WO2007053453A3 - High fill ratio silicon spatial light modulator - Google Patents

High fill ratio silicon spatial light modulator Download PDF

Info

Publication number
WO2007053453A3
WO2007053453A3 PCT/US2006/042045 US2006042045W WO2007053453A3 WO 2007053453 A3 WO2007053453 A3 WO 2007053453A3 US 2006042045 W US2006042045 W US 2006042045W WO 2007053453 A3 WO2007053453 A3 WO 2007053453A3
Authority
WO
WIPO (PCT)
Prior art keywords
light modulator
spatial light
surface region
high fill
optical deflection
Prior art date
Application number
PCT/US2006/042045
Other languages
French (fr)
Other versions
WO2007053453A2 (en
Inventor
Xiao Yang
Yuxiang Wang
Wook Ji
Justin Allen Payne
Ye Wang
Iii William Spencer Worley
Dongmin Chen
Howard Woo
Original Assignee
Miradia Inc
Xiao Yang
Yuxiang Wang
Wook Ji
Justin Allen Payne
Ye Wang
Iii William Spencer Worley
Dongmin Chen
Howard Woo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miradia Inc, Xiao Yang, Yuxiang Wang, Wook Ji, Justin Allen Payne, Ye Wang, Iii William Spencer Worley, Dongmin Chen, Howard Woo filed Critical Miradia Inc
Priority to CN2006800402022A priority Critical patent/CN101297227B/en
Priority to JP2008538004A priority patent/JP2009514029A/en
Publication of WO2007053453A2 publication Critical patent/WO2007053453A2/en
Publication of WO2007053453A3 publication Critical patent/WO2007053453A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/007—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
    • G02B26/008—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light in the form of devices for effecting sequential colour changes, e.g. colour wheels

Abstract

An optical deflection device for a display application The optical deflection device includes a semiconductor substrate (105) including an upper surface region and one or more electrode devices (112) provided overlying the upper surface region The optical deflection device also includes a hinge device (214) including a silicon material and coupled to the upper surface region The optical deflection device further includes a spacing defined between the upper surface region and the hinge device (214) and a mirror structure including a post portion (208) coupled to the hinge device (214) and a mirror plate portion (212) coupled to the post portion (208) and overlying the hinge device (214).
PCT/US2006/042045 2005-10-28 2006-10-26 High fill ratio silicon spatial light modulator WO2007053453A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN2006800402022A CN101297227B (en) 2005-10-28 2006-10-26 High fill ratio silicon spatial light modulator
JP2008538004A JP2009514029A (en) 2005-10-28 2006-10-26 High filling rate silicon spatial light modulator

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US73137805P 2005-10-28 2005-10-28
US60/731,378 2005-10-28
US11/448,149 2006-06-05
US11/448,149 US7522330B2 (en) 2005-10-28 2006-06-05 High fill ratio silicon spatial light modulator

Publications (2)

Publication Number Publication Date
WO2007053453A2 WO2007053453A2 (en) 2007-05-10
WO2007053453A3 true WO2007053453A3 (en) 2008-01-24

Family

ID=37995913

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/042045 WO2007053453A2 (en) 2005-10-28 2006-10-26 High fill ratio silicon spatial light modulator

Country Status (4)

Country Link
US (1) US7522330B2 (en)
JP (1) JP2009514029A (en)
CN (1) CN101297227B (en)
WO (1) WO2007053453A2 (en)

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Publication number Priority date Publication date Assignee Title
US7453624B2 (en) * 2005-10-28 2008-11-18 Miradia Inc. Projection display system including a high fill ratio silicon spatial light modulator
US7675670B2 (en) 2005-10-28 2010-03-09 Miradia Inc. Fabrication of a high fill ratio silicon spatial light modulator
US7505195B2 (en) * 2006-05-04 2009-03-17 Miradia Inc. Reflective spatial light modulator with high stiffness torsion spring hinge
US8314984B2 (en) * 2008-02-14 2012-11-20 Miradia Inc. Method and system for optical MEMS with flexible landing structures
US8105736B2 (en) * 2008-03-13 2012-01-31 Miradia Inc. Method and system for overlay correction during photolithography
US7764535B2 (en) * 2008-06-11 2010-07-27 Miradia Inc. Low power, small size SRAM architecture
TWI353334B (en) * 2008-07-02 2011-12-01 Touch Micro System Tech Torsional mems device
US9595479B2 (en) 2008-07-08 2017-03-14 MCube Inc. Method and structure of three dimensional CMOS transistors with hybrid crystal orientations
US20100075481A1 (en) 2008-07-08 2010-03-25 Xiao (Charles) Yang Method and structure of monolithically integrated ic-mems oscillator using ic foundry-compatible processes
US8148781B2 (en) 2008-07-28 2012-04-03 MCube Inc. Method and structures of monolithically integrated ESD suppression device
EP2211223A1 (en) * 2009-01-23 2010-07-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for generating a deflectable mirror structure and a micromirror device
JP2013205798A (en) * 2012-03-29 2013-10-07 Furukawa Electric Co Ltd:The Mems element, method for manufacturing the same, optical switch, and wavelength selection optical switch
JP6106970B2 (en) * 2012-07-02 2017-04-05 株式会社ニコン Spatial light modulator and exposure apparatus
JP6446895B2 (en) 2014-08-01 2019-01-09 セイコーエプソン株式会社 Digital micromirror device, digital micromirror device manufacturing method, and electronic apparatus
JP6613593B2 (en) 2015-04-01 2019-12-04 セイコーエプソン株式会社 Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
JP6519284B2 (en) * 2015-04-01 2019-05-29 セイコーエプソン株式会社 Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
WO2020069482A1 (en) * 2018-09-29 2020-04-02 Ignite, Inc. A mems display device with a vertical hinge

Citations (3)

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Publication number Priority date Publication date Assignee Title
US20050128564A1 (en) * 2003-10-27 2005-06-16 Pan Shaoher X. High contrast spatial light modulator and method
US20050157375A1 (en) * 2003-02-12 2005-07-21 Jonathan Doan Micromirror device and method for making the same
US20050185250A1 (en) * 2003-03-22 2005-08-25 Active Optical Networks, Inc. Methods for fabricating spatial light modulators with hidden comb actuators

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US5485304A (en) * 1994-07-29 1996-01-16 Texas Instruments, Inc. Support posts for micro-mechanical devices
US5535047A (en) * 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device
US5914802A (en) * 1997-07-18 1999-06-22 Northrop Grumman Corporation Combined spatial light modulator and phase mask for holographic storage system
JP3324469B2 (en) * 1997-09-26 2002-09-17 信越半導体株式会社 Method for producing SOI wafer and SOI wafer produced by this method
US7006275B2 (en) * 2000-08-30 2006-02-28 Reflectivity, Inc Packaged micromirror array for a projection display
US7209274B2 (en) * 2001-06-02 2007-04-24 Capella Photonics, Inc. High fill-factor bulk silicon mirrors
US6900915B2 (en) * 2001-11-14 2005-05-31 Ricoh Company, Ltd. Light deflecting method and apparatus efficiently using a floating mirror
TW521062B (en) * 2002-03-05 2003-02-21 Walsin Lihwa Corp Corner compensation method and structure constructed by the same
US6965468B2 (en) * 2003-07-03 2005-11-15 Reflectivity, Inc Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
US7034984B2 (en) * 2002-06-19 2006-04-25 Miradia Inc. Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
US20040004753A1 (en) * 2002-06-19 2004-01-08 Pan Shaoher X. Architecture of a reflective spatial light modulator
US6798560B2 (en) * 2002-10-11 2004-09-28 Exajoula, Llc Micromirror systems with open support structures
US7459402B2 (en) * 2003-02-12 2008-12-02 Texas Instruments Incorporated Protection layers in micromirror array devices
US6900922B2 (en) * 2003-02-24 2005-05-31 Exajoule, Llc Multi-tilt micromirror systems with concealed hinge structures
JP2004354440A (en) 2003-05-27 2004-12-16 Victor Co Of Japan Ltd Optical modulation element and optical modulation method
US7307777B2 (en) * 2003-10-23 2007-12-11 Spatial Photonics, Inc. High-resolution spatial light modulation
US7253941B2 (en) * 2003-12-19 2007-08-07 Texas Instruments Incorporated Hinge design for enhanced optical performance for a micro-mirror device
US7265477B2 (en) * 2004-01-05 2007-09-04 Chang-Feng Wan Stepping actuator and method of manufacture therefore
US7215459B2 (en) * 2004-08-25 2007-05-08 Reflectivity, Inc. Micromirror devices with in-plane deformable hinge
US7139113B1 (en) * 2005-07-29 2006-11-21 Texas Instruments Incorporated Digital micro-mirror device with free standing spring tips and distributed address electrodes

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US20050157375A1 (en) * 2003-02-12 2005-07-21 Jonathan Doan Micromirror device and method for making the same
US20050185250A1 (en) * 2003-03-22 2005-08-25 Active Optical Networks, Inc. Methods for fabricating spatial light modulators with hidden comb actuators
US20050128564A1 (en) * 2003-10-27 2005-06-16 Pan Shaoher X. High contrast spatial light modulator and method

Also Published As

Publication number Publication date
JP2009514029A (en) 2009-04-02
US7522330B2 (en) 2009-04-21
WO2007053453A2 (en) 2007-05-10
CN101297227B (en) 2011-05-04
US20070097487A1 (en) 2007-05-03
CN101297227A (en) 2008-10-29

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