WO2008077100A3 - Systems and methods for creating inspection recipes - Google Patents

Systems and methods for creating inspection recipes Download PDF

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Publication number
WO2008077100A3
WO2008077100A3 PCT/US2007/088129 US2007088129W WO2008077100A3 WO 2008077100 A3 WO2008077100 A3 WO 2008077100A3 US 2007088129 W US2007088129 W US 2007088129W WO 2008077100 A3 WO2008077100 A3 WO 2008077100A3
Authority
WO
WIPO (PCT)
Prior art keywords
design
systems
methods
creating
inspection
Prior art date
Application number
PCT/US2007/088129
Other languages
French (fr)
Other versions
WO2008077100A2 (en
Inventor
Brian Duffy
Ashok Kulkarni
Original Assignee
Kla-Tencor Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kla-Tencor Corporation filed Critical Kla-Tencor Corporation
Priority to JP2009543184A priority Critical patent/JP5427609B2/en
Publication of WO2008077100A2 publication Critical patent/WO2008077100A2/en
Priority to IL198416A priority patent/IL198416A0/en
Publication of WO2008077100A3 publication Critical patent/WO2008077100A3/en

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G03F7/7065—Defects, e.g. optical inspection of patterned layer for defects
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure

Abstract

Systems and methods for creating inspection recipes are provided. One computer-implemented method for creating an inspection recipe includes acquiring a first design and one or more characteristics of output of an inspection system for a wafer on which the first design is printed using a manufacturing process. The method also includes creating an inspection recipe for a second design using the first design and the one or more characteristics of the output acquired for the wafer on which the first design is printed. The first and second designs are different. The inspection recipe will be used for inspecting wafers after the second design is printed on the wafers using the manufacturing process.
PCT/US2007/088129 2006-12-19 2007-12-19 Systems and methods for creating inspection recipes WO2008077100A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009543184A JP5427609B2 (en) 2006-12-19 2007-12-19 Inspection recipe creation system and method
IL198416A IL198416A0 (en) 2006-12-19 2009-04-27 Systems and methods for creating inspection recipes

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US87072406P 2006-12-19 2006-12-19
US60/870,724 2006-12-19

Publications (2)

Publication Number Publication Date
WO2008077100A2 WO2008077100A2 (en) 2008-06-26
WO2008077100A3 true WO2008077100A3 (en) 2009-09-24

Family

ID=39402574

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/088129 WO2008077100A2 (en) 2006-12-19 2007-12-19 Systems and methods for creating inspection recipes

Country Status (4)

Country Link
US (1) US7877722B2 (en)
JP (2) JP5427609B2 (en)
IL (1) IL198416A0 (en)
WO (1) WO2008077100A2 (en)

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