WO2008030454A3 - Multi-gas flow device - Google Patents

Multi-gas flow device Download PDF

Info

Publication number
WO2008030454A3
WO2008030454A3 PCT/US2007/019333 US2007019333W WO2008030454A3 WO 2008030454 A3 WO2008030454 A3 WO 2008030454A3 US 2007019333 W US2007019333 W US 2007019333W WO 2008030454 A3 WO2008030454 A3 WO 2008030454A3
Authority
WO
WIPO (PCT)
Prior art keywords
gas flow
flow device
characteristic information
adjusted
flow
Prior art date
Application number
PCT/US2007/019333
Other languages
French (fr)
Other versions
WO2008030454A2 (en
Inventor
William Valentine
Chiun Wang
John Lull
Original Assignee
Celerity Inc
William Valentine
Chiun Wang
John Lull
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Celerity Inc, William Valentine, Chiun Wang, John Lull filed Critical Celerity Inc
Publication of WO2008030454A2 publication Critical patent/WO2008030454A2/en
Publication of WO2008030454A3 publication Critical patent/WO2008030454A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G01F5/005—Measuring a proportion of the volume flow by measuring pressure or differential pressure, created by the use of flow constriction
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages

Abstract

A system and method of characterizing or controlling a flow of a fluid is provided that involves a sensor conduit and a bypass. A plurality of fluids may be utilized in the flow control device based on characteristic information of the device generated during calibration thereof. The characteristic information, in turn is based on a dimensionless parameters, such as adjusted dynamic pressure and adjusted Reynolds number.
PCT/US2007/019333 2006-09-05 2007-09-05 Multi-gas flow device WO2008030454A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US84228306P 2006-09-05 2006-09-05
US60/842,283 2006-09-05

Publications (2)

Publication Number Publication Date
WO2008030454A2 WO2008030454A2 (en) 2008-03-13
WO2008030454A3 true WO2008030454A3 (en) 2008-05-02

Family

ID=39157801

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/019333 WO2008030454A2 (en) 2006-09-05 2007-09-05 Multi-gas flow device

Country Status (3)

Country Link
US (3) US7636640B2 (en)
TW (1) TW200834275A (en)
WO (1) WO2008030454A2 (en)

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US7636640B2 (en) * 2006-09-05 2009-12-22 Brooks Instrument, Llc Multi-gas flow device
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US9976887B1 (en) * 2011-06-22 2018-05-22 Daniel T. Mudd Wider dynamic accuracy range for gas delivery devices
US9557744B2 (en) 2012-01-20 2017-01-31 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US9471066B2 (en) 2012-01-20 2016-10-18 Mks Instruments, Inc. System for and method of providing pressure insensitive self verifying mass flow controller
US9846074B2 (en) * 2012-01-20 2017-12-19 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US10031005B2 (en) 2012-09-25 2018-07-24 Mks Instruments, Inc. Method and apparatus for self verification of pressure-based mass flow controllers
US9146563B2 (en) * 2013-03-01 2015-09-29 Hitachi Metals, Ltd. Mass flow controller and method for improved performance across fluid types
WO2014158375A1 (en) * 2013-03-12 2014-10-02 Illinois Tool Works Inc. Turning vane
WO2014152755A2 (en) 2013-03-14 2014-09-25 Christopher Max Horwitz Pressure-based gas flow controller with dynamic self-calibration
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
US9746359B2 (en) 2013-06-28 2017-08-29 Vyaire Medical Capital Llc Flow sensor
US9541098B2 (en) 2013-06-28 2017-01-10 Vyaire Medical Capital Llc Low-noise blower
US9795757B2 (en) 2013-06-28 2017-10-24 Vyaire Medical Capital Llc Fluid inlet adapter
US9962514B2 (en) 2013-06-28 2018-05-08 Vyaire Medical Capital Llc Ventilator flow valve
US9433743B2 (en) 2013-06-28 2016-09-06 Carefusion 303, Inc. Ventilator exhalation flow valve
US9707369B2 (en) * 2013-06-28 2017-07-18 Vyaire Medical Capital Llc Modular flow cassette
EP2883554A1 (en) * 2013-12-16 2015-06-17 MeKo Laserstrahl-Materialbearbeitungen e.K. Production of resorbable polymer tubes from threads
KR102303943B1 (en) * 2014-03-11 2021-09-27 엠케이에스 인스트루먼츠, 인코포레이티드 System for and method of monitoring flow through mass flow controllers in real time
US10139259B2 (en) * 2014-12-05 2018-11-27 General Electric Company System and method for metering gas based on amplitude and/or temporal characteristics of an electrical signal
US10760934B2 (en) * 2014-12-05 2020-09-01 Natural Gas Solutions North America, Llc Using localized flow characteristics on electronic flow meter to quantify volumetric flow
NO342709B1 (en) 2015-10-12 2018-07-23 Cameron Tech Ltd Flow sensor assembly
FR3059095B1 (en) * 2016-11-23 2019-08-09 Sagemcom Energy & Telecom Sas MASSIVE THERMAL FLOWMETER
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
US10971748B2 (en) * 2017-12-08 2021-04-06 Toyota Motor Engineering & Manufacturing North America, Inc. Implementation of feedforward and feedback control in state mediator
DE102017131066A1 (en) * 2017-12-22 2019-06-27 Endress+Hauser SE+Co. KG Method of providing calibrated pressure transducers
RU2680987C1 (en) * 2018-03-28 2019-03-01 Федеральное государственное бюджетное учреждение науки Институт проблем управления им. В.А. Трапезникова Российской академии наук Method for determining the estimated flow characteristics of a hydraulic circuit during a turbulent flow mode
US10822895B2 (en) 2018-04-10 2020-11-03 Cameron International Corporation Mud return flow monitoring
US11209298B2 (en) 2018-04-27 2021-12-28 Hitachi Metals, Ltd. Thermal mass flow sensor with improved accuracy
US10982985B2 (en) * 2019-03-04 2021-04-20 Hitachi Metals, Ltd. High flow tubular bypass
RU2709034C1 (en) * 2019-05-24 2019-12-13 Федеральное государственное бюджетное учреждение науки Институт проблем управления им. В.А. Трапезникова Российской академии наук Method of determining hydraulic circuit flow characteristic for transition area from turbulent to laminar flow conditions
CN113719500B (en) * 2020-05-25 2022-10-04 中国石油天然气股份有限公司 Pore cylinder, gas flow control valve and installation method of gas flow control valve
RU2765801C1 (en) * 2020-09-08 2022-02-03 Федеральное государственное бюджетное учреждение науки Институт проблем управления им. В.А. Трапезникова Российской академии наук Method for determining the flow characteristics of a hydraulic tract in the transition outflow area
US11435764B1 (en) 2021-03-30 2022-09-06 Hitachi Metals, Ltd. Mass flow controller utilizing nonlinearity component functions
US11940307B2 (en) 2021-06-08 2024-03-26 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control

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US5861561A (en) * 1996-01-17 1999-01-19 Micro Motion, Inc. Bypass type coriolis effect flowmeter
US6962164B2 (en) * 2001-04-24 2005-11-08 Celerity Group, Inc. System and method for a mass flow controller
US7000463B1 (en) * 2004-11-12 2006-02-21 Mks Instruments, Inc. Reynolds number correction function for mass flow rate sensor
US7043374B2 (en) * 2003-03-26 2006-05-09 Celerity, Inc. Flow sensor signal conversion

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Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4396300A (en) * 1981-05-01 1983-08-02 Bridger Scientific, Inc. Method and apparatus for determining the heat transfer characteristics of a tube
US5861561A (en) * 1996-01-17 1999-01-19 Micro Motion, Inc. Bypass type coriolis effect flowmeter
US6962164B2 (en) * 2001-04-24 2005-11-08 Celerity Group, Inc. System and method for a mass flow controller
US7043374B2 (en) * 2003-03-26 2006-05-09 Celerity, Inc. Flow sensor signal conversion
US7000463B1 (en) * 2004-11-12 2006-02-21 Mks Instruments, Inc. Reynolds number correction function for mass flow rate sensor

Also Published As

Publication number Publication date
US7636640B2 (en) 2009-12-22
US8068999B2 (en) 2011-11-29
US20100030388A1 (en) 2010-02-04
US20100070206A1 (en) 2010-03-18
US20080059084A1 (en) 2008-03-06
WO2008030454A2 (en) 2008-03-13
TW200834275A (en) 2008-08-16
US8010303B2 (en) 2011-08-30

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