WO2007133467A3 - Air bridge structures and methods of making and using air bridge structures - Google Patents

Air bridge structures and methods of making and using air bridge structures Download PDF

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Publication number
WO2007133467A3
WO2007133467A3 PCT/US2007/010738 US2007010738W WO2007133467A3 WO 2007133467 A3 WO2007133467 A3 WO 2007133467A3 US 2007010738 W US2007010738 W US 2007010738W WO 2007133467 A3 WO2007133467 A3 WO 2007133467A3
Authority
WO
WIPO (PCT)
Prior art keywords
air bridge
bridge structures
electrically conductive
making
methods
Prior art date
Application number
PCT/US2007/010738
Other languages
French (fr)
Other versions
WO2007133467A2 (en
Inventor
Gaetan L Mathieu
Original Assignee
Formfactor Inc
Gaetan L Mathieu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Formfactor Inc, Gaetan L Mathieu filed Critical Formfactor Inc
Priority to EP07756196A priority Critical patent/EP2024751A2/en
Priority to JP2009509714A priority patent/JP2009536735A/en
Publication of WO2007133467A2 publication Critical patent/WO2007133467A2/en
Publication of WO2007133467A3 publication Critical patent/WO2007133467A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/30—Monitoring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48464—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area also being a ball bond, i.e. ball-to-ball

Abstract

A probe card assembly, according to some embodiments of the invention, can comprise a tester interface configured to make electrical connections with a test controller, a plurality of electrically conductive probes disposed to contact terminals of an electronic device to be tested, and a plurality of electrically conductive data paths connecting the tester interface and the probes. At least one of the data paths can comprise an air bridge structure trace comprising an electrically conductive trace spaced away from an electrically conductive plate by a plurality of pylons.
PCT/US2007/010738 2006-05-09 2007-05-02 Air bridge structures and methods of making and using air bridge structures WO2007133467A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP07756196A EP2024751A2 (en) 2006-05-09 2007-05-02 Air bridge structures and methods of making and using air bridge structures
JP2009509714A JP2009536735A (en) 2006-05-09 2007-05-02 AIRBRIDGE STRUCTURE AND METHOD FOR MANUFACTURING AND USING AIRBRIDGE STRUCTURE

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/382,458 US7444253B2 (en) 2006-05-09 2006-05-09 Air bridge structures and methods of making and using air bridge structures
US11/382,458 2006-05-09

Publications (2)

Publication Number Publication Date
WO2007133467A2 WO2007133467A2 (en) 2007-11-22
WO2007133467A3 true WO2007133467A3 (en) 2008-05-08

Family

ID=38686177

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/010738 WO2007133467A2 (en) 2006-05-09 2007-05-02 Air bridge structures and methods of making and using air bridge structures

Country Status (7)

Country Link
US (2) US7444253B2 (en)
EP (1) EP2024751A2 (en)
JP (1) JP2009536735A (en)
KR (1) KR20090016460A (en)
CN (1) CN101443667A (en)
TW (1) TW200801530A (en)
WO (1) WO2007133467A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7658831B2 (en) * 2005-12-21 2010-02-09 Formfactor, Inc Three dimensional microstructures and methods for making three dimensional microstructures
US7444253B2 (en) * 2006-05-09 2008-10-28 Formfactor, Inc. Air bridge structures and methods of making and using air bridge structures
US7999375B2 (en) * 2006-10-11 2011-08-16 Formfactor, Inc. Electronic device with integrated micromechanical contacts and cooling system
CN101489356B (en) * 2008-01-16 2011-03-30 富葵精密组件(深圳)有限公司 Circuit board and production method thereof
US20100104678A1 (en) * 2008-10-28 2010-04-29 Formfactor, Inc. Apparatus and method for making and using a tooling die
US7880489B2 (en) * 2008-11-04 2011-02-01 Formfactor, Inc. Printing of redistribution traces on electronic component
US9230682B2 (en) * 2012-12-26 2016-01-05 Broadcom Corporation Method and system for automated device testing

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4920639A (en) * 1989-08-04 1990-05-01 Microelectronics And Computer Technology Corporation Method of making a multilevel electrical airbridge interconnect
US6605825B1 (en) * 2002-02-14 2003-08-12 Innovative Technology Licensing, Llc Bipolar transistor characterization apparatus with lateral test probe pads
US6849308B1 (en) * 1999-05-27 2005-02-01 Stuart Speakman Method of forming a masking pattern on a surface

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US2851660A (en) * 1953-10-26 1958-09-09 Ibm Circuit testing apparatus
US2877544A (en) * 1954-08-30 1959-03-17 Western Electric Co Method of locating and replacing defective components of encapsulated electrical assemblies
US2954521A (en) * 1958-04-23 1960-09-27 Technical Electronics Corp Air-actuated electrical contact probe
US3082374A (en) * 1959-06-12 1963-03-19 Itt Automatic testing system and timing device therefor
US3567914A (en) * 1964-12-31 1971-03-02 Sperry Rand Corp Automated manufacturing system
US5917707A (en) * 1993-11-16 1999-06-29 Formfactor, Inc. Flexible contact structure with an electrically conductive shell
US5476211A (en) * 1993-11-16 1995-12-19 Form Factor, Inc. Method of manufacturing electrical contacts, using a sacrificial member
US4761303A (en) * 1986-11-10 1988-08-02 Macdermid, Incorporated Process for preparing multilayer printed circuit boards
US5354695A (en) * 1992-04-08 1994-10-11 Leedy Glenn J Membrane dielectric isolation IC fabrication
US6714625B1 (en) * 1992-04-08 2004-03-30 Elm Technology Corporation Lithography device for semiconductor circuit pattern generation
US5529634A (en) * 1992-12-28 1996-06-25 Kabushiki Kaisha Toshiba Apparatus and method of manufacturing semiconductor device
US5974662A (en) * 1993-11-16 1999-11-02 Formfactor, Inc. Method of planarizing tips of probe elements of a probe card assembly
US6336269B1 (en) * 1993-11-16 2002-01-08 Benjamin N. Eldridge Method of fabricating an interconnection element
US6033935A (en) * 1997-06-30 2000-03-07 Formfactor, Inc. Sockets for "springed" semiconductor devices
US5839188A (en) * 1996-01-05 1998-11-24 Alliedsignal Inc. Method of manufacturing a printed circuit assembly
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JP2005081335A (en) * 2003-09-11 2005-03-31 Seiko Epson Corp Pattern forming method, conductive thin film, electro-optic device, electronic device
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US7658831B2 (en) 2005-12-21 2010-02-09 Formfactor, Inc Three dimensional microstructures and methods for making three dimensional microstructures
US7444253B2 (en) * 2006-05-09 2008-10-28 Formfactor, Inc. Air bridge structures and methods of making and using air bridge structures
US7999375B2 (en) 2006-10-11 2011-08-16 Formfactor, Inc. Electronic device with integrated micromechanical contacts and cooling system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4920639A (en) * 1989-08-04 1990-05-01 Microelectronics And Computer Technology Corporation Method of making a multilevel electrical airbridge interconnect
US6849308B1 (en) * 1999-05-27 2005-02-01 Stuart Speakman Method of forming a masking pattern on a surface
US6605825B1 (en) * 2002-02-14 2003-08-12 Innovative Technology Licensing, Llc Bipolar transistor characterization apparatus with lateral test probe pads
US20030151046A1 (en) * 2002-02-14 2003-08-14 Innovative Technology Licensing, Llc Bipolar transistor characterization apparatus and method employing air bridge connectors to test probe pads

Also Published As

Publication number Publication date
KR20090016460A (en) 2009-02-13
TW200801530A (en) 2008-01-01
US20070265795A1 (en) 2007-11-15
CN101443667A (en) 2009-05-27
US20090051378A1 (en) 2009-02-26
US7729878B2 (en) 2010-06-01
JP2009536735A (en) 2009-10-15
EP2024751A2 (en) 2009-02-18
WO2007133467A2 (en) 2007-11-22
US7444253B2 (en) 2008-10-28

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