WO2007047701A2 - Acoustically communicating data signals across an electrical isolation barrier - Google Patents
Acoustically communicating data signals across an electrical isolation barrier Download PDFInfo
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- WO2007047701A2 WO2007047701A2 PCT/US2006/040602 US2006040602W WO2007047701A2 WO 2007047701 A2 WO2007047701 A2 WO 2007047701A2 US 2006040602 W US2006040602 W US 2006040602W WO 2007047701 A2 WO2007047701 A2 WO 2007047701A2
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- WIPO (PCT)
- Prior art keywords
- acoustic
- thin film
- signal
- substrate
- demodulator
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L27/00—Modulated-carrier systems
- H04L27/10—Frequency-modulated carrier systems, i.e. using frequency-shift keying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B1/00—Systems for signalling characterised solely by the form of transmission of the signal
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/02—Transmitters
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B11/00—Transmission systems employing sonic, ultrasonic or infrasonic waves
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L27/00—Modulated-carrier systems
- H04L27/18—Phase-modulated carrier systems, i.e. using phase-shift keying
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
Definitions
- An electrical isolation barrier (also referred to as a galvanic isolation barrier) is used to electrically isolate one electronic circuit from another electronic circuit .
- Two electronic circuits are considered to be electrically isolated when at most a threshold level of current flows in response to application of a voltage above a voltage threshold across any node of the first electronic circuit and any node of the second electronic circuit .
- the current threshold is 10 milliamperes (mA) or less and the voltage threshold is 1000 volts (V) or more.
- Other applications, particularly those involving medical equipment impose much lower threshold current levels.
- Electrical isolation barriers are used in a wide variety of different applications, including separating measurement instruments from sensors operating in adverse environments, separating patients from high voltages present in measurement instruments, and separating circuitry that is connected directly to a residential power outlet from circuitry that is connected directly to the standard two- wire telephone network.
- Data signals typically are communicated across an electrical isolation barrier using optical coupling, electrostatic coupling, or magnetic coupling.
- Acoustic coupling of data signals across large-scale ultrasonic coupling media such as the wall of an aircraft or rocket fuel tank have been proposed.
- the acoustic transducers that are used in these approaches are formed from bulk crystal resonators, which are large (e.g., 12.6 millimeters (mm) in diameter) and are limited to low-frequency and low-bandwidth applications (e.g., on the order of 1 Megahertz (MHz) or less) .
- the manufacturing techniques that are used to fabricate such bulk crystal resonators typically cannot control the operating characteristics of these devices with tight tolerances
- a carrier signal having frequency of at least 10 MHz is modulated in response to an input data signal .
- An input electrical signal corresponding to the modulated carrier signal is converted into acoustic energy.
- the acoustic energy is coupled across an electrical isolation barrier.
- the acoustic energy coupled across the electrical isolation barrier is converted into an output electrical signal.
- An output data signal is generated from the output electrical signal .
- FIG. 1 is a block diagram of an embodiment of a data communication system that includes a modulator, an integrated acoustic data coupler, and a demodulator.
- FIG. 2 is a flow diagram of an embodiment of a method of acoustically communicating data signals across and electrical isolation barrier.
- FIG. 3 is a diagrammatic sectional view of an embodiment of an integrated acoustic data coupler that is coupled between a modulator and a demodulator.
- FIG. 4 is a diagrammatic view of an embodiment of a data communication system that includes a frequency modulator and a frequency demodulator.
- FIG. 5 is a diagrammatic view of an embodiment of a data communication system that includes an amplitude modulator and an amplitude demodulator.
- FIG. 6 is a diagrammatic view of an embodiment of a data communication system that includes a phase modulator and a phase demodulator.
- FIG. 7 is a diagrammatic view of an embodiment of a data communication system that is capable of bidirectional communication across an electrical isolation barrier.
- FIG. 8 is a diagrammatic view of an embodiment of a data communication system that includes an acoustic power transformer for transmitting power from one side of an electrical isolation barrier to the other side of the electrical isolation barrier.
- FIG. 9A shows a diagrammatic view of an embodiment of a data communication system in which a transmission circuit is mounted on a first substrate, an integrated acoustic data coupler is mounted on a second substrate, and a receiver circuit is mounted on a third substrate.
- FIG. 9B shows a diagrammatic view of an embodiment of a data communication system in which a transmission circuit, an integrated acoustic data coupler, and a receiver circuit are mounted on the same substrate.
- FIG. 10 shows a diagrammatic view of an embodiment of a data communication system in which a transmission circuit and a receiver circuit are integrated on opposite sides of the same substrate with an acoustic data coupler.
- FIG. 11 shows a diagrammatic view of an embodiment of a data communication system in which, a transmission circuit and a receiver circuit are integrated on one side of a substrate supporting an acoustic data coupler.
- FIG. 12 shows a diagrammatic view of an embodiment of a data communication system that includes an acoustic data coupler that has an electrical isolation barrier with an integral grounded electrode.
- FIG. 1 shows an embodiment of a data communication system 10 that is coupled between a first device 12 and a second device 14.
- the first and second devices 12, 14 may be any type of devices or circuits that must be separated by an electrical isolation barrier.
- the first and second devices 12, 14 respectively include first and second data processors 16, 18 for sending and receiving data signals 20, 22.
- the data communication system 10 includes a modulator 24, an integrated acoustic data coupler 26, and a demodulator 28.
- the integrated acoustic data coupler 26 includes an electrical isolation barrier that electrically isolates the first and second devices 12, 14.
- the characteristics of the electrical isolation barrier are application-dependent.
- the electrical isolation barrier allows a current of at most 10 mA to flow in response to application of a voltage of 1000 V across the grounded electrodes of a pair of electro-acoustic transducers on opposite sides of the electrical isolation barrier.
- Other embodiments impose a lower limit on the value of current that flows across the electrical isolation barrier in response to the application of the voltage.
- the integrated acoustic data coupler 26 conveys the data signal 20 from the first device 12 to the second device 14 across the electrical isolation barrier.
- the integrated acoustic data coupler 26 converts the modulated carrier signal 34 into acoustic energy (block 36) , couples the acoustic energy across an electrical isolation barrier (block 38) , and converts the acoustic energy coupled across the electrical isolation barrier into an output electrical signal 40 (block 42) .
- the output electrical signal 40 is amplified, filtered, or processed before being transmitted to the demodulator 28.
- the demodulator 28 generates the output data signal 22 from the output electrical signal 40 received from the integrated acoustic coupler 26 (block 44) .
- the demodulator 28 may demodulate the original data signal 22 from the received output electrical data signal 40 in accordance with a complimentary demodulation technique that matches the modulation technique used by the modulator 24.
- each of the thin film electro-acoustic transducers 48, 50 is formed from a respective thin film piezoelectric structure 52, 54 that is between a respective top electrode 56, 58 and a respective bottom electrode 60, 62.
- Each of the piezoelectric structures 52, 54 may be formed from one or more layers of piezoelectric material.
- the one or more piezoelectric layers may be formed of a wurtzite-type hexagonal crystal, such as cadmium sulfide, cadmium selenide, zinc oxide, beryllium oxide, aluminum nitride, and wurtzite zinc sulfide, and solid solutions thereof, and lead-zirconate- titanate (PZT) .
- the one or more piezoelectric ' layers may be formed of a non-wurtzite-type hexagonal crystal piezoelectric material, such as a sphalerite cubic crystal.
- the top electrodes 56, 58 and the bottom electrodes 60, 62 may be formed from one or more layers of Mo, Al, Au, Pt, Ti, and alloys thereof.
- Each of the thin film electro-acoustic transducers 48, 50 may be fabricated using one or more thin film deposition techniques, photolithographic techniques, and micro- machining techniques .
- the substrate 51 may be formed of alumina, glass, ceramic, sapphire or one or more of any number of electrically-insulating materials.
- the substrate 51 may be composed of a material that is at least partially electrically conducting and at least one electrically insulating layer.
- the substrate is formed of a high-resistivity silicon substrate supporting one or more electrically insulating layers formed of a dielectric material, such as silicon dioxide or silicon nitride.
- the substrate 51 electrically insulates the first thin film electro-acoustic transducer 48 from the second thin film electro-acoustic transducer 50.
- the substrate 51 provides an electrical isolation barrier that allows a current of at most 10 mA to flow in response to application of a voltage of 1000 V across the bottom ground electrodes 60, 62.
- the substrate 51 has a thickness normal to surfaces of the substrate respectively supporting the first and second thin film electro-acoustic transducers 48, 50 in a range from 0.1 ⁇ m to 1000 ⁇ m.
- the resonant frequencies of the first and second thin film electro-acoustic transducers 48, 50 are determined primarily by the thicknesses of the piezoelectric structures 52, 54 and secondarily by the thicknesses and the material compositions of the other layers.
- the acoustically resonant structure 46 is characterized by at least one mechanical resonant frequency corresponding to the frequency at which the half wavelength (or integer multiples of a half wavelength) of a sound wave propagating in the acoustically resonant structure 46 is approximately equal to the total thickness of the acoustically resonant structure 46.
- the thicknesses and compositions of the constituent layers of the first and second thin film electro-acoustic transducers 48, 50 and the substrate 51 are selected so that the acoustically resonant structure 46 has a fundamental resonant frequency that substantially coincides with a specified target frequency of the carrier signal 30 (i.e., within a range of 99% to 101% of the carrier signal frequency) and a bandwidth that encompasses the range of frequencies of the modulated carrier signal 34.
- the first and second thin film electro- acoustic transducers 48, 50 are constructed and arranged to have quality factor values (or Q-values) that are lower than the Q-value of the acoustically resonant structure 46 as a whole.
- the Q-value measures the ratio between the stored energy and lost energy in an acoustic resonator.
- the Q- value of a resonator is greatly affected by the quality of the deposited electrodes and the piezoelectric layers.
- the operating frequency band of the integrated acoustic data coupler 26 typically lies in the range from 10 MHz to several GHz, or greater, depending on the desired size of the integrated acoustic data coupler 26 and the passband characteristics of the electrically isolating substrate 51.
- the integrated acoustic data coupler 26 can be implemented in a die area that ranges from 50 ⁇ mx50 ⁇ m to 5000 ⁇ mx5000 ⁇ m.
- the nature of the integrated acoustic data coupler 26 allows it to be fabricated using high-volume integrated circuit fabrication methods, which provide tight control of the operating characteristics of the integrated acoustic data coupler 26.
- the integrated acoustic data coupler 26 may be manufactured on the same substrates (e.g., silicon substrates) with other integrated circuit elements (e.g., CMOS circuits and devices). These features of the integrated acoustic data coupler 26 significantly lower the manufacturing costs relative to other types of non-integrated electrically isolating data couplers.
- the data signal 20 that is generated by the first data processor 16 may be imposed on the carrier signal 30 in a wide variety of different ways.
- the frequency modulator 24 may by implemented by any one of a wide variety of different frequency modulator circuits, including a varactor-based frequency modulation circuit, a phase-locked loop (PLL) based frequency modulator circuit, and a vector modulator circuit.
- the frequency demodulator 28 generates the output data signal 22 by detecting the frequencies of the output electrical signal 40 received from the integrated acoustic coupler 26.
- the frequency demodulator 28 may be implemented by a wide variety of different frequency demodulator circuits, including a quadrature mixer based frequency modulation detection circuit and a PLL discriminator based frequency modulation detection circuit.
- FIG. 5 shows an implementation of the data communication system of 10 in which the modulator 24 is implemented by an amplitude modulator and the demodulator 28 is implemented by an amplitude demodulator.
- the amplitude modulator 24 changes the amplitude of the carrier signal 30 based on the value of the data signal 20.
- the data signal 20 can have one of two binary values and the modulated carrier signal 34 has a first amplitude that represents the first binary value and a second amplitude that represents the second binary value.
- the amplitude modulator 24 may by implemented by any one of a wide variety of different amplitude modulator circuits, including an on-off-keying based amplitude modulation circuit and a mixer based amplitude modulation circuit that imposes a pre-shaped data signal onto a fixed amplitude carrier signal 30 based on the values of the data signal 20.
- the amplitude demodulator 28 generates the output data signal 22 by detecting the amplitudes of the output electrical signal 40 received from the integrated acoustic coupler 26.
- the amplitude demodulator 28 may be implemented by a wide variety of different amplitude demodulator circuits, including an amplitude modulation envelope detector circuit and an amplitude modulation coherent detector circuit .
- the phase modulator 24 changes the phase of the carrier signal 30 based on the value of the data signal 20.
- the data signal 20 can have one of two binary values and the modulated carrier signal 34 has a first phase that represents the first binary value and a second phase that represents the second binary value.
- the phase modulator 24 may by implemented by any one of a wide variety of different amplitude modulator circuits, including a circuit that includes an integrator that receives the data signal 20 and a frequency modulator that receives the output of the integrator.
- the phase demodulator 28 generates the output data signal 22 by detecting the phases of the output electrical signal 40 received from the integrated acoustic coupler 26.
- the phase demodulator 28 may be implemented by a wide variety of different phase demodulator circuits, including a re-modulation type of phase synchronization circuit .
- FIG. 7 shows an embodiment of a data communication system 70 that is capable of bidirectional data communication across an electrical isolation barrier.
- the data communication system 70 includes a first modulator/demodulator (or "modem") 72, a second modulator/demodulator 74, and an electrically isolating acoustic transformer 76.
- Each of the modulators modulates a respective carrier signal 78, 80 based on a respective input data signal 82, 84 received from a respective one of the first and second devices 12, 14.
- Each of the demodulators generates a respective output data signal 86, 88 from a respective input signal 90, 92 received from the acoustic transformer 76.
- the acoustic transformer 76 includes a first acoustic data coupler 94 and a second acoustic data coupler 96.
- Each of the first and second acoustic data couplers 94 and 96 includes a respective acoustically resonant structure 97, 99 that includes a respective pair of electro-acoustic transducers 98, 100 and 102, 104 on opposite sides of the substrate 51.
- Each of the electro-acoustic transducers 98- 104 may be any type of acoustic resonator, including Bulk Acoustic Wave (BAW) resonators that are formed from one or more piezoelectric layers disposed between two electrodes.
- BAW Bulk Acoustic Wave
- each of the electro-acoustic transducers 98-104 is formed from a respective thin film piezoelectric structure that is between a respective top electrode and a respective bottom electrode in the manner described above in connection with the electro-acoustic transducers 48, 50 shown in FIG. 3.
- the acoustically resonant structures 97, 99 have respective fundamental acoustic resonant frequencies that may be the same or different.
- the selection of the fundamental acoustic resonant frequencies of the acoustically resonant structures 97, 99 may depend on a number of factors, including the lateral separation between the acoustically resonant structures 97, 99, the material compositions of the components of the acoustically resonant structures 97, 99, and the type of modulation that is used to transmit the data signals 82, 84 across the electrical isolation barrier.
- the thicknesses and material compositions of the constituent layers of the acoustically resonant structures 97, 99 are selected so that the acoustically resonant structures 97, 99 have the selected fundamental acoustic resonant frequencies.
- FIG. 8 shows an embodiment of a data communication system 110 that includes the acoustic data coupler 10 shown in FIG. 1 integrated with an acoustic power transformer 112 on the substrate 51.
- the acoustic power transformer 112 transmits electrical power from a power source circuit 114, across the electrical isolation barrier provided by the substrate 51, to a power extraction circuit 116.
- the acoustically resonant structures 46, 124 of the acoustic data coupler 26 and the acoustic power transformer 112 have respective fundamental acoustic resonant frequencies that may be the same or different .
- the selection of the fundamental acoustic resonant frequencies of the acoustically resonant structures 46, 124 may depend on a number of factors, including the frequency-dependence of the coupling efficiency of the power and data signals across the electrical isolation barrier, the lateral separation between the acoustically resonant structures 46, 124, the material compositions of the components of the acoustically resonant structures 46, 124, and the type of modulation that is used to transmit the data signal 20 across the electrical isolation barrier.
- the power extraction circuit 116 includes a rectifying and smoothing circuit 130 with an input that is coupled across the electrodes of the electro-acoustic transducer 120 and an output that supplies DC power to the demodulator 28 and the second device 14.
- the oscillator 126 converts the input DC power received from the DC power source 128 into alternating current (AC) power.
- the amplifier 127 amplifies the AC power from the oscillator 126 and drives the electro- acoustic transducer 118 with amplified input AC power.
- the acoustic power transformer 112 acoustically couples the input AC power from the output of the power source circuit 114, across the electrical isolation barrier provided by the substrate 51, to the input of the power extraction circuit
- the rectifying and smoothing circuit 130 rectifies the AC power received from the acoustic power transformer 112 to produce unfiltered DC power and then filters the unfiltered DC power to provide output DC power at the output terminals 136, 138, which are connected to the demodulator 28 and the second device 14.
- the data communication system 110 may include a feedback control circuit (not shown) that is configured to control the frequency of the input AC power in a manner that allows constant DC power to be delivered to the load 134 notwithstanding variations caused by variations in temperature and load current. Details regarding the structure and operation of the feedback control circuit may be obtained from co-pending U.S. Patent Application No. 10/971,169, filed October, 22, 2004, by John D. Larson, III et al . et al . and entitled "Piezoelectric Isolating Transformer . "
- FIG. 9A shows an embodiment of a data communication system 140 that includes a transmission circuit 142, an acoustic coupler 144, and a receiver circuit 146.
- the transmission circuit 142 includes a modulator 148 and an amplifier 150 that are mounted on a first substrate 152 (e.g., a circuit board) .
- the modulator 148 may be implemented in the same way as the modulator 24 that is described above and shown in FIG. 3.
- the acoustic coupler 144 is mounted on a second substrate 154 (e.g., a circuit board) .
- the acoustic coupler 144 provides an electrical isolation barrier between the respective components of the transmission and receiver circuits 142, 146 while enabling unidirectional or bidirectional data communication across the electrical isolation barrier.
- the acoustic coupler 144 may include one or more of the acoustic coupling structures 46, 97, 99, and 124 that are described above and shown in FIGS. 3, I 1 and 8.
- the receiver circuit 146 includes an amplifier 156 and a demodulator 158 that are mounted on a third substrate 160 (e.g., a circuit board) .
- An electrical connection 162 electrically interconnects the components of the first substrate 152 to components on one side of the electrical isolation barrier, and an electrical connection 164 electrically interconnects the components of the third substrate 160 to components on a second side of the electrical isolation barrier.
- the first and third substrates 152, 160 do not share the same electrical ground and therefore are galvanically isolated from each other.
- FIG. 9B shows an embodiment of a data communication system 166 that corresponds to the data communication system 140 shown in FIG. 9A, except that the transmission circuit 142, the acoustic coupler 144, and the receiver circuit 146 are mounted on the same substrate 168.
- FIG. 10 shows an embodiment of a data communication system 170 in which a transmission circuit 172 and a receiver circuit 174 are integrated on the same substrate 51 with the acoustic data coupler 10.
- the transmission circuit 172 and the receiver circuit 174 are integrated laterally with the electro-acoustic transducers of the acoustic data coupler 10 across the opposite surfaces of the substrate 51.
- the transmission circuit 172. and the receiver circuit 174 are formed on the same side of the substrate 51.
- the electro-acoustic transducers are integrated vertically (i.e., in a direction substantially parallel to the acoustic wave propagation direction through the substrate 51 ⁇ with the transmission and receiver circuits 172, 174 in a single monolithic device.
- the transmission circuit 172 and the receiver circuit 174 may be formed using known electronic circuit fabrication processes (e.g., CMOS fabrication processes) and the electro-acoustic transducers 48, 50 may be formed using known thin film deposition and patterning techniques.
- the processes for forming the electronic circuitry of the transmission and receiver circuits 172, 174 should be isolated with respect to thermal gradients and contaminants from any incompatible processes that are used to fabricate the thin film electro-acoustic transducers 48, 50.
- FIG. 11 shows an embodiment of a data communication system 176 that corresponds to the data communication system 170 shown in FIG. 10, except that the transmission and receiver circuits 172, 174 are formed on an inner surface of a cap structure 178 facing one side of the substrate 51, as ⁇ described, for example, in U.S. Patent Application
- the cap structure 178 seals and protects the electro-acoustic transducer 178, as described, for example, in U.S. Patent Application
- the cap structure 178 also provides contacts that are connected electrically to the electro-acoustic transducers 48, 50 and the transmission and receiver circuits 172, 174.
- the cap structure 178 may be formed of a substrate (e.g., a wafer of semiconductor material, such as silicon) that may be bonded to the substrate 51 using a metal bond or using a non-metal bond material, such as benzocyclobutene (BCB), polyimide, or an amorphous fluorocarbon polymer (e.g., CYTOP ® ) .
- a substrate e.g., a wafer of semiconductor material, such as silicon
- a non-metal bond material such as benzocyclobutene (BCB), polyimide, or an amorphous fluorocarbon polymer (e.g., CYTOP ® ) .
- the cap structure 178 includes a bottom side with a recess that defines a top part of the cavity containing the electro- acoustic transducer 48, and a top side that has vias through which the external contacts extend to the electrodes of the electro-acoustic transducer 48.
- the electrical contacts for the receiver circuit 174 may be connected electrically to the electro-acoustic transducer 50 by metal traces extending through the substrate 51 or by metal traces that extend over the side edges of the substrate 51.
- FIG. 12 shows an embodiment of a data communication system 180 that corresponds to the data communication system 170 shown in FIG. 10, except that the data communication system 180 additionally includes an electrode 182 that is integrated in the substrate 51.
- the electrode 182 is electrically connected to a ground 184 that is electrically isolated from the ground paths of the electro-acoustic transducers 48, 50, the transmission circuit 172, and the receiver circuit 174. In this way, the electrode 182 provides an electrostatic shield that reduces electrostatic coupling between the electro-acoustic transducers 48, 50 and between other electrical components on opposite sides of the substrate 51.
Abstract
Description
Claims
Priority Applications (2)
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DE112006001332.7T DE112006001332B4 (en) | 2005-10-18 | 2006-10-17 | System and method for communicating a data signal across an electrical isolation barrier |
GB0717257A GB2440844B (en) | 2005-10-18 | 2006-10-17 | Acoustically communicating data signals across an electrical isolation barrier |
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US11/252,845 | 2005-10-18 | ||
US11/252,845 US7525398B2 (en) | 2005-10-18 | 2005-10-18 | Acoustically communicating data signals across an electrical isolation barrier |
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WO2007047701A3 WO2007047701A3 (en) | 2007-10-11 |
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DE (1) | DE112006001332B4 (en) |
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WO (1) | WO2007047701A2 (en) |
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Also Published As
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DE112006001332B4 (en) | 2022-07-28 |
GB2440844A (en) | 2008-02-13 |
US20070086274A1 (en) | 2007-04-19 |
WO2007047701A3 (en) | 2007-10-11 |
GB0717257D0 (en) | 2007-10-17 |
TW200718050A (en) | 2007-05-01 |
GB2440844B (en) | 2011-01-26 |
DE112006001332T5 (en) | 2008-03-20 |
US7525398B2 (en) | 2009-04-28 |
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