WO2010097064A3 - Laser crystallisation by irradiation - Google Patents
Laser crystallisation by irradiation Download PDFInfo
- Publication number
- WO2010097064A3 WO2010097064A3 PCT/DE2009/050072 DE2009050072W WO2010097064A3 WO 2010097064 A3 WO2010097064 A3 WO 2010097064A3 DE 2009050072 W DE2009050072 W DE 2009050072W WO 2010097064 A3 WO2010097064 A3 WO 2010097064A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- semiconductor layer
- regions
- irradiation
- another
- arranged next
- Prior art date
Links
- 238000002425 crystallisation Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 abstract 4
- 238000000034 method Methods 0.000 abstract 2
- 238000007493 shaping process Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1872—Recrystallisation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B1/00—Single-crystal growth directly from the solid state
- C30B1/02—Single-crystal growth directly from the solid state by thermal treatment, e.g. strain annealing
- C30B1/023—Single-crystal growth directly from the solid state by thermal treatment, e.g. strain annealing from solids with amorphous structure
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02678—Beam shaping, e.g. using a mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02686—Pulsed laser beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02691—Scanning of a beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention relates to a method for restructuring a semiconductor layer (2) with a multiplicity of lasers (18, 20, 22) which are arranged next to one another and, by means of respectively assigned beam shaping optics (46, 48, 50), project on the semiconductor layer (2) laser lines (8, 10, 12) arranged next to one another, with marginal regions (15, 17) and inner overlapping regions (14, 16), wherein at least the overlapping regions (14, 16) are projected completely and on passive regions (14, 16) of the semiconductor layer (2) in which the semiconductor layer is removed in a following processing step, and relates to a laser system for carrying out the method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP09807437A EP2401773A2 (en) | 2009-02-27 | 2009-12-10 | Laser crystallisation by irradiation |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009010841A DE102009010841A1 (en) | 2009-02-27 | 2009-02-27 | Laser crystallization by irradiation |
DE102009010841.6 | 2009-02-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2010097064A2 WO2010097064A2 (en) | 2010-09-02 |
WO2010097064A3 true WO2010097064A3 (en) | 2010-10-21 |
Family
ID=42371765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2009/050072 WO2010097064A2 (en) | 2009-02-27 | 2009-12-10 | Laser crystallisation by irradiation |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2401773A2 (en) |
DE (1) | DE102009010841A1 (en) |
WO (1) | WO2010097064A2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014013015B4 (en) * | 2014-09-02 | 2020-08-20 | Friedrich Birkle | Cleaning system for surgery |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5651824A (en) * | 1979-10-04 | 1981-05-09 | Toshiba Corp | Preparation of semiconductor device |
US5932118A (en) * | 1994-05-16 | 1999-08-03 | Sanyo Electric Co., Ltd. | Photoprocessing method |
JP2000315652A (en) * | 1999-04-30 | 2000-11-14 | Sony Corp | Method for crystalizing semiconductor thin film and laser irradiation device |
US20040040938A1 (en) * | 2002-06-14 | 2004-03-04 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method and apparatus |
WO2008104346A2 (en) * | 2007-02-27 | 2008-09-04 | Carl Zeiss Laser Optics Gmbh | Continuous coating installation and methods for producing crystalline thin films and solar cells |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10042733A1 (en) | 2000-08-31 | 2002-03-28 | Inst Physikalische Hochtech Ev | Multicrystalline laser-crystallized silicon thin-film solar cell on a transparent substrate |
JP2003059858A (en) | 2001-08-09 | 2003-02-28 | Sony Corp | Laser annealing device and method of manufacturing thin film transistor |
DE102004036220B4 (en) | 2004-07-26 | 2009-04-02 | Jürgen H. Werner | Method for laser doping of solids with a line-focused laser beam |
DE102007009924A1 (en) * | 2007-02-27 | 2008-08-28 | Carl Zeiss Laser Optics Gmbh | Continuous coating apparatus comprises vacuum chamber containing PVD unit for coating surface of substrate and laser crystallization system which illuminates section being coated |
-
2009
- 2009-02-27 DE DE102009010841A patent/DE102009010841A1/en not_active Withdrawn
- 2009-12-10 EP EP09807437A patent/EP2401773A2/en not_active Withdrawn
- 2009-12-10 WO PCT/DE2009/050072 patent/WO2010097064A2/en active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5651824A (en) * | 1979-10-04 | 1981-05-09 | Toshiba Corp | Preparation of semiconductor device |
US5932118A (en) * | 1994-05-16 | 1999-08-03 | Sanyo Electric Co., Ltd. | Photoprocessing method |
JP2000315652A (en) * | 1999-04-30 | 2000-11-14 | Sony Corp | Method for crystalizing semiconductor thin film and laser irradiation device |
US20040040938A1 (en) * | 2002-06-14 | 2004-03-04 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method and apparatus |
WO2008104346A2 (en) * | 2007-02-27 | 2008-09-04 | Carl Zeiss Laser Optics Gmbh | Continuous coating installation and methods for producing crystalline thin films and solar cells |
Also Published As
Publication number | Publication date |
---|---|
DE102009010841A1 (en) | 2010-09-02 |
WO2010097064A2 (en) | 2010-09-02 |
EP2401773A2 (en) | 2012-01-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9592570B2 (en) | Laser processing apparatus | |
WO2011066989A8 (en) | Optical irradiation unit for a plant for producing workpieces by irradiation of powder layers with laser radiation | |
TW200721285A (en) | Laser processing method for wafer | |
WO2007041460A3 (en) | Method and system for laser machining | |
MX2018009285A (en) | Method and device for producing planar modifications in solid bodies. | |
WO2015134075A3 (en) | Diode laser fiber array for powder bed fabrication or repair | |
WO2015095264A3 (en) | 3-d forming of glass | |
WO2016083610A3 (en) | Splitting of a solid using conversion of material | |
TW200515966A (en) | Laser beam manufacturing method, laser beam manufacturing apparatus and work produced | |
JP2006114627A5 (en) | ||
JP2011110567A5 (en) | Laser processing method and laser processing apparatus | |
WO2010065204A3 (en) | Technique for manufacturing a solar cell | |
WO2012091316A3 (en) | Laser processing apparatus | |
EP2426795A4 (en) | Cooling module for laser, manufacture method thereof and semiconductor laser including the same | |
EP1915791A4 (en) | Laser ablation method for fabricating high performance organic devices | |
JP2010503537A5 (en) | ||
WO2010118231A3 (en) | Techniques for processing a substrate | |
WO2011025639A3 (en) | Demolding of ophthalmic lenses during the manufacture thereof | |
FR2897006B1 (en) | LASER BEAM CUTTING PROCESS | |
TW201129855A (en) | Laser mask and sequential lateral solidification crystallization method using the same | |
WO2010097064A3 (en) | Laser crystallisation by irradiation | |
WO2010095826A3 (en) | Method for generating laser beam irradiation trajectory | |
WO2012148117A3 (en) | Selective thin film removal apparatus using divided laser beams | |
EP3745171A4 (en) | Athermal arrayed waveguide grating using precise parallel movement module, and manufacturing method therefor | |
ZA200903768B (en) | Condensing optical system, laser processing method and apparatus, and manufacturing method of brittle material blank |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 09807437 Country of ref document: EP Kind code of ref document: A2 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2009807437 Country of ref document: EP |