WO2008094753A3 - Interferometry for lateral metrology - Google Patents

Interferometry for lateral metrology Download PDF

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Publication number
WO2008094753A3
WO2008094753A3 PCT/US2008/051085 US2008051085W WO2008094753A3 WO 2008094753 A3 WO2008094753 A3 WO 2008094753A3 US 2008051085 W US2008051085 W US 2008051085W WO 2008094753 A3 WO2008094753 A3 WO 2008094753A3
Authority
WO
WIPO (PCT)
Prior art keywords
phase
interferometry
shifted
images
interferometry images
Prior art date
Application number
PCT/US2008/051085
Other languages
French (fr)
Other versions
WO2008094753A2 (en
Inventor
Lega Xavier Colonna De
Robert Stoner
Groot Peter De
Original Assignee
Zygo Corp
Lega Xavier Colonna De
Robert Stoner
Groot Peter De
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp, Lega Xavier Colonna De, Robert Stoner, Groot Peter De filed Critical Zygo Corp
Publication of WO2008094753A2 publication Critical patent/WO2008094753A2/en
Publication of WO2008094753A3 publication Critical patent/WO2008094753A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02087—Combining two or more images of the same region
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers

Abstract

A method is disclosed which includes: using a scanning interferometry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.
PCT/US2008/051085 2007-01-31 2008-01-15 Interferometry for lateral metrology WO2008094753A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US88744807P 2007-01-31 2007-01-31
US60/887,448 2007-01-31
US11/757,720 US7889355B2 (en) 2007-01-31 2007-06-04 Interferometry for lateral metrology
US11/757,720 2007-06-04

Publications (2)

Publication Number Publication Date
WO2008094753A2 WO2008094753A2 (en) 2008-08-07
WO2008094753A3 true WO2008094753A3 (en) 2008-10-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/051085 WO2008094753A2 (en) 2007-01-31 2008-01-15 Interferometry for lateral metrology

Country Status (3)

Country Link
US (2) US7889355B2 (en)
TW (1) TWI420068B (en)
WO (1) WO2008094753A2 (en)

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US20080180685A1 (en) 2008-07-31
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