WO2006130822A3 - Flexible imaging pressure sensor - Google Patents

Flexible imaging pressure sensor Download PDF

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Publication number
WO2006130822A3
WO2006130822A3 PCT/US2006/021430 US2006021430W WO2006130822A3 WO 2006130822 A3 WO2006130822 A3 WO 2006130822A3 US 2006021430 W US2006021430 W US 2006021430W WO 2006130822 A3 WO2006130822 A3 WO 2006130822A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
membrane
sensor
textured surface
electrodes
Prior art date
Application number
PCT/US2006/021430
Other languages
French (fr)
Other versions
WO2006130822A2 (en
Inventor
Srinivasan K Ganapathi
Keith T Deconde
Randolph S Gluck
Original Assignee
Fidelica Microsystems
Srinivasan K Ganapathi
Keith T Deconde
Randolph S Gluck
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fidelica Microsystems, Srinivasan K Ganapathi, Keith T Deconde, Randolph S Gluck filed Critical Fidelica Microsystems
Priority to EP06784549A priority Critical patent/EP1893949A2/en
Publication of WO2006130822A2 publication Critical patent/WO2006130822A2/en
Publication of WO2006130822A3 publication Critical patent/WO2006130822A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/205—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using distributed sensing elements
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • G06V40/1306—Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing

Abstract

A sensor for a textured surface (e.g., a fingerprint) is provided. The sensor includes a flexible substrate and a flexible membrane supported above the substrate by one or more spacers. The sensor also includes multiple pressure sensor elements responsive to a separation between parts of the membrane and corresponding parts of the substrate. The membrane is conformable to the textured surface being sensed, so the variation in separation between substrate and membrane is representative of the textured surface being sensed. A preferred sensor array arrangement has a set of parallel substrate electrodes on the substrate facing the membrane and a set of parallel membrane electrodes on the membrane facing the substrate, where the substrate and membrane electrodes are perpendicular. The sensor array is preferably an entirely passive structure including no active electrical devices, to reduce cost. Row and column addressing circuitry can be provided as separate units (e.g., ASIC chips) to be hybrid integrated with the sensor array.
PCT/US2006/021430 2005-06-02 2006-06-02 Flexible imaging pressure sensor WO2006130822A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP06784549A EP1893949A2 (en) 2005-06-02 2006-06-02 Flexible imaging pressure sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/145,534 2005-06-02
US11/145,534 US7373843B2 (en) 2005-06-02 2005-06-02 Flexible imaging pressure sensor

Publications (2)

Publication Number Publication Date
WO2006130822A2 WO2006130822A2 (en) 2006-12-07
WO2006130822A3 true WO2006130822A3 (en) 2007-08-02

Family

ID=37482339

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/021430 WO2006130822A2 (en) 2005-06-02 2006-06-02 Flexible imaging pressure sensor

Country Status (3)

Country Link
US (2) US7373843B2 (en)
EP (1) EP1893949A2 (en)
WO (1) WO2006130822A2 (en)

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Also Published As

Publication number Publication date
US7409876B2 (en) 2008-08-12
US7373843B2 (en) 2008-05-20
WO2006130822A2 (en) 2006-12-07
EP1893949A2 (en) 2008-03-05
US20060273417A1 (en) 2006-12-07
US20060272429A1 (en) 2006-12-07

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