WO2012075144A3 - Predictive maintenance for third party support equipment - Google Patents

Predictive maintenance for third party support equipment Download PDF

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Publication number
WO2012075144A3
WO2012075144A3 PCT/US2011/062652 US2011062652W WO2012075144A3 WO 2012075144 A3 WO2012075144 A3 WO 2012075144A3 US 2011062652 W US2011062652 W US 2011062652W WO 2012075144 A3 WO2012075144 A3 WO 2012075144A3
Authority
WO
WIPO (PCT)
Prior art keywords
support equipment
party support
equipment
party
predictive maintenance
Prior art date
Application number
PCT/US2011/062652
Other languages
French (fr)
Other versions
WO2012075144A2 (en
Inventor
John R. Swyers
Manjunath Yedatore
Tony L. Davis
Donn Turner
Michael W. Johnson
Original Assignee
Applied Materials, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials, Inc. filed Critical Applied Materials, Inc.
Priority to CN201180053750.XA priority Critical patent/CN103201691B/en
Priority to KR1020137016805A priority patent/KR101488181B1/en
Publication of WO2012075144A2 publication Critical patent/WO2012075144A2/en
Publication of WO2012075144A3 publication Critical patent/WO2012075144A3/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0283—Predictive maintenance, e.g. involving the monitoring of a system and, based on the monitoring results, taking decisions on the maintenance schedule of the monitored system; Estimating remaining useful life [RUL]
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/80—Management or planning

Abstract

A server receives equipment data from third party support equipment during operation of the third party support equipment in a manufacturing environment. The server receives the equipment data via a first port on the third party support equipment. The third party support equipment communicates with a process tool via a second port on third party support equipment. The server determines a future state of the third party support equipment based on the equipment data and notifies a user of the future state of the third party support equipment.
PCT/US2011/062652 2010-11-30 2011-11-30 Predictive maintenance for third party support equipment WO2012075144A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201180053750.XA CN103201691B (en) 2010-11-30 2011-11-30 The predictive maintenance of equipment is supported for third party
KR1020137016805A KR101488181B1 (en) 2010-11-30 2011-11-30 Predictive maintenance for third party support equipment

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US41835910P 2010-11-30 2010-11-30
US61/418,359 2010-11-30
US13/306,646 US8560106B2 (en) 2010-11-30 2011-11-29 Predictive maintenance for third party support equipment
US13/306,646 2011-11-29

Publications (2)

Publication Number Publication Date
WO2012075144A2 WO2012075144A2 (en) 2012-06-07
WO2012075144A3 true WO2012075144A3 (en) 2012-09-13

Family

ID=46172537

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2011/062652 WO2012075144A2 (en) 2010-11-30 2011-11-30 Predictive maintenance for third party support equipment

Country Status (5)

Country Link
US (1) US8560106B2 (en)
KR (1) KR101488181B1 (en)
CN (1) CN103201691B (en)
TW (1) TWI494727B (en)
WO (1) WO2012075144A2 (en)

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KR102438829B1 (en) * 2015-09-22 2022-09-01 주식회사 엘지유플러스 Operation method of equipment management system and equipment management system
US10152879B2 (en) 2015-11-10 2018-12-11 Industrial Technology Research Institute Method, apparatus, and system for monitoring manufacturing equipment
JP6386488B2 (en) * 2016-03-17 2018-09-05 ファナック株式会社 Operation management method and program for machine tool
US10039113B2 (en) 2016-03-28 2018-07-31 Bank Of America Corporation Intelligent resource procurement system based on physical proximity to related resources
US10796253B2 (en) 2016-06-17 2020-10-06 Bank Of America Corporation System for resource use allocation and distribution
US10439913B2 (en) * 2016-07-01 2019-10-08 Bank Of America Corporation Dynamic replacement and upgrade of existing resources based on resource utilization
KR102409863B1 (en) * 2017-06-27 2022-06-17 주식회사 큐엔티 Method, server and program for providing robot prevention and prediction measure service
US20180164779A1 (en) * 2016-12-13 2018-06-14 QNT Co., Ltd. Method, server, and program for providing real-time robot monitoring service
KR102409862B1 (en) * 2017-06-27 2022-06-17 주식회사 큐엔티 Method, server and program for providing real-time robot monitoring service
US10843341B2 (en) * 2017-05-05 2020-11-24 Brooks Automation, Inc. Method and apparatus for health assessment of a transport apparatus

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US7337032B1 (en) * 2004-10-04 2008-02-26 Advanced Micro Devices, Inc. Scheduling ahead for various processes
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Also Published As

Publication number Publication date
US20120191225A1 (en) 2012-07-26
CN103201691B (en) 2016-07-06
KR101488181B1 (en) 2015-01-30
KR20130095817A (en) 2013-08-28
TWI494727B (en) 2015-08-01
US8560106B2 (en) 2013-10-15
CN103201691A (en) 2013-07-10
WO2012075144A2 (en) 2012-06-07
TW201234150A (en) 2012-08-16

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