WO2008061832A3 - Self-testing micromechanical pressure sensor - Google Patents

Self-testing micromechanical pressure sensor Download PDF

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Publication number
WO2008061832A3
WO2008061832A3 PCT/EP2007/060159 EP2007060159W WO2008061832A3 WO 2008061832 A3 WO2008061832 A3 WO 2008061832A3 EP 2007060159 W EP2007060159 W EP 2007060159W WO 2008061832 A3 WO2008061832 A3 WO 2008061832A3
Authority
WO
WIPO (PCT)
Prior art keywords
membrane
self
deflection
testing
pressure sensor
Prior art date
Application number
PCT/EP2007/060159
Other languages
German (de)
French (fr)
Other versions
WO2008061832A2 (en
Inventor
Polichronis Lepidis
Boris Adam
Original Assignee
Bosch Gmbh Robert
Polichronis Lepidis
Boris Adam
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert, Polichronis Lepidis, Boris Adam filed Critical Bosch Gmbh Robert
Publication of WO2008061832A2 publication Critical patent/WO2008061832A2/en
Publication of WO2008061832A3 publication Critical patent/WO2008061832A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/007—Malfunction diagnosis, i.e. diagnosing a sensor defect

Abstract

The invention allows an autonomous test of the membrane of a micromechanical membrane sensor. For such a self-test, the membrane comprises a heating element and means for detecting the deflection. For carrying out the test, the membrane is heated by the heating element to such an extent that it bends due to the thermal expansion of the membrane material. This bend produces a measurable value in the corresponding detection element depending on the deflection of the membrane. If a predetermined deflection of the membrane is obtained during the predetermined heating, it can be concluded that the membrane is operational. If, however, the predetermined deflection is not obtained, it can be concluded that the membrane is defective.
PCT/EP2007/060159 2006-11-24 2007-09-25 Self-testing micromechanical pressure sensor WO2008061832A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006055484.1 2006-11-24
DE102006055484A DE102006055484A1 (en) 2006-11-24 2006-11-24 Self-test with a micromechanical pressure sensor

Publications (2)

Publication Number Publication Date
WO2008061832A2 WO2008061832A2 (en) 2008-05-29
WO2008061832A3 true WO2008061832A3 (en) 2008-07-10

Family

ID=39277965

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/060159 WO2008061832A2 (en) 2006-11-24 2007-09-25 Self-testing micromechanical pressure sensor

Country Status (2)

Country Link
DE (1) DE102006055484A1 (en)
WO (1) WO2008061832A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111238698B (en) * 2020-02-27 2021-10-22 中国科学院微电子研究所 Built-in self-testing device and testing method of MEMS piezoresistive sensor

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010003432A1 (en) * 2008-07-08 2010-01-14 Siemens Aktiengesellschaft Method for calibrating a pressure transducer and pressure transducer
US7918134B2 (en) * 2008-10-06 2011-04-05 Rosemount Inc. Thermal-based diagnostic system for process transmitter
EP2668483B1 (en) 2011-01-28 2015-11-18 ELMOS Semiconductor AG Microelectromechanical component and method for testing a microelectromechanical component
TWI515418B (en) * 2012-09-25 2016-01-01 京元電子股份有限公司 Structure of built-in self-testfor pressure tester and method thereof
DE102017215580A1 (en) 2017-09-05 2019-03-07 Robert Bosch Gmbh Optical system with displaceable focal point
DE102020210051A1 (en) 2020-08-07 2022-02-10 Robert Bosch Gesellschaft mit beschränkter Haftung Sensor and method for manufacturing a sensor
CN116499616A (en) * 2023-06-25 2023-07-28 成都凯天电子股份有限公司 Silicon carbide pressure sensor with on-chip self-calibration capability and calibration method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5355712A (en) * 1991-09-13 1994-10-18 Lucas Novasensor Method and apparatus for thermally actuated self testing of silicon structures
DE10203484A1 (en) * 2001-06-08 2002-12-12 Continental Teves Ag & Co Ohg Pressure sensor for use in a motor vehicle electronic control system, and method for its calibration for variations in temperature whereby the calibration is carried out in-situ once the sensor is installed in the vehicle
US20040230850A1 (en) * 2003-05-15 2004-11-18 International Business Machines Corporation Method and apparatus for implementing power-saving sleep mode in design with multiple clock domains

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5355712A (en) * 1991-09-13 1994-10-18 Lucas Novasensor Method and apparatus for thermally actuated self testing of silicon structures
DE10203484A1 (en) * 2001-06-08 2002-12-12 Continental Teves Ag & Co Ohg Pressure sensor for use in a motor vehicle electronic control system, and method for its calibration for variations in temperature whereby the calibration is carried out in-situ once the sensor is installed in the vehicle
US20040230850A1 (en) * 2003-05-15 2004-11-18 International Business Machines Corporation Method and apparatus for implementing power-saving sleep mode in design with multiple clock domains

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
GÖPEL W, HESSE J, ZEMEL J N, GRANDKE T, KO WH: "Sensors - A comprehensive survey, Volume 1 Fundamentals and General Aspects", 1989, DE, WEINHEIM, VCH VERLAGSGESELLSCHAFT, ISBN: 3-527-26767-0, XP002477401 *
PUERS ET AL: "On the mechanisms in thermally actuated composite diaphragms", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 67, no. 1-3, 15 May 1998 (1998-05-15), pages 13 - 17, XP004130105, ISSN: 0924-4247 *
PUERS R ET AL: "A novel combined redundant pressure sensor with self-test function", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 60, no. 1-3, May 1997 (1997-05-01), pages 68 - 71, XP004134597, ISSN: 0924-4247 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111238698B (en) * 2020-02-27 2021-10-22 中国科学院微电子研究所 Built-in self-testing device and testing method of MEMS piezoresistive sensor

Also Published As

Publication number Publication date
DE102006055484A1 (en) 2008-05-29
WO2008061832A2 (en) 2008-05-29

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