WO2007136864A3 - Superabrasive tools having improved caustic resistance - Google Patents
Superabrasive tools having improved caustic resistance Download PDFInfo
- Publication number
- WO2007136864A3 WO2007136864A3 PCT/US2007/012196 US2007012196W WO2007136864A3 WO 2007136864 A3 WO2007136864 A3 WO 2007136864A3 US 2007012196 W US2007012196 W US 2007012196W WO 2007136864 A3 WO2007136864 A3 WO 2007136864A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- superabrasive
- caustic resistance
- protective layer
- reactive
- superabrasive tools
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D2203/00—Tool surfaces formed with a pattern
Abstract
Superabrasive tools having improved caustic resistance and their methods of manufacture are disclosed. One aspect may include a method of providing caustic resistance along an entire working surface of a superabrasive tool having embedded superabrasive particles (44). Such a method may include forming a protective layer (50) through reaction between a reactive source and a reactive element in situ along substantially all of the working surface at an interface between the reactive source and a support matrix (48) including the reactive element, and between each of a plurality of superabrasive particles (44) and the support matrix (48). At least a portion of the reactive source may then be removed to expose the protective layer (50). In some aspects, the protective layer (50) may be substantially continuous.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/436,881 US7771498B2 (en) | 2006-05-17 | 2006-05-17 | Superabrasive tools having improved caustic resistance |
US11/436,881 | 2006-05-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2007136864A2 WO2007136864A2 (en) | 2007-11-29 |
WO2007136864A3 true WO2007136864A3 (en) | 2008-01-31 |
Family
ID=38710684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2007/012196 WO2007136864A2 (en) | 2006-05-17 | 2007-05-17 | Superabrasive tools having improved caustic resistance |
Country Status (3)
Country | Link |
---|---|
US (1) | US7771498B2 (en) |
TW (1) | TWI331066B (en) |
WO (1) | WO2007136864A2 (en) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9868100B2 (en) | 1997-04-04 | 2018-01-16 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9463552B2 (en) | 1997-04-04 | 2016-10-11 | Chien-Min Sung | Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods |
US9221154B2 (en) | 1997-04-04 | 2015-12-29 | Chien-Min Sung | Diamond tools and methods for making the same |
US9409280B2 (en) | 1997-04-04 | 2016-08-09 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9238207B2 (en) | 1997-04-04 | 2016-01-19 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9199357B2 (en) | 1997-04-04 | 2015-12-01 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9724802B2 (en) | 2005-05-16 | 2017-08-08 | Chien-Min Sung | CMP pad dressers having leveled tips and associated methods |
US8393934B2 (en) | 2006-11-16 | 2013-03-12 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
US8678878B2 (en) | 2009-09-29 | 2014-03-25 | Chien-Min Sung | System for evaluating and/or improving performance of a CMP pad dresser |
US8622787B2 (en) | 2006-11-16 | 2014-01-07 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
US8398466B2 (en) | 2006-11-16 | 2013-03-19 | Chien-Min Sung | CMP pad conditioners with mosaic abrasive segments and associated methods |
US9138862B2 (en) * | 2011-05-23 | 2015-09-22 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
US8382557B2 (en) * | 2007-11-14 | 2013-02-26 | Saint-Gobain Abrasives, Inc. | Chemical mechanical planarization pad conditioner and methods of forming thereof |
TWI388402B (en) | 2007-12-06 | 2013-03-11 | Methods for orienting superabrasive particles on a surface and associated tools | |
US20100261419A1 (en) * | 2009-04-10 | 2010-10-14 | Chien-Min Sung | Superabrasive Tool Having Surface Modified Superabrasive Particles and Associated Methods |
US8951317B1 (en) | 2009-04-27 | 2015-02-10 | Us Synthetic Corporation | Superabrasive elements including ceramic coatings and methods of leaching catalysts from superabrasive elements |
US8079428B2 (en) | 2009-07-02 | 2011-12-20 | Baker Hughes Incorporated | Hardfacing materials including PCD particles, welding rods and earth-boring tools including such materials, and methods of forming and using same |
US8603350B2 (en) * | 2009-07-17 | 2013-12-10 | Ohara Inc. | Method of manufacturing substrate for information storage media |
WO2012040374A2 (en) * | 2010-09-21 | 2012-03-29 | Ritedia Corporation | Superabrasive tools having substantially leveled particle tips and associated methods |
TWI422466B (en) * | 2011-01-28 | 2014-01-11 | Advanced Surface Tech Inc | Diamond abrasive tool and manufacturing method thereof |
CN103329253B (en) | 2011-05-23 | 2016-03-30 | 宋健民 | There is the CMP pad dresser at planarization tip |
CN107234550A (en) * | 2012-08-02 | 2017-10-10 | 罗伯特·博世有限公司 | Abrasive particle comprising the first face without angle and angular second face of tool |
US20190351527A1 (en) * | 2018-05-17 | 2019-11-21 | Entegris, Inc. | Conditioner for chemical-mechanical-planarization pad and related methods |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6517424B2 (en) * | 2000-03-10 | 2003-02-11 | Abrasive Technology, Inc. | Protective coatings for CMP conditioning disk |
US20040031438A1 (en) * | 2000-10-13 | 2004-02-19 | Chien-Min Sung | Cast diamond products and formation thereof by chemical vapor deposition |
US20040112359A1 (en) * | 1997-04-04 | 2004-06-17 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US20040235406A1 (en) * | 2000-11-17 | 2004-11-25 | Duescher Wayne O. | Abrasive agglomerate coated raised island articles |
US6884155B2 (en) * | 1999-11-22 | 2005-04-26 | Kinik | Diamond grid CMP pad dresser |
US20050095959A1 (en) * | 1999-11-22 | 2005-05-05 | Chien-Min Sung | Contoured CMP pad dresser and associated methods |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4916869A (en) * | 1988-08-01 | 1990-04-17 | L. R. Oliver & Company, Inc. | Bonded abrasive grit structure |
TWI241939B (en) * | 2002-10-25 | 2005-10-21 | Alex C Long | Producing method and structure of cutting and polishing plate |
-
2006
- 2006-05-17 US US11/436,881 patent/US7771498B2/en not_active Expired - Fee Related
-
2007
- 2007-05-17 TW TW096117531A patent/TWI331066B/en active
- 2007-05-17 WO PCT/US2007/012196 patent/WO2007136864A2/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040112359A1 (en) * | 1997-04-04 | 2004-06-17 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US6884155B2 (en) * | 1999-11-22 | 2005-04-26 | Kinik | Diamond grid CMP pad dresser |
US20050095959A1 (en) * | 1999-11-22 | 2005-05-05 | Chien-Min Sung | Contoured CMP pad dresser and associated methods |
US6517424B2 (en) * | 2000-03-10 | 2003-02-11 | Abrasive Technology, Inc. | Protective coatings for CMP conditioning disk |
US20040031438A1 (en) * | 2000-10-13 | 2004-02-19 | Chien-Min Sung | Cast diamond products and formation thereof by chemical vapor deposition |
US20040235406A1 (en) * | 2000-11-17 | 2004-11-25 | Duescher Wayne O. | Abrasive agglomerate coated raised island articles |
Also Published As
Publication number | Publication date |
---|---|
TWI331066B (en) | 2010-10-01 |
WO2007136864A2 (en) | 2007-11-29 |
TW200806432A (en) | 2008-02-01 |
US7771498B2 (en) | 2010-08-10 |
US20070266639A1 (en) | 2007-11-22 |
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