WO2008115372A8 - Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine - Google Patents
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine Download PDFInfo
- Publication number
- WO2008115372A8 WO2008115372A8 PCT/US2008/003224 US2008003224W WO2008115372A8 WO 2008115372 A8 WO2008115372 A8 WO 2008115372A8 US 2008003224 W US2008003224 W US 2008003224W WO 2008115372 A8 WO2008115372 A8 WO 2008115372A8
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- optical assembly
- methods
- substrate
- assembly during
- immersion
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009553605A JP5282255B2 (en) | 2007-03-15 | 2008-03-12 | Apparatus and method for holding immersion fluid adjacent an optical assembly during substrate exchange in an immersion lithography machine |
KR1020157036015A KR20160003326A (en) | 2007-03-15 | 2008-03-12 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine |
KR1020147027490A KR101580467B1 (en) | 2007-03-15 | 2008-03-12 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine |
KR1020097021477A KR101515649B1 (en) | 2007-03-15 | 2008-03-12 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine |
KR1020187007817A KR20180031083A (en) | 2007-03-15 | 2008-03-12 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US91805707P | 2007-03-15 | 2007-03-15 | |
US60/918,057 | 2007-03-15 | ||
US11/976,898 | 2007-08-29 | ||
US11/976,898 US8237911B2 (en) | 2007-03-15 | 2007-10-29 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008115372A1 WO2008115372A1 (en) | 2008-09-25 |
WO2008115372A8 true WO2008115372A8 (en) | 2010-05-06 |
Family
ID=39762312
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2008/003224 WO2008115372A1 (en) | 2007-03-15 | 2008-03-12 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine |
Country Status (5)
Country | Link |
---|---|
US (4) | US8237911B2 (en) |
JP (4) | JP5282255B2 (en) |
KR (4) | KR20160003326A (en) |
TW (2) | TWI545407B (en) |
WO (1) | WO2008115372A1 (en) |
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US8237911B2 (en) | 2007-03-15 | 2012-08-07 | Nikon Corporation | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine |
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US8610873B2 (en) | 2008-03-17 | 2013-12-17 | Nikon Corporation | Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate |
US8289497B2 (en) * | 2008-03-18 | 2012-10-16 | Nikon Corporation | Apparatus and methods for recovering fluid in immersion lithography |
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US9268231B2 (en) | 2012-04-10 | 2016-02-23 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium |
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2007
- 2007-10-29 US US11/976,898 patent/US8237911B2/en not_active Expired - Fee Related
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2008
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- 2008-03-12 KR KR1020187007817A patent/KR20180031083A/en not_active Application Discontinuation
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JP2014168068A (en) | 2014-09-11 |
JP5327768B2 (en) | 2013-10-30 |
US20140232999A1 (en) | 2014-08-21 |
JP2013123079A (en) | 2013-06-20 |
JP2010521814A (en) | 2010-06-24 |
TW201437769A (en) | 2014-10-01 |
WO2008115372A1 (en) | 2008-09-25 |
US9217933B2 (en) | 2015-12-22 |
TWI545407B (en) | 2016-08-11 |
US20120262687A1 (en) | 2012-10-18 |
KR20140124867A (en) | 2014-10-27 |
KR101515649B1 (en) | 2015-04-27 |
KR20100015585A (en) | 2010-02-12 |
JP5725227B2 (en) | 2015-05-27 |
KR20180031083A (en) | 2018-03-27 |
US20080225246A1 (en) | 2008-09-18 |
TW200907586A (en) | 2009-02-16 |
TWI440985B (en) | 2014-06-11 |
JP2013225693A (en) | 2013-10-31 |
JP5282255B2 (en) | 2013-09-04 |
US8237911B2 (en) | 2012-08-07 |
JP5510600B2 (en) | 2014-06-04 |
US8400610B2 (en) | 2013-03-19 |
KR20160003326A (en) | 2016-01-08 |
US20130141702A1 (en) | 2013-06-06 |
US8743343B2 (en) | 2014-06-03 |
KR101580467B1 (en) | 2015-12-28 |
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