WO2009035984A3 - Periodic dimple array - Google Patents

Periodic dimple array Download PDF

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Publication number
WO2009035984A3
WO2009035984A3 PCT/US2008/075733 US2008075733W WO2009035984A3 WO 2009035984 A3 WO2009035984 A3 WO 2009035984A3 US 2008075733 W US2008075733 W US 2008075733W WO 2009035984 A3 WO2009035984 A3 WO 2009035984A3
Authority
WO
WIPO (PCT)
Prior art keywords
reflective layer
actuation electrode
aperture
recess
substrate
Prior art date
Application number
PCT/US2008/075733
Other languages
French (fr)
Other versions
WO2009035984A2 (en
Inventor
Marc Maurice Mignard
Original Assignee
Qualcomm Mems Technologies Inc
Marc Maurice Mignard
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Mems Technologies Inc, Marc Maurice Mignard filed Critical Qualcomm Mems Technologies Inc
Priority to CN2008801068714A priority Critical patent/CN101802677B/en
Priority to JP2010524946A priority patent/JP2010539542A/en
Priority to EP08831076A priority patent/EP2188662A2/en
Publication of WO2009035984A2 publication Critical patent/WO2009035984A2/en
Publication of WO2009035984A3 publication Critical patent/WO2009035984A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/0019—Flexible or deformable structures not provided for in groups B81C1/00142 - B81C1/00182
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045

Abstract

A microelectromechanical (MEMS) device (800) includes a substrate (802), an actuation electrode (804) over the substrate (802), a reflective layer (810) over the actuation electrode (804), and a support layer (808) between the actuation electrode (804) and the reflective layer (810). The reflective layer (810) includes at least one aperture (814) through the reflective layer (810). The support layer (808) includes a recess (812) between the actuation electrode (804) and the at least one aperture (814). Upon application of a control signal to the device (800), at least a first portion (816) of the reflective layer (810) is configured to move into the recess (812) and at least a second portion (818) of the reflective layer (810) is configured to remain stationary. The reflectivity of the MEMS device (800) is dominantly modulated by changing a phase difference between light reflected from the first portion (816) and light reflected from the second portion (818).
PCT/US2008/075733 2007-09-14 2008-09-08 Periodic dimple array WO2009035984A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2008801068714A CN101802677B (en) 2007-09-14 2008-09-08 Mems device and manufacturing method thereof
JP2010524946A JP2010539542A (en) 2007-09-14 2008-09-08 Periodic dimple array
EP08831076A EP2188662A2 (en) 2007-09-14 2008-09-08 Periodic dimple array

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US97271507P 2007-09-14 2007-09-14
US60/972,715 2007-09-14
US11/949,612 2007-12-03
US11/949,612 US7773286B2 (en) 2007-09-14 2007-12-03 Periodic dimple array

Publications (2)

Publication Number Publication Date
WO2009035984A2 WO2009035984A2 (en) 2009-03-19
WO2009035984A3 true WO2009035984A3 (en) 2009-05-28

Family

ID=40011339

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/075733 WO2009035984A2 (en) 2007-09-14 2008-09-08 Periodic dimple array

Country Status (6)

Country Link
US (2) US7773286B2 (en)
EP (1) EP2188662A2 (en)
JP (1) JP2010539542A (en)
KR (1) KR20100084511A (en)
CN (1) CN101802677B (en)
WO (1) WO2009035984A2 (en)

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