WO2006130779A3 - Method and apparatus for cleaning and surface conditioning objects using plasma - Google Patents

Method and apparatus for cleaning and surface conditioning objects using plasma Download PDF

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Publication number
WO2006130779A3
WO2006130779A3 PCT/US2006/021308 US2006021308W WO2006130779A3 WO 2006130779 A3 WO2006130779 A3 WO 2006130779A3 US 2006021308 W US2006021308 W US 2006021308W WO 2006130779 A3 WO2006130779 A3 WO 2006130779A3
Authority
WO
WIPO (PCT)
Prior art keywords
cleaning
plasma
objects
dielectric barrier
barrier plate
Prior art date
Application number
PCT/US2006/021308
Other languages
French (fr)
Other versions
WO2006130779A2 (en
Inventor
Peter Kurunczi
Original Assignee
Cerionx Inc
Peter Kurunczi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/143,552 external-priority patent/US20060272675A1/en
Priority claimed from US11/142,988 external-priority patent/US8092643B2/en
Priority claimed from US11/143,083 external-priority patent/US20060272674A1/en
Application filed by Cerionx Inc, Peter Kurunczi filed Critical Cerionx Inc
Publication of WO2006130779A2 publication Critical patent/WO2006130779A2/en
Publication of WO2006130779A3 publication Critical patent/WO2006130779A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass

Abstract

A method and apparatus for cleaning and surface conditioning objects using plasma are disclosed. One embodiment of the apparatus for cleaning conductive objects using plasma discloses at least one planar dielectric barrier plate having a first surface and a second surface, and at least one electrode proximate the second surface of the at least one planar dielectric barrier plate, wherein the planar dielectric barrier plate is positioned to receive at least one object substantially orthogonally proximate the first surface. Another embodiment of the apparatus includes a ground plane for cleaning non-conductive objects, wherein the ground plane has apertures sized and arranged for receiving each object to be cleaned.
PCT/US2006/021308 2005-06-02 2006-06-02 Method and apparatus for cleaning and surface conditioning objects using plasma WO2006130779A2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US11/143,552 2005-06-02
US11/143,552 US20060272675A1 (en) 2005-06-02 2005-06-02 Method and apparatus for cleaning and surface conditioning objects using plasma
US11/142,988 US8092643B2 (en) 2003-06-16 2005-06-02 Method and apparatus for cleaning and surface conditioning objects using plasma
US11/143,083 US20060272674A1 (en) 2005-06-02 2005-06-02 Method and apparatus for cleaning and surface conditioning objects using plasma
US11/142,988 2005-06-02
US11/143,083 2005-06-02

Publications (2)

Publication Number Publication Date
WO2006130779A2 WO2006130779A2 (en) 2006-12-07
WO2006130779A3 true WO2006130779A3 (en) 2007-02-01

Family

ID=37482323

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2006/021309 WO2006130780A2 (en) 2005-06-02 2006-06-02 Method and apparatus for cleaning and surface conditioning objects using plasma
PCT/US2006/021308 WO2006130779A2 (en) 2005-06-02 2006-06-02 Method and apparatus for cleaning and surface conditioning objects using plasma

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2006/021309 WO2006130780A2 (en) 2005-06-02 2006-06-02 Method and apparatus for cleaning and surface conditioning objects using plasma

Country Status (1)

Country Link
WO (2) WO2006130780A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108905545A (en) * 2018-09-11 2018-11-30 北京振戎融通通信技术有限公司 Can automatic cleansing medium barrier discharge pipe low temperature plasma exhaust treatment component
CN113357111B (en) * 2021-07-01 2022-03-18 兰州空间技术物理研究所 Installation method of probe of ion thruster

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6283130B1 (en) * 1995-05-30 2001-09-04 Anelva Corporation Plasma cleaning method and placement area protector used in the method
US20020124867A1 (en) * 2001-01-08 2002-09-12 Apl Co., Ltd. Apparatus and method for surface cleaning using plasma
US6666928B2 (en) * 2001-09-13 2003-12-23 Micell Technologies, Inc. Methods and apparatus for holding a substrate in a pressure chamber

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6283130B1 (en) * 1995-05-30 2001-09-04 Anelva Corporation Plasma cleaning method and placement area protector used in the method
US20020124867A1 (en) * 2001-01-08 2002-09-12 Apl Co., Ltd. Apparatus and method for surface cleaning using plasma
US6666928B2 (en) * 2001-09-13 2003-12-23 Micell Technologies, Inc. Methods and apparatus for holding a substrate in a pressure chamber

Also Published As

Publication number Publication date
WO2006130779A2 (en) 2006-12-07
WO2006130780A2 (en) 2006-12-07
WO2006130780A3 (en) 2007-04-19

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