WO2007145728A3 - A test structure and probe for differential signals - Google Patents

A test structure and probe for differential signals Download PDF

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Publication number
WO2007145728A3
WO2007145728A3 PCT/US2007/010801 US2007010801W WO2007145728A3 WO 2007145728 A3 WO2007145728 A3 WO 2007145728A3 US 2007010801 W US2007010801 W US 2007010801W WO 2007145728 A3 WO2007145728 A3 WO 2007145728A3
Authority
WO
WIPO (PCT)
Prior art keywords
test structure
probe
differential signals
differential
input impedance
Prior art date
Application number
PCT/US2007/010801
Other languages
French (fr)
Other versions
WO2007145728A2 (en
Inventor
Richard Campbell
Original Assignee
Cascade Microtech Inc
Richard Campbell
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/710,149 external-priority patent/US7403028B2/en
Application filed by Cascade Microtech Inc, Richard Campbell filed Critical Cascade Microtech Inc
Priority to DE112007001435T priority Critical patent/DE112007001435T5/en
Priority to JP2009515391A priority patent/JP4870211B2/en
Publication of WO2007145728A2 publication Critical patent/WO2007145728A2/en
Publication of WO2007145728A3 publication Critical patent/WO2007145728A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2621—Circuits therefor for testing field effect transistors, i.e. FET's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2822—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere of microwave or radiofrequency circuits

Abstract

A test structure including a differential gain cell and a differential signal probe include compensation for the Miller effect reducing the frequency dependent variability of the input impedance of the test structure.
PCT/US2007/010801 2006-06-12 2007-05-03 A test structure and probe for differential signals WO2007145728A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112007001435T DE112007001435T5 (en) 2006-06-12 2007-05-03 Test structure and probe for differential signals
JP2009515391A JP4870211B2 (en) 2006-06-12 2007-05-03 Differential signal test structure and probe

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US81311906P 2006-06-12 2006-06-12
US60/813,119 2006-06-12
US11/710,149 US7403028B2 (en) 2006-06-12 2007-02-22 Test structure and probe for differential signals
US11/710,149 2007-02-22

Publications (2)

Publication Number Publication Date
WO2007145728A2 WO2007145728A2 (en) 2007-12-21
WO2007145728A3 true WO2007145728A3 (en) 2008-05-02

Family

ID=38832257

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/010801 WO2007145728A2 (en) 2006-06-12 2007-05-03 A test structure and probe for differential signals

Country Status (3)

Country Link
JP (1) JP4870211B2 (en)
DE (2) DE112007001435T5 (en)
WO (1) WO2007145728A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103117536B (en) * 2013-01-15 2014-11-12 费新华 Storage battery protective circuit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5940965A (en) * 1995-02-03 1999-08-24 Hewlett-Packard Company Method of making multiple lead voltage probe
US20040140819A1 (en) * 2003-01-21 2004-07-22 Mctigue Michael T. Differential voltage probe

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001242214A (en) * 2000-02-28 2001-09-07 Asahi Kasei Microsystems Kk Characteristic measuring circuit of semiconductor
JP2002057288A (en) * 2000-08-09 2002-02-22 Rohm Co Ltd Semiconductor integrated circuit device
JP4151572B2 (en) * 2003-12-16 2008-09-17 株式会社デンソー Transistor pair characteristic difference measuring device and characteristic difference measuring method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5940965A (en) * 1995-02-03 1999-08-24 Hewlett-Packard Company Method of making multiple lead voltage probe
US20040140819A1 (en) * 2003-01-21 2004-07-22 Mctigue Michael T. Differential voltage probe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US8013623B2 (en) 2004-09-13 2011-09-06 Cascade Microtech, Inc. Double sided probing structures

Also Published As

Publication number Publication date
WO2007145728A2 (en) 2007-12-21
JP2009540331A (en) 2009-11-19
JP4870211B2 (en) 2012-02-08
DE202007018748U1 (en) 2009-04-02
DE112007001435T5 (en) 2009-05-20
DE202007018748U8 (en) 2009-08-13

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