United States Of America As Represented By The Secretary Of The Navy | Method of producing a silicon membrane using a silicon alloy etch stop layer |
US5904545A (en) * | 1993-12-17 | 1999-05-18 | The Regents Of The University Of California | Apparatus for fabricating self-assembling microstructures |
US6454938B2 (en) * | 1998-09-17 | 2002-09-24 | Kionix, Inc. | Integrated monolithic microfabricated electrospray and liquid chromatography system and method |
Also Published As
Publication number | Publication date |
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US7922795B2 (en) | 2011-04-12 |
WO2006119252A2 (en) | 2006-11-09 |
US20060243655A1 (en) | 2006-11-02 |
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