WO2007053453A3 - High fill ratio silicon spatial light modulator - Google Patents
High fill ratio silicon spatial light modulator Download PDFInfo
- Publication number
- WO2007053453A3 WO2007053453A3 PCT/US2006/042045 US2006042045W WO2007053453A3 WO 2007053453 A3 WO2007053453 A3 WO 2007053453A3 US 2006042045 W US2006042045 W US 2006042045W WO 2007053453 A3 WO2007053453 A3 WO 2007053453A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- light modulator
- spatial light
- surface region
- high fill
- optical deflection
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
- 230000003287 optical effect Effects 0.000 abstract 4
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000002210 silicon-based material Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/007—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
- G02B26/008—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light in the form of devices for effecting sequential colour changes, e.g. colour wheels
Abstract
An optical deflection device for a display application The optical deflection device includes a semiconductor substrate (105) including an upper surface region and one or more electrode devices (112) provided overlying the upper surface region The optical deflection device also includes a hinge device (214) including a silicon material and coupled to the upper surface region The optical deflection device further includes a spacing defined between the upper surface region and the hinge device (214) and a mirror structure including a post portion (208) coupled to the hinge device (214) and a mirror plate portion (212) coupled to the post portion (208) and overlying the hinge device (214).
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2006800402022A CN101297227B (en) | 2005-10-28 | 2006-10-26 | High fill ratio silicon spatial light modulator |
JP2008538004A JP2009514029A (en) | 2005-10-28 | 2006-10-26 | High filling rate silicon spatial light modulator |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US73137805P | 2005-10-28 | 2005-10-28 | |
US60/731,378 | 2005-10-28 | ||
US11/448,149 US7522330B2 (en) | 2005-10-28 | 2006-06-05 | High fill ratio silicon spatial light modulator |
US11/448,149 | 2006-06-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2007053453A2 WO2007053453A2 (en) | 2007-05-10 |
WO2007053453A3 true WO2007053453A3 (en) | 2008-01-24 |
Family
ID=37995913
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/042045 WO2007053453A2 (en) | 2005-10-28 | 2006-10-26 | High fill ratio silicon spatial light modulator |
Country Status (4)
Country | Link |
---|---|
US (1) | US7522330B2 (en) |
JP (1) | JP2009514029A (en) |
CN (1) | CN101297227B (en) |
WO (1) | WO2007053453A2 (en) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7453624B2 (en) * | 2005-10-28 | 2008-11-18 | Miradia Inc. | Projection display system including a high fill ratio silicon spatial light modulator |
US7675670B2 (en) | 2005-10-28 | 2010-03-09 | Miradia Inc. | Fabrication of a high fill ratio silicon spatial light modulator |
US7505195B2 (en) * | 2006-05-04 | 2009-03-17 | Miradia Inc. | Reflective spatial light modulator with high stiffness torsion spring hinge |
US8314984B2 (en) * | 2008-02-14 | 2012-11-20 | Miradia Inc. | Method and system for optical MEMS with flexible landing structures |
US8105736B2 (en) * | 2008-03-13 | 2012-01-31 | Miradia Inc. | Method and system for overlay correction during photolithography |
US7764535B2 (en) * | 2008-06-11 | 2010-07-27 | Miradia Inc. | Low power, small size SRAM architecture |
TWI353334B (en) * | 2008-07-02 | 2011-12-01 | Touch Micro System Tech | Torsional mems device |
US9595479B2 (en) | 2008-07-08 | 2017-03-14 | MCube Inc. | Method and structure of three dimensional CMOS transistors with hybrid crystal orientations |
US20100075481A1 (en) | 2008-07-08 | 2010-03-25 | Xiao (Charles) Yang | Method and structure of monolithically integrated ic-mems oscillator using ic foundry-compatible processes |
US8148781B2 (en) | 2008-07-28 | 2012-04-03 | MCube Inc. | Method and structures of monolithically integrated ESD suppression device |
EP2211223A1 (en) * | 2009-01-23 | 2010-07-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method for generating a deflectable mirror structure and a micromirror device |
JP2013205798A (en) * | 2012-03-29 | 2013-10-07 | Furukawa Electric Co Ltd:The | Mems element, method for manufacturing the same, optical switch, and wavelength selection optical switch |
JP6106970B2 (en) * | 2012-07-02 | 2017-04-05 | 株式会社ニコン | Spatial light modulator and exposure apparatus |
JP6446895B2 (en) | 2014-08-01 | 2019-01-09 | セイコーエプソン株式会社 | Digital micromirror device, digital micromirror device manufacturing method, and electronic apparatus |
JP6613593B2 (en) | 2015-04-01 | 2019-12-04 | セイコーエプソン株式会社 | Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus |
JP6519284B2 (en) * | 2015-04-01 | 2019-05-29 | セイコーエプソン株式会社 | Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus |
WO2020069482A1 (en) * | 2018-09-29 | 2020-04-02 | Ignite, Inc. | A mems display device with a vertical hinge |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050128564A1 (en) * | 2003-10-27 | 2005-06-16 | Pan Shaoher X. | High contrast spatial light modulator and method |
US20050157375A1 (en) * | 2003-02-12 | 2005-07-21 | Jonathan Doan | Micromirror device and method for making the same |
US20050185250A1 (en) * | 2003-03-22 | 2005-08-25 | Active Optical Networks, Inc. | Methods for fabricating spatial light modulators with hidden comb actuators |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5485304A (en) * | 1994-07-29 | 1996-01-16 | Texas Instruments, Inc. | Support posts for micro-mechanical devices |
US5535047A (en) * | 1995-04-18 | 1996-07-09 | Texas Instruments Incorporated | Active yoke hidden hinge digital micromirror device |
US5914802A (en) * | 1997-07-18 | 1999-06-22 | Northrop Grumman Corporation | Combined spatial light modulator and phase mask for holographic storage system |
JP3324469B2 (en) * | 1997-09-26 | 2002-09-17 | 信越半導体株式会社 | Method for producing SOI wafer and SOI wafer produced by this method |
US7196740B2 (en) * | 2000-08-30 | 2007-03-27 | Texas Instruments Incorporated | Projection TV with improved micromirror array |
US7209274B2 (en) * | 2001-06-02 | 2007-04-24 | Capella Photonics, Inc. | High fill-factor bulk silicon mirrors |
US6900915B2 (en) * | 2001-11-14 | 2005-05-31 | Ricoh Company, Ltd. | Light deflecting method and apparatus efficiently using a floating mirror |
TW521062B (en) * | 2002-03-05 | 2003-02-21 | Walsin Lihwa Corp | Corner compensation method and structure constructed by the same |
US6965468B2 (en) * | 2003-07-03 | 2005-11-15 | Reflectivity, Inc | Micromirror array having reduced gap between adjacent micromirrors of the micromirror array |
US7034984B2 (en) * | 2002-06-19 | 2006-04-25 | Miradia Inc. | Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge |
US20040004753A1 (en) * | 2002-06-19 | 2004-01-08 | Pan Shaoher X. | Architecture of a reflective spatial light modulator |
US6798560B2 (en) * | 2002-10-11 | 2004-09-28 | Exajoula, Llc | Micromirror systems with open support structures |
US7459402B2 (en) * | 2003-02-12 | 2008-12-02 | Texas Instruments Incorporated | Protection layers in micromirror array devices |
US6900922B2 (en) * | 2003-02-24 | 2005-05-31 | Exajoule, Llc | Multi-tilt micromirror systems with concealed hinge structures |
JP2004354440A (en) | 2003-05-27 | 2004-12-16 | Victor Co Of Japan Ltd | Optical modulation element and optical modulation method |
US7307777B2 (en) * | 2003-10-23 | 2007-12-11 | Spatial Photonics, Inc. | High-resolution spatial light modulation |
US7253941B2 (en) * | 2003-12-19 | 2007-08-07 | Texas Instruments Incorporated | Hinge design for enhanced optical performance for a micro-mirror device |
US7265477B2 (en) * | 2004-01-05 | 2007-09-04 | Chang-Feng Wan | Stepping actuator and method of manufacture therefore |
US7215459B2 (en) * | 2004-08-25 | 2007-05-08 | Reflectivity, Inc. | Micromirror devices with in-plane deformable hinge |
US7139113B1 (en) * | 2005-07-29 | 2006-11-21 | Texas Instruments Incorporated | Digital micro-mirror device with free standing spring tips and distributed address electrodes |
-
2006
- 2006-06-05 US US11/448,149 patent/US7522330B2/en active Active
- 2006-10-26 CN CN2006800402022A patent/CN101297227B/en not_active Expired - Fee Related
- 2006-10-26 JP JP2008538004A patent/JP2009514029A/en active Pending
- 2006-10-26 WO PCT/US2006/042045 patent/WO2007053453A2/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050157375A1 (en) * | 2003-02-12 | 2005-07-21 | Jonathan Doan | Micromirror device and method for making the same |
US20050185250A1 (en) * | 2003-03-22 | 2005-08-25 | Active Optical Networks, Inc. | Methods for fabricating spatial light modulators with hidden comb actuators |
US20050128564A1 (en) * | 2003-10-27 | 2005-06-16 | Pan Shaoher X. | High contrast spatial light modulator and method |
Also Published As
Publication number | Publication date |
---|---|
JP2009514029A (en) | 2009-04-02 |
CN101297227A (en) | 2008-10-29 |
US20070097487A1 (en) | 2007-05-03 |
US7522330B2 (en) | 2009-04-21 |
CN101297227B (en) | 2011-05-04 |
WO2007053453A2 (en) | 2007-05-10 |
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