WO2006133291A2 - Transmission ion miscroscope - Google Patents

Transmission ion miscroscope Download PDF

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Publication number
WO2006133291A2
WO2006133291A2 PCT/US2006/022107 US2006022107W WO2006133291A2 WO 2006133291 A2 WO2006133291 A2 WO 2006133291A2 US 2006022107 W US2006022107 W US 2006022107W WO 2006133291 A2 WO2006133291 A2 WO 2006133291A2
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WO
WIPO (PCT)
Prior art keywords
microscope
ion
image
sample
ion beam
Prior art date
Application number
PCT/US2006/022107
Other languages
French (fr)
Other versions
WO2006133291A3 (en
Inventor
Billy W. Ward
Original Assignee
Alis Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alis Corporation filed Critical Alis Corporation
Publication of WO2006133291A2 publication Critical patent/WO2006133291A2/en
Publication of WO2006133291A3 publication Critical patent/WO2006133291A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/262—Non-scanning techniques

Definitions

  • This invention relates to microscopy and more particularly to a transmission ion microscope using a bright light ion source.
  • the transmission electron microscope has been in use for almost fifty years and has atomic or near atomic resolution.
  • a transmission electron microscope sends a focused beam of electrons through a sample and an image is created on a phosphor screen by transmitted electrons so that atomic structure of the sample can be visualized.
  • a TEM is a large, complex and expensive tool utilizing very high energy electrons. The use of very high energy electrons results in an operational burden.
  • Atomic level surface structure from thick samples can be obtained by scanning tunneling microscopy (STM) and, to a lesser extent, by atomic force microscopy (AFM). These are slow methods that require mechanically scanning a very fine needle-shaped tip over a sample. These methods cannot, however, provide information on what is below the top atomic layer of the sample.
  • STM scanning tunneling microscopy
  • AFM atomic force microscopy
  • the transmission ion microscope of the invention includes a gas field ion source that generates an ion beam.
  • An electrostatic condenser lens focuses the ion beam onto a sample.
  • An objective lens focuses the ion beam transmitted through the sample to form an image and a projection lens enlarges the image.
  • a screen receives the enlarged image to generate light allowing visualization of the image.
  • the screen includes a phosphor screen.
  • the ion beam is a beam of helium ions, hi one embodiment, the source provides isolated ion emission sites of a small number of atoms.
  • the ion beam energy may be in the range between 1000V and lOOOkeV.
  • Another embodiment further includes a condenser aperture between the electrostatic condenser lens and the sample to exclude high angle ions.
  • An objective aperture and a selected area aperture between the objective lens and the projector lens may also be provided to restrict the beam.
  • the objective aperture enhances contrast by blocking out high -angle diffracted electrons while the selected area aperture enables a user to examine the periodic diffraction of electrons by ordered arrangements of atoms in the sample.
  • the electrostatic condenser lens may include first and second condenser lenses.
  • the ion beam has a sub-nanometer beam diameter.
  • the single figure of the drawing is a schematic illustration of the transmission ion microscope according to one embodiment of the invention.
  • the transmission ion microscope of the invention works substantially the same way as known transmission electron microscopes (TEM) that can be thought of as an analogy to a slide projector.
  • TEM transmission electron microscopes
  • a slide projector shines a beam of light through a slide and as the light passes through, it is affected by the structures and objects on the slide. These effects result incertain parts of the light beam being transmitted through certain parts of the slide.
  • the transmitted beam is to then projected through a viewing screen forming an enlarged image of the slide.
  • an ion source 10 can generate a sub-nanometer beam of ions.
  • the ions include Helium ions.
  • a suitable ion source is described in "Ion Sources for Nanofabrication and High Resolution Lithography", J. Melngailis, IEEE Proceedings of the 2001 Particle Accelerator Conference, Chicago, Illinois (2002), the contents of which are incorporated herein by reference. See, also “Growth and Current Charities of a Stable Field Ion Emitter," K. Jousten et al., Ultramicroscope 26, pp. 301-312 (1988) and “Maskless, Resistless Ion Beam Lithography Process," Qing Ji, Ph.D.
  • An ion beam 12 from the ion source 10 passes through first 14 and second 16 condenser lenses that focus the ion beam 12 to a small, thin, coherent beam.
  • the first lens 14 (usually controlled by a "spot size knob") largely determines the "spot size” which is the general size range of the final spot that strikes a sample 18.
  • the second condenser lens 16 (usually controlled by an "intensity or brightness knob") actually changes the size of the spot on the sample, changing it from a wide dispersed spot to a pinpoint beam.
  • a condenser aperture 20 restricts the beam 12 by knocking out high angle ions, that is, ions far from the optic axis down the center of the microscope. After passing through the condenser aperture 20 the beam 12 strikes the sample 18 and parts of the beam are transmitted through the sample. The transmitted portion is focused by an objective lens 22 to form an image.
  • An optional objective aperture 24 and optional selected area aperture 26 may be provided to restrict the transmitted beam.
  • the objective aperture 24 typically enhances contrast by blocking high-angle diffracted ions while the selected area aperture 26 enables a user to examine the periodic diffraction of ions by ordered arrangements of ions in the sample 18.
  • the image formed by the objective lens 22 continues down the microscope column through intermediate lenses and a projector lens 28 and then strikes a phosphor image screen 30.
  • the phosphor screen 30 generates light allowing the user to see the image.
  • the darker areas of the image typically represent those areas of the sample through which fewer ions were transmitted (they are generally thicker or denser).
  • the lighter areas of the image typically represent those areas of the sample through which more ions were transmitted (they are generally thinner or less dense).
  • the high brightness ion source 10 produces a helium ion beam with energy between 1000 V and 1000keV. By limiting the number of emission sites that share the helium gas, a notable increase in current and density from the remaining emitting sites occurs.
  • the lenses used in this embodiment are typically electrostatic lenses.
  • the electrostatic lens may be capable of accelerating, decelerating, collimating, focusing or deflecting an ion beam generated by an ion source for further processing within the microscope column.
  • the microscope of the invention takes advantage of the unusually long range of light ions in matter. The collection of the transmitted (bright field) and/or scattered (dark field) ions can provide structural information about the sample. Further, the interaction dynamics of an ion beam with the sample material is different from the interaction of an electron beam in prior art microscopes. With the present invention, one can see more effects from the atomic centers and less from the electronic structure of the samples.
  • nuclear contrast In a "bright field” picture dark pixels are typically a result of ions that interact with the atom nuclei in the sample which are then scattered away from the phosphor screen or absorbed in the sample. Bright pixels in the image are a result of ions that are not scattered or absorbed by the atoms in the sample. In the case of a "dark field” picture the contrast is reversed, or inverted, from the previous case.
  • the microscope of the invention is likely to be simpler, smaller and weigh less than a TEM because of the electrostatic optics used with the ion microscope of the invention.
  • the contrast in the image can also be higher than with a TEM.
  • the image can have more elemental contrast and the image quality may be enhanced with a charged neutralizer.
  • the temperature of the sample may also change the quality of the image.
  • Another contrast mechanism may arise from vibration in the sample as a result of interaction with the ion beam.
  • a tilting sample holder may be desirable and may also be capable of an X-Y motion.
  • the contrast in the image may also be affected by voltage and a comparison of pictures taken at different voltages may provide yet another contrast mechanism.
  • the energy loss of the beam at each position can also carry information about the composition of the sample material.
  • a traditional STIM uses high energy ion beams produced in accelerators and even then the resolution is limited to about 50nm to about 100 nm. Low energy ion scatter spectroscopy may also be utilized to identify the elements in the sample.

Abstract

Transmission ion microscope. A bright light ion source (10) generates an ion beam (12) that is focused on a sample (18) by an electrostatic condenser lens (14,16). An objective lens (22) focuses the ion beam transmitted through the sample to forth an image. A projector lens (28) enlarges the image and a phosphor screen (30) receives the enlarged image to generate light allowing visualization of the image.

Description

TRANSMISSION ION MICROSCOPE
Background of the Invention
This invention relates to microscopy and more particularly to a transmission ion microscope using a bright light ion source.
The transmission electron microscope (TEM) has been in use for almost fifty years and has atomic or near atomic resolution. A transmission electron microscope sends a focused beam of electrons through a sample and an image is created on a phosphor screen by transmitted electrons so that atomic structure of the sample can be visualized. A TEM is a large, complex and expensive tool utilizing very high energy electrons. The use of very high energy electrons results in an operational burden.
Atomic level surface structure from thick samples can be obtained by scanning tunneling microscopy (STM) and, to a lesser extent, by atomic force microscopy (AFM). These are slow methods that require mechanically scanning a very fine needle-shaped tip over a sample. These methods cannot, however, provide information on what is below the top atomic layer of the sample.
A detailed understanding of the operation of the aforementioned, presently available TEM and STM microscopes is held by many persons skilled in the art of high resolution microscopes. There are myriad public domain publications, classroom text books, and microscope vendor publications that discuss such prior art microscopes. A commonly available publication provided by a microscope vendor is JEOL News, Vol. 37E, No. 1, 2002. Exemplary text books that teach the above mentioned microscopes include Scanning Electron Microscopy andX-Ray Microanalysis by Joseph Goldstein (Editor); Scanning and Electron Microscopy: An Introduction by Stanley L. Flagler, et al.; High Resolution Focused Ion Beams: FIB and Its Applications by John Orloff, Materials Analysis Using A Nuclear Microprobe by Mark B. H. Breese; and Scanning Probe Microscopy and Spectroscopy: Theory, Techniques and Applications by Dawn Bonnell (Editor). The contents of all of these references are incorporated herein by reference in their entirety. Those skilled in the art will appreciate that existing microscopes lack sufficient contrast capability for a fuller understanding of the microscopic world. Summary of the Invention
In one aspect, the transmission ion microscope of the invention includes a gas field ion source that generates an ion beam. An electrostatic condenser lens focuses the ion beam onto a sample. An objective lens focuses the ion beam transmitted through the sample to form an image and a projection lens enlarges the image. A screen receives the enlarged image to generate light allowing visualization of the image. In one embodiment, the screen includes a phosphor screen. In one embodiment, the ion beam is a beam of helium ions, hi one embodiment, the source provides isolated ion emission sites of a small number of atoms. The ion beam energy may be in the range between 1000V and lOOOkeV.
Another embodiment further includes a condenser aperture between the electrostatic condenser lens and the sample to exclude high angle ions. An objective aperture and a selected area aperture between the objective lens and the projector lens may also be provided to restrict the beam. The objective aperture enhances contrast by blocking out high -angle diffracted electrons while the selected area aperture enables a user to examine the periodic diffraction of electrons by ordered arrangements of atoms in the sample. The electrostatic condenser lens may include first and second condenser lenses. In one embodiment, the ion beam has a sub-nanometer beam diameter.
Brief Description of the Drawing
The following figure depicts certain illustrative embodiments of the invention in which like reference numerals refer to like elements. This depicted embodiment may not be drawn to scale and is to be understood as illustrative of the invention and not as limiting in any way.
The single figure of the drawing is a schematic illustration of the transmission ion microscope according to one embodiment of the invention.
Description of the Preferred Embodiments
The systems and methods described herein will now be described with reference to a certain illustrative embodiment. However, the invention is not to be limited to this illustrated embodiment which is provided merely for the purpose of describing the systems and methods of the invention and is not to be understood as limiting in anyway. The transmission ion microscope of the invention works substantially the same way as known transmission electron microscopes (TEM) that can be thought of as an analogy to a slide projector. A slide projector shines a beam of light through a slide and as the light passes through, it is affected by the structures and objects on the slide. These effects result incertain parts of the light beam being transmitted through certain parts of the slide. The transmitted beam is to then projected through a viewing screen forming an enlarged image of the slide.
Existing prior art transmission electron microscopes work the same way as a slide projector except that such microscopes shine a beam of electrons through a specimen rather than light. The portion of the electron beam that is transmitted through the specimen may be projected onto a phosphor screen for the user to see. In one embodiment, the source of ions replaces a source of electrons in a typical TEM.
With reference to the single figure of the drawing, an ion source 10 can generate a sub-nanometer beam of ions. In one embodiment, the ions include Helium ions. A suitable ion source is described in "Ion Sources for Nanofabrication and High Resolution Lithography", J. Melngailis, IEEE Proceedings of the 2001 Particle Accelerator Conference, Chicago, Illinois (2002), the contents of which are incorporated herein by reference. See, also "Growth and Current Charities of a Stable Field Ion Emitter," K. Jousten et al., Ultramicroscope 26, pp. 301-312 (1988) and "Maskless, Resistless Ion Beam Lithography Process," Qing Ji, Ph.D. Dissertation, Department of Electrical Engineering and Computer Sciences, University of California, Berkeley (2003), the contents of both of which are incorporated herein by reference. An ion beam 12 from the ion source 10 passes through first 14 and second 16 condenser lenses that focus the ion beam 12 to a small, thin, coherent beam. The first lens 14 (usually controlled by a "spot size knob") largely determines the "spot size" which is the general size range of the final spot that strikes a sample 18. The second condenser lens 16 (usually controlled by an "intensity or brightness knob") actually changes the size of the spot on the sample, changing it from a wide dispersed spot to a pinpoint beam. In this embodiment a condenser aperture 20 restricts the beam 12 by knocking out high angle ions, that is, ions far from the optic axis down the center of the microscope. After passing through the condenser aperture 20 the beam 12 strikes the sample 18 and parts of the beam are transmitted through the sample. The transmitted portion is focused by an objective lens 22 to form an image. An optional objective aperture 24 and optional selected area aperture 26 may be provided to restrict the transmitted beam. The objective aperture 24 typically enhances contrast by blocking high-angle diffracted ions while the selected area aperture 26 enables a user to examine the periodic diffraction of ions by ordered arrangements of ions in the sample 18.
The image formed by the objective lens 22 continues down the microscope column through intermediate lenses and a projector lens 28 and then strikes a phosphor image screen 30. The phosphor screen 30 generates light allowing the user to see the image. The darker areas of the image typically represent those areas of the sample through which fewer ions were transmitted (they are generally thicker or denser). The lighter areas of the image typically represent those areas of the sample through which more ions were transmitted (they are generally thinner or less dense). In one embodiment, the high brightness ion source 10 produces a helium ion beam with energy between 1000 V and 1000keV. By limiting the number of emission sites that share the helium gas, a notable increase in current and density from the remaining emitting sites occurs. The lenses used in this embodiment are typically electrostatic lenses. The electrostatic lens may be capable of accelerating, decelerating, collimating, focusing or deflecting an ion beam generated by an ion source for further processing within the microscope column. The microscope of the invention takes advantage of the unusually long range of light ions in matter. The collection of the transmitted (bright field) and/or scattered (dark field) ions can provide structural information about the sample. Further, the interaction dynamics of an ion beam with the sample material is different from the interaction of an electron beam in prior art microscopes. With the present invention, one can see more effects from the atomic centers and less from the electronic structure of the samples. This phenomenon may best be explained as "nuclear contrast." In a "bright field" picture dark pixels are typically a result of ions that interact with the atom nuclei in the sample which are then scattered away from the phosphor screen or absorbed in the sample. Bright pixels in the image are a result of ions that are not scattered or absorbed by the atoms in the sample. In the case of a "dark field" picture the contrast is reversed, or inverted, from the previous case.
The microscope of the invention is likely to be simpler, smaller and weigh less than a TEM because of the electrostatic optics used with the ion microscope of the invention. The contrast in the image can also be higher than with a TEM. The image can have more elemental contrast and the image quality may be enhanced with a charged neutralizer. The temperature of the sample may also change the quality of the image. Another contrast mechanism may arise from vibration in the sample as a result of interaction with the ion beam.
Because crystal orientation of the sample maybe important, a tilting sample holder may be desirable and may also be capable of an X-Y motion. The contrast in the image may also be affected by voltage and a comparison of pictures taken at different voltages may provide yet another contrast mechanism. The energy loss of the beam at each position can also carry information about the composition of the sample material. We note that a traditional STIM uses high energy ion beams produced in accelerators and even then the resolution is limited to about 50nm to about 100 nm. Low energy ion scatter spectroscopy may also be utilized to identify the elements in the sample.
Those skilled in the art will know or be able to ascertain using no more than routine experimentation, many equivalents to the embodiments and practices described herein. Accordingly, it will be understood that the invention is not to be limited to the embodiments disclosed herein, but is to be understood from the following claims, which are to be interpreted as broadly as allowed under the law.

Claims

What is claimed is:
1. Transmission ion microscope comprising: a gas field ion source for generating an ion beam; an electrostatic condenser lens for focusing the ion beam onto a sample; an objective lens for focusing the ion beam transmitted through the sample to form an image; a projector lens for enlarging the image; and a screen for receiving the enlarged image to generate light allowing visualization of the image.
2. The microscope of claim 1, wherein the ion beam comprises helium ions.
3. The microscope of claim 1, wherein the ion source provides isolated ion emission sites of a small number of atoms.
4. The microscope of claim 2, wherein the ion beam energy is between 1000V and lOOOkeV.
5. The microscope of claim 1, further including a condenser aperture between the electrostatic condenser lens and the sample to exclude high angle ions.
6. The microscope of claim 1, further including an objective aperture and a selected area aperture between the objective lens and the projector lens.
7. The microscope of claim 1, wherein the electrostatic condenser lens comprises first and second condenser lenses.
8. The microscope of claim 1 , wherein the ion beam has sub-nanometer beam diameter.
9. The microscope of claim 1, wherein the screen includes a phosphor screen.
PCT/US2006/022107 2005-06-07 2006-06-07 Transmission ion miscroscope WO2006133291A2 (en)

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