WO2011055642A1 - Mullite ceramic and method for producing same - Google Patents

Mullite ceramic and method for producing same Download PDF

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Publication number
WO2011055642A1
WO2011055642A1 PCT/JP2010/068748 JP2010068748W WO2011055642A1 WO 2011055642 A1 WO2011055642 A1 WO 2011055642A1 JP 2010068748 W JP2010068748 W JP 2010068748W WO 2011055642 A1 WO2011055642 A1 WO 2011055642A1
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Prior art keywords
particles
mullite
silica
ceramics
firing
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PCT/JP2010/068748
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French (fr)
Japanese (ja)
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梶野 仁
高文 上野
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三井金属鉱業株式会社
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Application filed by 三井金属鉱業株式会社 filed Critical 三井金属鉱業株式会社
Priority to KR1020127008702A priority Critical patent/KR101729650B1/en
Priority to JP2011539334A priority patent/JP5718239B2/en
Priority to CN201080043163.8A priority patent/CN102596850B/en
Publication of WO2011055642A1 publication Critical patent/WO2011055642A1/en

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    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/16Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
    • C04B35/18Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay rich in aluminium oxide
    • C04B35/185Mullite 3Al2O3-2SiO2
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Definitions

  • the present invention relates to mullite ceramics and a method for producing the same.
  • the mullite ceramic of the present invention is particularly useful as a refractory material such as a firing jig and a firing furnace construction member.
  • a mullite porous body with improved creep resistance and spalling resistance As a conventional technique related to mullite ceramics, a mullite porous body with improved creep resistance and spalling resistance is known (see Patent Document 1).
  • This porous body is formed by bonding mullite crystals and aggregates thereof through a binder phase mainly composed of silica.
  • This porous body can be obtained by molding a blend of alumina powder and silicon carbide powder and firing it in the range of 1550 ° C. to 1700 ° C. in an oxidizing atmosphere.
  • Patent Document 2 discloses a reaction-sintered mullite-containing ceramic molded body obtained by heat-treating a substrate formed from a finely dispersible powder mixture made of aluminum, Al 2 O 3 and Si-containing material in an oxygen-containing atmosphere. Is described. This literature describes that the mullite-containing ceramic molded body has a small shrinkage during firing.
  • the mullite ceramics described in Patent Document 1 described above has high creep resistance and high thermal shock resistance, but is not satisfactory in terms of strength.
  • the mullite ceramics described in Patent Document 2 described above has a problem that the calcite temperature is as low as less than 1700 ° C., so that a single phase of mullite cannot be obtained, and the creep resistance decreases when the thickness is reduced. .
  • An object of the present invention is to provide a mullite ceramic that can eliminate various drawbacks of the above-described conventional technology.
  • the present invention includes a mullite spherical particle having an aspect ratio of 1 or more and 2 or less and a mullite needle particle having an aspect ratio of more than 2 and 10 or less, and the average major axis of the acicular particle is a spherical particle.
  • An object of the present invention is to provide a mullite ceramic characterized in that it has an average particle diameter of 2 to 10 times and an area ratio of acicular particles / total particles of 0.03 to 0.3.
  • the present invention also provides a suitable method for producing the mullite ceramics as described above.
  • a raw material containing alumina, silica, and Si having an average particle size of 0.1 to 10 ⁇ m or a Si-containing compound (excluding silica and silicate) is subjected to reaction sintering at 1700 to 1800 ° C. in an oxygen-containing atmosphere to obtain mullite.
  • An object of the present invention is to provide a method for producing mullite ceramics characterized by producing
  • a mullite ceramic having excellent thermal shock resistance, creep resistance and high strength performance.
  • Conventionally known mullite ceramics are brick-like, and it has been difficult to make them thin enough to withstand practical use due to insufficient strength.
  • the mullite ceramics of the present invention can cope with a normal temperature strength of more than 50 MPa and a thickness of 1.5 mm or less, and a fired body having a thickness of 0.5 mm can be obtained.
  • FIG. 1 is a scanning electron microscope image of a polished cross section of mullite ceramics obtained in Example 1.
  • FIG. FIG. 2 is a scanning electron microscope image of a polished cross section of the mullite ceramics obtained in Comparative Example 2.
  • the mullite ceramic of the present invention has one of the characteristics in the shape of the particles constituting the ceramic. Specifically, when the polished cross section of mullite ceramics is magnified with a microscope, a state in which spherical particles of mullite (3Al 2 O 3 .2SiO 2 ) and acicular particles of mullite are mixed is observed. Spherical particles and acicular particles are uniformly mixed. As a result of the examination by the present inventors, mullite ceramics in which spherical particles and acicular particles are mixed has high thermal shock resistance and excellent creep resistance.
  • the spherical particle means a particle having an aspect ratio of 1 or more and 2 or less when a polished cross section of mullite ceramics is observed, and does not need to be a true sphere (hereinafter referred to as “spherical”).
  • the acicular particles are particles having an aspect ratio of more than 2 and 10 or less when a polished cross section of mullite ceramics is observed.
  • grains mentioned later mean the particle
  • acicular particles and coarse acicular particles may be recognized as spherical particles even though they are actually acicular particles, depending on how the mullite ceramics are polished. .
  • such an acicular particle that is recognized as a spherical particle is regarded as a spherical particle for the sake of convenience.
  • the relationship between the size of spherical particles and acicular particles affects the performance of mullite ceramics.
  • the average particle diameter of the spherical particles is r
  • the average major axis of the acicular particles is in the range of 2r to 10r, so that the mullite having the above-described thermal shock resistance and creep resistance is obtained. It has been found that ceramics can be obtained. If the average major axis of the needle-like particles is less than 2r, even if the aspect ratio of the needle-like particles is large, the “strut effect” that the needle-like particles enter between the spherical particles does not sufficiently develop, and creep resistance Does not improve.
  • the major axis of the acicular particles exceeds 10r, coarse defects are likely to occur between the particles in the mullite ceramics. This coarse defect contributes to a decrease in thermal shock resistance.
  • the range of the major axis of the acicular particles is particularly preferably 3r to 6r, since the thermal shock resistance and creep resistance of mullite ceramics are further improved.
  • the relative sizes of the spherical particles and the acicular particles are as described above, and it is preferable that the spherical particles themselves have an average particle size of 5 to 10 ⁇ m, particularly 6 to 9 ⁇ m.
  • the size of the acicular particles is preferably 10 to 100 ⁇ m, and more preferably 12 to 90 ⁇ m, on condition that the range of 2r to 10r is satisfied.
  • the minor axis is preferably 1 to 50 ⁇ m, more preferably 1 to 10 ⁇ m, provided that the aspect ratio (over 2 and 10 or less) is used.
  • the aspect ratio is over 2, but the upper limit needs to be 10 or less.
  • it is preferable that acicular particles having an aspect ratio of more than 10 (hereinafter, such acicular particles are referred to as “coarse acicular particles”) are not excessively contained.
  • the presence of such coarse needle-like particles causes coarse defects between particles in mullite ceramics. This coarse defect contributes to a decrease in thermal shock resistance. Needle-like particles have the effect of improving creep resistance, but needle-like particles having an aspect ratio exceeding 10 have no effect.
  • the ratio of the area of coarse needle-like particles having an aspect ratio of more than 10 to the area of all particles in the polished cross section of mullite ceramics is preferably 0.2 or less, particularly preferably 0.1 or less.
  • the presence ratio of spherical particles and acicular particles in mullite ceramics also affects the performance of mullite ceramics.
  • the acicular particles enter between the spherical particles, the “strut effect” is generated and the creep resistance is improved, but the strength is lowered by the grain growth of the acicular particles, and the thermal shock resistance tends to be lowered.
  • the abundance ratio of the spherical particles and the acicular particles is reduced so that the area ratio of acicular particles / total particles in the polished cross section of mullite ceramics is in the range of 0.03 to 0.3.
  • the polished cross section of mullite ceramics in the above description is obtained by rotating a disc grindstone sprayed with diamond slurry, for example, and pressing the mullite ceramics on the surface for polishing.
  • the average particle diameter measurement of the spherical particles and the average major axis and average minor axis of the acicular particles and coarse acicular particles are performed as follows.
  • the polished cross section has a size of at least 10 mm ⁇ 2 mm, and several SEM images of an arbitrary part are taken in an observation field of view of 200 ⁇ m ⁇ 200 ⁇ m in the polished cross section. An arbitrary straight line is drawn on each photographed image, and 100 particles crossing the straight line are selected. When the number is less than 100, this operation is repeated until 100 particles are traversed.
  • the major and minor diameters of each selected particle are measured and the aspect ratio is calculated. Specifically, the target particle is approximated to an ellipse, the length of the major axis of the ellipse is measured, this is taken as the major axis, the direction perpendicular to the major axis is taken as the minor axis, and the length Is the minor axis. Based on the major and minor axes thus determined, particles with an aspect ratio of 1 or more and 2 or less are spherical particles, particles with an aspect ratio of 10 or more are acicular particles, and particles with an aspect ratio of 10 or more are coarse needles. Classify as particles.
  • the average value of the major axis and the minor axis is defined as the average particle diameter.
  • the average major axis and the minor axis are obtained by averaging the major axis and the minor axis separately.
  • the area of the spherical particles in the polished cross section is calculated by regarding the average particle size obtained by the above method as the equivalent circle diameter.
  • the area of the acicular particles is calculated from the area ⁇ ab of the ellipse, assuming that the average major axis a and the average minor axis b of the acicular particles obtained by the above method are the major axis and minor axis of the ellipse.
  • spherical particles and needle-like particles are observed on the polished cross section, but particles having shapes other than these shapes may be observed.
  • shaped particles include particles having a sharp shape.
  • electrofused mullite particles described later which are particles used as one of the raw materials. Electrofused mullite particles are produced by pulverizing an electromelted mullite lump. By this pulverization, electrofused mullite particles having a pointed shape are generated.
  • the mullite ceramics preferably contains certain pores.
  • the apparent porosity is preferably 5 to 27%, particularly preferably 9 to 20%. By setting the apparent porosity within this range, both creep resistance and thermal shock resistance can be effectively balanced in a balanced manner.
  • the apparent porosity is measured by a vacuum method according to JIS-R2205.
  • the mullite ceramics do not include rough air holes.
  • the coarse pores mean pores having a major axis that is 5 times or more the average major axis of the acicular particles among pores observed in the polished cross section.
  • the presence of such rough air holes may cause a decrease in strength, thermal shock resistance and creep resistance of mullite ceramics.
  • the ratio of the total area of the rough air holes to the area of the observation field is preferably 0.07 or less, more preferably Is 0.05 or less.
  • the particle size and firing conditions of the raw material components may be adjusted in the method for producing mullite ceramics described later.
  • the aspect ratio of the rough air hole is 1 or more and 2 or less
  • the long diameter of the rough air hole is an average value of the long diameter and the short diameter, and when the aspect ratio of the rough air hole is more than 2, This is the major axis.
  • the area of the rough air hole is such that the polished cross section has a size of at least 10 mm ⁇ 2 mm, and an SEM image of an arbitrary part is taken with an observation visual field of 200 ⁇ m ⁇ 200 ⁇ m in the polished cross section.
  • the area of the rough air hole is obtained by calculating by the same method as the calculation of the area of the acicular particles and the area of the spherical particles described above.
  • Mullite ceramics may contain, as impurities, network modification oxides such as alkali metal oxides such as Na 2 O and alkaline earth metal oxides. Since these impurities lower the viscosity of the glass at the grain boundary and affect the creep resistance, the total amount of these impurities is 0.01-0.3% with respect to mullite ceramics using high-purity raw materials. It is preferable that the content is 0.03 to 0.25% by weight.
  • the ratio of the network modification oxide contained in mullite ceramics can be measured with a fluorescent X-ray analyzer.
  • intermediate oxides such as Fe 2 O 3 , TiO 2 , ZrO 2 , CoO, and NiO stabilize the network skeleton of the glass, suppress the decrease in the viscosity of the glass, and contribute to the improvement of creep resistance.
  • the total amount of is preferably 0.01 to 0.3% by weight with respect to mullite ceramics.
  • Mullite ceramics can be suitably produced by reacting and firing raw materials containing alumina and silica in an oxygen atmosphere to produce mullite.
  • it is effective to use Si or a Si-containing compound (excluding silica and silicate) in addition to alumina and silica in order to produce spherical particles and acicular particles in the target mullite ceramics.
  • Si or Si-containing compounds are generically referred to simply as Si-containing compounds.
  • the Si-containing compound is used to generate mullite needle-like particles during reactive sintering in the production of mullite ceramics.
  • the Si-containing compound those known as ceramic materials are used. Examples thereof include inorganic Si-containing compounds.
  • inorganic Si-containing compounds include Si-containing non-oxide compounds. Specifically, SiC, Si 3 N 4 -based materials such as Si 3 N 4 , Si 2 ON 2 and sialon can be used. Sialon is one the Si 3 N 4 material obtained by solid solution of Al 2 O 3 and SiO 2 in Si 3 N 4. Since the Si-containing compound oxidizes and expands during firing in the production of mullite ceramics, it has an effect of complementing the firing shrinkage of alumina or silica. As a result, the coarsening of pores that occur during shrinkage and the development of cracks that may occur in ceramics are suppressed, and as a result, a decrease in thermal shock resistance is also suppressed.
  • the ratio of each component in the raw material is determined in consideration of the stoichiometric ratio of alumina and silica in the target mullite ceramics. Specifically, when each component in the raw material is classified into alumina, which is a compound containing Al, and silica and Si-containing compound, which are compounds containing Si, the ratio of alumina to silica and Si-containing compound Is preferably in the range of 3: 2 to 3.5: 1.5, particularly 3.1: 1.9 to 3.4: 1.6 in terms of the molar ratio of alumina to silica.
  • the silica and the Si-containing compound in combination at this ratio, the acicular particles can be grown while preventing the coarsening of the spherical particles.
  • ⁇ -alumina or ⁇ -alumina is preferably used as alumina as one of the raw materials. It is also possible to use a mixture of these.
  • shape of the alumina particles There are no particular limitations on the shape of the alumina particles, and various shapes known in the art can be used. The shape preferably used is spherical. Regardless of the shape, alumina preferably has an average particle size of 0.1 to 20 ⁇ m, particularly 1 to 10 ⁇ m. It is desirable that alumina does not contain alkali components such as Na and K as much as possible.
  • Silica is not particularly limited in the shape of the particles, and various shapes known in the technical field can be used.
  • the shape preferably used is spherical. Regardless of the shape, silica preferably has an average particle size of 0.05 to 30 ⁇ m, particularly 0.1 to 20 ⁇ m.
  • the average particle diameters of alumina and silica are measured using, for example, a laser diffraction particle size distribution analyzer (the same applies to the Si-containing compounds described below and the mullite particles described below).
  • the particle size of the Si-containing compound particles affects the performance of the target mullite ceramics. Specifically, when the particle size of the Si-containing compound particles is too large, coarse defects are likely to occur in the resulting mullite ceramic structure. Moreover, it cannot fully oxidize, it is difficult to become a single mullite composition, and creep resistance may deteriorate. In addition, strength and thermal shock resistance are likely to decrease. On the other hand, if the particle size of the Si-containing compound particles is too small, the Si-containing compound tends to be oxidized at a low temperature range, and the generation of acicular mullite particles is difficult to be promoted. From these viewpoints, the average particle diameter of the Si-containing compound particles is 0.1 to 10 ⁇ m, preferably 1 to 10 ⁇ m. This advantageous effect is particularly remarkable when SiC is used as the Si-containing compound. Regarding the shape of the Si-containing compound particles, it is preferable to use a spherical one.
  • the above-mentioned raw material may contain mullite particles as an aggregate.
  • mullite particles By including mullite particles in the raw material, the progress of cracks that may be caused by thermal shock can be delayed by the detour effect, so that an advantageous effect that mullite ceramics can be used for a longer time is exhibited.
  • the particle size of the mullite particles contained in the raw material is too large, rough air holes are likely to be generated in the mullite ceramics, which may reduce the strength and thermal shock resistance of the mullite ceramics. Therefore, the average particle size of the mullite particles contained in the raw material is preferably 20 to 100 ⁇ m, particularly preferably 20 to 50 ⁇ m.
  • the content is preferably 15% by weight or less, particularly 10% by weight or less in the raw material from the viewpoint of improvement in strength and thermal shock resistance.
  • the target mullite ceramics can be obtained by mixing the raw materials containing the above-mentioned components and reaction firing.
  • a mixing method known in the technical field such as wet mixing, semi-wet mixing, and dry mixing can be used. From the viewpoint of reliably generating reaction sintering, it is advantageous to perform wet mixing or semi-wet mixing rather than dry mixing.
  • alumina, silica and Si-containing compounds are wet mixed using a liquid medium to form a slurry.
  • the obtained slurry is cast-molded, or granulated obtained by spray-drying the slurry is press-molded or CIP-molded and then subjected to reactive firing.
  • a known kneading apparatus for example, a media mill such as a ball mill can be used.
  • the solid content concentration in the slurry is preferably about 35 to 45% by weight.
  • a binder can also be added to the slurry.
  • a binder what is normally used in the said technical field, such as polyvinyl alcohol (PVA) and carboxymethylcellulose (CMC), for example can be used without a restriction
  • the molding pressure when performing press molding or CIP molding is preferably set to about 70 to 150 MPa.
  • alumina, silica and Si-containing compound are made into a semi-fluid using a liquid medium, and kneaded to obtain a kneaded product.
  • the solid content in the kneaded product can be preferably about 10 to 15% by weight.
  • the kneaded product is formed into a desired shape by plastic molding such as extrusion molding.
  • the reaction firing atmosphere is an oxygen-containing atmosphere such as air.
  • the temperature for the reaction firing is preferably set to 1700 to 1800 ° C., particularly 1730 to 1790 ° C.
  • the time for maintaining this firing temperature is preferably 1 to 8 hours, particularly 2 to 7 hours.
  • the average temperature increase rate when the temperature is raised to the above-described firing temperature is set to 25 to 300 ° C./h, preferably 30 to 200 ° C./h.
  • the average temperature rising rate is set within this range, it is possible to prevent the increase of pores in the ceramic and to successfully obtain a mullite ceramic having good creep resistance. If the heating rate is less than 25 ° C./h, the oxidative expansion is completed before the sintering starts, the interparticle distance increases, the sinterability decreases, and the pores increase.
  • the firing atmosphere can be air, that is, an oxygen-containing atmosphere having an oxygen concentration of about 20%.
  • the temperature of the atmosphere is 900 ° C. or higher, the oxidation of Si and the Si-containing compound becomes significant.
  • the temperature of the atmosphere becomes 900 ° C. or more due to temperature, it is preferable to reduce the oxygen concentration in the oxygen-containing atmosphere to 3% or less.
  • the lower limit value of the oxygen concentration in the oxygen-containing atmosphere is preferably more than 0.5% regardless of the temperature of the atmosphere.
  • the mullite ceramics thus obtained include, for example, furnace tools for high-temperature furnaces and atmosphere furnaces, side walls, arches, hearths; setters for firing electronic components such as lining bricks, mortars, base plates; gas generation furnaces Various chemical reactor linings; ceramic substrates; carbide furnace linings; carbon black furnace linings; glass melting furnace linings;
  • Example 1 Alumina (average particle size 8 ⁇ m, spherical), SiC (average particle size 4 ⁇ m, spherical) and silica (average particle size 0.5 ⁇ m, spherical) have a molar ratio after oxidation of 3: 0.5: 1.5. Weighed as follows. When the ratio of these components is expressed by weight ratio, it is as shown in Table 4 below. These components were wet mixed to obtain a slurry (solid content concentration: 40%). A PVA aqueous solution was used as the liquid medium for the wet mixing. This slurry was spray-dried to obtain granules having an average particle size of 50 ⁇ m.
  • FIG. 1 shows a scanning electron microscope image of the polished cross section of the obtained mullite ceramics.
  • the obtained ceramic was a single phase of mullite, and the SiC charged as a raw material was completely oxidized to form mullite, and was a sintered body particularly excellent in high creep resistance. Moreover, it had the strength which can be satisfied by thinning, and the thermal shock resistance was also excellent.
  • the specimen was removed from the furnace together with the base plate and allowed to cool. It was visually confirmed whether or not the specimen was cracked or broken.
  • the above operation was performed by increasing the temperature from 500 ° C. to 50 ° C., the upper limit of the temperature at which no cracking occurred was measured, and the value was used as an index of thermal shock resistance.
  • Example 2 to 4 mullite ceramics were obtained in the same manner as in Example 1 except that the conditions shown in Table 1 below were used. Table 1 shows the results of evaluation performed in the same manner as in Example 1.
  • SiC and silica were mixed at a blending ratio different from that in Example 1 to grow acicular crystals, and high creep resistance similar to that in Example 1 was obtained.
  • the thermal shock resistance was high as in Example 1.
  • the raw material particle size of SiC was made smaller than that in Example 1.
  • Example 3 was inferior to Example 1 in creep resistance and thermal shock resistance, it was judged that the characteristics can withstand practical use. Moreover, compared with the comparative example 5 mentioned later, high creep resistance, high thermal shock resistance, and high intensity
  • Example 4 the SiC raw material particle size was made larger than that in Example 1. Compared to Example 1, Example 4 was determined to have a thermal shock resistance that could withstand practical use, although the thermal shock resistance was inferior because the pore diameter was larger as in Comparative Example 4 described later.
  • Example 5 Using the raw materials shown in Table 1 below, a slurry (solid content concentration: 42%) was obtained by wet mixing. CMC aqueous solution was used for the liquid medium of the wet mixing. This slurry was cast to obtain a plate-like molded body. This molded body was fired by reaction at 1750 ° C. for 4 hours in an air atmosphere. The temperature rising rate at this time was 40 ° C./h. After the completion of firing, it was naturally cooled to obtain mullite ceramics having high creep resistance and high thermal shock resistance. Table 1 shows the results of evaluation performed in the same manner as in Example 1.
  • Example 6 A mullite ceramic was obtained in the same manner as in Example 1 except that the conditions shown in Table 1 below were used. Table 1 shows the results of evaluation performed in the same manner as in Example 1.
  • Example 6 compared with Example 1, the firing temperature was lowered to 1700 ° C. Although Example 6 was inferior in thermal shock resistance as compared with Example 1, it was judged to be a characteristic that could withstand practical use.
  • Example 7 high creep resistance, high thermal shock resistance, and high strength are shown.
  • Example 7 compared with Example 1, the firing temperature was increased to 1800 ° C. Although Example 7 was inferior in thermal shock resistance as compared with Example 1, it was judged to be a characteristic that could withstand practical use.
  • Example 8 compared with Example 1, the temperature increase rate was made slower. Although the thermal shock resistance of Example 8 was lower than that of Example 1, it was judged that the characteristics can withstand practical use. Moreover, since the porosity became low compared with the comparative example 7 mentioned later, the high intensity
  • Example 10 Using the raw materials shown in Table 1 below, a kneaded product having a solid content concentration of 13% was obtained with a CMC aqueous solution. A mixing stirrer was used to prepare the kneaded product. This kneaded product was extrusion molded to obtain a plate-shaped molded body. This molded body was fired by reaction at 1750 ° C. for 4 hours in an air atmosphere. The temperature rising rate at this time was 40 ° C./h. After firing, it was naturally cooled to obtain mullite ceramics having thermal shock resistance and creep resistance that could withstand practical use. Table 1 shows the results of evaluation performed in the same manner as in Example 1.
  • Example 11 to 14 A mullite ceramic was obtained in the same manner as in Example 1 except that the conditions shown in Table 2 below were used. Specifically, in Example 11, the press molding pressure was reduced to 70 MPa. In Example 12, the press molding pressure was reduced to 30 MPa, and the firing temperature was increased to 1800 ° C. In Example 13, a raw material having the composition shown in Table 4, that is, a raw material containing 10% of 220 mesh electrofused mullite particles was used. In Example 14, a high-purity raw material having a low content of alkali metal oxides such as Na 2 O was used as a raw material for mullite ceramics. Table 2 shows the results of evaluation performed on Examples 11 to 14 in the same manner as Example 1.
  • Example 11 the apparent porosity was lower than that in Example 1, and thus the creep resistance and thermal shock resistance were lowered, but the creep resistance and thermal shock resistance can withstand practical use. Value.
  • Example 12 since the press molding pressure was lowered, the raw material granules were not easily crushed, and as a result, coarse atmospheric pores generated between the granules remained. Therefore, although the thermal shock resistance is lowered, the thermal shock resistance is a value that can withstand practical use.
  • Example 13 although the strength decreased because electrofused mullite particles were added to the raw material, the thermal shock resistance and creep resistance showed the same values as in Example 1.
  • Example 14 since the content of the network modification oxide, which is an impurity, was reduced as compared with Example 1, the creep resistance was further improved.
  • Example 13 the measurement of the particle diameter aspect ratio of the spherical particles and the acicular particles shown in Table 2 was performed excluding electrofused mullite particles. In the observation of the polished cross section, the electrofused mullite particles are clearly distinguished from the spherical particles and the acicular particles in terms of shape.
  • Example 1 A mullite ceramic was obtained in the same manner as in Example 1 except that the conditions shown in Table 3 below were used. Table 3 shows the results of evaluation performed in the same manner as in Example 1. Moreover, the scanning electron microscope image of the grinding
  • Comparative Example 2 unlike Examples 1 and 2, since the raw material does not contain a Si-containing compound, there is no difference in the mullite generation rate, so that acicular particles do not grow and creep resistance is improved. Declined. In Comparative Example 3, unlike Examples 1 and 2, since the raw material does not contain silica, as in Comparative Example 2, there is no difference in the rate of mullite generation, so acicular particles do not grow and creep resistance is increased. Decreased. In Comparative Example 4, since SiC that is coarser than that in Example 1 is used, it is difficult for the oxidation of SiC to proceed.
  • Example 14 Although the network modification oxide was the same as that of Example 14, the creep resistance was lower than that of Example 14. The reason for this is thought to be that the apparent porosity has increased due to the lowering of the press molding pressure, so that the connectivity of each particle is lowered. Furthermore, since the apparent porosity increased, the thermal shock resistance was also lower than in Example 14.

Abstract

Disclosed is a mullite ceramic which is characterized by containing spherical mullite particles having an aspect ratio of 1-2 (inclusive) and needle-like mullite particles having an aspect ratio of more than 2 but 10 or less in a polishing cross-section. The mullite ceramic is also characterized in that the average length of the needle-like particles is 2-10 times the average diameter of the spherical particles and the area ratio of the needle-like particles to all the particles is 0.03-0.3. It is preferable that the area ratio of the coarse needle-like particles having an aspect ratio of more than 10 to all the particles in the polishing cross-section is 0.2 or less. It is also preferable that the mullite ceramic has an apparent porosity of 5-27%.

Description

ムライトセラミックス及びその製造方法Mullite ceramics and method for producing the same
 本発明は、ムライトセラミックス及びその製造方法に関する。本発明のムライトセラミックスは、例えば焼成用治具、焼成炉構築用部材等の耐火物として特に有用である。 The present invention relates to mullite ceramics and a method for producing the same. The mullite ceramic of the present invention is particularly useful as a refractory material such as a firing jig and a firing furnace construction member.
 ムライトセラミックスに関する従来の技術として、耐クリープ性及び耐スポーリング性を向上させたムライト質多孔体が知られている(特許文献1参照)。この多孔体は、ムライト結晶及びその凝集体を、シリカが主成分の結合相を介して結合させてなるものである。この多孔体は、アルミナ粉末と炭化珪素粉末との配合物を成形後、酸化雰囲気の下、1550℃~1700℃の範囲で焼成することで得られる。 As a conventional technique related to mullite ceramics, a mullite porous body with improved creep resistance and spalling resistance is known (see Patent Document 1). This porous body is formed by bonding mullite crystals and aggregates thereof through a binder phase mainly composed of silica. This porous body can be obtained by molding a blend of alumina powder and silicon carbide powder and firing it in the range of 1550 ° C. to 1700 ° C. in an oxidizing atmosphere.
 特許文献2には、アルミニウム、Al23及びSi含有物質からなる微分散性の粉末混合物から成形された素地を酸素含有雰囲気内で熱処理することによって得られる反応焼結したムライト含有セラミックス成形体が記載されている。このムライト含有セラミックス成形体は焼成収縮が小さいものであると、同文献には記載されている。 Patent Document 2 discloses a reaction-sintered mullite-containing ceramic molded body obtained by heat-treating a substrate formed from a finely dispersible powder mixture made of aluminum, Al 2 O 3 and Si-containing material in an oxygen-containing atmosphere. Is described. This literature describes that the mullite-containing ceramic molded body has a small shrinkage during firing.
JP2003-137671AJP2003-137671A US5843859AUS5843859A
 セラミックス製の電子部品を初めとして、セラミックスの焼成において、省エネルギー及び低コストを目的として、薄肉・軽量でありながら、ある程度の高強度、耐クリープ性及び耐熱衝撃性の高い窯道具が求められている。しかしながら、上述の特許文献1に記載のムライトセラミックスは、高い耐クリープ性及び高耐熱衝撃性ではあるが、強度面では満足すべき性能ではなかった。また、上述の特許文献2に記載のムライトセラミックスは、焼成温度が1700℃未満と低いため、ムライトの単一相が得られず、薄肉化の際に、耐クリープ性が低下する問題があった。 There is a need for kiln tools that have high strength, creep resistance, and thermal shock resistance while being thin and lightweight for the purpose of energy saving and low cost in firing ceramics, including ceramic electronic parts. . However, the mullite ceramics described in Patent Document 1 described above has high creep resistance and high thermal shock resistance, but is not satisfactory in terms of strength. Further, the mullite ceramics described in Patent Document 2 described above has a problem that the calcite temperature is as low as less than 1700 ° C., so that a single phase of mullite cannot be obtained, and the creep resistance decreases when the thickness is reduced. .
 発明の目的は、前述した従来技術が有する種々の欠点を解消し得るムライトセラミックスを提供することにある。 An object of the present invention is to provide a mullite ceramic that can eliminate various drawbacks of the above-described conventional technology.
 本発明は、研磨断面において、アスペクト比が1以上2以下であるムライトの球状粒子及びアスペクト比が2超10以下であるムライトの針状粒子を含み、かつ針状粒子の平均長径が球状粒子の平均粒径の2~10倍であり、針状粒子/全粒子の面積比が0.03~0.3であることを特徴とするムライトセラミックスを提供するものである。 The present invention includes a mullite spherical particle having an aspect ratio of 1 or more and 2 or less and a mullite needle particle having an aspect ratio of more than 2 and 10 or less, and the average major axis of the acicular particle is a spherical particle. An object of the present invention is to provide a mullite ceramic characterized in that it has an average particle diameter of 2 to 10 times and an area ratio of acicular particles / total particles of 0.03 to 0.3.
 また本発明は、前記のムライトセラミックスの好適な製造方法として、
 アルミナ、シリカ、及び平均粒径0.1~10μmであるSi又はSi含有化合物(ただしシリカ及びシリケートを除く。)を含む原料を、酸素含有雰囲気下に1700~1800℃で反応焼結させ、ムライトを生成させることを特徴とするムライトセラミックスの製造方法を提供することにある。
The present invention also provides a suitable method for producing the mullite ceramics as described above.
A raw material containing alumina, silica, and Si having an average particle size of 0.1 to 10 μm or a Si-containing compound (excluding silica and silicate) is subjected to reaction sintering at 1700 to 1800 ° C. in an oxygen-containing atmosphere to obtain mullite. An object of the present invention is to provide a method for producing mullite ceramics characterized by producing
 本発明によれば、優れた耐熱衝撃性、耐クリープ性及び高強度の性能を備えたムライトセラミックスが提供される。従来知られていたムライトセラミックスは、レンガ質であり、強度不足に起因して実用に耐え得る薄肉形状とすることが困難であった。本発明のムライトセラミックスは、常温強度50MPaを超え、厚み1.5mm以下にも対応することができ、最薄0.5mmの焼成体も得ることができる。 According to the present invention, there is provided a mullite ceramic having excellent thermal shock resistance, creep resistance and high strength performance. Conventionally known mullite ceramics are brick-like, and it has been difficult to make them thin enough to withstand practical use due to insufficient strength. The mullite ceramics of the present invention can cope with a normal temperature strength of more than 50 MPa and a thickness of 1.5 mm or less, and a fired body having a thickness of 0.5 mm can be obtained.
図1は、実施例1で得られたムライトセラミックスの研磨断面の走査型電子顕微鏡像である。1 is a scanning electron microscope image of a polished cross section of mullite ceramics obtained in Example 1. FIG. 図2は、比較例2で得られたムライトセラミックスの研磨断面の走査型電子顕微鏡像である。FIG. 2 is a scanning electron microscope image of a polished cross section of the mullite ceramics obtained in Comparative Example 2.
 以下本発明を、その好ましい実施形態に基づき説明する。本発明のムライトセラミックスは、該セラミックスを構成する粒子の形状に特徴の一つを有する。詳細には、ムライトセラミックスは、その研磨断面を顕微鏡で拡大すると、ムライト(3Al23・2SiO2)の球状粒子とムライトの針状粒子とが混在している状態が観察される。球状粒子と針状粒子とは均一に混在している。球状粒子と針状粒子とが混在したムライトセラミックスは、耐熱衝撃性が高くなり、かつ耐クリープ性に優れることが本発明者らの検討の結果判明した。ここで球状粒子とは、ムライトセラミックスの研磨断面を観察したときに、アスペクト比が1以上2以下である粒子のことをいい、真球であることを要しない(以下、「球状」というときの意味はこれに同じである。)。一方、針状粒子とは、ムライトセラミックスの研磨断面を観察したときに、アスペクト比が2超10以下である粒子のことを言う。また、後述する粗大針状粒子とは、ムライトセラミックスの研磨断面を観察したときに、アスペクト比が10超である粒子のことをいう。 Hereinafter, the present invention will be described based on preferred embodiments thereof. The mullite ceramic of the present invention has one of the characteristics in the shape of the particles constituting the ceramic. Specifically, when the polished cross section of mullite ceramics is magnified with a microscope, a state in which spherical particles of mullite (3Al 2 O 3 .2SiO 2 ) and acicular particles of mullite are mixed is observed. Spherical particles and acicular particles are uniformly mixed. As a result of the examination by the present inventors, mullite ceramics in which spherical particles and acicular particles are mixed has high thermal shock resistance and excellent creep resistance. Here, the spherical particle means a particle having an aspect ratio of 1 or more and 2 or less when a polished cross section of mullite ceramics is observed, and does not need to be a true sphere (hereinafter referred to as “spherical”). The meaning is the same.) On the other hand, the acicular particles are particles having an aspect ratio of more than 2 and 10 or less when a polished cross section of mullite ceramics is observed. Moreover, the coarse needle-like particle | grains mentioned later mean the particle | grains whose aspect-ratio is more than 10 when observing the grinding | polishing cross section of mullite ceramics.
 なお、針状粒子及び後述する粗大針状粒子に関しては、ムライトセラミックスの研磨断面の調製のしかたによっては、実際は針状粒子であるにもかかわらず、球状粒子のように認識してしまう場合がある。そのような見かけ上球状粒子に認識される針状粒子は、本発明においては便宜的に球状粒子とみなすこととする。 Note that acicular particles and coarse acicular particles, which will be described later, may be recognized as spherical particles even though they are actually acicular particles, depending on how the mullite ceramics are polished. . In the present invention, such an acicular particle that is recognized as a spherical particle is regarded as a spherical particle for the sake of convenience.
 球状粒子と針状粒子との大きさの関係は、ムライトセラミックスの性能に影響を及ぼす。本発明者らの検討の結果、球状粒子の平均粒径をrとしたとき、針状粒子の平均長径が2r~10rの範囲であることで、上述した耐熱衝撃性や耐クリープ性を有するムライトセラミックスが得られることが判明した。針状粒子の平均長径が2rに満たないと、該針状粒子のアスペクト比が大きい場合であっても、針状粒子が球状粒子間に入り込む「筋交い効果」が十分に発現せず、耐クリープ性が向上しない。一方、針状粒子の長径が10rを超えると、ムライトセラミックスにおける粒子間に粗大欠陥が生じやすくなる。この粗大欠陥は耐熱衝撃性の低下の一因となる。針状粒子の長径の範囲が特に3r~6rであると、ムライトセラミックスの耐熱衝撃性や耐クリープ性が一層向上するので好ましい。 The relationship between the size of spherical particles and acicular particles affects the performance of mullite ceramics. As a result of the study by the present inventors, when the average particle diameter of the spherical particles is r, the average major axis of the acicular particles is in the range of 2r to 10r, so that the mullite having the above-described thermal shock resistance and creep resistance is obtained. It has been found that ceramics can be obtained. If the average major axis of the needle-like particles is less than 2r, even if the aspect ratio of the needle-like particles is large, the “strut effect” that the needle-like particles enter between the spherical particles does not sufficiently develop, and creep resistance Does not improve. On the other hand, when the major axis of the acicular particles exceeds 10r, coarse defects are likely to occur between the particles in the mullite ceramics. This coarse defect contributes to a decrease in thermal shock resistance. The range of the major axis of the acicular particles is particularly preferably 3r to 6r, since the thermal shock resistance and creep resistance of mullite ceramics are further improved.
 球状粒子と針状粒子との相対的な大きさは上述のとおりであるところ、球状粒子の大きさそのものは、平均粒径が5~10μm、特に6~9μmであることが好ましい。一方、針状粒子の大きさそのものは、上述した2r~10rの範囲を満たすことを条件として、長径が10~100μm、特に12~90μmであることが好ましい。一方、短径は、上述したアスペクト比(2超10以下)であることを条件として、1~50μm、特に1~10μmであることが好ましい。 The relative sizes of the spherical particles and the acicular particles are as described above, and it is preferable that the spherical particles themselves have an average particle size of 5 to 10 μm, particularly 6 to 9 μm. On the other hand, the size of the acicular particles is preferably 10 to 100 μm, and more preferably 12 to 90 μm, on condition that the range of 2r to 10r is satisfied. On the other hand, the minor axis is preferably 1 to 50 μm, more preferably 1 to 10 μm, provided that the aspect ratio (over 2 and 10 or less) is used.
 針状粒子に関しては、上述のとおり、そのアスペクト比は2超であるところ、その上限は10以下とすることが必要である。換言すれば、10超のアスペクト比を有する針状粒子(以下、このような針状粒子を「粗大針状粒子」という)が過剰に含まれていないことが好ましい。このような粗大針状粒子の存在は、ムライトセラミックスにおける粒子間に粗大欠陥を生じさせる原因となる。この粗大欠陥は耐熱衝撃性の低下の一因となるものである。また針状粒子は耐クリープ性を向上させる効果があるが、アスペクト比が10を超える針状粒子にはその効果がない。この観点から、ムライトセラミックスの研磨断面におけるアスペクト比10超の粗大針状粒子の面積/全粒子の面積の比を0.2以下、特に0.1以下とすることが好ましい。 Regarding the acicular particles, as described above, the aspect ratio is over 2, but the upper limit needs to be 10 or less. In other words, it is preferable that acicular particles having an aspect ratio of more than 10 (hereinafter, such acicular particles are referred to as “coarse acicular particles”) are not excessively contained. The presence of such coarse needle-like particles causes coarse defects between particles in mullite ceramics. This coarse defect contributes to a decrease in thermal shock resistance. Needle-like particles have the effect of improving creep resistance, but needle-like particles having an aspect ratio exceeding 10 have no effect. From this viewpoint, the ratio of the area of coarse needle-like particles having an aspect ratio of more than 10 to the area of all particles in the polished cross section of mullite ceramics is preferably 0.2 or less, particularly preferably 0.1 or less.
 球状粒子と針状粒子との相対的な大きさに加えて、ムライトセラミックス中における球状粒子と針状粒子との存在割合も、ムライトセラミックスの性能に影響を及ぼす。球状粒子間に針状粒子が入り込むことで、「筋交い効果」が生じて耐クリープ性が向上するが、針状粒子の粒成長によって強度が低下し、耐熱衝撃性が低下する傾向にある。これに対し、検討の結果、ムライトセラミックスの研磨断面における針状粒子/全粒子の面積比が0.03~0.3の範囲内となるように、球状粒子と針状粒子との存在割合を調整することで、耐熱衝撃性と耐クリープ性が両立するムライトセラミックスが得られることが判明した。この面積比がこの範囲が特に0.05~0.25であると、ムライトセラミックスの耐熱衝撃性や耐クリープ性が一層向上するので好ましい。 In addition to the relative sizes of spherical particles and acicular particles, the presence ratio of spherical particles and acicular particles in mullite ceramics also affects the performance of mullite ceramics. When the acicular particles enter between the spherical particles, the “strut effect” is generated and the creep resistance is improved, but the strength is lowered by the grain growth of the acicular particles, and the thermal shock resistance tends to be lowered. On the other hand, as a result of the study, the abundance ratio of the spherical particles and the acicular particles is reduced so that the area ratio of acicular particles / total particles in the polished cross section of mullite ceramics is in the range of 0.03 to 0.3. By adjusting, it was found that mullite ceramics having both thermal shock resistance and creep resistance can be obtained. When the area ratio is in this range of 0.05 to 0.25, the thermal shock resistance and creep resistance of mullite ceramics are further improved, which is preferable.
 上述の説明におけるムライトセラミックスの研磨断面は、例えばダイヤモンドスラリーを噴霧した円板砥石を回転させ、その面にムライトセラミックスを押しつけて研磨することで得られる。 The polished cross section of mullite ceramics in the above description is obtained by rotating a disc grindstone sprayed with diamond slurry, for example, and pressing the mullite ceramics on the surface for polishing.
 上述のようにして得られたムライトセラミックスの研磨断面を観察する場合には、例えば走査型電子顕微鏡(SEM)を用いた拡大観察を行う。球状粒子の平均粒径測定、並びに針状粒子及び粗大針状粒子の平均長径及び平均短径の測定は、次のようにして行う。研磨断面はその大きさを少なくとも10mm×2mmとし、その研磨断面における200μm×200μmの観察視野で任意の部位のSEM像を数カ所撮影する。撮影された像にそれぞれ任意の直線を描き、該直線を横切る100個の粒子を選択する。100個に満たない場合は、この操作を繰り返して、横切る粒子が100個になるまで行う。選択された各粒子の長径及び短径を測定して、アスペクト比を計算する。具体的には、対象とする粒子を楕円形に近似し、その楕円形の長軸の長さを測定し、これを長径とするとともに、長軸と直交する方向を短軸とし、その長さを短径とする。このようにして求められた長軸及び短軸に基づき、アスペクト比が1以上2以下である粒子を球状粒子、2超10以下である粒子を針状粒子、10超である粒子を粗大針状粒子と分類する。球状粒子の場合、長径と短径の平均値を平均粒径とする。針状粒子及び粗大針状粒子の場合は、長径と短径をそれぞれ別個に平均することで平均長径と平均短径を求める。 When observing the polished cross section of the mullite ceramics obtained as described above, magnified observation using, for example, a scanning electron microscope (SEM) is performed. The average particle diameter measurement of the spherical particles and the average major axis and average minor axis of the acicular particles and coarse acicular particles are performed as follows. The polished cross section has a size of at least 10 mm × 2 mm, and several SEM images of an arbitrary part are taken in an observation field of view of 200 μm × 200 μm in the polished cross section. An arbitrary straight line is drawn on each photographed image, and 100 particles crossing the straight line are selected. When the number is less than 100, this operation is repeated until 100 particles are traversed. The major and minor diameters of each selected particle are measured and the aspect ratio is calculated. Specifically, the target particle is approximated to an ellipse, the length of the major axis of the ellipse is measured, this is taken as the major axis, the direction perpendicular to the major axis is taken as the minor axis, and the length Is the minor axis. Based on the major and minor axes thus determined, particles with an aspect ratio of 1 or more and 2 or less are spherical particles, particles with an aspect ratio of 10 or more are acicular particles, and particles with an aspect ratio of 10 or more are coarse needles. Classify as particles. In the case of spherical particles, the average value of the major axis and the minor axis is defined as the average particle diameter. In the case of needle-like particles and coarse needle-like particles, the average major axis and the minor axis are obtained by averaging the major axis and the minor axis separately.
 研磨断面における球状粒子の面積は、上述の方法で求められた平均粒径を円相当直径とみなして計算する。針状粒子の面積は、上述の方法で求められた針状粒子の平均長径a及び平均短径bを楕円の長径及び短径とみなし、楕円の面積πabから算出する。 The area of the spherical particles in the polished cross section is calculated by regarding the average particle size obtained by the above method as the equivalent circle diameter. The area of the acicular particles is calculated from the area πab of the ellipse, assuming that the average major axis a and the average minor axis b of the acicular particles obtained by the above method are the major axis and minor axis of the ellipse.
 ムライトセラミックスの研磨断面を観察したときに、該研磨断面に、上述の球状粒子及び針状粒子のみしか観察されてないことが好ましいが、これらの形状以外の形状を有する粒子が観察されてもよい。そのような形状の粒子としては、角のとがった形状を有する粒子等が挙げられる。該粒子の具体例としては、原料の一つとして用いられる粒子である、後述する電融ムライト粒子が挙げられる。電融ムライト粒子は、電融ムライト塊を粉砕することによって製造される。この粉砕によって、角のとがった形状を有する電融ムライト粒子が生じる。 When observing a polished cross section of mullite ceramics, it is preferable that only the above-mentioned spherical particles and needle-like particles are observed on the polished cross section, but particles having shapes other than these shapes may be observed. . Examples of such shaped particles include particles having a sharp shape. Specific examples of the particles include electrofused mullite particles described later, which are particles used as one of the raw materials. Electrofused mullite particles are produced by pulverizing an electromelted mullite lump. By this pulverization, electrofused mullite particles having a pointed shape are generated.
 ムライトセラミックスには、ある一定の気孔が含まれることが好ましい。その見掛け気孔率は5~27%、特に9~20%の範囲が好ましい。この範囲の見掛け気孔率とすることで、耐クリープ性と耐熱衝撃性を効果的にバランスよく両立させることができる。見掛け気孔率は、JIS-R2205に準じ真空法によって測定される。 The mullite ceramics preferably contains certain pores. The apparent porosity is preferably 5 to 27%, particularly preferably 9 to 20%. By setting the apparent porosity within this range, both creep resistance and thermal shock resistance can be effectively balanced in a balanced manner. The apparent porosity is measured by a vacuum method according to JIS-R2205.
 また、ムライトセラミックスには粗大気孔が含まれないことが好ましい。粗大気孔とは、研磨断面において観察される気孔の中で、前記の針状粒子の平均長径の5倍以上の長径を有する気孔を言う。このような粗大気孔の存在は、ムライトセラミックスの強度、耐熱衝撃性及び耐クリープ性を低下させる原因となる場合がある。この観点から、ムライトセラミックスの研磨断面において、観察視野の面積に対する粗大気孔の面積の総和の割合(すなわち、粗大気孔の面積の総和/観察視野の面積)を、好ましくは0.07以下、更に好ましくは0.05以下にする。粗大気孔の形成を抑制するためには、後述するムライトセラミックスの製造方法において、原料成分の粒径及び焼成条件を調整すればよい。粗大気孔の長径とは、該粗大気孔のアスペクト比が1以上2以下である場合は、長径と短径との平均値のことであり、該粗大気孔のアスペクト比が2超である場合は、当該長径のことである。 Further, it is preferable that the mullite ceramics do not include rough air holes. The coarse pores mean pores having a major axis that is 5 times or more the average major axis of the acicular particles among pores observed in the polished cross section. The presence of such rough air holes may cause a decrease in strength, thermal shock resistance and creep resistance of mullite ceramics. From this point of view, in the polished cross section of mullite ceramics, the ratio of the total area of the rough air holes to the area of the observation field (that is, the total area of the rough air holes / the area of the observation field) is preferably 0.07 or less, more preferably Is 0.05 or less. In order to suppress the formation of rough atmospheric pores, the particle size and firing conditions of the raw material components may be adjusted in the method for producing mullite ceramics described later. When the aspect ratio of the rough air hole is 1 or more and 2 or less, the long diameter of the rough air hole is an average value of the long diameter and the short diameter, and when the aspect ratio of the rough air hole is more than 2, This is the major axis.
 粗大気孔の面積は、研磨断面はその大きさを少なくとも10mm×2mmとし、その研磨断面における200μm×200μmの観察視野で任意の部位のSEM像を撮影し、撮影された観察視野に存在するすべての粗大気孔の面積を、先に述べた針状粒子の面積及び球状粒子の面積の算出と同様の方法で算出することで求める。 The area of the rough air hole is such that the polished cross section has a size of at least 10 mm × 2 mm, and an SEM image of an arbitrary part is taken with an observation visual field of 200 μm × 200 μm in the polished cross section. The area of the rough air hole is obtained by calculating by the same method as the calculation of the area of the acicular particles and the area of the spherical particles described above.
 ムライトセラミックスには不純物として、例えばNa2Oを始めとするアルカリ金属の酸化物やアルカリ土類金属の酸化物等の網目修飾酸化物が含有されることがある。これらの不純物は、粒界のガラスの粘性を下げて耐クリープ性の低下に影響を及ぼすため、高純度の原料を用いて、それらの総量を、ムライトセラミックスに対して0.01~0.3重量%、特に0.03~0.25重量%とすることが好ましい。ムライトセラミックスに含まれる網目修飾酸化物の割合は、蛍光X線分析装置によって測定することができる。また、Fe23、TiO2、ZrO2、CoO、NiOなどの中間酸化物は、ガラスの網目骨格を安定化させてガラスの粘性低下を抑制し、耐クリープ性向上に寄与するため、それらの総量が、ムライトセラミックスに対して0.01~0.3重量%となるように含有されることが好ましい。 Mullite ceramics may contain, as impurities, network modification oxides such as alkali metal oxides such as Na 2 O and alkaline earth metal oxides. Since these impurities lower the viscosity of the glass at the grain boundary and affect the creep resistance, the total amount of these impurities is 0.01-0.3% with respect to mullite ceramics using high-purity raw materials. It is preferable that the content is 0.03 to 0.25% by weight. The ratio of the network modification oxide contained in mullite ceramics can be measured with a fluorescent X-ray analyzer. In addition, intermediate oxides such as Fe 2 O 3 , TiO 2 , ZrO 2 , CoO, and NiO stabilize the network skeleton of the glass, suppress the decrease in the viscosity of the glass, and contribute to the improvement of creep resistance. The total amount of is preferably 0.01 to 0.3% by weight with respect to mullite ceramics.
 次に、本発明のムライトセラミックスの好適な方法について説明する。ムライトセラミックスは、アルミナ及びシリカを含む原料を酸素雰囲気下に反応焼成してムライトを生成させることによって好適に製造することができる。特に、目的とするムライトセラミックス中に、球状粒子及び針状粒子を生成させるためには、アルミナ及びシリカに加え、Si又はSi含有化合物(ただしシリカ及びシリケートを除く。)を用いることが有効であることが、本発明者らの検討の結果判明した(以下の説明では、簡便のためSi又はSi含有化合物を総称して、単にSi含有化合物という。)。詳細には、アルミナとシリカの反応焼結において、シリカの一部をSi含有化合物で置き換えることで、ムライトの生成速度に差を設け、それによって針状粒子を容易に生成させ得ることが判明した。詳細には、シリカの一部をSi含有化合物で置き換えると、反応焼結時に、ムライトの針状粒子が局所的に成長する一方、該針状粒子の周囲に位置する球状粒子は粒成長の程度が低くなる。その結果、耐クリープ性や耐熱衝撃性の高いムライトセラミックスが容易に得られる。Si含有化合物を用いず、アルミナとシリカのみで反応焼結を行うと、針状粒子の成長よりも、球状粒子の粗大化が優先して生じてしまう。その結果、得られるムライトセラミックスは強度低下を招き、耐熱衝撃性に劣るものとなってしまう。また、針状粒子の成長が少ないため、「筋交い効果」が生じにくくなり、耐クリープ性が低下する。 Next, a preferred method for the mullite ceramics of the present invention will be described. Mullite ceramics can be suitably produced by reacting and firing raw materials containing alumina and silica in an oxygen atmosphere to produce mullite. In particular, it is effective to use Si or a Si-containing compound (excluding silica and silicate) in addition to alumina and silica in order to produce spherical particles and acicular particles in the target mullite ceramics. As a result of the study by the present inventors, in the following description, for the sake of simplicity, Si or Si-containing compounds are generically referred to simply as Si-containing compounds. Specifically, it has been found that, in the reactive sintering of alumina and silica, by replacing part of the silica with a Si-containing compound, a difference in the mullite generation rate can be provided, whereby needle-like particles can be easily generated. . Specifically, when a part of the silica is replaced with a Si-containing compound, the mullite needle-like particles grow locally during reaction sintering, while the spherical particles located around the needle-like particles have a degree of grain growth. Becomes lower. As a result, mullite ceramics with high creep resistance and high thermal shock resistance can be easily obtained. When reaction sintering is performed using only alumina and silica without using a Si-containing compound, the coarsening of spherical particles is given priority over the growth of acicular particles. As a result, the obtained mullite ceramics causes a decrease in strength and is inferior in thermal shock resistance. Further, since the growth of the acicular particles is small, the “bracing effect” is less likely to occur, and the creep resistance is reduced.
 Si含有化合物は、上述のとおり、ムライトセラミックスの製造における反応焼結時に、ムライトの針状粒子を生成させるために用いられるものである。Si含有化合物としては、セラミックス材料として知られているものが用いられる。その例としては、無機Si含有化合物が挙げられる。無機Si含有化合物としては、Si含有非酸化物化合物が挙げられる。具体的には、SiCや、Si34、Si2ON2及びサイアロンなどのSi34系材料などが挙げられる。サイアロンは、Si34にAl23及びSiO2を固溶させて得られるSi34系材料の一つである。Si含有化合物は、ムライトセラミックスの製造における焼成中に酸化膨張するので、アルミナやシリカの焼成収縮を補完する効果がある。その結果、収縮の際に生ずる気孔の粗大化や、セラミックスに生じることのある亀裂の進展が抑制され、ひいては耐熱衝撃性の低下も抑制される。 As described above, the Si-containing compound is used to generate mullite needle-like particles during reactive sintering in the production of mullite ceramics. As the Si-containing compound, those known as ceramic materials are used. Examples thereof include inorganic Si-containing compounds. Examples of inorganic Si-containing compounds include Si-containing non-oxide compounds. Specifically, SiC, Si 3 N 4 -based materials such as Si 3 N 4 , Si 2 ON 2 and sialon can be used. Sialon is one the Si 3 N 4 material obtained by solid solution of Al 2 O 3 and SiO 2 in Si 3 N 4. Since the Si-containing compound oxidizes and expands during firing in the production of mullite ceramics, it has an effect of complementing the firing shrinkage of alumina or silica. As a result, the coarsening of pores that occur during shrinkage and the development of cracks that may occur in ceramics are suppressed, and as a result, a decrease in thermal shock resistance is also suppressed.
 原料における各成分の比率は、目的とするムライトセラミックスにおけるアルミナとシリカとの量論比を考慮して決定される。具体的には、原料における各成分を、Alを含有する化合物であるアルミナと、Siを含有する化合物であるシリカ及びSi含有化合物とに分類したとき、アルミナと、シリカ及びSi含有化合物との比率を、アルミナとシリカのモル比に換算して、3:2~3.5:1.5、特に3.1:1.9~3.4:1.6とすることが好ましい。 The ratio of each component in the raw material is determined in consideration of the stoichiometric ratio of alumina and silica in the target mullite ceramics. Specifically, when each component in the raw material is classified into alumina, which is a compound containing Al, and silica and Si-containing compound, which are compounds containing Si, the ratio of alumina to silica and Si-containing compound Is preferably in the range of 3: 2 to 3.5: 1.5, particularly 3.1: 1.9 to 3.4: 1.6 in terms of the molar ratio of alumina to silica.
 原料中におけるシリカとSi含有化合物との比率は、Siのモル比に換算して、シリカ:Si含有化合物=0.1:1.9~1.9:0.1、特に0.5:1.5~1.5:0.5とすることが好ましい。この比率でシリカとSi含有化合物とを併用することで、球状粒子の粗大化を防止しつつ、針状粒子を成長させることができる。また、Si含有化合物の有する耐熱性によって組織の結晶性が低下することや、それに起因する気孔の増大及び耐クリープ性の低下を、効果的に防止することができる。 The ratio of the silica and the Si-containing compound in the raw material is calculated by converting the molar ratio of Si to silica: Si-containing compound = 0.1: 1.9 to 1.9: 0.1, particularly 0.5: 1. .5 to 1.5: 0.5 is preferable. By using the silica and the Si-containing compound in combination at this ratio, the acicular particles can be grown while preventing the coarsening of the spherical particles. Moreover, it is possible to effectively prevent the crystallinity of the structure from decreasing due to the heat resistance of the Si-containing compound, and the increase in pores and the decrease in creep resistance resulting therefrom.
 原料の一つであるアルミナとしては、α-アルミナやγ-アルミナが好適に用いられる。これらの混合物を用いることも差し支えない。アルミナの粒子の形状に特に制限はなく、当該技術分野で知られている様々な形状のものを用いることができる。特に好ましく用いられる形状は球状である。形状にかかわらず、アルミナはその平均粒径が、0.1~20μm、特に1~10μmであることが好ましい。アルミナは、NaやK等のアルカリ成分を極力含まないことが望ましい。 Α-alumina or γ-alumina is preferably used as alumina as one of the raw materials. It is also possible to use a mixture of these. There are no particular limitations on the shape of the alumina particles, and various shapes known in the art can be used. The shape preferably used is spherical. Regardless of the shape, alumina preferably has an average particle size of 0.1 to 20 μm, particularly 1 to 10 μm. It is desirable that alumina does not contain alkali components such as Na and K as much as possible.
 シリカもその粒子の形状に特に制限はなく、当該技術分野で知られている様々な形状のものを用いることができる。特に好ましく用いられる形状は球状である。形状にかかわらず、シリカはその平均粒径が、0.05~30μm、特に0.1~20μmであることが好ましい。 Silica is not particularly limited in the shape of the particles, and various shapes known in the technical field can be used. The shape preferably used is spherical. Regardless of the shape, silica preferably has an average particle size of 0.05 to 30 μm, particularly 0.1 to 20 μm.
 アルミナ及びシリカの平均粒径は、例えばレーザー回折式粒度分布測定装置を用いて測定される(以下に述べるSi含有化合物及び以下に述べるムライト粒子についても同様である)。 The average particle diameters of alumina and silica are measured using, for example, a laser diffraction particle size distribution analyzer (the same applies to the Si-containing compounds described below and the mullite particles described below).
 Si含有化合物の粒子の粒径は、目的とするムライトセラミックスの性能に影響を及ぼす。詳細には、Si含有化合物の粒子の粒径が大きすぎると、得られるムライトセラミックスの組織に粗大欠陥が生じやすくなる。また十分に酸化できず、単一ムライト組成になりにくく耐クリープ性が悪化することがある。更に、強度低下や耐熱衝撃性の低下が起こりやすくなる。逆にSi含有化合物の粒子の粒径が小さすぎると、低温域でSi含有化合物の酸化が始まる傾向にあり、針状のムライト粒子の生成が促進されづらくなる。これらの観点から、Si含有化合物の粒子の平均粒径を0.1~10μmとし、好ましくは1~10μmとする。この有利な効果は、Si含有化合物として特にSiCを用いた場合に顕著である。Si含有化合物の粒子の形状に関しては、球状のものを用いることが好ましい。 The particle size of the Si-containing compound particles affects the performance of the target mullite ceramics. Specifically, when the particle size of the Si-containing compound particles is too large, coarse defects are likely to occur in the resulting mullite ceramic structure. Moreover, it cannot fully oxidize, it is difficult to become a single mullite composition, and creep resistance may deteriorate. In addition, strength and thermal shock resistance are likely to decrease. On the other hand, if the particle size of the Si-containing compound particles is too small, the Si-containing compound tends to be oxidized at a low temperature range, and the generation of acicular mullite particles is difficult to be promoted. From these viewpoints, the average particle diameter of the Si-containing compound particles is 0.1 to 10 μm, preferably 1 to 10 μm. This advantageous effect is particularly remarkable when SiC is used as the Si-containing compound. Regarding the shape of the Si-containing compound particles, it is preferable to use a spherical one.
 また、上述の原料はムライト粒子を骨材として含有していてもよい。原料中にムライト粒子を含有させることにより、熱衝撃によって生じることのある亀裂の進展を、迂回効果により遅らせることができるので、ムライトセラミックスをより長く使用できるという有利な効果が奏される。原料に含まれるムライト粒子の粒径が大きすぎると、ムライトセラミックスに粗大気孔が生じやすくなるので、ムライトセラミックスの強度及び耐熱衝撃性が低下するおそれがある。そこで、原料中に含有されるムライト粒子の平均粒径は20~100μm、特に20~50μmであることが好ましい。原料がムライト粒子を含有する場合、その含有量は、原料中に15重量%以下、特に10重量%以下とすることが、強度及び耐熱衝撃性の向上の点から好ましい。 Moreover, the above-mentioned raw material may contain mullite particles as an aggregate. By including mullite particles in the raw material, the progress of cracks that may be caused by thermal shock can be delayed by the detour effect, so that an advantageous effect that mullite ceramics can be used for a longer time is exhibited. If the particle size of the mullite particles contained in the raw material is too large, rough air holes are likely to be generated in the mullite ceramics, which may reduce the strength and thermal shock resistance of the mullite ceramics. Therefore, the average particle size of the mullite particles contained in the raw material is preferably 20 to 100 μm, particularly preferably 20 to 50 μm. When the raw material contains mullite particles, the content is preferably 15% by weight or less, particularly 10% by weight or less in the raw material from the viewpoint of improvement in strength and thermal shock resistance.
 上述の各成分を含む原料を混合し、反応焼成することで、目的とするムライトセラミックスが得られる。各成分の混合には、湿式混合、半湿式混合、乾式混合など、当該技術分野において公知の混合法を用いることができる。反応焼結を確実に生じさせる観点からは、乾式混合を行うよりも、湿式混合や半湿式混合を行うことが有利である。 The target mullite ceramics can be obtained by mixing the raw materials containing the above-mentioned components and reaction firing. For mixing each component, a mixing method known in the technical field such as wet mixing, semi-wet mixing, and dry mixing can be used. From the viewpoint of reliably generating reaction sintering, it is advantageous to perform wet mixing or semi-wet mixing rather than dry mixing.
 湿式混合を行う場合には、アルミナ、シリカ及びSi含有化合物を、液媒体を用いて湿式混合してスラリー化する。得られたスラリーは、これを鋳込成形するか、又は該スラリーを噴霧乾燥して得られた顆粒をプレス成形又はCIP成形した後に反応焼成を行う。湿式混合に用いる装置としては、公知の混練装置、例えばボールミル等のメディアミルを用いることができる。スラリー中の固形分濃度は、好ましくは35~45重量%程度とすることができる。スラリー中にはバインダを添加することもできる。バインダとしては、例えばポリビニルアルコール(PVA)やカルボキシメチルセルロース(CMC)など、当該技術分野において通常用いられているものを、特に制限なく用いることができる。プレス成形やCIP成形を行う場合の成形圧は、好ましくは70~150MPa程度に設定する。 When wet mixing is performed, alumina, silica and Si-containing compounds are wet mixed using a liquid medium to form a slurry. The obtained slurry is cast-molded, or granulated obtained by spray-drying the slurry is press-molded or CIP-molded and then subjected to reactive firing. As an apparatus used for wet mixing, a known kneading apparatus, for example, a media mill such as a ball mill can be used. The solid content concentration in the slurry is preferably about 35 to 45% by weight. A binder can also be added to the slurry. As a binder, what is normally used in the said technical field, such as polyvinyl alcohol (PVA) and carboxymethylcellulose (CMC), for example can be used without a restriction | limiting in particular. The molding pressure when performing press molding or CIP molding is preferably set to about 70 to 150 MPa.
 半湿式混合を行う場合には、アルミナ、シリカ及びSi含有化合物を、液媒体を用いて半流動体となし、これを混練して混練物を得る。混練物中の固形分濃度は好ましくは10~15重量%程度とすることができる。混練物は押し出し成形等の可塑成形によって所望の形状に成形される。 When semi-wet mixing is performed, alumina, silica and Si-containing compound are made into a semi-fluid using a liquid medium, and kneaded to obtain a kneaded product. The solid content in the kneaded product can be preferably about 10 to 15% by weight. The kneaded product is formed into a desired shape by plastic molding such as extrusion molding.
 上述のいずれの成形法を用いた場合においても、反応焼成の雰囲気は大気等の酸素含有雰囲気とする。反応焼成の温度は1700~1800℃、特に1730~1790℃に設定することが好ましい。この範囲の温度で焼成することで、この焼成温度を保持する時間は1~8時間、特に2~7時間とすることが好ましい。この条件で反応焼成を行うことで、セラミックス中における気孔の増大を防止して、耐クリープ性の良好なムライトセラミックスを首尾良く得ることができる。 In any of the above-described molding methods, the reaction firing atmosphere is an oxygen-containing atmosphere such as air. The temperature for the reaction firing is preferably set to 1700 to 1800 ° C., particularly 1730 to 1790 ° C. By firing at a temperature in this range, the time for maintaining this firing temperature is preferably 1 to 8 hours, particularly 2 to 7 hours. By performing the reaction firing under these conditions, it is possible to prevent the increase of pores in the ceramic and to successfully obtain a mullite ceramic having good creep resistance.
 上述の焼成温度に昇温するときの平均昇温速度は、900~1700℃の温度範囲において、25~300℃/hに設定し、好ましくは30~200℃/hに設定する。平均昇温速度をこの範囲に設定することで、セラミックス中における気孔の増大を防止して、耐クリープ性の良好なムライトセラミックスを首尾良く得ることができる。昇温速度が25℃/hに満たないと、焼結が開始する前に酸化膨張が完了してしまい、粒子間距離が増大し、焼結性が低下し、気孔が増大してしまう。一方、昇温速度が300℃/h超であると、酸化が完了する前に焼結が完了してしまい、焼結体内部に非酸化物質が残留しやすく、ムライトセラミックスの耐クリープ性を低下させる一因となる。 In the temperature range of 900 to 1700 ° C., the average temperature increase rate when the temperature is raised to the above-described firing temperature is set to 25 to 300 ° C./h, preferably 30 to 200 ° C./h. By setting the average temperature rising rate within this range, it is possible to prevent the increase of pores in the ceramic and to successfully obtain a mullite ceramic having good creep resistance. If the heating rate is less than 25 ° C./h, the oxidative expansion is completed before the sintering starts, the interparticle distance increases, the sinterability decreases, and the pores increase. On the other hand, if the rate of temperature rise exceeds 300 ° C / h, the sintering is completed before the oxidation is completed, and non-oxidized substances are likely to remain inside the sintered body, reducing the creep resistance of mullite ceramics. It will be a cause.
 焼成の雰囲気は上述のとおり大気、すなわち酸素濃度が約20%の酸素含有雰囲気とすることができるが、雰囲気の温度が900℃以上になるとSi及びSi含有化合物の酸化が顕著となるので、昇温によって雰囲気の温度が900℃以上となった場合には、酸素含有雰囲気中の酸素濃度を3%以下に低下させることが好ましい。酸素濃度を3%以下に低下させることで、焼結が開始する前に酸化膨張が完了することを防止でき、それによって、粒子間距離の増大、焼結性の低下及び気孔の増大を効果的に防止できる。一方、酸素含有雰囲気中の酸素濃度の下限値は、雰囲気の温度によらず0.5%超とすることが好ましい。このようにすることで、酸化が完了する前に焼結が完了することを防止でき、それによって、焼結体内部に非酸化物質が残留することや、ムライトセラミックスの耐クリープ性が低下することを効果的に防止することができる。 As described above, the firing atmosphere can be air, that is, an oxygen-containing atmosphere having an oxygen concentration of about 20%. However, when the temperature of the atmosphere is 900 ° C. or higher, the oxidation of Si and the Si-containing compound becomes significant. When the temperature of the atmosphere becomes 900 ° C. or more due to temperature, it is preferable to reduce the oxygen concentration in the oxygen-containing atmosphere to 3% or less. By reducing the oxygen concentration to 3% or less, it is possible to prevent the oxidative expansion from being completed before sintering starts, thereby effectively increasing the interparticle distance, lowering the sinterability, and increasing the pores. Can be prevented. On the other hand, the lower limit value of the oxygen concentration in the oxygen-containing atmosphere is preferably more than 0.5% regardless of the temperature of the atmosphere. By doing so, it is possible to prevent the sintering from being completed before the oxidation is completed, thereby leaving a non-oxidized substance inside the sintered body and reducing the creep resistance of the mullite ceramics. Can be effectively prevented.
 このようにして得られたムライトセラミックスは、例えば高温窯炉及び雰囲気炉の窯道具、側壁、アーチ、炉床;内張煉瓦等電子部品焼成用セッター、匣鉢、台板;ガス発生炉を含む種々の化学反応装置内張;セラミック基板;カーバイド炉用内張;カーボンブラック炉用内張;ガラス溶解炉用内張;セラミックス焼成用窯道具などとして好適に用いられる。 The mullite ceramics thus obtained include, for example, furnace tools for high-temperature furnaces and atmosphere furnaces, side walls, arches, hearths; setters for firing electronic components such as lining bricks, mortars, base plates; gas generation furnaces Various chemical reactor linings; ceramic substrates; carbide furnace linings; carbon black furnace linings; glass melting furnace linings;
 以下、実施例により本発明を更に詳細に説明する。しかしながら本発明の範囲は、かかる実施例に制限されない。特に断らない限り、「%」は「重量%」を意味する。 Hereinafter, the present invention will be described in more detail with reference to examples. However, the scope of the present invention is not limited to such examples. Unless otherwise specified, “%” means “% by weight”.
  〔実施例1〕
 アルミナ(平均粒径8μm、球状)、SiC(平均粒径4μm、球状)及びシリカ(平均粒径0.5μm、球状)を、酸化後のモル比が3:0.5:1.5となるように秤量した。これらの成分の比率を重量比で表すと、以下の表4に示すとおりとなる。これらの成分を湿式混合してスラリー(固形分濃度:40%)を得た。湿式混合の液媒体には、PVA水溶液を用いた。このスラリーを噴霧乾燥して、平均粒径50μmの顆粒を得た。この顆粒をプレス成形して、板状の成形体を得た。プレス圧は100MPaとした。この成形体を、大気雰囲気下に、1750℃で4時間反応焼成した。このときの昇温速度は40℃/hとした。焼成終了後、自然冷却して、目的とするムライトセラミックスを得た。得られたムライトセラミックスの研磨断面の走査型電子顕微鏡像を図1に示す。得られたセラミックスはムライト単一相であり、原料として仕込んだSiCは完全に酸化してムライト化しており、特に高い耐クリープ性に優れた焼結体であった。また、薄肉化で満足できる強度を有しており、耐熱衝撃性も優れていた。
[Example 1]
Alumina (average particle size 8 μm, spherical), SiC (average particle size 4 μm, spherical) and silica (average particle size 0.5 μm, spherical) have a molar ratio after oxidation of 3: 0.5: 1.5. Weighed as follows. When the ratio of these components is expressed by weight ratio, it is as shown in Table 4 below. These components were wet mixed to obtain a slurry (solid content concentration: 40%). A PVA aqueous solution was used as the liquid medium for the wet mixing. This slurry was spray-dried to obtain granules having an average particle size of 50 μm. This granule was press-molded to obtain a plate-shaped molded body. The press pressure was 100 MPa. This molded body was fired by reaction at 1750 ° C. for 4 hours in an air atmosphere. The temperature rising rate at this time was 40 ° C./h. After firing, it was naturally cooled to obtain the intended mullite ceramics. FIG. 1 shows a scanning electron microscope image of the polished cross section of the obtained mullite ceramics. The obtained ceramic was a single phase of mullite, and the SiC charged as a raw material was completely oxidized to form mullite, and was a sintered body particularly excellent in high creep resistance. Moreover, it had the strength which can be satisfied by thinning, and the thermal shock resistance was also excellent.
  〔評価〕
 得られたムライトセラミックスについて、XRD測定を行い、それに含まれる化合物を同定した。また、上述の方法でムライトセラミックスの研磨断面を調製し、該断面をSEM観察した。更に、上述の方法で見掛け気孔率を測定した。また、上述の方法で網目修飾酸化物の含有量を測定した。更に、常温三点曲げ強度S、耐クリープ性及び耐熱衝撃性を、以下の方法でそれぞれ測定した。それらの結果を表1に示す。
[Evaluation]
About the obtained mullite ceramics, the XRD measurement was performed and the compound contained in it was identified. Also, a polished cross section of mullite ceramics was prepared by the method described above, and the cross section was observed by SEM. Furthermore, the apparent porosity was measured by the method described above. Further, the content of the network modification oxide was measured by the method described above. Furthermore, room temperature three-point bending strength S, creep resistance and thermal shock resistance were measured by the following methods, respectively. The results are shown in Table 1.
  〔常温三点曲げ強度S〕
  JIS R1601に準じ、三点曲げ試験によって測定した。
[Normal temperature three-point bending strength S]
It was measured by a three-point bending test according to JIS R1601.
  〔耐クリープ性〕
 100mm×30mm×2mmに加工した試験体をスパン90mmになるように支柱上に載せ、中央に300gの荷重をかけた。1400℃で12時間にわたって加熱した後のたわみ量を、デプスゲージによって測定し、この値を耐クリープ性の指標とした。
(Creep resistance)
A specimen processed to 100 mm × 30 mm × 2 mm was placed on a support so that the span would be 90 mm, and a load of 300 g was applied to the center. The amount of deflection after heating at 1400 ° C. for 12 hours was measured with a depth gauge, and this value was used as an index of creep resistance.
  〔耐熱衝撃性〕
 □90mm×2.5mmに加工した試験体を4枚作製した。これとは別に、長さ10mm×幅5mm×高さ5mmの支柱を用意し、該支柱をセラミックス台板上に配置した。支柱配置位置は、□90mmの四隅の位置とした。支柱の上に、前記の試験体を4段積みに重ねた。その各試験体間に、同様に4隅に支柱をはさみ配した。次に電気炉を所定の温度まで昇温して30分保持した後、前記の試験体を台板ごと炉内に入れた。その温度で60分保持後、試験体を台板ごと炉から取り出し放冷した。試験体の割れや切裂が生じていないかどうかを目視で確認した。以上の操作を500℃から50℃ずつ温度を昇温させて行い、割れの生じない温度の上限を測定し、その値を耐熱衝撃性の指標とした。
[Thermal shock resistance]
□ Four test specimens processed to 90 mm × 2.5 mm were prepared. Separately, a support column having a length of 10 mm, a width of 5 mm, and a height of 5 mm was prepared, and the support column was arranged on a ceramic base plate. The column arrangement positions were the positions of four corners of □ 90 mm. The test specimens were stacked in a four-layer stack on the support. Similarly, struts were sandwiched between the test specimens at four corners. Next, the temperature of the electric furnace was raised to a predetermined temperature and held for 30 minutes, and then the test specimen was placed in the furnace together with the base plate. After holding at that temperature for 60 minutes, the specimen was removed from the furnace together with the base plate and allowed to cool. It was visually confirmed whether or not the specimen was cracked or broken. The above operation was performed by increasing the temperature from 500 ° C. to 50 ° C., the upper limit of the temperature at which no cracking occurred was measured, and the value was used as an index of thermal shock resistance.
  〔実施例2~4〕
 実施例2~4においては、以下の表1に示す条件を用いる以外は、実施例1と同様にしてムライトセラミックスを得た。実施例1と同様に行った評価の結果を表1に示す。実施例2では、実施例1と異なる配合比でSiCとシリカを混合し、針状結晶を成長させ、実施例1と同様の高い耐クリープ性が得られた。また、耐熱衝撃性についても、実施例1と同様に高くなった。実施例3では、SiCの原料粒径を実施例1に比べて小さくした。実施例3は実施例1に比べると、耐クリープ性及び耐熱衝撃性は劣るが、実用に耐えうる特性であると判断した。また、後述する比較例5に比べると、高い耐クリープ性、高耐熱衝撃性及び高強度を示した。実施例4では、SiCの原料粒径を実施例1に比べて大きくした。実施例4は実施例1に比べると、後述する比較例4と同様に気孔径が大きくなるので、耐熱衝撃性は劣るが、実用に耐えうる耐熱衝撃性であると判断した。
[Examples 2 to 4]
In Examples 2 to 4, mullite ceramics were obtained in the same manner as in Example 1 except that the conditions shown in Table 1 below were used. Table 1 shows the results of evaluation performed in the same manner as in Example 1. In Example 2, SiC and silica were mixed at a blending ratio different from that in Example 1 to grow acicular crystals, and high creep resistance similar to that in Example 1 was obtained. Also, the thermal shock resistance was high as in Example 1. In Example 3, the raw material particle size of SiC was made smaller than that in Example 1. Although Example 3 was inferior to Example 1 in creep resistance and thermal shock resistance, it was judged that the characteristics can withstand practical use. Moreover, compared with the comparative example 5 mentioned later, high creep resistance, high thermal shock resistance, and high intensity | strength were shown. In Example 4, the SiC raw material particle size was made larger than that in Example 1. Compared to Example 1, Example 4 was determined to have a thermal shock resistance that could withstand practical use, although the thermal shock resistance was inferior because the pore diameter was larger as in Comparative Example 4 described later.
  〔実施例5〕
 以下の表1に示す原料を用い、湿式混合によってスラリー(固形分濃度:42%)を得た。湿式混合の液媒体には、CMC水溶液を用いた。このスラリーを鋳込成形して板状の成形体を得た。この成形体を、大気雰囲気下に、1750℃で4時間反応焼成した。このときの昇温速度は40℃/hとした。焼成終了後、自然冷却して、高い耐クリープ性及び高耐熱衝撃性を有すムライトセラミックスを得た。実施例1と同様に行った評価の結果を表1に示す。
Example 5
Using the raw materials shown in Table 1 below, a slurry (solid content concentration: 42%) was obtained by wet mixing. CMC aqueous solution was used for the liquid medium of the wet mixing. This slurry was cast to obtain a plate-like molded body. This molded body was fired by reaction at 1750 ° C. for 4 hours in an air atmosphere. The temperature rising rate at this time was 40 ° C./h. After the completion of firing, it was naturally cooled to obtain mullite ceramics having high creep resistance and high thermal shock resistance. Table 1 shows the results of evaluation performed in the same manner as in Example 1.
  〔実施例6~9〕
 以下の表1に示す条件を用いる以外は実施例1と同様にしてムライトセラミックスを得た。実施例1と同様に行った評価の結果を表1に示す。実施例6では、実施例1に比べ、焼成温度を下げて1700℃とした。実施例6は実施例1に比べると、耐熱衝撃性は劣るが、実用に耐えうる特性であると判断した。また、比較例6に比べると、高い耐クリープ性、高耐熱衝撃性及び高強度を示す。実施例7では、実施例1に比べ、焼成温度を上げて1800℃とした。実施例7は実施例1に比べると、耐熱衝撃性は劣るが、実用に耐えうる特性であると判断した。実施例8では、実施例1に比べ、昇温速度を遅くした。実施例8は実施例1に比べると、耐熱衝撃性は下がるが、実用に耐えうる特性であると判断した。また、後述する比較例7に比べると、気孔率が低くなったため、高強度、高い耐クリープ性を示し、また気孔率の低減によって気孔径が小さくなり、高耐熱衝撃性を示した。実施例9では、実施例1に比べ、昇温速度を早くした。すべての実施例の中で、耐熱衝撃性と耐クリープ性の両面で高特性を示す結果となった。
[Examples 6 to 9]
A mullite ceramic was obtained in the same manner as in Example 1 except that the conditions shown in Table 1 below were used. Table 1 shows the results of evaluation performed in the same manner as in Example 1. In Example 6, compared with Example 1, the firing temperature was lowered to 1700 ° C. Although Example 6 was inferior in thermal shock resistance as compared with Example 1, it was judged to be a characteristic that could withstand practical use. Moreover, compared with the comparative example 6, high creep resistance, high thermal shock resistance, and high strength are shown. In Example 7, compared with Example 1, the firing temperature was increased to 1800 ° C. Although Example 7 was inferior in thermal shock resistance as compared with Example 1, it was judged to be a characteristic that could withstand practical use. In Example 8, compared with Example 1, the temperature increase rate was made slower. Although the thermal shock resistance of Example 8 was lower than that of Example 1, it was judged that the characteristics can withstand practical use. Moreover, since the porosity became low compared with the comparative example 7 mentioned later, the high intensity | strength and the high creep resistance were shown, the pore diameter became small by the porosity reduction, and the high thermal shock resistance was shown. In Example 9, compared with Example 1, the temperature raising rate was increased. In all the examples, the results showed high characteristics in both thermal shock resistance and creep resistance.
  〔実施例10〕
 以下の表1に示す原料を用い、CMC水溶液によって、固形分濃度13%の混練物を得た。混練物の調製には混合攪拌機を用いた。この混練物を押し出し成形して、板状の成形体を得た。この成形体を、大気雰囲気下に、1750℃で4時間反応焼成した。このときの昇温速度は40℃/hとした。焼成終了後、自然冷却して、実用に耐え得る耐熱衝撃性と耐クリープ性を有したムライトセラミックスを得た。実施例1と同様に行った評価の結果を表1に示す。
Example 10
Using the raw materials shown in Table 1 below, a kneaded product having a solid content concentration of 13% was obtained with a CMC aqueous solution. A mixing stirrer was used to prepare the kneaded product. This kneaded product was extrusion molded to obtain a plate-shaped molded body. This molded body was fired by reaction at 1750 ° C. for 4 hours in an air atmosphere. The temperature rising rate at this time was 40 ° C./h. After firing, it was naturally cooled to obtain mullite ceramics having thermal shock resistance and creep resistance that could withstand practical use. Table 1 shows the results of evaluation performed in the same manner as in Example 1.
  〔実施例11~14〕
 以下の表2に示す条件を用いる以外は、実施例1と同様にしてムライトセラミックスを得た。具体的には、実施例11では、プレス成形圧を70MPaに低下させた。実施例12では、プレス成形圧を30MPaに低下させ、かつ焼成温度を1800℃まで上昇させた。実施例13では、表4の組成の原料、すなわち220メッシュの電融ムライト粒子を10%含有する原料を用いた。実施例14においては、ムライトセラミックスの原料としてNa2Oを始めとするアルカリ金属の酸化物の含有量の低い高純度の原料を用いた。実施例11~14について、実施例1と同様に行った評価の結果を表2に示す。同表に示すとおり、実施例11では、実施例1に比べて見掛け気孔率が低くなったため、耐クリープ性と耐熱衝撃性が低下したものの、該耐クリープ性及び耐熱衝撃性は実用に耐えうる値である。実施例12では、プレス成形圧を低くしたため、原料顆粒がつぶれにくくなり、その結果、顆粒間に生ずる粗大気孔が残留した。そのため、耐熱衝撃性が低下したものの、該耐熱衝撃性は実用に耐えうる値である。実施例13では、原料に電融ムライト粒子が添加されたために強度は低下したが、耐熱衝撃性及び耐クリープ性については、実施例1と同様の値を示した。実施例14では、実施例1に比べて、不純物である網目修飾酸化物の含有量を低減させたので、耐クリープ性が一層向上した。なお、実施例13において、表2に示す球状粒子及び針状粒子の粒径アスペクト比の測定は、電融ムライト粒子は除外して測定した。研磨断面の観察において、電融ムライト粒子は、球状粒子及び針状粒子とは、形状の点において明確に区別される。
[Examples 11 to 14]
A mullite ceramic was obtained in the same manner as in Example 1 except that the conditions shown in Table 2 below were used. Specifically, in Example 11, the press molding pressure was reduced to 70 MPa. In Example 12, the press molding pressure was reduced to 30 MPa, and the firing temperature was increased to 1800 ° C. In Example 13, a raw material having the composition shown in Table 4, that is, a raw material containing 10% of 220 mesh electrofused mullite particles was used. In Example 14, a high-purity raw material having a low content of alkali metal oxides such as Na 2 O was used as a raw material for mullite ceramics. Table 2 shows the results of evaluation performed on Examples 11 to 14 in the same manner as Example 1. As shown in the table, in Example 11, the apparent porosity was lower than that in Example 1, and thus the creep resistance and thermal shock resistance were lowered, but the creep resistance and thermal shock resistance can withstand practical use. Value. In Example 12, since the press molding pressure was lowered, the raw material granules were not easily crushed, and as a result, coarse atmospheric pores generated between the granules remained. Therefore, although the thermal shock resistance is lowered, the thermal shock resistance is a value that can withstand practical use. In Example 13, although the strength decreased because electrofused mullite particles were added to the raw material, the thermal shock resistance and creep resistance showed the same values as in Example 1. In Example 14, since the content of the network modification oxide, which is an impurity, was reduced as compared with Example 1, the creep resistance was further improved. In Example 13, the measurement of the particle diameter aspect ratio of the spherical particles and the acicular particles shown in Table 2 was performed excluding electrofused mullite particles. In the observation of the polished cross section, the electrofused mullite particles are clearly distinguished from the spherical particles and the acicular particles in terms of shape.
  〔比較例1~9〕
 以下の表3に示す条件を用いる以外は実施例1と同様にしてムライトセラミックスを得た。実施例1と同様に行った評価の結果を表3に示す。また、比較例2で得られたムライトセラミックスの研磨断面の走査型電子顕微鏡像を図1に示す。比較例1では、実施例1に比べて1810℃と高い焼成温度で焼成している。そのため、針状粒子が異常に粒成長し、粗大針状粒子が研磨断面積比で全粒子の30%と多くなっているため、粒子間の粗大欠陥が生じ、耐熱衝撃性が低下した。また、高い焼成温度で焼成したため、結晶状態が不安定になり、耐クリープ性が低下した。比較例2では、実施例1及び2と異なり、原料にSi含有化合物を含んでいないことに起因して、ムライトの生成速度に差が出ないため針状粒子が成長せず、耐クリープ性が低下した。比較例3では、実施例1及び2と異なり、原料にシリカを含んでいないため、比較例2と同様に、ムライトの生成速度に差が出ないため針状粒子が成長せず、耐クリープ性が低下した。比較例4では、実施例1に比べて粗大なSiCを用いたので、SiCの酸化が進みにくくなる。その結果、SiCの酸化とムライトの反応焼結とが同時進行して、酸化膨張による焼結性の低下を招くことなく焼結を進めることができる。しかしその反面、SiCの酸化膨張とムライトの反応焼結によって、SiCが存在していた場所が焼結後に気孔となる。このことに起因して、粗大なSiCを用いた本比較例においては、粗大気孔が形成され、強度低下、耐熱衝撃性の低下及び耐クリープ性の低下が観察された。比較例5では、比較例4とは逆に、SiCの原料粒子を極小化させた。この場合はSiCの酸化が進みやすいので、ムライトの反応焼結が進む前にSiCの酸化が完了する。その結果、粒子間の距離増大による焼結性の低下が、気孔率増加及び強度低下の原因となる。このことに起因して、実施例1に比べて耐クリープ性の低下及び耐熱衝撃性が低下する。比較例6では、実施例1に比べて焼成温度を低くして焼成を行った。その結果、ムライト単一相とならず、耐クリープ性が低下した。比較例7では、実施例1に比べて昇温速度を遅くして焼成を行った。この場合にはSiCの酸化が完了した後にムライト反応焼結が進むので、粒子間距離増大による焼結性の低下が、気孔率増加及び強度低下の原因となる。このことに起因して、実施例1に比べて耐クリープ性の低下及び耐熱衝撃性が低下した。比較例8では、実施例1に比べて昇温速度を早くして焼成を行った。この場合にはSiCの酸化が完了する前に焼結が完了するので、内部にSiCが残留してしまう。その結果、アルミナ、SiC及びムライトが混在する組織となり、耐クリープ性が低下する。比較例9では、実施例14に比べてプレス成形圧を30MPaに下げた。本比較例は、網目修飾酸化物が実施例14と同じであるにもかかわらず、耐クリープ性が実施例14よりも低下した。この理由は、プレス成形圧を下げたことに起因して見掛け気孔率が増大したため、各粒子の連結性が低下しためであると考えられる。更に、見掛け気孔率が増大したため、耐熱衝撃性も実施例14よりも低下した。
[Comparative Examples 1 to 9]
A mullite ceramic was obtained in the same manner as in Example 1 except that the conditions shown in Table 3 below were used. Table 3 shows the results of evaluation performed in the same manner as in Example 1. Moreover, the scanning electron microscope image of the grinding | polishing cross section of the mullite ceramics obtained by the comparative example 2 is shown in FIG. In Comparative Example 1, firing was performed at a firing temperature as high as 1810 ° C. as compared with Example 1. Therefore, the acicular particles grew abnormally, and the coarse acicular particles increased in the polishing cross-sectional area ratio to 30% of the total particles, resulting in coarse defects between the particles and a decrease in thermal shock resistance. Moreover, since it baked at the high calcination temperature, the crystal state became unstable and creep resistance fell. In Comparative Example 2, unlike Examples 1 and 2, since the raw material does not contain a Si-containing compound, there is no difference in the mullite generation rate, so that acicular particles do not grow and creep resistance is improved. Declined. In Comparative Example 3, unlike Examples 1 and 2, since the raw material does not contain silica, as in Comparative Example 2, there is no difference in the rate of mullite generation, so acicular particles do not grow and creep resistance is increased. Decreased. In Comparative Example 4, since SiC that is coarser than that in Example 1 is used, it is difficult for the oxidation of SiC to proceed. As a result, the oxidation of SiC and the reactive sintering of mullite proceed simultaneously, and the sintering can proceed without causing a decrease in sinterability due to oxidative expansion. On the other hand, the location where SiC was present becomes pores after sintering due to the oxidative expansion of SiC and the reactive sintering of mullite. Due to this, in this comparative example using coarse SiC, coarse air holes were formed, and a decrease in strength, a decrease in thermal shock resistance, and a decrease in creep resistance were observed. In Comparative Example 5, contrary to Comparative Example 4, the raw material particles of SiC were minimized. In this case, since the oxidation of SiC is easy to proceed, the oxidation of SiC is completed before the reactive sintering of mullite proceeds. As a result, a decrease in sinterability due to an increase in the distance between particles causes an increase in porosity and a decrease in strength. As a result, the creep resistance and thermal shock resistance are reduced compared to Example 1. In Comparative Example 6, firing was performed at a lower firing temperature than in Example 1. As a result, the mullite single phase was not obtained, and the creep resistance was lowered. In Comparative Example 7, firing was performed at a lower temperature increase rate than in Example 1. In this case, since mullite reaction sintering proceeds after the oxidation of SiC is completed, a decrease in sinterability due to an increase in interparticle distance causes an increase in porosity and a decrease in strength. As a result, the creep resistance and the thermal shock resistance decreased as compared with Example 1. In Comparative Example 8, firing was performed at a higher temperature rising rate than in Example 1. In this case, since sintering is completed before the oxidation of SiC is completed, SiC remains inside. As a result, it becomes a structure in which alumina, SiC and mullite are mixed, and the creep resistance is lowered. In Comparative Example 9, the press molding pressure was lowered to 30 MPa as compared with Example 14. In this comparative example, although the network modification oxide was the same as that of Example 14, the creep resistance was lower than that of Example 14. The reason for this is thought to be that the apparent porosity has increased due to the lowering of the press molding pressure, so that the connectivity of each particle is lowered. Furthermore, since the apparent porosity increased, the thermal shock resistance was also lower than in Example 14.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000004
Figure JPOXMLDOC01-appb-T000004

Claims (8)

  1.  研磨断面において、アスペクト比が1以上2以下であるムライトの球状粒子及びアスペクト比が2超10以下であるムライトの針状粒子を含み、かつ針状粒子の平均長径が球状粒子の平均粒径の2~10倍であり、針状粒子/全粒子の面積比が0.03~0.3であることを特徴とするムライトセラミックス。 In the polished cross section, mullite spherical particles having an aspect ratio of 1 or more and 2 or less, and mullite needle particles having an aspect ratio of more than 2 and 10 or less, and the average major axis of the acicular particles is the average particle diameter of the spherical particles. A mullite ceramic characterized by being 2 to 10 times and having an area ratio of acicular particles / total particles of 0.03 to 0.3.
  2.  研磨断面におけるアスペクト比10超の粗大針状粒子の面積/全粒子の面積の比が0.2以下である請求項1記載のムライトセラミックス。 The mullite ceramics according to claim 1, wherein the ratio of the area of coarse needle particles having an aspect ratio of more than 10 to the area of all particles in the polished cross section is 0.2 or less.
  3.  見掛け気孔率が5~27%である請求項1又は2記載のムライトセラミックス。 3. The mullite ceramic according to claim 1 or 2, wherein the apparent porosity is 5 to 27%.
  4.  研磨断面において、観察視野の面積に対し、針状粒子の平均長径の5倍以上の長径を有する粗大気孔の面積の総和の割合が0.07以下である請求項1ないし3のいずれか一項に記載のムライトセラミックス。 4. The ratio of the total area of coarse atmospheric pores having a major axis that is 5 times or more of the average major axis of the acicular particles in the polished cross section to the area of the observation field is 0.07 or less. The mullite ceramics described in 1.
  5.  請求項1記載のムライトセラミックスの製造方法であって、
     アルミナ、シリカ、及び平均粒径0.1~10μmであるSi又はSi含有化合物(ただしシリカ及びシリケートを除く。)を含む原料を、酸素含有雰囲気下に1700~1800℃で反応焼結させ、ムライトを生成させる工程を含み、
     焼成における900~1700℃の間の平均昇温速度を25~300℃/hに設定することを特徴とするムライトセラミックスの製造方法。
    A method for producing mullite ceramics according to claim 1,
    A raw material containing alumina, silica, and Si having an average particle size of 0.1 to 10 μm or a Si-containing compound (excluding silica and silicate) is subjected to reaction sintering at 1700 to 1800 ° C. in an oxygen-containing atmosphere to obtain mullite. Including the step of generating
    A method for producing mullite ceramics, characterized in that an average heating rate between 900 and 1700 ° C. in firing is set at 25 to 300 ° C./h.
  6.  Si含有非酸化物化合物が、SiC、Si34、Si2ON2又はサイアロンである請求項5記載の製造方法。 The manufacturing method according to claim 5, wherein the Si-containing non-oxide compound is SiC, Si 3 N 4 , Si 2 ON 2 or sialon.
  7.  アルミナ、シリカ、及び平均粒径0.1~10μmであるSi又はSi含有化合物(ただしシリカ及びシリケートを除く)を湿式混合によってスラリー化し、得られたスラリーを鋳込成形するか、又は該スラリーを噴霧乾燥して得られた顆粒をプレス成形又はCIP成形した後に反応焼成する請求項5又は6に記載の製造方法。 Alumina, silica, and Si or Si-containing compound having an average particle size of 0.1 to 10 μm (excluding silica and silicate) are slurried by wet mixing, and the resulting slurry is cast or molded. The production method according to claim 5 or 6, wherein the granules obtained by spray drying are subjected to reaction firing after press molding or CIP molding.
  8.  アルミナ、シリカ、及び平均粒径0.1~10μmであるSi又はSi含有化合物(ただしシリカ及びシリケートを除く)を半湿式で混練し、得られた混練物を可塑成形した後に反応焼成する請求項5又は6に記載の製造方法。 Claims: Alumina, silica, and Si or Si-containing compound having an average particle size of 0.1 to 10 µm (excluding silica and silicate) are kneaded semi-wet, and the resulting kneaded product is plastic-molded and then subjected to reaction firing. 5. The production method according to 5 or 6.
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