WO2011015650A3 - Method of producing microneedles - Google Patents

Method of producing microneedles Download PDF

Info

Publication number
WO2011015650A3
WO2011015650A3 PCT/EP2010/061477 EP2010061477W WO2011015650A3 WO 2011015650 A3 WO2011015650 A3 WO 2011015650A3 EP 2010061477 W EP2010061477 W EP 2010061477W WO 2011015650 A3 WO2011015650 A3 WO 2011015650A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
microneedle
protective
front surface
masking material
Prior art date
Application number
PCT/EP2010/061477
Other languages
French (fr)
Other versions
WO2011015650A2 (en
Inventor
Conor O'mahony
Joseph O'brien
Alan Blake
Carlo Webster
Original Assignee
University College Cork, National University Of Ireland, Cork
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University College Cork, National University Of Ireland, Cork filed Critical University College Cork, National University Of Ireland, Cork
Publication of WO2011015650A2 publication Critical patent/WO2011015650A2/en
Publication of WO2011015650A3 publication Critical patent/WO2011015650A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00111—Tips, pillars, i.e. raised structures
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/0053—Methods for producing microneedles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/055—Microneedles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0369—Static structures characterized by their profile
    • B81B2203/0384—Static structures characterized by their profile sloped profile
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0133—Wet etching

Abstract

A method of forming a microneedle device comprises the steps of coating the front and back surfaces of a substrate with a protective masking material, patterning the protective masking material to form a protective mask on the front surface of the substrate and an opening in the protective masking material on the back surface of the substrate, and simultaneously wet-etching both front and back surfaces of the substrate to provide a generally conical microneedle on the front surface of the substrate and a generally conical pit on the back surface of the substrate. The dimensions and location of the protective mask and opening are chosen so that the pyramidal pit extends from the back surface to intersect the front surface of the substrate, generally on, or adjacent to, a surface of the conical microneedle. Thus, a through-hole is formed in the substrate providing fluid communication from a rear of the substrate to a location on the front surface of the substrate, either on the microneedle surface or adjacent to a base of the microneedle.
PCT/EP2010/061477 2009-08-06 2010-08-06 Method of producing microneedles WO2011015650A2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US23173409P 2009-08-06 2009-08-06
EP09167419.2 2009-08-06
US61/231,734 2009-08-06
EP09167419 2009-08-06
IE20090840 2009-10-30
IES2009/0840 2009-10-30

Publications (2)

Publication Number Publication Date
WO2011015650A2 WO2011015650A2 (en) 2011-02-10
WO2011015650A3 true WO2011015650A3 (en) 2011-10-27

Family

ID=43544710

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2010/061477 WO2011015650A2 (en) 2009-08-06 2010-08-06 Method of producing microneedles

Country Status (1)

Country Link
WO (1) WO2011015650A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101811513B1 (en) * 2015-11-25 2017-12-20 주식회사 파이안에스테틱스 Micro spicule, Mold for Producing the Same and Method for Producing the Same
WO2019058328A1 (en) * 2017-09-22 2019-03-28 Sabic Global Technologies B.V. Microneedle arrays

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001049362A1 (en) * 2000-01-06 2001-07-12 The Regents Of The University Of California Method of forming vertical, hollow needles within a semiconductor substrate
US6558361B1 (en) * 2000-03-09 2003-05-06 Nanopass Ltd. Systems and methods for the transport of fluids through a biological barrier and production techniques for such systems
US6743211B1 (en) * 1999-11-23 2004-06-01 Georgia Tech Research Corporation Devices and methods for enhanced microneedle penetration of biological barriers
WO2006022933A2 (en) * 2004-08-05 2006-03-02 Apogee Technologies, Inc. System and method for drug delivery and microfluidic applications using microneedles
US20080063866A1 (en) * 2006-05-26 2008-03-13 Georgia Tech Research Corporation Method for Making Electrically Conductive Three-Dimensional Structures

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9815820D0 (en) 1998-07-22 1998-09-16 Secr Defence Improvements relating to micro-machining
FR2888226B1 (en) 2005-07-11 2007-12-14 Rieter Textile Machinery Fr ARRAY-SWING ARRAY DEVICE
WO2008114252A2 (en) 2007-03-18 2008-09-25 Nanopass Technologies Ltd Microneedle structures and corresponding production methods employing a backside wet etch

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6743211B1 (en) * 1999-11-23 2004-06-01 Georgia Tech Research Corporation Devices and methods for enhanced microneedle penetration of biological barriers
WO2001049362A1 (en) * 2000-01-06 2001-07-12 The Regents Of The University Of California Method of forming vertical, hollow needles within a semiconductor substrate
US6558361B1 (en) * 2000-03-09 2003-05-06 Nanopass Ltd. Systems and methods for the transport of fluids through a biological barrier and production techniques for such systems
WO2006022933A2 (en) * 2004-08-05 2006-03-02 Apogee Technologies, Inc. System and method for drug delivery and microfluidic applications using microneedles
US20080063866A1 (en) * 2006-05-26 2008-03-13 Georgia Tech Research Corporation Method for Making Electrically Conductive Three-Dimensional Structures

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
WILKE N ET AL: "Silicon microneedle electrode array with temperature monitoring for electroporation", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 123-124, 23 September 2005 (2005-09-23), pages 319 - 325, XP025325350, ISSN: 0924-4247, [retrieved on 20050923] *

Also Published As

Publication number Publication date
WO2011015650A2 (en) 2011-02-10

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