WO2009044324A3 - Mems scanning micromirror manufacturing method - Google Patents

Mems scanning micromirror manufacturing method Download PDF

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Publication number
WO2009044324A3
WO2009044324A3 PCT/IB2008/053950 IB2008053950W WO2009044324A3 WO 2009044324 A3 WO2009044324 A3 WO 2009044324A3 IB 2008053950 W IB2008053950 W IB 2008053950W WO 2009044324 A3 WO2009044324 A3 WO 2009044324A3
Authority
WO
WIPO (PCT)
Prior art keywords
silicon layer
mems scanning
scanning micromirror
manufacturing
cantilever beam
Prior art date
Application number
PCT/IB2008/053950
Other languages
French (fr)
Other versions
WO2009044324A2 (en
Inventor
Krassimir T Krastev
Antonius J M Nellissen
Lierop Hendrikus W L A M Van
Hermanus M J R Soemers
Renatus H M Sanders
Original Assignee
Koninkl Philips Electronics Nv
Krassimir T Krastev
Antonius J M Nellissen
Lierop Hendrikus W L A M Van
Hermanus M J R Soemers
Renatus H M Sanders
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv, Krassimir T Krastev, Antonius J M Nellissen, Lierop Hendrikus W L A M Van, Hermanus M J R Soemers, Renatus H M Sanders filed Critical Koninkl Philips Electronics Nv
Publication of WO2009044324A2 publication Critical patent/WO2009044324A2/en
Publication of WO2009044324A3 publication Critical patent/WO2009044324A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means

Abstract

A MEMS scanning micromirror manufacturing method with a method for manufacturing a MEMS scanning micromirror having a cantilever beam including providing a silicon on insulator (SOI) wafer 200 having a first silicon layer 202, a second silicon layer 206, and an insulating layer 204 between the first silicon layer 202 and the second silicon layer 206, the thickness of the first silicon layer 202 being a final thickness of the cantilever beam 72; and fashioning the cantilever beam 72 from the first silicon layer 202 while maintaining the final thickness of the cantilever beam.
PCT/IB2008/053950 2007-10-05 2008-09-29 Mems scanning micromirror manufacturing method WO2009044324A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US97771707P 2007-10-05 2007-10-05
US60/977,717 2007-10-05

Publications (2)

Publication Number Publication Date
WO2009044324A2 WO2009044324A2 (en) 2009-04-09
WO2009044324A3 true WO2009044324A3 (en) 2009-05-28

Family

ID=40184977

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2008/053950 WO2009044324A2 (en) 2007-10-05 2008-09-29 Mems scanning micromirror manufacturing method

Country Status (2)

Country Link
TW (1) TW200925104A (en)
WO (1) WO2009044324A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009044360A1 (en) 2007-10-05 2009-04-09 Koninklijke Philips Electronics N.V. Mems scanning micromirror with reduced dynamic deformation
CN109799607A (en) * 2019-04-02 2019-05-24 华域视觉科技(上海)有限公司 Back drives transmission-type MEMS chip, MEMS lighting system and automobile
CN110989163B (en) * 2019-12-06 2023-03-31 西北工业大学 MEMS linear electrostatic driving technology
US11668925B2 (en) * 2020-03-25 2023-06-06 Compertum Microsystems Inc. MEMS micro-mirror device with stopper and method of making same
CN114105081A (en) * 2020-08-27 2022-03-01 中光电智能感测股份有限公司 Micro scanning mirror

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001092939A1 (en) * 2000-05-31 2001-12-06 The Regents Of The University Of California Staggered torsional electrostatic combdrive and method of forming same
US20020005976A1 (en) * 2000-03-24 2002-01-17 Behrang Behin Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020005976A1 (en) * 2000-03-24 2002-01-17 Behrang Behin Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
WO2001092939A1 (en) * 2000-05-31 2001-12-06 The Regents Of The University Of California Staggered torsional electrostatic combdrive and method of forming same

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
BAKSHI S ET AL: "High-Aspect Ratio Vertical Comb-Drive Actuator With Small Self-Aligned Finger Gaps", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 14, no. 5, 1 October 2005 (2005-10-01), pages 1144 - 1155, XP011140181, ISSN: 1057-7157 *
NOWOROLSKI J M ET AL: "Fabrication Of SOI Wafers With Buried Cavities Using Silicon Fusion Bonding And Electrochemical Etchback", 19950625; 19950625 - 19950629, vol. 1, 25 June 1995 (1995-06-25), pages 71 - 74, XP010304769 *

Also Published As

Publication number Publication date
TW200925104A (en) 2009-06-16
WO2009044324A2 (en) 2009-04-09

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