WO2006130780A3 - Method and apparatus for cleaning and surface conditioning objects using plasma - Google Patents
Method and apparatus for cleaning and surface conditioning objects using plasma Download PDFInfo
- Publication number
- WO2006130780A3 WO2006130780A3 PCT/US2006/021309 US2006021309W WO2006130780A3 WO 2006130780 A3 WO2006130780 A3 WO 2006130780A3 US 2006021309 W US2006021309 W US 2006021309W WO 2006130780 A3 WO2006130780 A3 WO 2006130780A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- dielectric barrier
- electrodes
- barrier members
- objects
- plasma
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
Abstract
An apparatus and method for cleaning objects using plasma are disclosed. The apparatus provides a plurality of elongated dielectric barrier members arranged adjacent each other, a plurality of electrodes each contained within, and extending substantially along the length of, the plurality of elongated dielectric barrier members, and at least one buss bar for electrically coupling the plurality of electrodes to a voltage source. The method provides providing a plurality of elongated dielectric barrier members arranged adjacent each other, providing a plurality of electrodes each contained within, and extending substantially along the length of the plurality of elongated dielectric barrier members, providing at least one buss bar connected to the plurality of electrodes, electrically coupling the plurality of electrodes to a voltage source through the at least one buss bar, introducing the objects proximate the plurality of elongated dielectric barrier members, generating a dielectric barrier discharge between the plurality of dielectric barrier members and the objects; and forming plasma to clean at least a portion of the objects.
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/143,083 US20060272674A1 (en) | 2005-06-02 | 2005-06-02 | Method and apparatus for cleaning and surface conditioning objects using plasma |
US11/143,552 US20060272675A1 (en) | 2005-06-02 | 2005-06-02 | Method and apparatus for cleaning and surface conditioning objects using plasma |
US11/142,988 | 2005-06-02 | ||
US11/142,988 US8092643B2 (en) | 2003-06-16 | 2005-06-02 | Method and apparatus for cleaning and surface conditioning objects using plasma |
US11/142,083 | 2005-06-02 | ||
US11/143,552 | 2005-06-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006130780A2 WO2006130780A2 (en) | 2006-12-07 |
WO2006130780A3 true WO2006130780A3 (en) | 2007-04-19 |
Family
ID=37482323
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/021309 WO2006130780A2 (en) | 2005-06-02 | 2006-06-02 | Method and apparatus for cleaning and surface conditioning objects using plasma |
PCT/US2006/021308 WO2006130779A2 (en) | 2005-06-02 | 2006-06-02 | Method and apparatus for cleaning and surface conditioning objects using plasma |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/021308 WO2006130779A2 (en) | 2005-06-02 | 2006-06-02 | Method and apparatus for cleaning and surface conditioning objects using plasma |
Country Status (1)
Country | Link |
---|---|
WO (2) | WO2006130780A2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108905545A (en) * | 2018-09-11 | 2018-11-30 | 北京振戎融通通信技术有限公司 | Can automatic cleansing medium barrier discharge pipe low temperature plasma exhaust treatment component |
CN113357111B (en) * | 2021-07-01 | 2022-03-18 | 兰州空间技术物理研究所 | Installation method of probe of ion thruster |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6283130B1 (en) * | 1995-05-30 | 2001-09-04 | Anelva Corporation | Plasma cleaning method and placement area protector used in the method |
US20020124867A1 (en) * | 2001-01-08 | 2002-09-12 | Apl Co., Ltd. | Apparatus and method for surface cleaning using plasma |
US6666928B2 (en) * | 2001-09-13 | 2003-12-23 | Micell Technologies, Inc. | Methods and apparatus for holding a substrate in a pressure chamber |
-
2006
- 2006-06-02 WO PCT/US2006/021309 patent/WO2006130780A2/en active Application Filing
- 2006-06-02 WO PCT/US2006/021308 patent/WO2006130779A2/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6283130B1 (en) * | 1995-05-30 | 2001-09-04 | Anelva Corporation | Plasma cleaning method and placement area protector used in the method |
US20020124867A1 (en) * | 2001-01-08 | 2002-09-12 | Apl Co., Ltd. | Apparatus and method for surface cleaning using plasma |
US6666928B2 (en) * | 2001-09-13 | 2003-12-23 | Micell Technologies, Inc. | Methods and apparatus for holding a substrate in a pressure chamber |
Also Published As
Publication number | Publication date |
---|---|
WO2006130780A2 (en) | 2006-12-07 |
WO2006130779A3 (en) | 2007-02-01 |
WO2006130779A2 (en) | 2006-12-07 |
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