WO2008121657B1 - A recipe-and-component control module and methods thereof - Google Patents

A recipe-and-component control module and methods thereof

Info

Publication number
WO2008121657B1
WO2008121657B1 PCT/US2008/058320 US2008058320W WO2008121657B1 WO 2008121657 B1 WO2008121657 B1 WO 2008121657B1 US 2008058320 W US2008058320 W US 2008058320W WO 2008121657 B1 WO2008121657 B1 WO 2008121657B1
Authority
WO
WIPO (PCT)
Prior art keywords
data
criteria
intelligent
agent
component
Prior art date
Application number
PCT/US2008/058320
Other languages
French (fr)
Other versions
WO2008121657A1 (en
Inventor
Chung-Ho Huang
Andrew Lui
Original Assignee
Lam Res Corp
Chung-Ho Huang
Andrew Lui
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp, Chung-Ho Huang, Andrew Lui filed Critical Lam Res Corp
Priority to CN200880010750.XA priority Critical patent/CN101652838B/en
Priority to JP2010501200A priority patent/JP5341875B2/en
Priority to KR1020097020285A priority patent/KR101388802B1/en
Publication of WO2008121657A1 publication Critical patent/WO2008121657A1/en
Publication of WO2008121657B1 publication Critical patent/WO2008121657B1/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/4183—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by data acquisition, e.g. workpiece identification
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32097—Recipe programming for flexible batch
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/33—Director till display
    • G05B2219/33063—Generic coordination, master agent to data manager agent to tasks to active agent
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/33—Director till display
    • G05B2219/33068—CCP coordination cooperation protocol, make optimal decisions with other agents
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A recipe-and-component control module (RACCM) is provided. The RACCM is a server for performing data management in a plasma processing system with a plurality of components. The RACCM includes a plurality of intelligent agents. Each intelligent agent of the intelligent agents is configured to interact with each component of the plurality of components. The RACCM also includes a coordinating agent, which is configured to receive processed data from the plurality of intelligent agents.

Claims

AMENDED CLAIMS received by the International Bureau on 24 September 2008 (24.09.2008)
1. A server for performing data management in a plasma processing system, said plasma processing system having or being coupled with a plurality of components, said server comprising: a plurality of intelligent agents, each intelligent agent of said intelligent agents being configured to interact with a component of said plurality of components, said plurality of intelligent agents including at least a first intelligent agent and a second intelligent agent, said plurality of components including at least a first component and a second component, said first intelligent agent being configured to receive first data from said first component according to a first set of criteria, said first component being configured to collect second data according to a second set of criteria, said second intelligent agent being configured to receive third data from said second component according to a third set of criteria, said second component being configured to collect fourth data according to a fourth set of criteria, said first set of criteria being different from said second set of criteria, said first set of criteria being different from said third set of criteria, said third set of criteria being different from said fourth set of criteria, said first data being a subset of said second data, said third data being a subset of said fourth data; and a coordinating agent, said coordinating agent being configured to receive processed data from said plurality of intelligent agents.
2. The server of claim 1 further including a set of provisional agents, said set of provisional agents being configured to perform recipe management, said recipe management including distributing at least part of a recipe to at least one of said plurality of intelligent agents and said coordinating agent.
3. The server of claim 2 wherein said each intelligent agents of said plurality of intelligent agents includes intelligence for defining configuration requirements for said component of said plurality of components, said configuration requirements including criteria for sending a data file to said each intelligent agent of said plurality of intelligent agents, said criteria being based on said part of said recipe being stored locally at said each intelligent agent of said plurality of intelligent agents.
27
4. The server of claim 3 wherein said plurality of components employing said condition requirements to perform pre-processing on said data file prior to sending said data file to said plurality of intelligent agents.
5. The server of claim 4 wherein said each intelligent agent of said plurality of intelligent agents include a cache, said cache being configured to save at least most recent data file in order to enable data latching.
6. The server of claim 5 wherein said each intelligent agent of said plurality of intelligent agents perform data analysis of said data file to generate a signature data, said signature data being summarized data for said data file.
7. The server of claim 6 wherein said coordinating agent is configured to receive said signature data from each intelligent agent of said plurality of intelligent agents, said coordinating agent performing data analysis to generate a composite signature.
8. The server of claim 7 wherein said coordinating agent includes intelligence for providing instruction to said plurality of components based on said composite signature.
9. The server of claim 8 wherein said plurality of components including at least one of a process module, a sensor, and a metrology tool.
10. The server of claim 1 wherein said server includes intelligence for performing self-discovery to identify changes to said plasma processing system, said self- discovery including identifying when a component of said plurality of components is being connected to said plasma processing system.
11. An article of manufacture comprising a program storage medium having computer readable code embodied therein, said computer readable code being configured to perform data management for a plasma processing system, comprising: code for providing a server, wherein said server including a plurality of intelligent agents, each intelligent agent of said intelligent agents being configured to interact with a component of said plurality of components, said plurality of intelligent agents including at least a first intelligent agent and a second intelligent agent, said plurality of components including at least a first component and a second component, said first intelligent agent being configured to receive first data from said first component according to a first set of criteria, said first component being configured to collect second data according to a second set of criteria, said second intelligent agent being configured to receive third data from said second component according to a third set of criteria, said second component being configured to collect fourth data according to a fourth set of criteria, said first set of criteria being different from said second set of criteria, said first set of criteria being different from said third set of criteria, said third set of criteria being different from said fourth set of criteria, said first data being a subset of said second data, said third data being a subset of said fourth data, and a coordinating agent, said coordinating agent being configured to receive processed data from said plurality of intelligent agents.
12. The article of manufacture of claim 11 wherein said server includes a set of provisional agents, said set of provisional agents being configured to include code for performing recipe management, said recipe management including code for distributing at least part of a recipe to at least one of said plurality of intelligent agents and said coordinating agent.
13. The article of manufacture of claim 12 wherein said each intelligent agents of said plurality of intelligent agents includes intelligence for including code for defining configuration requirements for said each components of said plurality of components, said configuration requirements including criteria for sending a data file to said each intelligent agent of said plurality of intelligent agents, said criteria being based on said part of said recipe being stored locally at said each intelligent agent of said plurality of intelligent agents.
14. The article of manufacture of claim 13 wherein said each intelligent agent of said plurality of intelligent agents include a cache, said cache being configured to include code for saving at least most recent data file in order to enable data latching.
15. The article of manufacture of claim 14 wherein said each intelligent agent of said plurality of intelligent agents includes code for performing data analysis of said data file to generate a signature data, said signature data being summarized data for said data file.
29
16. The article of manufacture of claim 15 wherein said coordinating agent is configured to include code for receiving a signature data from each intelligent agent of said plurality of intelligent agents, said signature data being summarized data for said data file.
17. The article of manufacture of claim 16 wherein said coordinating agent includes intelligence for performing data analysis to generate a composite signature, said coordinating agent including code for employing said signature data to provide instruction to said plurality of components.
18. The article of manufacture of claim 11 wherein said server includes intelligence for performing self -discovery to identify changes to said plasma processing system, said self-discovery including code for identifying when a component of said plurality of components is being connected to said plasma processing system.
19-26. (Cancelled)
30
27. A method for managing data in operating a plasma processing system, said plasma processing system having or being coupled with a plurality of components, said plurality of components including at least a first component and a second component, said method comprising: coupling a server with said plasma processing system, said server including at least a plurality of intelligent agents, said plurality of intelligent agents including at least a first intelligent agent and a second intelligent agent; using said first intelligent agent to receive first data from said first component according to a first set of criteria; using said first component to collect second data according to a second set of criteria, said first set of criteria being different from said second set of criteria, said first data being a subset of said second data; using said second intelligent agent to receive third data from said second component according to a third set of criteria, said first set of criteria being different from said third set of criteria; and using said second component to collect fourth data according to a fourth set of criteria, said third set of criteria being different from said fourth set of criteria, said third data being a subset of said fourth data.
31
PCT/US2008/058320 2007-03-29 2008-03-26 A recipe-and-component control module and methods thereof WO2008121657A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN200880010750.XA CN101652838B (en) 2007-03-29 2008-03-26 A recipe-and-component control module and methods thereof
JP2010501200A JP5341875B2 (en) 2007-03-29 2008-03-26 Recipe and parts control module and method
KR1020097020285A KR101388802B1 (en) 2007-03-29 2008-03-26 A recipe-and-component control module and methods thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/693,664 2007-03-29
US11/693,664 US7672747B2 (en) 2000-03-30 2007-03-29 Recipe-and-component control module and methods thereof

Publications (2)

Publication Number Publication Date
WO2008121657A1 WO2008121657A1 (en) 2008-10-09
WO2008121657B1 true WO2008121657B1 (en) 2008-11-27

Family

ID=39796175

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/058320 WO2008121657A1 (en) 2007-03-29 2008-03-26 A recipe-and-component control module and methods thereof

Country Status (6)

Country Link
US (2) US7672747B2 (en)
JP (1) JP5341875B2 (en)
KR (1) KR101388802B1 (en)
CN (1) CN101652838B (en)
TW (1) TWI517202B (en)
WO (1) WO2008121657A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7672747B2 (en) 2000-03-30 2010-03-02 Lam Research Corporation Recipe-and-component control module and methods thereof
US7565220B2 (en) * 2006-09-28 2009-07-21 Lam Research Corporation Targeted data collection architecture
US7814046B2 (en) * 2006-09-29 2010-10-12 Lam Research Corporation Dynamic component-tracking system and methods therefor
TWI380390B (en) * 2008-04-08 2012-12-21 Inotera Memories Inc Method and system for detecting tool errors to stop a process recipe for a single chamber
US8285414B2 (en) * 2009-03-31 2012-10-09 International Business Machines Corporation Method and system for evaluating a machine tool operating characteristics
US8618807B2 (en) * 2009-06-30 2013-12-31 Lam Research Corporation Arrangement for identifying uncontrolled events at the process module level and methods thereof
US8473089B2 (en) * 2009-06-30 2013-06-25 Lam Research Corporation Methods and apparatus for predictive preventive maintenance of processing chambers
US8295966B2 (en) * 2009-06-30 2012-10-23 Lam Research Corporation Methods and apparatus to predict etch rate uniformity for qualification of a plasma chamber
US8538572B2 (en) * 2009-06-30 2013-09-17 Lam Research Corporation Methods for constructing an optimal endpoint algorithm
US8271121B2 (en) * 2009-06-30 2012-09-18 Lam Research Corporation Methods and arrangements for in-situ process monitoring and control for plasma processing tools
US8983631B2 (en) * 2009-06-30 2015-03-17 Lam Research Corporation Arrangement for identifying uncontrolled events at the process module level and methods thereof
US9727045B2 (en) 2012-12-31 2017-08-08 Sunedison Semiconductor Limited (Uen201334164H) Method and system for a meta-recipe control software architecture
CN107623528A (en) * 2017-09-11 2018-01-23 宁波市鄞州诺亿电子元件厂 A kind of electronic message unit
US11287785B2 (en) * 2019-09-03 2022-03-29 Honeywell International Inc. Apparatus and method for distributed batch control for modular automation

Family Cites Families (99)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US468803A (en) * 1892-02-16 William w
US575483A (en) * 1897-01-19 Skirt-support
GB2020009B (en) 1978-04-08 1982-12-01 Bodenseewerk Perkin Elmer Co Apparatus for determining the concentration of components of a sample
US4365303A (en) 1980-02-07 1982-12-21 The Perkin-Elmer Corporation Method and apparatus for determining the nature of an unknown chemical substance
US4734909A (en) * 1982-03-08 1988-03-29 Sperry Corporation Versatile interconnection bus
US4490806A (en) * 1982-06-04 1984-12-25 Research Corporation High repetition rate transient recorder with automatic integration
US4645348A (en) * 1983-09-01 1987-02-24 Perceptron, Inc. Sensor-illumination system for use in three-dimensional measurement of objects and assemblies of objects
GB2202062B (en) 1987-03-14 1991-05-01 Plessey Co Plc Apparatus for checking a system configuration
GB2203869B (en) 1987-04-17 1991-10-23 Apple Computer Computer resource configuration method and apparatus
JPH02139610A (en) 1988-11-19 1990-05-29 Fujitsu Ltd Active attaching and detaching system
US5119498A (en) * 1989-06-12 1992-06-02 International Business Machines Corporation Feature board with automatic adjustment to one of two bus widths based on sensing power level at one connection contact
JPH0330808A (en) 1989-06-27 1991-02-08 Matsushita Electric Works Ltd Air purifying filter
JPH03179997A (en) 1989-12-08 1991-08-05 Pfu Ltd Presence management control system
US5113344A (en) * 1990-07-27 1992-05-12 Raymond Corporation Material handling vehicle identification tag
JP2835184B2 (en) 1990-12-12 1998-12-14 キヤノン株式会社 Information processing apparatus, device control method, and IC card
KR930019861A (en) * 1991-12-12 1993-10-19 완다 케이. 덴슨-로우 Coating method using dense gas
JPH0821015B2 (en) 1992-01-20 1996-03-04 インターナショナル・ビジネス・マシーンズ・コーポレイション Computer and system reconfiguring apparatus and method thereof
US5301122A (en) * 1992-02-12 1994-04-05 Measuring And Monitoring, Inc. Measuring and monitoring system
FR2692701B1 (en) 1992-06-18 1994-09-30 Aerospatiale Method for controlling the configuration of a complex installation and device for implementing this method.
US5347460A (en) * 1992-08-25 1994-09-13 International Business Machines Corporation Method and system employing optical emission spectroscopy for monitoring and controlling semiconductor fabrication
US5664066A (en) * 1992-11-09 1997-09-02 The United States Of America As Represented By The United States Department Of Energy Intelligent system for automatic feature detection and selection or identification
US5450205A (en) * 1993-05-28 1995-09-12 Massachusetts Institute Of Technology Apparatus and method for real-time measurement of thin film layer thickness and changes thereof
US5937365A (en) * 1993-08-25 1999-08-10 Hunter Engineering Company Communications system for vehicle wheel alignment apparatus
US5553220A (en) * 1993-09-07 1996-09-03 Cirrus Logic, Inc. Managing audio data using a graphics display controller
US5546322A (en) * 1994-04-12 1996-08-13 International Business Machines Corporation Method and system for analyzing plasma data
JP3514331B2 (en) 1994-07-07 2004-03-31 大和ハウス工業株式会社 Exterior wall joint waterproof structure
US5831851A (en) * 1995-03-21 1998-11-03 Seagate Technology, Inc. Apparatus and method for controlling high throughput sputtering
US5717737A (en) * 1995-06-01 1998-02-10 Padcom, Inc. Apparatus and method for transparent wireless communication between a remote device and a host system
NZ332183A (en) 1996-04-24 2000-05-26 Merck & Co Inc Carbapenem antibacterial compounds substituted in the 2-position by a napthosultam, compositions and use for treating bacterial infections
US5831581A (en) * 1996-08-23 1998-11-03 Lockheed Martin Vought Systems Corporation Dual frequency band planar array antenna
JP3839526B2 (en) * 1996-09-20 2006-11-01 富士写真フイルム株式会社 Digital camera
US5715051A (en) * 1996-10-21 1998-02-03 Medar, Inc. Method and system for detecting defects in optically transmissive coatings formed on optical media substrates
US6032109A (en) * 1996-10-21 2000-02-29 Telemonitor, Inc. Smart sensor module
US5977913A (en) * 1997-02-07 1999-11-02 Dominion Wireless Method and apparatus for tracking and locating personnel
US5959529A (en) * 1997-03-07 1999-09-28 Kail, Iv; Karl A. Reprogrammable remote sensor monitoring system
US6013108A (en) * 1997-03-18 2000-01-11 Endevco Corporation Intelligent sensor system with network bus
JP3578886B2 (en) * 1997-05-02 2004-10-20 東京エレクトロン株式会社 Process control system and process data transfer control method
US6425006B1 (en) * 1997-05-13 2002-07-23 Micron Technology, Inc. Alert configurator and manager
US5757483A (en) * 1997-08-06 1998-05-26 Stellarnet, Inc. Dual beam optical spectrograph
CA2299507A1 (en) 1997-08-07 1999-02-18 Stefaan A. De Schrijver Micro-electro-mechanical integrated control systems
US6292108B1 (en) * 1997-09-04 2001-09-18 The Board Of Trustees Of The Leland Standford Junior University Modular, wireless damage monitoring system for structures
US6411994B2 (en) * 1997-10-07 2002-06-25 Interval Research Corporation Interface system for providing content using context hotspots
US7016811B2 (en) * 2001-08-15 2006-03-21 National Instruments Corporation Network-based system for configuring a programmable hardware element in a measurement system using hardware configuration programs generated based on a user specification
US6360362B1 (en) * 1998-02-20 2002-03-19 Intel Corporation Automatic update of camera firmware
US6091749A (en) * 1998-02-26 2000-07-18 Trw Inc. Laser system controller
US6157867A (en) * 1998-02-27 2000-12-05 Taiwan Semiconductor Manufacturing Company Method and system for on-line monitoring plasma chamber condition by comparing intensity of certain wavelength
US6138241A (en) * 1998-03-20 2000-10-24 Leviton Manufacturing Co., Inc. Apparatus for and method of inhibiting and overriding an electrical control device
US6243738B1 (en) * 1998-04-06 2001-06-05 National Instruments Corporation Data acquisition system which includes remote access to data acquisition devices
KR20040053203A (en) 1998-04-23 2004-06-23 샌디아 코포레이션 Method and apparatus for monitoring plasma processing operations
AU3663099A (en) 1998-04-23 1999-11-08 Sandia Corporation Method and apparatus for monitoring plasma processing operations
US6090302A (en) * 1998-04-23 2000-07-18 Sandia Method and apparatus for monitoring plasma processing operations
US6077386A (en) * 1998-04-23 2000-06-20 Sandia Corporation Method and apparatus for monitoring plasma processing operations
KR100315912B1 (en) * 1998-04-27 2002-02-19 윤종용 Automation system using file server and method for controlling the same
US6292098B1 (en) * 1998-08-31 2001-09-18 Hitachi, Ltd. Surveillance system and network system
JP3724689B2 (en) * 1998-10-30 2005-12-07 ホーチキ株式会社 Fire monitoring device and fire detector
US6515586B1 (en) * 1998-12-18 2003-02-04 Intel Corporation Tactile tracking systems and methods
US6265831B1 (en) * 1999-03-31 2001-07-24 Lam Research Corporation Plasma processing method and apparatus with control of rf bias
MXPA01010270A (en) * 1999-04-09 2002-10-23 Henry B Steen Iii Remote data access and system control.
WO2000072285A1 (en) * 1999-05-24 2000-11-30 Heat-Timer Corporation Electronic message delivery system utilizable in the monitoring oe remote equipment and method of same
US6446192B1 (en) * 1999-06-04 2002-09-03 Embrace Networks, Inc. Remote monitoring and control of equipment over computer networks using a single web interfacing chip
WO2001001366A2 (en) * 1999-06-25 2001-01-04 Telemonitor, Inc. Smart remote monitoring system and method
FR2799289B1 (en) * 1999-10-01 2001-12-28 Air Liquide METHOD AND DEVICE FOR MAKING A SHEMA OF AN INSTALLATION COMPRISING APPARATUSES SUPPLIED WITH GAS
US6493756B1 (en) * 1999-10-28 2002-12-10 Networks Associates, Inc. System and method for dynamically sensing an asynchronous network event within a modular framework for network event processing
US6640151B1 (en) * 1999-12-22 2003-10-28 Applied Materials, Inc. Multi-tool control system, method and medium
AU2221000A (en) * 1999-12-30 2001-07-16 Abb Power T & D Company Inc. Parametric programming of laser cutting system
US6370454B1 (en) * 2000-02-25 2002-04-09 Edwin S. Moore Iii Apparatus and method for monitoring and maintaining mechanized equipment
US7356580B1 (en) * 2000-03-30 2008-04-08 Lam Research Corporation Plug and play sensor integration for a process module
US7672747B2 (en) * 2000-03-30 2010-03-02 Lam Research Corporation Recipe-and-component control module and methods thereof
US6526355B1 (en) * 2000-03-30 2003-02-25 Lam Research Corporation Integrated full wavelength spectrometer for wafer processing
US6671700B1 (en) * 2000-05-23 2003-12-30 Palm Source, Inc. Method and apparatus for parallel execution of conduits during simultaneous synchronization of databases
US20020059299A1 (en) * 2000-07-14 2002-05-16 Frederic Spaey System and method for synchronizing databases
US6618692B2 (en) * 2000-09-20 2003-09-09 Hitachi, Ltd. Remote diagnostic system and method for semiconductor manufacturing equipment
JP3847568B2 (en) * 2001-03-01 2006-11-22 ファブソリューション株式会社 Semiconductor device manufacturing method
US7089075B2 (en) * 2001-05-04 2006-08-08 Tokyo Electron Limited Systems and methods for metrology recipe and model generation
JP2003063652A (en) * 2001-08-29 2003-03-05 Mitsubishi Electric Corp Physical distribution management system and method, program and recording medium
KR20040105767A (en) * 2002-03-12 2004-12-16 아이엘에스 테크놀로지, 인크. Diagnostic system and method for integrated remote tool access, data collection, and control
TWI286785B (en) 2002-03-29 2007-09-11 Tokyo Electron Ltd Method for interaction with status and control apparatus
US6976033B2 (en) * 2002-04-10 2005-12-13 Charming Systems Corpration Production cell information system based on activity costs and an architecture therefor
US7606881B2 (en) * 2002-04-25 2009-10-20 Oracle International Corporation System and method for synchronization of version annotated objects
US7836015B1 (en) * 2002-05-02 2010-11-16 Access Systems Americas, Inc. Fast synchronization of computer databases using coverage status
TWI328164B (en) * 2002-05-29 2010-08-01 Tokyo Electron Ltd Method and apparatus for monitoring tool performance
CN1666203A (en) * 2002-07-03 2005-09-07 东京电子株式会社 Method and apparatus for automatic sensor installation
US6782302B1 (en) * 2002-08-30 2004-08-24 Advanced Micro Devices, Inc. Method and apparatus for scheduling workpieces with compatible processing requirements
TWI233008B (en) * 2002-09-30 2005-05-21 Tokyo Electron Ltd Method and apparatus for the monitoring and control of a semiconductor manufacturing process
US7337183B2 (en) * 2002-11-19 2008-02-26 Siemens Power Generation, Inc. Customer extranet portal
US6862557B2 (en) * 2003-06-12 2005-03-01 Lam Research Corporation System and method for electronically collecting data in a fabrication facility
US7440932B2 (en) * 2003-10-02 2008-10-21 International Business Machines Corporation Method and system for automating issue resolution in manufacturing execution and material control systems
CA2540336C (en) * 2003-10-17 2013-05-14 Hydralift Amclyde, Inc. Equipment component monitoring and replacement management system
US20050131991A1 (en) * 2003-12-10 2005-06-16 Sanyo Electric Co., Ltd. Network apparatus and program product
US7123960B2 (en) * 2003-12-22 2006-10-17 Cardiac Pacemakers, Inc. Method and system for delivering cardiac resynchronization therapy with variable atrio-ventricular delay
JP2005294473A (en) * 2004-03-31 2005-10-20 Canon Inc Exposure system, device manufacturing method and device
US7146237B2 (en) * 2004-04-07 2006-12-05 Mks Instruments, Inc. Controller and method to mediate data collection from smart sensors for fab applications
JP4664618B2 (en) * 2004-04-30 2011-04-06 株式会社東芝 Measuring system
KR20060086602A (en) 2005-01-27 2006-08-01 삼성전자주식회사 System for managing semiconductor manufacture equipment
US7676295B2 (en) * 2005-02-18 2010-03-09 Lam Research Corporation Processing information management in a plasma processing tool
US7283882B1 (en) * 2006-02-15 2007-10-16 Kla-Tencor Technologies Corporation Automatic recipe validation
US7565220B2 (en) * 2006-09-28 2009-07-21 Lam Research Corporation Targeted data collection architecture
US7814046B2 (en) * 2006-09-29 2010-10-12 Lam Research Corporation Dynamic component-tracking system and methods therefor
US20080082578A1 (en) * 2006-09-29 2008-04-03 Andrew Hogue Displaying search results on a one or two dimensional graph

Also Published As

Publication number Publication date
JP2010523003A (en) 2010-07-08
WO2008121657A1 (en) 2008-10-09
TW200908072A (en) 2009-02-16
US20080243988A1 (en) 2008-10-02
CN101652838A (en) 2010-02-17
KR20100014649A (en) 2010-02-10
CN101652838B (en) 2015-04-08
JP5341875B2 (en) 2013-11-13
US7672747B2 (en) 2010-03-02
KR101388802B1 (en) 2014-04-23
US20100125360A1 (en) 2010-05-20
TWI517202B (en) 2016-01-11
US8295963B2 (en) 2012-10-23

Similar Documents

Publication Publication Date Title
WO2008121657B1 (en) A recipe-and-component control module and methods thereof
JP2008532154A5 (en)
WO2010054131A3 (en) Method and system for processing work requests
WO2006082591A3 (en) Upgrading performance using aggregated information shared between management systems
US9613066B2 (en) Efficient pushdown of joins in a heterogeneous database system involving a large-scale low-power cluster
WO2007060664A3 (en) System and method of managing data protection resources
TW200711483A (en) System and method for data delivery
EP1840768A3 (en) Systems and method for a distributed in-memory database
EP1983420A3 (en) Storage system and control method thereof
WO2001095133A3 (en) A method of modelling a maintenance system
WO2008126221A1 (en) Software modification management program, software modification management device, and software modification management method
CA2622835A1 (en) Email server for processing a threshold number of email jobs for a given user and related methods
US9531792B2 (en) System and method for generating information file based on parallel processing
CN1293473C (en) System process protection method
CN103678051A (en) On-line fault tolerance method in cluster data processing system
ATE423352T1 (en) METHOD FOR DETERMINING A TAKEOVER SCENARIO OF THE SOFTWARE UNITS IN THE EVENT OF A COMPUTER FAILURE IN A SERVER FARM
WO2009149452A3 (en) Method of operating a warehouse
CN108829415A (en) Model loading method, server and computer readable storage medium
US7835813B2 (en) System and method for managing a product manufacturing process
CA2622833A1 (en) Email server performing email job processing for a given user and related methods
WO2008127235A3 (en) Machine vision system for enterprise management
TW200622952A (en) Method and system with multiple purpose and functions for alarm performance assesment
HK1118118A1 (en) Method for controlling a relational database system
CN103631594A (en) Asynchronous scheduling method and asynchronous scheduling system for general flow
WO2006013158A3 (en) Managing resources in a data processing system

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880010750.X

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08744405

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2010501200

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 1020097020285

Country of ref document: KR

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08744405

Country of ref document: EP

Kind code of ref document: A1