WO2009086976A3 - Micromechanical component and production method for a micromechanical component - Google Patents

Micromechanical component and production method for a micromechanical component Download PDF

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Publication number
WO2009086976A3
WO2009086976A3 PCT/EP2008/065524 EP2008065524W WO2009086976A3 WO 2009086976 A3 WO2009086976 A3 WO 2009086976A3 EP 2008065524 W EP2008065524 W EP 2008065524W WO 2009086976 A3 WO2009086976 A3 WO 2009086976A3
Authority
WO
WIPO (PCT)
Prior art keywords
micromechanical component
lateral surface
production method
electrode
subjected
Prior art date
Application number
PCT/EP2008/065524
Other languages
German (de)
French (fr)
Other versions
WO2009086976A2 (en
Inventor
Tjalf Pirk
Stefan Pinter
Joachim Fritz
Christoph Friese
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2009086976A2 publication Critical patent/WO2009086976A2/en
Publication of WO2009086976A3 publication Critical patent/WO2009086976A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00182—Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)

Abstract

The invention relates to a micromechanical component, comprising at least one stator electrode (21) with at least one lateral surface, divided into at least two electrically conducting sections (26, 27, 29, 30) which are electrically insulated from each other and which are subjected to differing voltages. The micromechanical component further comprises at least one moving actuator electrode (22), which has a lateral surface divided into at least two electrically conducting sections (32, 34; 80, 82) which are electrically insulated from each other and which are subjected to differing voltages. The lateral surface of the actuator electrode (22) is arranged to face the lateral surface of the stator electrode (21; 71a, 71b; 103, 104).
PCT/EP2008/065524 2008-01-07 2008-11-14 Micromechanical component and production method for a micromechanical component WO2009086976A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200810003344 DE102008003344A1 (en) 2008-01-07 2008-01-07 Micromechanical component and production method for a micromechanical component
DE102008003344.8 2008-01-07

Publications (2)

Publication Number Publication Date
WO2009086976A2 WO2009086976A2 (en) 2009-07-16
WO2009086976A3 true WO2009086976A3 (en) 2010-01-07

Family

ID=40719441

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/065524 WO2009086976A2 (en) 2008-01-07 2008-11-14 Micromechanical component and production method for a micromechanical component

Country Status (2)

Country Link
DE (1) DE102008003344A1 (en)
WO (1) WO2009086976A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008042967B4 (en) 2008-10-20 2017-04-06 Robert Bosch Gmbh Cascaded micromechanical actuator structure
DE102017215276B4 (en) * 2017-08-31 2023-02-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Multi-directional translation and tilt platform using flexure actuators as the active entity
US11101746B2 (en) 2018-12-13 2021-08-24 Beijing Voyager Technology Co., Ltd. Bipolar staggered comb drive for bidirectional MEMS actuation

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020005976A1 (en) * 2000-03-24 2002-01-17 Behrang Behin Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
US20040232107A1 (en) * 2002-10-24 2004-11-25 Fujitsu Limited Method for manufacturing microstructure
WO2005068353A1 (en) * 2004-01-20 2005-07-28 National University Of Singapore Optical scanning using vibratory diffraction gratings
US20070054433A1 (en) * 2005-09-08 2007-03-08 Rockwell Scientific Licensing Llc High temperature microelectromechanical (MEM) devices and fabrication method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7479402B2 (en) 2006-03-20 2009-01-20 Honeywell International Inc. Comb structure fabrication methods and systems

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020005976A1 (en) * 2000-03-24 2002-01-17 Behrang Behin Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
US20040232107A1 (en) * 2002-10-24 2004-11-25 Fujitsu Limited Method for manufacturing microstructure
WO2005068353A1 (en) * 2004-01-20 2005-07-28 National University Of Singapore Optical scanning using vibratory diffraction gratings
US20070054433A1 (en) * 2005-09-08 2007-03-08 Rockwell Scientific Licensing Llc High temperature microelectromechanical (MEM) devices and fabrication method

Also Published As

Publication number Publication date
DE102008003344A1 (en) 2009-07-09
WO2009086976A2 (en) 2009-07-16

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