WO2008024476A3 - Method and apparatus for semiconductor wafer alignment - Google Patents

Method and apparatus for semiconductor wafer alignment Download PDF

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Publication number
WO2008024476A3
WO2008024476A3 PCT/US2007/018752 US2007018752W WO2008024476A3 WO 2008024476 A3 WO2008024476 A3 WO 2008024476A3 US 2007018752 W US2007018752 W US 2007018752W WO 2008024476 A3 WO2008024476 A3 WO 2008024476A3
Authority
WO
WIPO (PCT)
Prior art keywords
wafer alignment
semiconductor wafer
platform
wafer
image
Prior art date
Application number
PCT/US2007/018752
Other languages
French (fr)
Other versions
WO2008024476A2 (en
Inventor
David Michael
James Clark
Gang Liu
Original Assignee
Cognex Corp
David Michael
James Clark
Gang Liu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cognex Corp, David Michael, James Clark, Gang Liu filed Critical Cognex Corp
Publication of WO2008024476A2 publication Critical patent/WO2008024476A2/en
Publication of WO2008024476A3 publication Critical patent/WO2008024476A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/70—Determining position or orientation of objects or cameras
    • G06T7/73—Determining position or orientation of objects or cameras using feature-based methods

Abstract

The invention provides, in some aspects, a wafer alignment system comprising an image acquisition device, an illumination source, a rotatable wafer platform, and an image processor that includes functionality for mapping coordinates in an image of an article (such as a wafer) on the platform to a 'world' frame of reference at each of a plurality of angles of rotation of the platform.
PCT/US2007/018752 2006-08-23 2007-08-23 Method and apparatus for semiconductor wafer alignment WO2008024476A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/508,551 2006-08-23
US11/508,551 US8162584B2 (en) 2006-08-23 2006-08-23 Method and apparatus for semiconductor wafer alignment

Publications (2)

Publication Number Publication Date
WO2008024476A2 WO2008024476A2 (en) 2008-02-28
WO2008024476A3 true WO2008024476A3 (en) 2008-11-13

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/018752 WO2008024476A2 (en) 2006-08-23 2007-08-23 Method and apparatus for semiconductor wafer alignment

Country Status (3)

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US (1) US8162584B2 (en)
TW (1) TWI390660B (en)
WO (1) WO2008024476A2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8422127B2 (en) * 2005-03-17 2013-04-16 Hamamatsu Photonics K.K. Microscopic image capturing device
TWI434368B (en) * 2011-12-08 2014-04-11 Metal Ind Res & Dev Ct Alignment method for assembling substrates without fiducial mark
TWI421972B (en) * 2011-12-08 2014-01-01 Metal Ind Res & Dev Ct Alignment method for assembling substrates in different spaces without fiducial mark and its system
SG11201501085TA (en) 2012-08-31 2015-04-29 Semiconductor Tech & Instr Inc Single ultra-planar wafer table structure for both wafers and film frames
US10032273B2 (en) 2013-03-15 2018-07-24 Cognex Corporation Machine vision system calibration using inaccurate calibration targets
PL3769174T3 (en) * 2018-03-21 2022-10-24 Realtime Robotics, Inc. Motion planning of a robot for various environments and tasks and improved operation of same
CN108615699B (en) * 2018-05-29 2023-11-07 深圳信息职业技术学院 Wafer alignment system and method and optical imaging device for wafer alignment
US11295975B2 (en) 2019-09-13 2022-04-05 Brooks Automation Us, Llc Method and apparatus for substrate alignment
CN116277015B (en) * 2023-04-07 2024-01-23 上海感图网络科技有限公司 Data processing method, device, equipment and storage medium

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5978081A (en) * 1995-12-19 1999-11-02 Cognex Corporation Multiple field of view calibration plate for use in semiconductor manufacturing
US5982132A (en) * 1997-10-09 1999-11-09 Electroglas, Inc. Rotary wafer positioning system and method

Family Cites Families (306)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3816722A (en) 1970-09-29 1974-06-11 Nippon Electric Co Computer for calculating the similarity between patterns and pattern recognition system comprising the similarity computer
JPS5425782B2 (en) 1973-03-28 1979-08-30
US3967100A (en) 1973-11-12 1976-06-29 Naonobu Shimomura Digital function generator utilizing cascade accumulation
US3968475A (en) 1974-11-11 1976-07-06 Sperry Rand Corporation Digital processor for extracting data from a binary image
JPS5177047A (en) 1974-12-27 1976-07-03 Naonobu Shimomura
US4011403A (en) 1976-03-30 1977-03-08 Northwestern University Fiber optic laser illuminators
CH611017A5 (en) 1976-05-05 1979-05-15 Zumbach Electronic Ag
US4183013A (en) 1976-11-29 1980-01-08 Coulter Electronics, Inc. System for extracting shape features from an image
JPS5369063A (en) 1976-12-01 1978-06-20 Hitachi Ltd Detector of position alignment patterns
CH643959A5 (en) 1978-04-14 1984-06-29 Siemens Ag METHOD AND DEVICE FOR THE AUTOMATIC POSITION DETECTION OF SEMICONDUCTOR CHIPS.
US4385322A (en) 1978-09-01 1983-05-24 View Engineering, Inc. Pattern recognition apparatus and method
US4200861A (en) 1978-09-01 1980-04-29 View Engineering, Inc. Pattern recognition apparatus and method
JPS5579590A (en) 1978-12-13 1980-06-16 Hitachi Ltd Video data processor
US4286293A (en) 1979-05-30 1981-08-25 Western Electric Company, Inc. Laser scanning and multiple detection for video image processing
US4300164A (en) 1980-03-21 1981-11-10 View Engineering, Inc. Adaptive video processor
US4631750A (en) 1980-04-11 1986-12-23 Ampex Corporation Method and system for spacially transforming images
GB2084833A (en) 1980-04-11 1982-04-15 Ampex System for spatially transforming images
JPS57102017A (en) 1980-12-17 1982-06-24 Hitachi Ltd Pattern detector
US4435837A (en) 1981-03-05 1984-03-06 President And Fellows Of Harvard College Pattern recognition and orientation system
US4441124A (en) 1981-11-05 1984-04-03 Western Electric Company, Inc. Technique for inspecting semiconductor wafers for particulate contamination
US5506682A (en) 1982-02-16 1996-04-09 Sensor Adaptive Machines Inc. Robot vision using targets
US4519041A (en) 1982-05-03 1985-05-21 Honeywell Inc. Real time automated inspection
DE3267548D1 (en) 1982-05-28 1986-01-02 Ibm Deutschland Process and device for an automatic optical inspection
US4534813A (en) 1982-07-26 1985-08-13 Mcdonnell Douglas Corporation Compound curve-flat pattern process
US4736437A (en) 1982-11-22 1988-04-05 View Engineering, Inc. High speed pattern recognizer
US4577344A (en) 1983-01-17 1986-03-18 Automatix Incorporated Vision system
FR2540263B1 (en) 1983-01-31 1988-05-20 Commissariat Energie Atomique METHOD FOR AUTOMATICALLY RECOGNIZING AN IMAGE FROM A CORRESPONDING REFERENCE IMAGE
US4783829A (en) 1983-02-23 1988-11-08 Hitachi, Ltd. Pattern recognition apparatus
GB8311813D0 (en) 1983-04-29 1983-06-02 West G A W Coding and storing raster scan images
US4581762A (en) 1984-01-19 1986-04-08 Itran Corporation Vision inspection system
US4606065A (en) 1984-02-09 1986-08-12 Imaging Technology Incorporated Image processing-system
JPS60167069A (en) 1984-02-09 1985-08-30 Omron Tateisi Electronics Co Pattern recognizer
US4541116A (en) 1984-02-27 1985-09-10 Environmental Research Institute Of Mi Neighborhood image processing stage for implementing filtering operations
US4860374A (en) 1984-04-19 1989-08-22 Nikon Corporation Apparatus for detecting position of reference pattern
US4688088A (en) 1984-04-20 1987-08-18 Canon Kabushiki Kaisha Position detecting device and method
EP0163885A1 (en) 1984-05-11 1985-12-11 Siemens Aktiengesellschaft Segmentation device
JPS6134583A (en) 1984-07-26 1986-02-18 シャープ株式会社 Lighting apparatus
US4953224A (en) 1984-09-27 1990-08-28 Hitachi, Ltd. Pattern defects detection method and apparatus
JPS6180222A (en) 1984-09-28 1986-04-23 Asahi Glass Co Ltd Method and apparatus for adjusting spectacles
DE3580918D1 (en) 1984-12-14 1991-01-24 Sten Hugo Nils Ahlbom ARRANGEMENT FOR TREATING IMAGES.
US4641349A (en) 1985-02-20 1987-02-03 Leonard Flom Iris recognition system
US4876728A (en) 1985-06-04 1989-10-24 Adept Technology, Inc. Vision system for distinguishing touching parts
US4831580A (en) 1985-07-12 1989-05-16 Nippon Electric Industry Co., Ltd. Program generator
JPS6261390A (en) 1985-09-11 1987-03-18 興和株式会社 Method and apparatus for inspecting printed board
US4617619A (en) 1985-10-02 1986-10-14 American Sterilizer Company Reflector for multiple source lighting fixture
US4742551A (en) 1985-10-07 1988-05-03 Fairchild Camera & Instrument Corporation Multistatistics gatherer
JPH0679325B2 (en) 1985-10-11 1994-10-05 株式会社日立製作所 Position and orientation determination method
US4706168A (en) 1985-11-15 1987-11-10 View Engineering, Inc. Systems and methods for illuminating objects for vision systems
US4860375A (en) 1986-03-10 1989-08-22 Environmental Research Inst. Of Michigan High speed cellular processing system
US4728195A (en) 1986-03-19 1988-03-01 Cognex Corporation Method for imaging printed circuit board component leads
GB8608431D0 (en) 1986-04-07 1986-05-14 Crosfield Electronics Ltd Monitoring digital image processing equipment
US4697075A (en) 1986-04-11 1987-09-29 General Electric Company X-ray imaging system calibration using projection means
JP2623530B2 (en) 1986-04-22 1997-06-25 ミノルタ株式会社 Solid-state image sensor drive
FR2598019B1 (en) 1986-04-25 1992-09-11 Thomson Csf METHOD FOR USING A CHARGE TRANSFER PHOTOSENSITIVE MATRIX, AND PHOTOSENSITIVE MATRIX THUS USED
US4707647A (en) 1986-05-19 1987-11-17 Gmf Robotics Corporation Gray scale vision method and system utilizing same
US4783828A (en) 1986-06-02 1988-11-08 Honeywell Inc. Two-dimensional object recognition using chain codes, histogram normalization and trellis algorithm
US4771469A (en) 1986-06-30 1988-09-13 Honeywell Inc. Means and method of representing an object shape by hierarchical boundary decomposition
US4783826A (en) 1986-08-18 1988-11-08 The Gerber Scientific Company, Inc. Pattern inspection system
US4821333A (en) 1986-08-22 1989-04-11 Environmental Research Inst. Of Michigan Machine learning procedures for generating image domain feature detector structuring elements
FR2604320B1 (en) 1986-09-19 1988-11-04 Thomson Csf FAST VIDEOGRAPHY SHOOTING SYSTEM USING A MATRIX OPTICAL SENSOR WITH LOAD TRANSFER
US4955062A (en) 1986-12-10 1990-09-04 Canon Kabushiki Kaisha Pattern detecting method and apparatus
US4752898A (en) 1987-01-28 1988-06-21 Tencor Instruments Edge finding in wafers
US4972359A (en) 1987-04-03 1990-11-20 Cognex Corporation Digital image processing system
US5005126A (en) 1987-04-09 1991-04-02 Prevail, Inc. System and method for remote presentation of diagnostic image information
US4764870A (en) 1987-04-09 1988-08-16 R.A.P.I.D., Inc. System and method for remote presentation of diagnostic image information
US5012433A (en) 1987-04-27 1991-04-30 International Business Machines Corporation Multistage clipping method
US4982438A (en) 1987-06-02 1991-01-01 Hitachi, Ltd. Apparatus and method for recognizing three-dimensional shape of object
CA1318977C (en) 1987-07-22 1993-06-08 Kazuhito Hori Image recognition system
JPH07120385B2 (en) 1987-07-24 1995-12-20 シャープ株式会社 Optical reading method
JP2630605B2 (en) 1987-07-29 1997-07-16 三菱電機株式会社 Curved surface creation method
US4903218A (en) 1987-08-13 1990-02-20 Digital Equipment Corporation Console emulation for a graphics workstation
JPS6478381A (en) 1987-09-21 1989-03-23 Toshiba Corp Picture processing method
US5119435A (en) 1987-09-21 1992-06-02 Kulicke And Soffa Industries, Inc. Pattern recognition apparatus and method
US4907169A (en) 1987-09-30 1990-03-06 International Technical Associates Adaptive tracking vision and guidance system
US4782238A (en) 1987-10-20 1988-11-01 Eastman Kodak Company Apparatus for generating edge position signals for use in locating an address element on a mailpiece
US5081656A (en) 1987-10-30 1992-01-14 Four Pi Systems Corporation Automated laminography system for inspection of electronics
US4912659A (en) 1987-10-30 1990-03-27 International Business Machines Corporation Parallel surface processing system for graphics display
US5621811A (en) 1987-10-30 1997-04-15 Hewlett-Packard Co. Learning method and apparatus for detecting and controlling solder defects
DE3737631C1 (en) 1987-11-05 1989-03-02 Sick Optik Elektronik Erwin Optical scanning device for flat surfaces
US5287449A (en) 1987-11-06 1994-02-15 Hitachi, Ltd. Automatic program generation method with a visual data structure display
JPH01160158A (en) 1987-12-17 1989-06-23 Murata Mach Ltd Mechanical control system at remote location
JP2622573B2 (en) 1988-01-27 1997-06-18 キヤノン株式会社 Mark detection apparatus and method
FR2631188A1 (en) 1988-05-03 1989-11-10 Thomson Csf CHARGE TRANSFER MATRIX PHOTODETECTOR WITH INTEGRATED CHARGE FILTERING DEVICE
JP2739130B2 (en) 1988-05-12 1998-04-08 株式会社鷹山 Image processing method
US4891767A (en) 1988-06-02 1990-01-02 Combustion Engineering, Inc. Machine vision system for position sensing
JP2541631B2 (en) 1988-07-26 1996-10-09 ファナック株式会社 CNC remote diagnosis method
EP0356680A1 (en) 1988-08-11 1990-03-07 Siemens Aktiengesellschaft Optical recording apparatus for an image-processing system
JP2512099B2 (en) 1988-08-24 1996-07-03 松下電器産業株式会社 Robot motion teaching method and control device
US5046190A (en) 1988-09-06 1991-09-03 Allen-Bradley Company, Inc. Pipeline image processor
US5155775A (en) 1988-10-13 1992-10-13 Brown C David Structured illumination autonomous machine vision system
US4975972A (en) 1988-10-18 1990-12-04 At&T Bell Laboratories Method and apparatus for surface inspection
US5054096A (en) 1988-10-24 1991-10-01 Empire Blue Cross/Blue Shield Method and apparatus for converting documents into electronic data for transaction processing
US4876457A (en) 1988-10-31 1989-10-24 American Telephone And Telegraph Company Method and apparatus for differentiating a planar textured surface from a surrounding background
US4932065A (en) 1988-11-16 1990-06-05 Ncr Corporation Universal character segmentation scheme for multifont OCR images
JPH02148180A (en) 1988-11-29 1990-06-07 Nippon Seiko Kk Method and device for inspecting pattern
US6067379A (en) 1988-12-09 2000-05-23 Cognex Corporation Method and apparatus for locating patterns in an optical image
US5717785A (en) 1992-01-30 1998-02-10 Cognex Corporation Method and apparatus for locating patterns in an optical image
NL8803112A (en) 1988-12-19 1990-07-16 Elbicon Nv METHOD AND APPARATUS FOR SORTING A FLOW OF ARTICLES DEPENDING ON OPTICAL PROPERTIES OF THE ARTICLES.
US5012524A (en) 1989-02-27 1991-04-30 Motorola, Inc. Automatic inspection method
EP0385009A1 (en) 1989-03-03 1990-09-05 Hewlett-Packard Limited Apparatus and method for use in image processing
IL89484A (en) 1989-03-03 1992-08-18 Nct Ltd Numerical Control Tech System for automatic finishing of machined parts
US5081689A (en) 1989-03-27 1992-01-14 Hughes Aircraft Company Apparatus and method for extracting edges and lines
US5027419A (en) 1989-03-31 1991-06-25 Atomic Energy Of Canada Limited Optical images by quadrupole convolution
US5153925A (en) 1989-04-27 1992-10-06 Canon Kabushiki Kaisha Image processing apparatus
US5060276A (en) 1989-05-31 1991-10-22 At&T Bell Laboratories Technique for object orientation detection using a feed-forward neural network
US5253308A (en) 1989-06-21 1993-10-12 Amber Engineering, Inc. Massively parallel digital image data processor using pixel-mapped input/output and relative indexed addressing
DE3923449A1 (en) 1989-07-15 1991-01-24 Philips Patentverwaltung METHOD FOR DETERMINING EDGES IN IMAGES
CA2021865A1 (en) 1989-07-26 1991-01-27 Seizi Maruo Multimedia telemeeting terminal device, terminal device system and manipulation method thereof
US5204944A (en) 1989-07-28 1993-04-20 The Trustees Of Columbia University In The City Of New York Separable image warping methods and systems using spatial lookup tables
US5175808A (en) 1989-09-12 1992-12-29 Pixar Method and apparatus for non-affine image warping
JP2810152B2 (en) 1989-10-13 1998-10-15 株式会社日立製作所 Point pattern matching method
US5063608A (en) 1989-11-03 1991-11-05 Datacube Inc. Adaptive zonal coder
JP2523222B2 (en) 1989-12-08 1996-08-07 ゼロックス コーポレーション Image reduction / enlargement method and apparatus
JP3092809B2 (en) 1989-12-21 2000-09-25 株式会社日立製作所 Inspection method and inspection apparatus having automatic creation function of inspection program data
US5164994A (en) 1989-12-21 1992-11-17 Hughes Aircraft Company Solder joint locator
JPH03210679A (en) 1990-01-12 1991-09-13 Hiyuutec:Kk Method and device for pattern matching
US5271068A (en) 1990-03-15 1993-12-14 Sharp Kabushiki Kaisha Character recognition device which divides a single character region into subregions to obtain a character code
US5151951A (en) 1990-03-15 1992-09-29 Sharp Kabushiki Kaisha Character recognition device which divides a single character region into subregions to obtain a character code
US5495424A (en) 1990-04-18 1996-02-27 Matsushita Electric Industrial Co., Ltd. Method and apparatus for inspecting solder portions
DE4013308A1 (en) 1990-04-26 1991-10-31 Zeiss Carl Fa METHOD FOR THE OPTICAL EXAMINATION OF TEST UNITS
US4959898A (en) 1990-05-22 1990-10-02 Emhart Industries, Inc. Surface mount machine with lead coplanarity verifier
JP2690603B2 (en) 1990-05-30 1997-12-10 ファナック株式会社 Vision sensor calibration method
US5243607A (en) 1990-06-25 1993-09-07 The Johns Hopkins University Method and apparatus for fault tolerance
US5113565A (en) 1990-07-06 1992-05-19 International Business Machines Corp. Apparatus and method for inspection and alignment of semiconductor chips and conductive lead frames
JPH0475183A (en) 1990-07-17 1992-03-10 Mitsubishi Electric Corp Correlativity detector for image
JP2865827B2 (en) 1990-08-13 1999-03-08 株式会社日立製作所 Data storage method in conference system
US5206820A (en) 1990-08-31 1993-04-27 At&T Bell Laboratories Metrology system for analyzing panel misregistration in a panel manufacturing process and providing appropriate information for adjusting panel manufacturing processes
JP2591292B2 (en) 1990-09-05 1997-03-19 日本電気株式会社 Image processing device and automatic optical inspection device using it
US5388252A (en) 1990-09-07 1995-02-07 Eastman Kodak Company System for transparent monitoring of processors in a network with display of screen images at a remote station for diagnosis by technical support personnel
US5115309A (en) 1990-09-10 1992-05-19 At&T Bell Laboratories Method and apparatus for dynamic channel bandwidth allocation among multiple parallel video coders
US5083073A (en) 1990-09-20 1992-01-21 Mazada Motor Manufacturing U.S.A. Corp. Method and apparatus for calibrating a vision guided robot
US5168269A (en) 1990-11-08 1992-12-01 Norton-Lambert Corp. Mouse driven remote communication system
US5327156A (en) 1990-11-09 1994-07-05 Fuji Photo Film Co., Ltd. Apparatus for processing signals representative of a computer graphics image and a real image including storing processed signals back into internal memory
US5598345A (en) 1990-11-29 1997-01-28 Matsushita Electric Industrial Co., Ltd. Method and apparatus for inspecting solder portions
DE69121369T2 (en) 1990-11-30 1997-01-09 Honda Motor Co Ltd Control device for an independently moving body and method for evaluating the data thereof
US5586058A (en) 1990-12-04 1996-12-17 Orbot Instruments Ltd. Apparatus and method for inspection of a patterned object by comparison thereof to a reference
US5086478A (en) 1990-12-27 1992-02-04 International Business Machines Corporation Finding fiducials on printed circuit boards to sub pixel accuracy
US5091968A (en) 1990-12-28 1992-02-25 Ncr Corporation Optical character recognition system and method
US5133022A (en) 1991-02-06 1992-07-21 Recognition Equipment Incorporated Normalizing correlator for video processing
TW198107B (en) 1991-02-28 1993-01-11 Ibm
JP3175175B2 (en) 1991-03-01 2001-06-11 ミノルタ株式会社 Focus detection device
US5143436A (en) 1991-03-06 1992-09-01 The United States Of America As Represented By The United States Department Of Energy Ringlight for use in high radiation
US5265173A (en) 1991-03-20 1993-11-23 Hughes Aircraft Company Rectilinear object image matcher
CA2072198A1 (en) 1991-06-24 1992-12-25 Scott C. Farrand Remote console emulator for computer system manager
JP2700965B2 (en) 1991-07-04 1998-01-21 ファナック株式会社 Automatic calibration method
JPH05223532A (en) 1991-07-10 1993-08-31 Raytheon Co Automatic sight-check system
US5477138A (en) 1991-07-23 1995-12-19 Vlsi Technology, Inc. Apparatus and method for testing the calibration of a variety of electronic package lead inspection systems
EP0526064B1 (en) 1991-08-02 1997-09-10 The Grass Valley Group, Inc. Video editing system operator interface for visualization and interactive control of video material
EP0823818B1 (en) 1991-08-13 2002-01-09 Canon Kabushiki Kaisha Image transmission apparatus
US5297238A (en) 1991-08-30 1994-03-22 Cimetrix Incorporated Robot end-effector terminal control frame (TCF) calibration method and device
US5475766A (en) 1991-09-05 1995-12-12 Kabushiki Kaisha Toshiba Pattern inspection apparatus with corner rounding of reference pattern data
JPH0568243A (en) 1991-09-09 1993-03-19 Hitachi Ltd Variable length coding controlling system
FR2683340A1 (en) 1991-11-05 1993-05-07 Sgs Thomson Microelectronics CIRCUIT ELEVATEUR IN THE SQUARE OF BINARY NUMBERS.
US5315388A (en) 1991-11-19 1994-05-24 General Instrument Corporation Multiple serial access memory for use in feedback systems such as motion compensated television
US5159281A (en) 1991-11-20 1992-10-27 Nsi Partners Digital demodulator using numerical processor to evaluate period measurements
US5179419A (en) 1991-11-22 1993-01-12 At&T Bell Laboratories Methods of detecting, classifying and quantifying defects in optical fiber end faces
US5145432A (en) 1991-11-27 1992-09-08 Zenith Electronics Corporation Optical interprogation system for use in constructing flat tension shadow mask CRTS
US5337262A (en) 1991-12-03 1994-08-09 Hr Textron Inc. Apparatus for and method of testing hydraulic/pneumatic apparatus using computer controlled test equipment
US5299269A (en) 1991-12-20 1994-03-29 Eastman Kodak Company Character segmentation using an associative memory for optical character recognition
US5216503A (en) 1991-12-24 1993-06-01 General Instrument Corporation Statistical multiplexer for a multichannel image compression system
US5371690A (en) 1992-01-17 1994-12-06 Cognex Corporation Method and apparatus for inspection of surface mounted devices
US6002793A (en) 1992-01-30 1999-12-14 Cognex Corporation Machine vision method and apparatus for finding an object orientation angle of a rectilinear object
CA2130340C (en) 1992-02-18 2000-06-06 Shih-Jong James Lee Method for identifying objects using data processing techniques
JP3073599B2 (en) 1992-04-22 2000-08-07 本田技研工業株式会社 Image edge detection device
US5657403A (en) 1992-06-01 1997-08-12 Cognex Corporation Vision coprocessing
US5594859A (en) 1992-06-03 1997-01-14 Digital Equipment Corporation Graphical user interface for video teleconferencing
US5715385A (en) 1992-07-10 1998-02-03 Lsi Logic Corporation Apparatus for 2-D affine transformation of images
US5475803A (en) 1992-07-10 1995-12-12 Lsi Logic Corporation Method for 2-D affine transformation of images
JP2597802B2 (en) 1992-08-04 1997-04-09 インターナショナル・ビジネス・マシーンズ・コーポレイション Method for controlling an image capture device, image capture device and user interface
GB2270581A (en) 1992-09-15 1994-03-16 Ibm Computer workstation
US5367667A (en) 1992-09-25 1994-11-22 Compaq Computer Corporation System for performing remote computer system diagnostic tests
JP3225635B2 (en) 1992-10-20 2001-11-05 株式会社日立製作所 Construction support device and method
US5506617A (en) 1992-12-10 1996-04-09 Eastman Kodak Company Electronic camera incorporating a computer-compatible bus interface
EP0604052B1 (en) 1992-12-23 2001-08-08 AT&T Corp. A method and system for locating objects with subpixel precision
US5367439A (en) 1992-12-24 1994-11-22 Cognex Corporation System for frontal illumination
US5859923A (en) 1992-12-29 1999-01-12 Cognex Corporation Mark quality inspection apparatus and method
US5461417A (en) 1993-02-16 1995-10-24 Northeast Robotics, Inc. Continuous diffuse illumination method and apparatus
US5608872A (en) 1993-03-19 1997-03-04 Ncr Corporation System for allowing all remote computers to perform annotation on an image and replicating the annotated image on the respective displays of other comuters
US5481712A (en) 1993-04-06 1996-01-02 Cognex Corporation Method and apparatus for interactively generating a computer program for machine vision analysis of an object
JP3051279B2 (en) 1993-05-13 2000-06-12 シャープ株式会社 Bump appearance inspection method and bump appearance inspection device
JPH06325181A (en) 1993-05-17 1994-11-25 Mitsubishi Electric Corp Pattern recognizing method
JP3205432B2 (en) 1993-06-10 2001-09-04 松下電器産業株式会社 Mounting component inspection device and mounting component inspection method
US5455933A (en) 1993-07-14 1995-10-03 Dell Usa, L.P. Circuit and method for remote diagnosis of personal computers
EP0638801B1 (en) 1993-08-12 1998-12-23 International Business Machines Corporation Method of inspecting the array of balls of an integrated circuit module
US5381004A (en) 1993-08-31 1995-01-10 Applied Materials, Inc. Particle analysis of notched wafers
US5809658A (en) 1993-09-29 1998-09-22 Snap-On Technologies, Inc. Method and apparatus for calibrating cameras used in the alignment of motor vehicle wheels
US5548326A (en) 1993-10-06 1996-08-20 Cognex Corporation Efficient image registration
US5640199A (en) 1993-10-06 1997-06-17 Cognex Corporation Automated optical inspection apparatus
US5532739A (en) 1993-10-06 1996-07-02 Cognex Corporation Automated optical inspection apparatus
EP0647920A2 (en) 1993-10-08 1995-04-12 AT&T Corp. Method for deriving image width & height from raw image data
US5652658A (en) 1993-10-19 1997-07-29 View Engineering, Inc. Grid array inspection system and method
US5544256A (en) 1993-10-22 1996-08-06 International Business Machines Corporation Automated defect classification system
US5805722A (en) 1993-11-22 1998-09-08 Cognex Corporation Method and apparatus for locating, inspecting, and placing large leaded devices
US5511015A (en) 1993-11-30 1996-04-23 Loral Vought Systems Corporation Double-accumulator implementation of the convolution function
US5434927A (en) 1993-12-08 1995-07-18 Minnesota Mining And Manufacturing Company Method and apparatus for machine vision classification and tracking
US5500906A (en) 1994-01-14 1996-03-19 Cognex Corporation Locating curvilinear objects using feathered fiducials
CA2113752C (en) 1994-01-19 1999-03-02 Stephen Michael Rooks Inspection system for cross-sectional imaging
US5519840A (en) 1994-01-24 1996-05-21 At&T Corp. Method for implementing approximate data structures using operations on machine words
US5583954A (en) 1994-03-01 1996-12-10 Cognex Corporation Methods and apparatus for fast correlation
DE4408948C2 (en) 1994-03-16 1998-02-26 Till Gea Gmbh & Co Method and device for checking containers
US5526050A (en) 1994-03-31 1996-06-11 Cognex Corporation Methods and apparatus for concurrently acquiring video data from multiple video data sources
US5581632A (en) 1994-05-02 1996-12-03 Cognex Corporation Method and apparatus for ball bond inspection system
US5550763A (en) 1994-05-02 1996-08-27 Michael; David J. Using cone shaped search models to locate ball bonds on wire bonded devices
US5642158A (en) 1994-05-02 1997-06-24 Cognex Corporation Method and apparatus to detect capillary indentations
DE4415990A1 (en) 1994-05-06 1995-11-23 Philips Patentverwaltung Process for reproducing, in particular, a digital X-ray image as a visible image and arrangement for carrying out the process
US5557410A (en) 1994-05-26 1996-09-17 Lockheed Missiles & Space Company, Inc. Method of calibrating a three-dimensional optical measurement system
US5495537A (en) 1994-06-01 1996-02-27 Cognex Corporation Methods and apparatus for machine vision template matching of images predominantly having generally diagonal and elongate features
US5602937A (en) 1994-06-01 1997-02-11 Cognex Corporation Methods and apparatus for machine vision high accuracy searching
JP3513916B2 (en) 1994-06-20 2004-03-31 株式会社ニコン Camera system
US5539409A (en) 1994-06-30 1996-07-23 Westinghouse Electric Corp. Apparatus and method for windshear data processing
JP3603285B2 (en) 1994-07-21 2004-12-22 株式会社セガ Image processing device
US5640200A (en) 1994-08-31 1997-06-17 Cognex Corporation Golden template comparison using efficient image registration
US5649032A (en) 1994-11-14 1997-07-15 David Sarnoff Research Center, Inc. System for automatically aligning images to form a mosaic image
US5496106A (en) 1994-12-13 1996-03-05 Apple Computer, Inc. System and method for generating a contrast overlay as a focus assist for an imaging device
DE69530566T2 (en) 1995-01-13 2004-03-25 Stmicroelectronics S.R.L., Agrate Brianza Hough transform with fuzzy gradient and choice
US5796386A (en) 1995-01-23 1998-08-18 International Business Machines Corporation Precise calibration procedure for sensor-based view point control system
US5497007A (en) 1995-01-27 1996-03-05 Applied Materials, Inc. Method for automatically establishing a wafer coordinate system
US5627915A (en) 1995-01-31 1997-05-06 Princeton Video Image, Inc. Pattern recognition system employing unlike templates to detect objects having distinctive features in a video field
US5574668A (en) 1995-02-22 1996-11-12 Beaty; Elwin M. Apparatus and method for measuring ball grid arrays
US5850466A (en) 1995-02-22 1998-12-15 Cognex Corporation Golden template comparison for rotated and/or scaled images
US5696848A (en) 1995-03-09 1997-12-09 Eastman Kodak Company System for creating a high resolution image from a sequence of lower resolution motion images
US5553859A (en) 1995-03-22 1996-09-10 Lazer-Tron Corporation Arcade game for sensing and validating objects
AU5317696A (en) 1995-03-24 1996-10-16 Ppt Vision, Inc. High speed digital video serial link
US5566877A (en) 1995-05-01 1996-10-22 Motorola Inc. Method for inspecting a semiconductor device
US5676302A (en) 1995-06-02 1997-10-14 Cognex Corporation Method and apparatus for crescent boundary thresholding on wire-bonded leads
WO1996039619A1 (en) 1995-06-06 1996-12-12 Kla Instruments Corporation Optical inspection of a specimen using multi-channel responses from the specimen
US6002738A (en) 1995-07-07 1999-12-14 Silicon Graphics, Inc. System and method of performing tomographic reconstruction and volume rendering using texture mapping
US5825913A (en) 1995-07-18 1998-10-20 Cognex Corporation System for finding the orientation of a wafer
US5801966A (en) 1995-07-24 1998-09-01 Cognex Corporation Machine vision methods and articles of manufacture for determination of convex hull and convex hull angle
US6026176A (en) 1995-07-25 2000-02-15 Cognex Corporation Machine vision methods and articles of manufacture for ball grid array inspection
US5754679A (en) 1995-10-31 1998-05-19 Cognex Corp. Image rotating method for locating bond pads in an image
US5757956A (en) 1995-10-31 1998-05-26 Cognex Corp. Template rotating method for locating bond pads in an image
US5715369A (en) 1995-11-27 1998-02-03 Microsoft Corporation Single processor programmable speech recognition test system
US5673334A (en) 1995-11-30 1997-09-30 Cognex Corporation Method and apparatus for inspection of characteristics on non-rigid packages
US5987172A (en) 1995-12-06 1999-11-16 Cognex Corp. Edge peak contour tracker
US6870566B1 (en) 1995-12-07 2005-03-22 Canon Kabushiki Kaisha Image sensing system for sensing an image and converting the image into image signals with a controlled operating rate
US5768443A (en) 1995-12-19 1998-06-16 Cognex Corporation Method for coordinating multiple fields of view in multi-camera
US5796868A (en) 1995-12-28 1998-08-18 Cognex Corporation Object edge point filtering system for machine vision
US5751853A (en) 1996-01-02 1998-05-12 Cognex Corporation Locating shapes in two-dimensional space curves
US5845007A (en) 1996-01-02 1998-12-01 Cognex Corporation Machine vision method and apparatus for edge-based image histogram analysis
SG42307A1 (en) 1996-01-09 1997-08-15 Peng Seng Toh Measurement and inspection of leads on integrated circuit packages
US5739846A (en) 1996-02-05 1998-04-14 Universal Instruments Corporation Method of inspecting component placement accuracy for each first selected circuit board to be assembled of a batch
US5872870A (en) 1996-02-16 1999-02-16 Cognex Corporation Machine vision methods for identifying extrema of objects in rotated reference frames
US5742037A (en) 1996-03-07 1998-04-21 Cognex Corp. Method and apparatus for high speed identification of objects having an identifying feature
US5909504A (en) 1996-03-15 1999-06-01 Cognex Corporation Method of testing a machine vision inspection system
US6259827B1 (en) 1996-03-21 2001-07-10 Cognex Corporation Machine vision methods for enhancing the contrast between an object and its background using multiple on-axis images
US5949901A (en) 1996-03-21 1999-09-07 Nichani; Sanjay Semiconductor device image inspection utilizing image subtraction and threshold imaging
US6298149B1 (en) 1996-03-21 2001-10-02 Cognex Corporation Semiconductor device image inspection with contrast enhancement
US5848189A (en) 1996-03-25 1998-12-08 Focus Automation Systems Inc. Method, apparatus and system for verification of patterns
US5978502A (en) 1996-04-01 1999-11-02 Cognex Corporation Machine vision methods for determining characteristics of three-dimensional objects
EP0895696B1 (en) 1996-04-02 2004-01-14 Cognex Corporation Image formation apparatus for viewing indicia on a planar specular substrate
US5818443A (en) 1996-05-06 1998-10-06 Cognex Corporation Single step coarse registration and inspection of circular objects
US5847714A (en) 1996-05-31 1998-12-08 Hewlett Packard Company Interpolation method and apparatus for fast image magnification
KR100257279B1 (en) 1996-06-06 2000-06-01 이시다 아키라 Apparatus and method for exposing periphery
US5835099A (en) 1996-06-26 1998-11-10 Xerox Corporation Representing a region of a color image using a space-color separable model
US6188784B1 (en) 1996-07-12 2001-02-13 American Tech Manufacturing, Inc. Split optics arrangement for vision inspection/sorter module
US5739913A (en) 1996-08-02 1998-04-14 Mrs Technology, Inc. Non-contact edge detector
US6137893A (en) 1996-10-07 2000-10-24 Cognex Corporation Machine vision calibration targets and methods of determining their location and orientation in an image
US5960125A (en) 1996-11-21 1999-09-28 Cognex Corporation Nonfeedback-based machine vision method for determining a calibration relationship between a camera and a moveable object
US5918196A (en) 1996-11-29 1999-06-29 Cognex Corporation Vision system for analyzing solid-of-revolution radius profile
US5912984A (en) 1996-12-19 1999-06-15 Cognex Corporation Method and apparatus for in-line solder paste inspection
US6025905A (en) 1996-12-31 2000-02-15 Cognex Corporation System for obtaining a uniform illumination reflectance image during periodic structured illumination
US5912768A (en) 1996-12-31 1999-06-15 Cognex Corporation Depth-from-defocus optical apparatus with invariance to surface reflectance properties
US5953130A (en) 1997-01-06 1999-09-14 Cognex Corporation Machine vision methods and apparatus for machine vision illumination of an object
US6075881A (en) 1997-03-18 2000-06-13 Cognex Corporation Machine vision methods for identifying collinear sets of points from an image
US5933523A (en) 1997-03-18 1999-08-03 Cognex Corporation Machine vision method and apparatus for determining the position of generally rectangular devices using boundary extracting features
US5974169A (en) 1997-03-20 1999-10-26 Cognex Corporation Machine vision methods for determining characteristics of an object using boundary points and bounding regions
US6069668A (en) 1997-04-07 2000-05-30 Pinnacle Systems, Inc. System and method for producing video effects on live-action video
US6141033A (en) 1997-05-15 2000-10-31 Cognex Corporation Bandwidth reduction of multichannel images for machine vision
US5878152A (en) 1997-05-21 1999-03-02 Cognex Corporation Depth from focal gradient analysis using object texture removal by albedo normalization
US6118540A (en) 1997-07-11 2000-09-12 Semiconductor Technologies & Instruments, Inc. Method and apparatus for inspecting a workpiece
US6016152A (en) 1997-08-01 2000-01-18 Avid Technology, Inc. Apparatus and method for non-uniform image scaling
US5978521A (en) 1997-09-25 1999-11-02 Cognex Corporation Machine vision methods using feedback to determine calibration locations of multiple cameras that image a common object
US5978080A (en) 1997-09-25 1999-11-02 Cognex Corporation Machine vision methods using feedback to determine an orientation, pixel width and pixel height of a field of view
US5974365A (en) 1997-10-23 1999-10-26 The United States Of America As Represented By The Secretary Of The Army System for measuring the location and orientation of an object
US5900975A (en) 1997-10-30 1999-05-04 Cognex Corporation Ghost image extinction in an active range sensor
US6658145B1 (en) 1997-12-31 2003-12-02 Cognex Corporation Fast high-accuracy multi-dimensional pattern inspection
US6856698B1 (en) 1997-11-26 2005-02-15 Cognex Corporation Fast high-accuracy multi-dimensional pattern localization
US6170973B1 (en) 1997-11-26 2001-01-09 Cognex Corporation Method and apparatus for wide-angle illumination in line-scanning machine vision devices
US6850646B1 (en) 1997-12-31 2005-02-01 Cognex Corporation Fast high-accuracy multi-dimensional pattern inspection
US6025854A (en) 1997-12-31 2000-02-15 Cognex Corporation Method and apparatus for high speed image acquisition
US6282328B1 (en) 1998-01-28 2001-08-28 Cognex Corporation Machine vision systems and methods for morphological transformation of an image with non-uniform offsets
US6236769B1 (en) 1998-01-28 2001-05-22 Cognex Corporation Machine vision systems and methods for morphological transformation of an image with zero or other uniform offsets
US6215915B1 (en) 1998-02-20 2001-04-10 Cognex Corporation Image processing methods and apparatus for separable, general affine transformation of an image
US6381375B1 (en) 1998-02-20 2002-04-30 Cognex Corporation Methods and apparatus for generating a projection of an image
US6516092B1 (en) 1998-05-29 2003-02-04 Cognex Corporation Robust sub-model shape-finder
US7295314B1 (en) 1998-07-10 2007-11-13 Nanometrics Incorporated Metrology/inspection positioning system
US6389029B1 (en) 1998-11-10 2002-05-14 Nortel Networks Limited Local area network incorporating universal serial bus protocol
US6381366B1 (en) 1998-12-18 2002-04-30 Cognex Corporation Machine vision methods and system for boundary point-based comparison of patterns and images
US6275742B1 (en) 1999-04-16 2001-08-14 Berkeley Process Control, Inc. Wafer aligner system
US6477275B1 (en) 1999-06-16 2002-11-05 Coreco Imaging, Inc. Systems and methods for locating a pattern in an image
US6341878B1 (en) 1999-08-31 2002-01-29 Cognex Corporation Method and apparatus for providing uniform diffuse illumination to a surface
US6191850B1 (en) 1999-10-15 2001-02-20 Cognex Corporation System and method for inspecting an object using structured illumination
US6684402B1 (en) 1999-12-01 2004-01-27 Cognex Technology And Investment Corporation Control methods and apparatus for coupling multiple image acquisition devices to a digital data processor
US6639624B1 (en) 1999-12-30 2003-10-28 Cognex Corporation Machine vision methods for inspection of leaded components
US6748104B1 (en) 2000-03-24 2004-06-08 Cognex Corporation Methods and apparatus for machine vision inspection using single and multiple templates or patterns
US6728582B1 (en) 2000-12-15 2004-04-27 Cognex Corporation System and method for determining the position of an object in three dimensions using a machine vision system with two cameras
US6771808B1 (en) 2000-12-15 2004-08-03 Cognex Corporation System and method for registering patterns transformed in six degrees of freedom using machine vision
US7006669B1 (en) 2000-12-31 2006-02-28 Cognex Corporation Machine vision method and apparatus for thresholding images of non-uniform materials
US7048400B2 (en) 2001-03-22 2006-05-23 Lumimove, Inc. Integrated illumination system
US6914679B2 (en) 2001-12-18 2005-07-05 Cognex Technology And Investment Corporation Side light apparatus and method
CN1251318C (en) 2002-02-25 2006-04-12 精工爱普生株式会社 Semiconductor water, semiconductor device and their producing method, circuit board and instrument
US7042568B2 (en) 2002-05-16 2006-05-09 Asyst Technologies, Inc. Pre-aligner
DE10222119B4 (en) 2002-05-17 2004-11-11 Asys Automatisierungssysteme Gmbh Device and method for adjusting the relative position between a substrate to be printed and a print pattern
US6900877B2 (en) 2002-06-12 2005-05-31 Asm American, Inc. Semiconductor wafer position shift measurement and correction
US7220034B2 (en) 2003-07-11 2007-05-22 Rudolph Technologies, Inc. Fiber optic darkfield ring light

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5978081A (en) * 1995-12-19 1999-11-02 Cognex Corporation Multiple field of view calibration plate for use in semiconductor manufacturing
US5982132A (en) * 1997-10-09 1999-11-09 Electroglas, Inc. Rotary wafer positioning system and method

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