WO2010004275A3 - Sample holder - Google Patents

Sample holder Download PDF

Info

Publication number
WO2010004275A3
WO2010004275A3 PCT/GB2009/001692 GB2009001692W WO2010004275A3 WO 2010004275 A3 WO2010004275 A3 WO 2010004275A3 GB 2009001692 W GB2009001692 W GB 2009001692W WO 2010004275 A3 WO2010004275 A3 WO 2010004275A3
Authority
WO
WIPO (PCT)
Prior art keywords
membrane
sample holder
sample
window
functional structure
Prior art date
Application number
PCT/GB2009/001692
Other languages
French (fr)
Other versions
WO2010004275A2 (en
Inventor
Peter A. F. Anastasi
Anthony M. Howard
Original Assignee
Silson Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silson Limited filed Critical Silson Limited
Publication of WO2010004275A2 publication Critical patent/WO2010004275A2/en
Publication of WO2010004275A3 publication Critical patent/WO2010004275A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2204—Specimen supports therefor; Sample conveying means therefore
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/08—Holders for targets or for other objects to be irradiated
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2001—Maintaining constant desired temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2008—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated specially adapted for studying electrical or magnetical properties of objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/206—Modifying objects while observing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

A sample holder for use in a method of analysis using high-energy radiation, includes a frame (4) having a window (6) and a membrane (2) that extends across the window and has a surface (8) for supporting a sample. The membrane is substantially transparent to the high-energy radiation. A functional structure (10, 12, 14, 18, 22, 24, 26, 34, 36) is formed on the membrane, the functional structure providing additional functionality that allows selected parameters of a sample on the support surface to be measured and/or controlled.
PCT/GB2009/001692 2008-07-08 2009-07-07 Sample holder WO2010004275A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0812480.2 2008-07-08
GB0812480A GB2461708A (en) 2008-07-08 2008-07-08 Sample holder

Publications (2)

Publication Number Publication Date
WO2010004275A2 WO2010004275A2 (en) 2010-01-14
WO2010004275A3 true WO2010004275A3 (en) 2010-06-03

Family

ID=39718156

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2009/001692 WO2010004275A2 (en) 2008-07-08 2009-07-07 Sample holder

Country Status (2)

Country Link
GB (1) GB2461708A (en)
WO (1) WO2010004275A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2626884A1 (en) * 2012-02-10 2013-08-14 Danmarks Tekniske Universitet - DTU Microfluidic chip for high resolution transmission electron microscopy
GB201613173D0 (en) * 2016-07-29 2016-09-14 Medical Res Council Electron microscopy
GB201721152D0 (en) * 2017-12-18 2018-01-31 Univ Warwick Transmission electron microscopy systems

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4953387A (en) * 1989-07-31 1990-09-04 The Regents Of The University Of Michigan Ultrathin-film gas detector
US5296255A (en) * 1992-02-14 1994-03-22 The Regents Of The University Of Michigan In-situ monitoring, and growth of thin films by means of selected area CVD
US5731587A (en) * 1996-08-12 1998-03-24 The Regents Of The University Of Michigan Hot stage for scanning probe microscope
JPH1195124A (en) * 1994-04-30 1999-04-09 Kitazato Supply:Kk Transparent heating plate for microscope and transparent heating device therefor
WO2006031104A1 (en) * 2004-09-13 2006-03-23 Technische Universiteit Delft Microreactor for a transmission electron microscope and heating element and method for the manufacture thereof
JP2008047411A (en) * 2006-08-15 2008-02-28 Jeol Ltd Sample retainer, sample inspection method and sample inspection device
WO2008141147A1 (en) * 2007-05-09 2008-11-20 Protochips, Inc. Microscopy support structures

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3359703B2 (en) * 1992-08-27 2002-12-24 オリンパス光学工業株式会社 X-ray microscope sample container and sample holding method
JPH07333119A (en) * 1994-06-14 1995-12-22 Nikon Corp Sample holder
JPH09297093A (en) * 1996-05-01 1997-11-18 Hamamatsu Photonics Kk Sample cell for x-ray microscope
WO2006021961A2 (en) * 2004-08-26 2006-03-02 Quantomix Ltd. Sample enclosure for inspection and methods of use thereof
US20080280099A1 (en) * 2005-05-23 2008-11-13 Hutchison James E Silicon Substrates with Thermal Oxide Windows for Transmission Electron Microscopy
TWI330380B (en) * 2006-12-07 2010-09-11 Nat Univ Tsing Hua A specimen kit for electron microscope and its fabrication process

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4953387A (en) * 1989-07-31 1990-09-04 The Regents Of The University Of Michigan Ultrathin-film gas detector
US5296255A (en) * 1992-02-14 1994-03-22 The Regents Of The University Of Michigan In-situ monitoring, and growth of thin films by means of selected area CVD
JPH1195124A (en) * 1994-04-30 1999-04-09 Kitazato Supply:Kk Transparent heating plate for microscope and transparent heating device therefor
US5731587A (en) * 1996-08-12 1998-03-24 The Regents Of The University Of Michigan Hot stage for scanning probe microscope
WO2006031104A1 (en) * 2004-09-13 2006-03-23 Technische Universiteit Delft Microreactor for a transmission electron microscope and heating element and method for the manufacture thereof
JP2008047411A (en) * 2006-08-15 2008-02-28 Jeol Ltd Sample retainer, sample inspection method and sample inspection device
WO2008141147A1 (en) * 2007-05-09 2008-11-20 Protochips, Inc. Microscopy support structures

Also Published As

Publication number Publication date
GB0812480D0 (en) 2008-08-13
GB2461708A (en) 2010-01-13
WO2010004275A2 (en) 2010-01-14

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