WO2013097262A1 - Highly parallel microfluidic chip applicable in fabricating nanoparticles - Google Patents

Highly parallel microfluidic chip applicable in fabricating nanoparticles Download PDF

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Publication number
WO2013097262A1
WO2013097262A1 PCT/CN2012/000330 CN2012000330W WO2013097262A1 WO 2013097262 A1 WO2013097262 A1 WO 2013097262A1 CN 2012000330 W CN2012000330 W CN 2012000330W WO 2013097262 A1 WO2013097262 A1 WO 2013097262A1
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pdms
layer
flow channel
intermediate layer
microns
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PCT/CN2012/000330
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French (fr)
Chinese (zh)
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陈颖
罗春雄
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北京瑞斯诺生物医药技术有限公司
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Publication of WO2013097262A1 publication Critical patent/WO2013097262A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40Mixing liquids with liquids; Emulsifying
    • B01F23/41Emulsifying
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30Micromixers
    • B01F33/301Micromixers using specific means for arranging the streams to be mixed, e.g. channel geometries or dispositions
    • B01F33/3011Micromixers using specific means for arranging the streams to be mixed, e.g. channel geometries or dispositions using a sheathing stream of a fluid surrounding a central stream of a different fluid, e.g. for reducing the cross-section of the central stream or to produce droplets from the central stream
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502769Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
    • B01L3/502776Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for focusing or laminating flows
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/00029Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor provided with flat sample substrates, e.g. slides
    • G01N2035/00099Characterised by type of test elements
    • G01N2035/00158Elements containing microarrays, i.e. "biochip"

Definitions

  • the invention relates to a high parallel micro-flow channel chip applied to the preparation of nanoparticles, belonging to the direction of nano-pharmaceutical. Background technique
  • a method for synthesizing polymer nanoparticles of several tens to several hundreds of nanometers in size has been reported in the prior art.
  • the main method is to use a microfluidic method to sandwich an organic phase of a polymer molecule having a hydrophobic group in water. Quite quite.
  • Reference material 1 “Microfluidic Platform for Controlled Synthesis of Polymeric Nanoparticles”
  • reference 2 “Micronization of Size-Tunable Polymeric Nanoparticles Enabled by 3D Hydrodynamic Flow Focusing in Single-Layer Microchannels” uses the polymer material PDMS ( Polydimethylsiloxane)
  • PDMS Polydimethylsiloxane
  • the single flow channel is prepared, and the mixing of the body is reduced from a hundred micron to a micron scale.
  • the characteristic diffusion reaction time without stirring can be smaller than the characteristic time of the nanoparticle formation, and the reaction is more uniform.
  • the organic phase is sandwiched by the aqueous phase to a thickness of about several micrometers, and the organic solvent used is an infinitely miscible liquid with water.
  • the organic solvent diffuses into the aqueous phase, it dissolves.
  • the polymer molecules in the organic solvent will self-assemble into particles of several tens of nanometers, the inside is a hydrophobic group and the outside is a hydrophilic group, the average size is smaller than the body mixing, and the uniformity is better than the body mixing, but Into the hydraulic pressure limit, the output can only reach a speed of about 20ul / h, and there is also a polymer material PDMS surface is easy to adsorb molecules, resulting in flow channel blockage.
  • PLGA polylactic acid-glycolic acid copolymer-PEG polyethylene glycol improved 3D flow channel can avoid surface adsorption, but it still does not improve in yield, and needs more The fluid control of the road to complete the single-channel output, the product is difficult to obtain in high yield, and the industrial application prospect is poor. Summary of the invention
  • a microchannel chip for nanoparticle preparation is provided.
  • the micro flow channel chip as shown in FIG. 5, FIG. 6, and FIG. 7, is composed of a PDMS top layer, a PDMS intermediate layer, a PDMS bottom layer, and a glass back sheet;
  • a groove is formed in the front part of the PDMS top layer, the PDMS intermediate layer and the lower surface of the PDMS bottom layer.
  • the groove of the top layer of the PDMS is PDMS middle layer
  • the groove of the intermediate layer of the PDMS and the bottom layer of the PDMS, the groove of the bottom layer of the PDMS and the glass backsheet respectively form a top flow channel, an intermediate layer flow channel, and a bottom flow channel three-layer flow channel, and the three-layer flow channels are not connected to each other and are parallel to each other;
  • the liquid inlets are perpendicular to each of the flow channels and are parallel to each other; the flow path between the liquid inlet and the liquid outlet of each layer is a tree structure, and is divided into two branch flows by one flow channel.
  • the road is divided into three branch flow passages, which are equally divided into six branch flow passages, and are divided into 10-1000 branch flow passages as the liquid outlets.
  • the liquid inlet line width is 100-400 um
  • the intermediate layer flow channel outlet opening width is 5-20 micrometers
  • the height is 5-15 micrometers
  • the line period is 100 micrometers
  • the outlet has a width of 10-40 microns, a height of 5-20 microns, and a line period of 50 microns.
  • the middle layer flow channel is an organic phase flow channel
  • the top layer flow channel and the bottom layer flow channel are water phase flow channels.
  • the organic phase is a water-miscible organic solvent and a water-insoluble solute, an organic solvent such as methanol, ethanol, isopropanol, butanol, acetone, acetonitrile, etc.
  • the solute is a biodegradable polymer and is encapsulated Hydrophobic drugs, polymers such as: polylactic acid (PLA), polylactic acid-glycolic acid copolymer (PLGA), polyethylene glycol (PEG), polyethylene glycol-polylactic acid copolymer (PLA-PEG, PLA- PEG-PLA, PEG-PL-PEG), polyethylene glycol-polylactic acid-glycolic acid copolymer (PLGA-PEG, PLGA-PEG-PLGA, PEG-PLGA-PEG), polycaprolactone (PCL), Polyethylene glycol-polycaprol
  • the intermediate layer flow channel mold is prepared by using the photoresist SU83005 model, and the top flow channel mold and the bottom flow channel mold are prepared by using the photoresist SU83025 model.
  • the PDMS is prepared by mixing the monomer A and the crosslinking agent B in proportion; the PDMS ratio of the PDMS top layer is 5-20:1 (mass ratio), and the PDMS intermediate layer adopts a PDMS ratio of 5 -20 : 1 (mass ratio), PDMS bottom layer adopts PDMS ratio of 5-20: 1 (mass ratio); PDMS item layer, PDMS middle layer and PDMS bottom layer adopt different PDMS ratios.
  • the PDMS material can also be made of plexiglass (polymethyl methacrylate P let A) or vinyl polymer, vinyl polymer selected polystyrene PS, polyethylene PE, polyvinyl chloride PVC, polydichloroethylene PVDC Other polymer materials are replaced. .
  • a preparation process of a three-layer parallel microchannel chip comprising the following steps:
  • Step 1 Photolithography process 1
  • Intermediate layer flow channel mold preparation process prepared by using photoresist SU83005, the intermediate layer flow channel outlet opening width is 5-20 microns, the height is 5-15 microns, and the line period is 100 microns;
  • top and bottom flow channel molds Prepared by photoresist SU83025, the top flow channel outlet and the bottom flow channel outlet have a width of 10-40 microns, a height of 5-20 microns, and a line cycle of 50. Micron.
  • Step 2 Soft injection molding process
  • Step 3 Alignment and bonding
  • the two layers of PDMS that have been bonded are cut from the mold, and after the outlet of the intermediate layer is opened, the surface is treated by plasma, and then placed on the cured bottom layer PDMS mold, 75 degrees Celsius in the oven. Bake overnight to complete bonding to the underlying PDMS.
  • the first important is product homogeneity.
  • the thickness of the chip PDMS film is determined at the same flow rate ratio; the second is the production speed, compared with references 1, 2, the production speed has been 10-50. With a multiple increase, the number of runners can partially limit the maximum flow rate, ie the maximum production speed.
  • the micron-sized polymer flow channel can be conveniently prepared, and the polymer material polydimethylsiloxane (PDMS) material can be prepared.
  • the low cost can greatly reduce the manufacturing cost of the device.
  • the use of micro-scale liquid coating can shorten the mixing reaction time, let the production
  • the material is more uniform, but recent prior art requires complex fluid control to complete sample preparation for a single channel, requiring high expertise and extremely low product yield.
  • the new device chip adopts the combination of micro-flow and body mixing, and the characteristic time of mixing is obviously smaller than that of body mixing, reducing the injection channel to micron size, and adopting high flow rate and high parallel channel to achieve high Sample uniformity control under yield.
  • the invention adopts multi-channel parallel and the way of the liquid outlet reaction to achieve high output, and adopts the method of controlling the size of the liquid outlet and the liquid coating of the liquid outlet to realize the uniformity control of the product. Since the reaction is carried out outside the flow channel, the product is avoided. The clogging in the flow channel is a typical application that combines the advantages of conventional bulk mixing and microfluidic systems.
  • Figure 1 is a schematic view showing uniform nanoparticles obtained by laminar flow fast diffusion mixing
  • Figure 2 is a schematic diagram of a 2D microfluidic device
  • Figure 3 is a schematic diagram of an improved 3D generation nanoparticle microfluidic device
  • Figure 4 is a quasi-3D hybrid mode in an improved microchannel
  • Figure 5 is a plan view of the liquid outlet of each layer
  • Figure 6 is a side view of the chip
  • Figure 7 is a perspective view of the chip
  • Figure 8 is a photograph of the inlet port
  • Figure 9 is a picture of the liquid outlet under the microscope
  • Figure 10 is a diagram showing the flow of the outlet laminar flow with the fluorescent molecule in place of the outlet of the intermediate layer (top view micrograph);
  • Figure 11 is a photo of the experiment
  • Figure 12 is a comparison photograph of the products obtained by the present invention and the prior art.
  • Figure 13 is a particle size distribution: dynamic light scattering results of different flow rates of the same chip
  • Figure 14 is a graph showing the results of changing the line width of the water channel (25 micron chip 1 to 40 micron chip 2);
  • Figure 15 is a comparison of the product and the body of the chip with varying layer thickness
  • Figure 16 is a comparison of the product and body mixture produced by the 3D, 2D microfluidic chip in the supplementary material of Reference 2.
  • Example 1 A three-layer parallel microchannel chip 1 was prepared: Step 1: Photolithography process
  • Intermediate layer flow path mold preparation Using photoresist SU83005, a 5-10 micron photoresist (rotation speed 3000 rpm-2000 rpm, time 30 s) is coated on the silicon wafer by a silicone machine, and baked at 65 degrees Celsius. 1 minute, 95 degrees Celsius baking, 5 minutes before baking, exposed to the exposure machine, the mask used is the negative layer of the designed intermediate layer pattern (Fig. 5), the exposure time is 50 seconds, and the light intensity is 20mw/ C m 2 ; After exposure, the sample was placed at 65 ° C for 1 minute, and after 95 ° C for 5 minutes; after development by a developing solution, an intermediate layer mold was obtained.
  • each layer of the pattern is an entrance divided into hundreds of outlets through a tree structure, the width of the entrance is 300um, divided into 150 microns, and then to 100 microns. Strips, 50 micron 6 strips, 50 micron 12 strips, to exit 10-1000 flow channels. The top of the exit runner width is 25 microns wide with a period of 50 microns and the middle layer is 5 microns wide with a 100 micron period.
  • Step 2 Soft injection molding process
  • PDMS with different ratios is used.
  • the PDMS ratio of the top layer of the PDMS is 15:1
  • the PDMS ratio of the PDMS middle layer is 10:1
  • the PDMS bottom layer is 8:1.
  • Step 3 Alignment and bonding
  • the resulting chip 1 has a line width of 300 ⁇ m, a PDMS intermediate layer with 100 liquid outlets, and a PDMS top end with 240 outlets.
  • the PDMS intermediate channel has a 5 ⁇ m width. 5 micron, line period is 100 microns; PDMS top flow channel outlet and PDMS bottom channel outlet width is 25 microns, height is 15 microns, line period is 50 microns; PDMS bottom layer thickness is 30 microns, PDMS middle The layer thickness is 20 microns.
  • Example 2 Preparation of a three-layer parallel microchannel chip 2:
  • the inlet width of the three-layer parallel microchannel chip is 300 nm
  • the outlet of the intermediate layer is provided with 50 liquid outlets
  • the end of the top layer is provided with 120 liquid outlets.
  • the outlet of the intermediate flow channel has a width of 20 ⁇ m, a height of 15 ⁇ m, and a line period of 100 ⁇ m.
  • the outlet of the top flow channel and the bottom channel has a width of 40 ⁇ m, a height of 20 ⁇ m, and a line period of 50.
  • Micron; PDMS underlayer thickness is 40 microns, PDMS interlayer thickness is 30 microns.
  • Example 1 The method of Example 1 was used, but the PDMS was replaced by a plexiglass crucible, and the crucible was heated and liquefied, which was not the same cross-linking curing reaction as PDMS; the PDMS of the first step in the second step of Example 1 could be changed to heat melting at 180 ° C. After PMMA; 5) The resulting three-layer PMMA-covered runner mold was cooled at room temperature; in step three, the plasma bond was changed to heat-bond at 140 °C.
  • the three-layer parallel micro-channel chip inlet has a line width of 100 ⁇ m, the middle layer flow channel has 450 liquid outlets, and the top and bottom layers have 1000 liquid outlets.
  • the outlet of the intermediate flow channel has a width of 10 ⁇ m, a height of 10 ⁇ m, and a line period of 100 ⁇ m;
  • the outlet of the top flow channel and the bottom channel has a width of 10 ⁇ m, a height of 5 ⁇ m, and a line period of 50.
  • Micron; PMMA underlayer thickness is 35 microns, PMMA interlayer thickness is 25 microns.
  • the inlet width of the three-layer parallel microchannel chip is 400 um
  • the outlet of the middle layer flow channel is provided with 10 liquid outlets
  • the end of the top layer is provided with 20 liquid outlets.
  • the outlet of the intermediate flow channel has a width of 20 ⁇ m, a height of 3 ⁇ 4 is 15 ⁇ m, and a line period of 100 ⁇ m;
  • the outlet of the top flow channel and the bottom channel has a width of 40 ⁇ m and a height of 20 ⁇ m. It is 50 microns;
  • the PDMS underlayer has a thickness of 25 microns and the PDMS interlayer has a thickness of 15 microns.
  • the body mixing conditions were such that 200 ul of a 50 mg/ml PEG-PLGA/ACN solution was added to 10 ml of the liquid.
  • the mixture product A 200 ul volume, 50 mg/ml concentration of PLGA 55k - PEG 5k / ACN was added to 10 ml of pure water; chip product 8, C, D, 50 mg
  • the concentration of the particle concentration is 1. 5ml / h, reflecting the particle concentration of the PLGA 55k - PEG 5k / ACN solution, the rate of 200ul / h, 500ul / h, lral / h, the total liquid flow time is 1 hour, the water phase flow rate is 1. 5ml / h, reflecting the particle concentration That is, lmg/ml, 2.
  • the particle size is measured as shown in Figure 13, Figure 14, the product B, C, D is about 150-160nm, the peak is narrow, and the body mixing result product A
  • the particle size is extremely heterogeneous and many micron-sized particles are produced.
  • Control Reference 1 and Reference 2 Figure 10 is a picture under the microscope, from which it can be seen that the organic phase and the aqueous phase are mixed at the liquid outlet.
  • the production rate is ten times higher than that of the existing literature ("Microfluidic Platform for Controlled Synthesis of Polymeric Nanoparticles", “Synthesis of Size-Tunable Polymeric Nanoparticles Enabled by 3D Hydrodynamic Flow Focusing in Single-Layer Microchannels”), and the particle size is uniform.
  • the results were close to those reported in the literature, and the product was close at a flow rate of 200 ul/h to 1 ml/h, indicating that the flow rate control accuracy was low and suitable for industrial production.
  • the flow rate is 500ul/h
  • the molecule is PLGA 55k - PEG 5k
  • the line width of the water channel can get better coating effect.
  • the width of the chip 25 ⁇ m width and 40 ⁇ m width, the product was found to be substantially unchanged.
  • PLGA 55k -PEG 5k 50mg/ml As shown in Fig. 15, PLGA 55k -PEG 5k 50mg/ml, the pushing speed is 500ul/h, chip 1 is the bottom film thickness 30um, in the middle The layer thickness is 20 ura, the chip 2 has an underlying film thickness of 40 ⁇ m, and the intermediate layer film has a thickness of 30 ⁇ m.
  • the test result chip products are superior to the body mixed product.
  • Each channel of the organic phase should be far enough apart to satisfy the surrounding area of each organic phase and be surrounded by water. Theoretically, the thinner the liquid phase and the organic phase liquid layer, the thinner the degree of thickness directly affects the diffusion time at the same flow rate.
  • the chip 1 has a film thickness of 30 ⁇ m for the bottom layer and 20 ⁇ m for the middle layer. The same flow rate is used, and the result is slightly better than the bottom layer. 40 micron, the middle layer is 30 micron chip 2, but due to the PDMS silicone curve, the lower limit of PDMS film thickness is 15 microns, and the thinner, the worse the stability of the chip, so we choose the optimal condition.
  • the bottom layer is 30 microns and the intermediate layer is 20 microns thick.
  • Figure 16 is a supplement from the reference article "Synthesis of Size-Tunable Polymeric Nanoparticles Enabled by 3D Hydrodynamic Flow Focusing in Single-Layer Microchannels", which indicates the product prepared by bulk mixing.
  • the heterogeneity, the product of the present invention is close to the 3D, 2D product size and uniformity at the same concentration and close molecular weight, but the flow rate control range is from 200 ul / h to 1000 ul / h, the product is not Too much change can explain our conclusions above.
  • the chip provided by the invention is from 200 ul/h to lOOOul/h, the products are close to the literature results, and the comparative literature needs to strictly limit the flow rate, and the PLGA-PEG/ACN flow rate is much lower than the case of the present invention.
  • the ultimate push rate of the chip of the present invention can be 15 ml/h in the aqueous phase and 5 ml/h in the organic phase. Under this condition, the product size of the same concentration and molecular weight does not change much. It has also been proved that the chip has low flow rate control precision requirements and large output, and is more suitable for industrial production than the existing microfluidic literature.
  • the product obtained by the chip of this patent has good uniformity; compared with Reference 1 and Reference 2, only 3 channels are needed, the product speed is more than 10 times faster, and the product uniformity index is close to it.
  • the above analysis can be concluded. Conclusion Our chips and related technical solutions can achieve high yield and uniform nanoparticle preparation, and its low flow rate control makes it suitable for industrial production.

Abstract

A microfluidic chip consisting of a PDMS top layer, a PDMS intermediate layer, a PDMS bottom layer, and a glass substrate. The PDMS top layer, the PDMS intermediate layer, and the PDMS bottom layer are all provided with a groove at the front-middle portion of their respective lower surfaces. When the PDMS top layer, the PDMS intermediate layer, the PDMS bottom layer, and the glass substrate are sequentially aligned and bonded, three layers of flow paths, namely a top layer flow path, an intermediate layer flow path, and a bottom layer flow path, are formed respectively by the groove of the PDMS top layer and the PDMS intermediate layer, by the groove of the PDMS intermediate layer and the PDMS bottom layer, and by the groove of the PDMS bottom layer and the glass substrate. Three fluid inlets respectively in communication with the top layer flow path, the intermediate layer flow path, and the bottom layer flow path are sequentially arranged on the upper surface of the PDMS top layer on the basis of the positional order of the three layers of flow paths, namely the top layer flow path, the intermediate layer flow path, and the bottom layer flow path, while 10 to 1000 fluid outlets are arranged at the end of each layer of flow path. The present invention employs a scheme of multiple paths in parallel and fluid envelopment at the fluid outlets to achieve uniformity control of a product, and to prevent the product from being clogged within the flow paths.

Description

一种应用于纳米颗粒制备的高并行微流道芯片 技术领域  High parallel microchannel chip for nanoparticle preparation
本发明涉及一种应用于纳米颗粒制备的高并行微流道芯片, 属于纳米制药方向。 背景技术  The invention relates to a high parallel micro-flow channel chip applied to the preparation of nanoparticles, belonging to the direction of nano-pharmaceutical. Background technique
现有文献报道过合成几十到几百纳米尺寸的聚合物纳米颗粒的方法, 主要的方式为采用 利用微流控的方式, 将溶解有亲疏水基团的聚合物分子的有机相夹于水相当中。  A method for synthesizing polymer nanoparticles of several tens to several hundreds of nanometers in size has been reported in the prior art. The main method is to use a microfluidic method to sandwich an organic phase of a polymer molecule having a hydrophobic group in water. Quite quite.
现有技术中的体混合方法, 有容易出现混合不一致, 产生材料均一性差的缺点,。 参考文献 1 《Microfluidic Platform for Controlled Synthesis of Polymeric Nanoparticles》, 参考文献 2 《 Synthesis of Size-Tunable Polymeric Nanoparticles Enabled by 3D Hydrodynamic Flow Focusing in Single-Layer Microchannels》中提及的实验室中采用聚合物材料 PDMS (聚二甲基硅 氧烷) 制备的单条流道, 将体混合由百微米以上尺度下降到若干微米尺度, 无需搅拌的特征 扩散反应时间可以小于纳米颗粒生成的特征时间, 反应更加均一。 如图 1、 图 2所示, 由于 层流作用, 有机相被水相夹成大约几微米的厚度, 同时采用的有机溶剂为与水可无限互溶的 液体, 当有机溶剂扩散入水相后, 溶于有机溶剂的聚合物分子便会自组装成几十纳米的颗粒, 内部为疏水基团而外部为亲水基团, 其平均尺寸小于体混合情况, 且均一性优于体混合情况, 但由于进液压强的限制, 产量只能达到 20ul/h左右的速度, 同时还存在聚合物材料 PDMS表 面容易吸附分子, 造成流道堵塞。 如图 3、 图 4所示, PLGA聚乳酸 -羟基乙酸共聚物- PEG聚 乙二醇: 改进后的 3D流道, 可以避免表面的吸附, 但是在产量上依然没有提高, 同时需要了 更多路的流体控制来完成单路的产出, 难以高产量的得到产物, 工业应用前景差。 发明内容 In the prior art body mixing method, there is a disadvantage that mixing inconsistency is likely to occur, resulting in poor uniformity of materials. Reference material 1 "Microfluidic Platform for Controlled Synthesis of Polymeric Nanoparticles", reference 2 "Micronization of Size-Tunable Polymeric Nanoparticles Enabled by 3D Hydrodynamic Flow Focusing in Single-Layer Microchannels" uses the polymer material PDMS ( Polydimethylsiloxane) The single flow channel is prepared, and the mixing of the body is reduced from a hundred micron to a micron scale. The characteristic diffusion reaction time without stirring can be smaller than the characteristic time of the nanoparticle formation, and the reaction is more uniform. As shown in Fig. 1 and Fig. 2, due to the laminar flow, the organic phase is sandwiched by the aqueous phase to a thickness of about several micrometers, and the organic solvent used is an infinitely miscible liquid with water. When the organic solvent diffuses into the aqueous phase, it dissolves. The polymer molecules in the organic solvent will self-assemble into particles of several tens of nanometers, the inside is a hydrophobic group and the outside is a hydrophilic group, the average size is smaller than the body mixing, and the uniformity is better than the body mixing, but Into the hydraulic pressure limit, the output can only reach a speed of about 20ul / h, and there is also a polymer material PDMS surface is easy to adsorb molecules, resulting in flow channel blockage. As shown in Fig. 3 and Fig. 4, PLGA polylactic acid-glycolic acid copolymer-PEG polyethylene glycol: improved 3D flow channel can avoid surface adsorption, but it still does not improve in yield, and needs more The fluid control of the road to complete the single-channel output, the product is difficult to obtain in high yield, and the industrial application prospect is poor. Summary of the invention
本发明的技术方案。 .  The technical solution of the present invention. .
一种应用于纳米颗粒制备的微流道芯片。  A microchannel chip for nanoparticle preparation.
种微流道芯片, 如图 5、 图 6、 图 7所示, 是由 PDMS顶层、 PDMS中间层、 PDMS底层和 玻璃底片组成;  The micro flow channel chip, as shown in FIG. 5, FIG. 6, and FIG. 7, is composed of a PDMS top layer, a PDMS intermediate layer, a PDMS bottom layer, and a glass back sheet;
其中, 在 PDMS顶层、 PDMS中间层和 PDMS底层的下表面中前部均设有一凹槽, 当 PDMS 顶层、 PDMS中间层、 PDMS底层和玻璃底片依次对位粘合时, PDMS顶层的凹槽与 PDMS中间层、 PDMS中间层的凹槽与 PDMS底层、 PDMS底层的凹槽与玻璃底片分别形成顶层流道、 中间层流 道、 底层流道三层流道, 三层流道各不相通, 互相平行; Wherein, a groove is formed in the front part of the PDMS top layer, the PDMS intermediate layer and the lower surface of the PDMS bottom layer. When the PDMS top layer, the PDMS intermediate layer, the PDMS bottom layer and the glass back sheet are sequentially aligned, the groove of the top layer of the PDMS is PDMS middle layer, The groove of the intermediate layer of the PDMS and the bottom layer of the PDMS, the groove of the bottom layer of the PDMS and the glass backsheet respectively form a top flow channel, an intermediate layer flow channel, and a bottom flow channel three-layer flow channel, and the three-layer flow channels are not connected to each other and are parallel to each other;
其中, 在 PDMS顶层上表面, 按照顶层流道、 中间层流道、 底层流道三层流道的位置顺序 依次设置三个与其相通的进液口; 在每一层流道末端设有 10_1000个出液口。  Wherein, on the upper surface of the top layer of the PDMS, three inlet ports communicating with each other are sequentially arranged according to the position of the top flow channel, the middle layer flow channel, and the bottom flow channel; the number of the flow channels at each end is 10 to 1000 Liquid outlet.
其中, 所述进液口垂直于每层流道且相互平行; 每一层从进液口到出液口之间的流道为 树形结构, 是由一条流道等分为 2条分支流道, 再等分为 3条分支流道, 依次等分为 6条分 支流道 · · ·, 直至分裂为 10- 1000个分支流道作为出液口。  Wherein, the liquid inlets are perpendicular to each of the flow channels and are parallel to each other; the flow path between the liquid inlet and the liquid outlet of each layer is a tree structure, and is divided into two branch flows by one flow channel. The road is divided into three branch flow passages, which are equally divided into six branch flow passages, and are divided into 10-1000 branch flow passages as the liquid outlets.
其中, 所述进液口线宽 100- 400um, 中间层流道出液口宽度为 5-20微米, 高度为 5-15 微米,线周期为 100微米;顶层流道出液口与底层流道出液口宽度为 10-40微米,高度为 5 - 20 微米, 线周期为 50微米。  Wherein, the liquid inlet line width is 100-400 um, the intermediate layer flow channel outlet opening width is 5-20 micrometers, the height is 5-15 micrometers, the line period is 100 micrometers; the top flow channel outlet port and the bottom layer flow channel The outlet has a width of 10-40 microns, a height of 5-20 microns, and a line period of 50 microns.
其中, 中间层流道为有机相流道, 顶层流道与底层流道为水相流道。 所述有机相为可与 水互溶的有机溶剂和不溶于水的溶质组成, 有机溶剂例如甲醇、 乙醇, 异丙醇、 丁醇、 丙酮、 乙腈等, 溶质为生物可降解聚合物和被包封的疏水性药物, 聚合物例如: 聚乳酸 (PLA), 聚 乳酸-羟基乙酸共聚物 ( PLGA ), 聚乙二醇 ( PEG ) , 聚乙二醇-聚乳酸共聚物 (PLA-PEG, PLA-PEG-PLA, PEG- PLA- PEG) , 聚 乙 二 醇 -聚 乳 酸 -羟 基 乙 酸共 聚 物 (PLGA- PEG, PLGA- PEG- PLGA, PEG- PLGA-PEG), 聚己酸内酯(PCL), 聚乙二醇-聚己酸内酯共聚 物 (PCL- PEG' PCL - PEG- PCL), 聚葡糖酸酯 (polyglyconate ), 聚酐 (polyanhydrides ), 多正 酯类 ( polyorthoesters ), 聚二氧六环酮 ( polydioxanone ), 聚氰基丙烯酸烷酯 (polyalkylcyanoacrylates ) 等。  Wherein, the middle layer flow channel is an organic phase flow channel, and the top layer flow channel and the bottom layer flow channel are water phase flow channels. The organic phase is a water-miscible organic solvent and a water-insoluble solute, an organic solvent such as methanol, ethanol, isopropanol, butanol, acetone, acetonitrile, etc., the solute is a biodegradable polymer and is encapsulated Hydrophobic drugs, polymers such as: polylactic acid (PLA), polylactic acid-glycolic acid copolymer (PLGA), polyethylene glycol (PEG), polyethylene glycol-polylactic acid copolymer (PLA-PEG, PLA- PEG-PLA, PEG-PL-PEG), polyethylene glycol-polylactic acid-glycolic acid copolymer (PLGA-PEG, PLGA-PEG-PLGA, PEG-PLGA-PEG), polycaprolactone (PCL), Polyethylene glycol-polycaprolactone copolymer (PCL-PEG' PCL - PEG-PCL), polyglyconate, polyanhydrides, polyorthoesters, polydioxane Polydioxanone, polyalkylcyanoacrylates, and the like.
其中, 中间层流道模具采用光刻胶 SU83005型号制备, 顶层流道模具与底层流道模具采 用光刻胶 SU83025型号制备其模具。  Among them, the intermediate layer flow channel mold is prepared by using the photoresist SU83005 model, and the top flow channel mold and the bottom flow channel mold are prepared by using the photoresist SU83025 model.
其中, 所述 PDMS由单体 A和交联剂 B按比例混合而成; 所述 PDMS顶层采用的 PDMS配比 是 5-20 : 1 (质量比), PDMS中间层采用的 PDMS配比为 5-20 : 1 (质量比), PDMS底层采用 PDMS 配比为 5-20: 1 (质量比); 所述 PDMS项层、 PDMS中间层、 PDMS底层采用的 PDMS配比均不相 同。  Wherein, the PDMS is prepared by mixing the monomer A and the crosslinking agent B in proportion; the PDMS ratio of the PDMS top layer is 5-20:1 (mass ratio), and the PDMS intermediate layer adopts a PDMS ratio of 5 -20 : 1 (mass ratio), PDMS bottom layer adopts PDMS ratio of 5-20: 1 (mass ratio); PDMS item layer, PDMS middle layer and PDMS bottom layer adopt different PDMS ratios.
所述 PDMS材料还能够采用有机玻璃 (聚甲基丙烯酸甲酯 P讓 A) 或乙烯基聚合物, 乙烯 基聚合物选择聚苯乙烯 PS, 聚乙烯 PE, 聚氯乙烯 PVC, 聚二氯乙烯 PVDC等其他聚合物材料 替换。 . .  The PDMS material can also be made of plexiglass (polymethyl methacrylate P let A) or vinyl polymer, vinyl polymer selected polystyrene PS, polyethylene PE, polyvinyl chloride PVC, polydichloroethylene PVDC Other polymer materials are replaced. .
一种三层并行微流道芯片的制备工艺, 包含以下步骤:  A preparation process of a three-layer parallel microchannel chip, comprising the following steps:
步骤一: 光刻工艺 1 )中间层流道模具制备工艺:采用光刻胶 SU83005制备, 中间层流道出液口宽度为 5-20 微米, 高度为 5- 15微米, 线周期为 100微米; Step 1: Photolithography process 1) Intermediate layer flow channel mold preparation process: prepared by using photoresist SU83005, the intermediate layer flow channel outlet opening width is 5-20 microns, the height is 5-15 microns, and the line period is 100 microns;
2 )顶层和底层流道模具的制备工艺: 采用光刻胶 SU83025制备, 顶层流道出液口与底层 流道出液口宽度为 10- 40微米, 高度为 5- 20微米, 线周期为 50微米。  2) Preparation process of the top and bottom flow channel molds: Prepared by photoresist SU83025, the top flow channel outlet and the bottom flow channel outlet have a width of 10-40 microns, a height of 5-20 microns, and a line cycle of 50. Micron.
步骤二: 软注模工艺  Step 2: Soft injection molding process
1 ) 上述各层采用不同配比的 PDMS, PDMS配比介于 5-20 : 1之间;  1) The above layers use PDMS with different ratios, and the PDMS ratio is between 5-20:1;
2 ) 通过甩胶机在底层流道模具上注入 20-40微米厚度的 PDMS , 甩胶机相应转速为 5000 到 2000转每分钟;  2) Injecting PDMS with a thickness of 20-40 microns through the silicone machine on the underlying runner mold, the corresponding speed of the silicone machine is 5000 to 2000 rpm;
3 ) 通过甩胶机在中间层流道模具上注入 10-30微米的 PDMS ,甩胶机相应转速为 6000到 3000转每分钟;  3) Injecting 10-30 micron PDMS into the intermediate layer runner mold by a silicone machine, the corresponding speed of the silicone machine is 6000 to 3000 rpm;
4 ) 在顶层流道模具上倒入厚度为 6mm-2cm的 PDMS ;  4) Pour the PDMS with a thickness of 6mm-2cm on the top flow channel mold;
5 ) 将上述三层流道模具均放入 75°C烘箱固化 30分钟。  5) The above three-layer flow path molds were placed in a 75 ° C oven for 30 minutes.
步骤三: 对位及粘合  Step 3: Alignment and bonding
1 . 切下 PDMS顶层后, 打孔, 通过等离子体处理表面后, 对位放在固化好的中间层 PDMS模具上, 在烘箱中 75摄氏度烘烤 30分钟, 完成 PDMS顶层和 PDMS中间层 的粘连;  1. After cutting the top layer of PDMS, punch the hole, treat the surface by plasma, place it on the cured intermediate layer PDMS mold, and bake in the oven at 75 °C for 30 minutes to complete the adhesion of the PDMS top layer and the PDMS intermediate layer. ;
2. 同理, 从模具上切下已粘合好的两层 PDMS , 打通中间层的出口后, 通过等离子体 处理表面后,对位放在固化好的底层 PDMS模具上,在烘箱中 75摄氏度烘烤过夜, 完成与 PDMS底层的粘合。  2. Similarly, the two layers of PDMS that have been bonded are cut from the mold, and after the outlet of the intermediate layer is opened, the surface is treated by plasma, and then placed on the cured bottom layer PDMS mold, 75 degrees Celsius in the oven. Bake overnight to complete bonding to the underlying PDMS.
3. 切下粘合好的三层 PDMS ,打通底层的出口后将其与玻璃底片通过等离子体处理粘 合成最终芯片。 对于本发明而言,第一重要的是产物均一性,在同一流速比下决定产物性质的是芯片 PDMS 膜层厚度; 其次是生产速度, 对比参考文献 1、 2, 生产速度已经有 10-50倍的提升, 流道的 数目可以部分的限制最大的流速, 即最大生产速度。  3. Cut the bonded three-layer PDMS, open the bottom outlet, and bond it to the glass backsheet by plasma treatment to bond the final chip. For the purposes of the present invention, the first important is product homogeneity. The thickness of the chip PDMS film is determined at the same flow rate ratio; the second is the production speed, compared with references 1, 2, the production speed has been 10-50. With a multiple increase, the number of runners can partially limit the maximum flow rate, ie the maximum production speed.
本发明的技术效果: 1、 采用新兴的 MEMS (注明中文含义) 以及软光刻工艺, 可以非常 方便的制备微米尺寸的聚合物流道, 聚合物材料聚二甲基硅氧垸 (PDMS ) 材料成本低, 可以 大幅度的降低器件的制备成本。 2、 在微流道中进行的化学反应, 分子析出, 对比将常规的加 样搅拌混合反应, 由于尺寸的直接下降, 扩散成平方关系下降, 可以加快产物的产生的速度 和更好的实现产物的均一性控制。 3、 采用微米尺度的液体包被可以缩短混合反应时间, 让产 物更加均匀, 但是最近的现有技术, 其需要采用复杂的流体控制来完成单条通道的样品制备, 需要较高的专业技术, 同时产品产量极低。 4、新的装置芯片,采用微流与体混合结合的方式, 其混合的特征时间明显小于体混合情况, 将注入的流道减小到微米尺寸, 采用高流速, 高平 行通道的方式实现高产量下的样品均一性控制。 The technical effects of the invention: 1. Using the emerging MEMS (indicating Chinese meaning) and the soft lithography process, the micron-sized polymer flow channel can be conveniently prepared, and the polymer material polydimethylsiloxane (PDMS) material can be prepared. The low cost can greatly reduce the manufacturing cost of the device. 2. The chemical reaction carried out in the microchannel, the molecular precipitation, the comparison of the conventional sample mixing and mixing reaction, due to the direct decrease of the size, the diffusion into a square relationship, which can speed up the production of the product and better realize the product. Uniformity control. 3, the use of micro-scale liquid coating can shorten the mixing reaction time, let the production The material is more uniform, but recent prior art requires complex fluid control to complete sample preparation for a single channel, requiring high expertise and extremely low product yield. 4. The new device chip adopts the combination of micro-flow and body mixing, and the characteristic time of mixing is obviously smaller than that of body mixing, reducing the injection channel to micron size, and adopting high flow rate and high parallel channel to achieve high Sample uniformity control under yield.
本发明采用多通道并行, 出液口反应的方式实现高产量, 采用控制出液口尺寸, 出液口 液体包被的方式实现产物的均一性控制, 由于反应在流道外进行, 避免了产物在流道内堵塞 的情况, 为结合传统体混合和微流系统的优势的典型应用。 附图说明  The invention adopts multi-channel parallel and the way of the liquid outlet reaction to achieve high output, and adopts the method of controlling the size of the liquid outlet and the liquid coating of the liquid outlet to realize the uniformity control of the product. Since the reaction is carried out outside the flow channel, the product is avoided. The clogging in the flow channel is a typical application that combines the advantages of conventional bulk mixing and microfluidic systems. DRAWINGS
图 1为采用层流快速扩散混合得到均一的纳米颗粒示意图; Figure 1 is a schematic view showing uniform nanoparticles obtained by laminar flow fast diffusion mixing;
图 2为 2D微流装置示意图; Figure 2 is a schematic diagram of a 2D microfluidic device;
图 3为改进的 3D产生纳米颗粒的微流装置示意图; Figure 3 is a schematic diagram of an improved 3D generation nanoparticle microfluidic device;
图 4为改进的微流道中的准 3D混合方式; Figure 4 is a quasi-3D hybrid mode in an improved microchannel;
图 5为各层出液口俯视图; Figure 5 is a plan view of the liquid outlet of each layer;
图 6为芯片侧视图; Figure 6 is a side view of the chip;
图 7为芯片立体结构图; Figure 7 is a perspective view of the chip;
图 8为进液口照片; Figure 8 is a photograph of the inlet port;
图 9为显微镜下出液口图片; Figure 9 is a picture of the liquid outlet under the microscope;
图 10为用荧光分子替代中间层出口的出口层流情况图 (俯视显微图); Figure 10 is a diagram showing the flow of the outlet laminar flow with the fluorescent molecule in place of the outlet of the intermediate layer (top view micrograph);
图 11为实验进行照片; Figure 11 is a photo of the experiment;
图 12为本发明与现有工艺技术各自得到的产物对比照片; Figure 12 is a comparison photograph of the products obtained by the present invention and the prior art;
图 13为颗粒大小分布: 同一芯片不同流速的动态光散射结果图; Figure 13 is a particle size distribution: dynamic light scattering results of different flow rates of the same chip;
图 14为改变水流道线宽 (25微米芯片 1变为 40微米芯片 2 ) 的产物结果图; Figure 14 is a graph showing the results of changing the line width of the water channel (25 micron chip 1 to 40 micron chip 2);
图 15为改变层厚度的芯片的产物与体混和对比图; Figure 15 is a comparison of the product and the body of the chip with varying layer thickness;
图 16为参考文献 2补充材料中采用 3D, 2D微流控芯片产生的产物与体混和比较图。 具体实施方式 Figure 16 is a comparison of the product and body mixture produced by the 3D, 2D microfluidic chip in the supplementary material of Reference 2. detailed description
下面将结合附图对本发明作进一步的阐述。 实施例 1 制备三层并行微流道芯片 1: 步骤一: 光刻工艺 The invention will now be further elucidated with reference to the accompanying drawings. Example 1 A three-layer parallel microchannel chip 1 was prepared: Step 1: Photolithography process
1 ) 中间层流道模具制备: 采用光刻胶 SU83005, 采用甩胶机在硅片上涂布上 5-10微米 的光刻胶 (转速 3000rpm-2000rpm, 时间为 30s ), 经过 65摄氏度烘烤 1分钟, 95摄氏度烘 烤 5分钟前烘后, 放于曝光机下曝光, 采用的掩模为所设计的中间层图形 (图 5 ) 的阴版, 曝光时间为 50秒, 光强为 20mw/Cm2 ; 曝光后样品放于 65摄氏度 1分钟, 95摄氏度后烘 5分 钟; 经过显影液显影后, 获得中间层模具。 1) Intermediate layer flow path mold preparation: Using photoresist SU83005, a 5-10 micron photoresist (rotation speed 3000 rpm-2000 rpm, time 30 s) is coated on the silicon wafer by a silicone machine, and baked at 65 degrees Celsius. 1 minute, 95 degrees Celsius baking, 5 minutes before baking, exposed to the exposure machine, the mask used is the negative layer of the designed intermediate layer pattern (Fig. 5), the exposure time is 50 seconds, and the light intensity is 20mw/ C m 2 ; After exposure, the sample was placed at 65 ° C for 1 minute, and after 95 ° C for 5 minutes; after development by a developing solution, an intermediate layer mold was obtained.
2 ) 顶层和底层流道模具的制备: 釆用光刻胶 SU83025, 步骤同上, 前烘条件为 65摄氏 度 1分钟, 95摄氏度 10分钟, 采用相应的掩模, 曝光时间为 90秒, 光强 20mw/cm2, 后烘条 件为 65摄氏度 1分钟, 95摄氏度 10分钟。  2) Preparation of the top and bottom runner molds: 光刻Using the photoresist SU83025, the procedure is the same as above, the pre-baking conditions are 65 degrees Celsius for 1 minute, 95 degrees Celsius for 10 minutes, the corresponding mask is used, the exposure time is 90 seconds, and the light intensity is 20mw. /cm2, post-baking conditions are 65 degrees Celsius for 1 minute, 95 degrees Celsius for 10 minutes.
如图 5、 图 6、 图 7, 每层图形均为一个入口经过一个树形结构等分到上百个出口, 宽度 为入口 1条 300um, 等分到 150微米两条, 再到 100微米 3条, 50微米 6条, 50微米 12条, 到出口 10- 1000条流道。 出口流道宽度底顶层为 25微米宽度, 周期 50微米, 中间层为 5微 米宽度, 100微米周期。  As shown in Figure 5, Figure 6, and Figure 7, each layer of the pattern is an entrance divided into hundreds of outlets through a tree structure, the width of the entrance is 300um, divided into 150 microns, and then to 100 microns. Strips, 50 micron 6 strips, 50 micron 12 strips, to exit 10-1000 flow channels. The top of the exit runner width is 25 microns wide with a period of 50 microns and the middle layer is 5 microns wide with a 100 micron period.
步骤二: 软注模工艺, ,  Step 2: Soft injection molding process,
1 ) 采用不同配比的 PDMS, PDMS顶层采用 PDMS配比是 15: 1, PDMS中间层采用的 PDMS 配比为 10 : 1 , PDMS底层采用 PDMS配比为 8 : 1 ;  1) PDMS with different ratios is used. The PDMS ratio of the top layer of the PDMS is 15:1, the PDMS ratio of the PDMS middle layer is 10:1, and the PDMS bottom layer is 8:1.
2 ) 通过甩胶机在底层流道模具上注入 30微米厚度的 PDMS, 甩胶机相应转速为 2000转 每分钟;  2) Injecting a 30-micron-thick PDMS onto the underlying runner mold by a silicone machine, the corresponding speed of the silicone machine is 2000 rpm;
3 ) 通过甩胶机在中间层流道模具上注入 20微米的 PDMS, 甩胶机相应转速为 3000转每 分钟;  3) Inject 20 micron PDMS into the middle layer flow path mold through a rubberizing machine, and the corresponding speed of the rubberizing machine is 3000 rpm;
4 ) 在顶层流道模具上倒入厚度为 6mm的 PDMS;  4) Pour the PDMS with a thickness of 6mm on the top flow channel mold;
5 ) 将上述三层 PDMS覆盖的流道模具均放入 75°C烘箱固化 30分钟。  5) The above three layers of PDMS covered runner molds were placed in a 75 ° C oven for 30 minutes.
步骤三: 对位及粘合  Step 3: Alignment and bonding
1 )切下 PDMS顶层后, 打孔, 通过等离子体处理表面后, 对位放在固化好的中间层 TOMS模具 上, 在烘箱中 75摄氏度烘烤 30分钟, 完成 PDMS顶层和 PDMS中间层的粘连;  1) After cutting the top layer of PDMS, punch the hole, treat the surface by plasma, place it on the cured intermediate layer TOMS mold, and bake in the oven at 75 ° C for 30 minutes to complete the adhesion of the PDMS top layer and the PDMS intermediate layer. ;
2 ) 同理, 从模具上切下已粘合好的两层 PDMS, 打通中间层的出口后, 通过等离子体处理表 面后, 对位放在固化好的底层 PDMS模具上, 在烘箱中 75摄氏度烘烤过夜, 完成与 PDMS底层 的粘合。 ' '  2) Similarly, the two layers of PDMS that have been bonded are cut from the mold, and after the outlet of the intermediate layer is opened, the surface is treated by plasma, and then placed on the cured bottom layer PDMS mold, 75 degrees Celsius in the oven. Bake overnight to complete bonding to the underlying PDMS. ' '
3 ) 切下粘合好的三层 PDMS打通底层的出口后将其与玻璃底片通过等离子体处理粘合成最终 心片; 最终得到的芯片 1进液口线宽 300um, PDMS中间层末端设有 100个出液口, PDMS顶底末 端设有 240个出液口; PDMS中间层流道出液口宽度为 5微米, 高度为 5微米, 线周期为 100 微米; PDMS顶层流道出液口与 PDMS底层流道出液口宽度为 25微米, 高度为 15微米, 线周 期为 50微米; PDMS底层厚度为 30微米, PDMS中间层厚度为 20微米。 实施例 2 制备三层并行微流道芯片 2: 3) cutting the bonded three-layer PDMS to open the bottom layer of the outlet and bonding it to the glass backsheet by plasma treatment to form a final core sheet; The resulting chip 1 has a line width of 300 μm, a PDMS intermediate layer with 100 liquid outlets, and a PDMS top end with 240 outlets. The PDMS intermediate channel has a 5 μm width. 5 micron, line period is 100 microns; PDMS top flow channel outlet and PDMS bottom channel outlet width is 25 microns, height is 15 microns, line period is 50 microns; PDMS bottom layer thickness is 30 microns, PDMS middle The layer thickness is 20 microns. Example 2 Preparation of a three-layer parallel microchannel chip 2:
采用实施例 1 的方法, 制得三层并行微流道芯片进液口线宽 300mn, 中间层流道末端设 有 50个出液口, 顶底层末端设有 120个出液口。 中间层流道出液口宽度为 20微米, 高度为 15微米, 线周期为 100微米; 顶层流道出液口与底层流道出液口宽度为 40微米, 高度为 20 微米, 线周期为 50微米; PDMS底层厚度为 40微米, PDMS中间层厚度为 30微米。 实施例 3 制备三层并行微流道芯片 3:  By the method of the first embodiment, the inlet width of the three-layer parallel microchannel chip is 300 nm, the outlet of the intermediate layer is provided with 50 liquid outlets, and the end of the top layer is provided with 120 liquid outlets. The outlet of the intermediate flow channel has a width of 20 μm, a height of 15 μm, and a line period of 100 μm. The outlet of the top flow channel and the bottom channel has a width of 40 μm, a height of 20 μm, and a line period of 50. Micron; PDMS underlayer thickness is 40 microns, PDMS interlayer thickness is 30 microns. Example 3 Preparation of a three-layer parallel microchannel chip 3:
采用实施例 1的方法, 但将 PDMS替换为有机玻璃 ΡΜΜΑ, ΡΜΜΑ为加热液化, 不是和 PDMS 一样的交联固化反应;可将实施例 1步骤二中 1 )的 PDMS改为在 180摄氏度加热熔化后的 PMMA; 5 ) 中将所得三层 PMMA覆盖的流道模具放于室温冷却; 步骤三中等离子体粘合改为在 140摄 氏度下加热粘合。  The method of Example 1 was used, but the PDMS was replaced by a plexiglass crucible, and the crucible was heated and liquefied, which was not the same cross-linking curing reaction as PDMS; the PDMS of the first step in the second step of Example 1 could be changed to heat melting at 180 ° C. After PMMA; 5) The resulting three-layer PMMA-covered runner mold was cooled at room temperature; in step three, the plasma bond was changed to heat-bond at 140 °C.
制得三层并行微流道芯片进液口线宽 100um, 中间层流道末端设有 450个出液口, 顶底 层末端设有 1000个出液口。 中间层流道出液口宽度为 10微米, 高度为 10微米, 线周期为 100微米; 顶层流道出液口与底层流道出液口宽度为 10微米, 高度为 5微米, 线周期为 50 微米; PMMA底层厚度为 35微米, PMMA中间层厚度为 25微米。 实施例 4制备三层并行微流道芯片 4:  The three-layer parallel micro-channel chip inlet has a line width of 100 μm, the middle layer flow channel has 450 liquid outlets, and the top and bottom layers have 1000 liquid outlets. The outlet of the intermediate flow channel has a width of 10 μm, a height of 10 μm, and a line period of 100 μm; the outlet of the top flow channel and the bottom channel has a width of 10 μm, a height of 5 μm, and a line period of 50. Micron; PMMA underlayer thickness is 35 microns, PMMA interlayer thickness is 25 microns. Example 4 Preparation of a three-layer parallel microchannel chip 4:
采用实施例 1 的方法, 制得三层并行微流道芯片进液口线宽 400um, 中间层流道末端设 有 10个出液口, 顶底层末端设有 20个出液口。 中间层流道出液口宽度为 20微米, 高 ^¾为 15微米, 线周期为 100微米; 顶层流道出液口与底层流道出液口宽度为 40微米, 高度为 20 微米, 钱周期为 50微米; PDMS底层厚度为 25微米, PDMS中间层厚度为 15微米。 芯片结果测试: By the method of the first embodiment, the inlet width of the three-layer parallel microchannel chip is 400 um , the outlet of the middle layer flow channel is provided with 10 liquid outlets, and the end of the top layer is provided with 20 liquid outlets. The outlet of the intermediate flow channel has a width of 20 μm, a height of 3⁄4 is 15 μm, and a line period of 100 μm; the outlet of the top flow channel and the bottom channel has a width of 40 μm and a height of 20 μm. It is 50 microns; the PDMS underlayer has a thickness of 25 microns and the PDMS interlayer has a thickness of 15 microns. Chip result test:
1、 进液控制 在培养皿中注入约 5ml纯水, 将芯片出液口泡入纯水中后, 如图 11所示, 顶层流道和下 层流道通入纯水溶液, 推速为 1. 5ml/h, 3分钟后中间层流道入口通入 PEG- PLGA/ACN溶液, 典型浓度为 50mg/ml,典型聚合物分子量为 PEG5k- PLGA55k, 典型推速为 100ul/h至 lml/h。推一 个小时后收集样品,并加纯水至 10ml体积。 1, liquid control The singularity of the singularity of the singularity of the singularity of the singularity of the liquid. After a minute, the intermediate layer flow channel inlet is passed through a PEG-PLGA/ACN solution with a typical concentration of 50 mg/ml. The typical polymer molecular weight is PEG 5k - PLGA 55k , with a typical push rate of 100 ul/h to 1 ml/h. The sample was collected after one hour of pushing and pure water was added to a volume of 10 ml.
体混合条件为在 10ml液体中加入 200ul 50mg/ml的 PEG- PLGA/ACN溶液。  The body mixing conditions were such that 200 ul of a 50 mg/ml PEG-PLGA/ACN solution was added to 10 ml of the liquid.
2、 对样品的鉴定 2. Identification of samples
如图 12所示, 由左到右为体混合产物 A, 200ul体积, 50mg/ml浓度的 PLGA55k- PEG5k/ACN 加入到 10毫升纯水中的产物; 芯片产物8、 C、 D, 50mg/ml浓度的 PLGA55k- PEG5k/ACN溶液, 推速分别 200ul/h, 500ul/h, lral/h, 总推液时间均为 1小时, 水相流速为 1. 5ml/h, 体现颗 粒浓度即分别为 lmg/ml, 2. 5mg/mL 5mg/ml,颗粒大小测量如图 13,图 14所示, 产物 B, C, D 大约为 150-160nm, 峰较窄, 而体混合结果产物 A颗粒大小极不均一, 很多微米尺度的颗粒 产生。 通过测试, 可以得出以下结论: As shown in Figure 12, from left to right, the mixture product A, 200 ul volume, 50 mg/ml concentration of PLGA 55k - PEG 5k / ACN was added to 10 ml of pure water; chip product 8, C, D, 50 mg The concentration of the particle concentration is 1. 5ml / h, reflecting the particle concentration of the PLGA 55k - PEG 5k / ACN solution, the rate of 200ul / h, 500ul / h, lral / h, the total liquid flow time is 1 hour, the water phase flow rate is 1. 5ml / h, reflecting the particle concentration That is, lmg/ml, 2. 5mg/mL 5mg/ml, the particle size is measured as shown in Figure 13, Figure 14, the product B, C, D is about 150-160nm, the peak is narrow, and the body mixing result product A The particle size is extremely heterogeneous and many micron-sized particles are produced. Through the test, the following conclusions can be drawn:
1 ) 高通量性。 由图 5、 图 6、 图 7、 图 9所示, 树状结构的流道, 由 1条流道分支为数百条流道, 能够大大提高液体通过的芯片的流量。  1) High throughput. As shown in Fig. 5, Fig. 6, Fig. 7, and Fig. 9, the flow path of the tree structure is branched into a plurality of flow paths by one flow path, which can greatly increase the flow rate of the chip through which the liquid passes.
2 ) 快速混合效果。 对照参考文献 1和参考文献 2, 图 10是在显微镜下的图片, 从中可以看出, 有机相和水相在出液口处混合效果。  2) Quick mixing effect. Control Reference 1 and Reference 2, Figure 10 is a picture under the microscope, from which it can be seen that the organic phase and the aqueous phase are mixed at the liquid outlet.
3 ) 产物均一性高。 由图 13可见, 芯片的样品均一性结果明显优于体混合, 体混合明显有大 尺寸颗粒, 加大流速提升产量, 产物性质无明显变化 (有机相 200ul/h与 lOOOul/h, 分子为 PLGA55k-PEG5k, 每一水相为 1. 5ml/h )。 产量速度比起已有文献 (《Microfluidic Platform for Controlled Synthesis of Polymeric Nanoparticles》, 《 Synthesis of Size-Tunable Polymeric Nanoparticles Enabled by 3D Hydrodynamic Flow Focusing in Single-Layer Microchannels》)可高 十倍以上, 同时颗粒大小均一性结果与文献报道接近, 并且在流速为 200ul/h到 lml/h时, 产物接近, 说明流速控制精度要求低, 适合工业化生产。 3) High product uniformity. It can be seen from Fig. 13 that the sample homogeneity result of the chip is obviously better than that of the body mixture, and the body mixing obviously has large-sized particles, and the flow rate is increased to increase the yield, and the product properties are not significantly changed (organic phase 200 ul/h and lOOOOul/h, the molecule is PLGA). 55k -PEG 5k, each of the aqueous phase is 1. 5ml / h). The production rate is ten times higher than that of the existing literature ("Microfluidic Platform for Controlled Synthesis of Polymeric Nanoparticles", "Synthesis of Size-Tunable Polymeric Nanoparticles Enabled by 3D Hydrodynamic Flow Focusing in Single-Layer Microchannels"), and the particle size is uniform. The results were close to those reported in the literature, and the product was close at a flow rate of 200 ul/h to 1 ml/h, indicating that the flow rate control accuracy was low and suitable for industrial production.
对不同芯片的理论与测试结果: 如图 所示, 流速为 500ul/h, 分子为 PLGA55k- PEG5k, 水流道的线宽宽可以得到较好的包被效果, 申请人测试了两类水流道宽度的芯片: 25微^宽 度和 40微米宽度, 发现产物基本没有变化。 Theoretical and test results for different chips: As shown in the figure, the flow rate is 500ul/h, the molecule is PLGA 55k - PEG 5k , and the line width of the water channel can get better coating effect. The applicant tested two types of water flow. The width of the chip: 25 μm width and 40 μm width, the product was found to be substantially unchanged.
如图 15所示, PLGA55k-PEG5k 50mg/ml , 推速为 500ul/h, 芯片 1为底层膜厚 30um, 中间 层厚 20ura, 芯片 2为底层膜厚 40微米, 中间层膜厚 30微米, 测试结果芯片产物均优于体混 合产物情况。 有机相每条流道应距离足够远以满足每条有机相流出流道后周围均被水包裹。 理论上水相和有机相液层为越薄越好, 厚薄程度在同一流速情况下直接影响扩散时间, 越薄的情况产物均一性会越好, 而在同一流速比的情况, 芯片 PDMS底层和中层的厚度会直接 影响到液层的厚度, 我们测试了两类芯片, 见图 15, 芯片 1采用的膜厚为底层 30微米, 中 间层 20微米, 采用同样的流速, 结果要略优于底层为 40微米, 中间层为 30微米芯片 2的情 况, 但由于 PDMS甩胶曲线决定, PDMS的膜厚下限为 15微米, 同时越薄, 芯片的稳定性会越 差, 所以最优条件我们就选为底层 30微米, 中间层膜厚 20微米。 As shown in Fig. 15, PLGA 55k -PEG 5k 50mg/ml, the pushing speed is 500ul/h, chip 1 is the bottom film thickness 30um, in the middle The layer thickness is 20 ura, the chip 2 has an underlying film thickness of 40 μm, and the intermediate layer film has a thickness of 30 μm. The test result chip products are superior to the body mixed product. Each channel of the organic phase should be far enough apart to satisfy the surrounding area of each organic phase and be surrounded by water. Theoretically, the thinner the liquid phase and the organic phase liquid layer, the thinner the degree of thickness directly affects the diffusion time at the same flow rate. The thinner the product, the better the product uniformity, and in the case of the same flow rate ratio, the chip PDMS bottom layer and The thickness of the middle layer directly affects the thickness of the liquid layer. We tested two types of chips, as shown in Figure 15. The chip 1 has a film thickness of 30 μm for the bottom layer and 20 μm for the middle layer. The same flow rate is used, and the result is slightly better than the bottom layer. 40 micron, the middle layer is 30 micron chip 2, but due to the PDMS silicone curve, the lower limit of PDMS film thickness is 15 microns, and the thinner, the worse the stability of the chip, so we choose the optimal condition. The bottom layer is 30 microns and the intermediate layer is 20 microns thick.
图 16来自参考文章 《Synthesis of Size-Tunable Polymeric Nanoparticles Enabled by 3D Hydrodynamic Flow Focusing in Single-Layer Microchannels》 的补充材料, 该文章指出体混合 制备的产物, 当 PLGA-PEG浓度越高的时候产物越大且不均匀, 本发明的产物在同样的浓度 及接近的分子量的情况下对比其 3D、 2D的产物大小和均一性, 均与其接近, 但流速控制范 围在 200ul/h-1000ul/h, 产物无太大变化, 可以说明我们上述的结论。  Figure 16 is a supplement from the reference article "Synthesis of Size-Tunable Polymeric Nanoparticles Enabled by 3D Hydrodynamic Flow Focusing in Single-Layer Microchannels", which indicates the product prepared by bulk mixing. The higher the concentration of PLGA-PEG, the larger the product. And the heterogeneity, the product of the present invention is close to the 3D, 2D product size and uniformity at the same concentration and close molecular weight, but the flow rate control range is from 200 ul / h to 1000 ul / h, the product is not Too much change can explain our conclusions above.
4) 本发明提供的芯片在 200ul/h到 lOOOul/h时, 产物均与文献结果接近, 而对比文献, 其 需要较为严格限制流速大小, 且 PLGA- PEG/ACN流速远低于本发明的情况, 测试本发明的芯片 的极限推速可以达到水相 15ml/h, 有机相达到 5ml/h, 在此条件下, 同一浓度及分子量的产 物大小均无较大变化。 也证明了本发明的芯片流速控制精度要求低, 产量大, 比己有的微流 文献更适合工业化生产。  4) When the chip provided by the invention is from 200 ul/h to lOOOul/h, the products are close to the literature results, and the comparative literature needs to strictly limit the flow rate, and the PLGA-PEG/ACN flow rate is much lower than the case of the present invention. The ultimate push rate of the chip of the present invention can be 15 ml/h in the aqueous phase and 5 ml/h in the organic phase. Under this condition, the product size of the same concentration and molecular weight does not change much. It has also been proved that the chip has low flow rate control precision requirements and large output, and is more suitable for industrial production than the existing microfluidic literature.
对比体混合, 本专利的芯片得到的产物均一性好; 对比参考文献 1和参考文献 2, 只需 要 3通路 制, 产物速度要快 10倍以上, 产物均一性指标与其接近, 以上分析可以得出结论 我们的芯片及相关技术方案可以实现高产量, 均一性好的纳米颗粒制备, 其对流速控制的低 要求使其适合工业化生产。  Compared with the mixed body, the product obtained by the chip of this patent has good uniformity; compared with Reference 1 and Reference 2, only 3 channels are needed, the product speed is more than 10 times faster, and the product uniformity index is close to it. The above analysis can be concluded. Conclusion Our chips and related technical solutions can achieve high yield and uniform nanoparticle preparation, and its low flow rate control makes it suitable for industrial production.

Claims

权 利 要 求 书 Claim
1、 一种微流道芯片, 其特征在于, 是由 PDMS顶层、 PDMS中间层、 PDMS底层和玻璃底 片组成。 A microchannel chip characterized by comprising a PDMS top layer, a PDMS intermediate layer, a PDMS underlayer and a glass substrate.
2、 根据权利要求 1所述的微流道芯片, 其中, 在 PDMS顶层、 PDMS中间层和 PDMS底层 的下表面中前部均设有一凹槽; 当 PDMS顶层、 PDMS中间层、 PDMS底层和玻璃底片依次对位 粘合时, PDMS顶层的凹槽与 PDMS中间层、 PDMS中间层的凹槽与 PDMS底层、 PDMS底层的凹 槽与玻璃底片分别形成顶层流道、 中间层流道、 底层流道三层流道, 三层流道各不相通, 互 相平行。  2. The microchannel chip according to claim 1, wherein a groove is provided in the front portion of the PDMS top layer, the PDMS intermediate layer and the lower surface of the PDMS underlayer; when the PDMS top layer, the PDMS intermediate layer, the PDMS bottom layer and the glass When the negative film is sequentially aligned, the groove of the top layer of the PDMS and the PDMS intermediate layer, the groove of the PDMS intermediate layer and the PDMS bottom layer, the groove of the PDMS bottom layer and the glass back sheet respectively form a top flow channel, an intermediate layer flow channel, and a bottom flow channel. The three-layer flow channel and the three-layer flow channel are not connected to each other and are parallel to each other.
3、 根据权利要求 2所述的微流道芯片, 其中, 在 PDMS顶层上表面, 按照顶层流道、 中 间层流道、 底层流道三层流道的位置顺序依次设置三个与其相通的进液口; 在每一层流道末 端设有出液口。  3. The micro-channel chip according to claim 2, wherein, on the upper surface of the top layer of the PDMS, three adjacent channels are sequentially arranged according to the position of the top flow channel, the middle layer flow channel, and the bottom layer flow channel Liquid port; a liquid outlet is provided at the end of each layer of the flow channel.
4、 根据权利要求 3所述的微流道芯片, 其中, 所述进液口垂直于每层流道且相互平行; 每一层从进液口到出液口之间的流道为树形结构, 是由一条流道等分为 2条分支流道, 再等 分为 3条分支流道,依次等分为 6条分支流道 · · ·,直至分裂为 10-1000个分支流道作为出液 4. The microchannel chip according to claim 3, wherein the liquid inlet is perpendicular to each of the flow channels and parallel to each other; the flow path between the liquid inlet and the liquid outlet of each layer is a tree shape The structure is divided into two branch flow channels by one flow channel, and then divided into three branch flow channels, which are equally divided into six branch flow paths, and are divided into 10-1000 branch flow paths. Liquid
P。 P.
5、 根据权利要求 3或 4所述的微流道芯片, 其中, 所述进液口线宽 100- 400um, 每一层 设有 10-1000出液口; 中间层流道出液口宽度为 5- 20微米,髙度为 5- 15微米,线周期为 100 微米; 顶层流道出液口与底层流道出液口宽度为 10-40微米, 高度为 5- 20微米, 线周期为 50微米; PDMS底层厚度为 20-40微米, PDMS中间层厚度为 10-30微米。  The micro-channel chip according to claim 3 or 4, wherein the liquid inlet line has a line width of 100-400 um, and each layer is provided with 10-1000 liquid outlets; and the intermediate layer flow channel outlet opening width is 5- 20 μm, 5-15 μm twist, 100 μm line period; top channel flow port and bottom channel outlet width 10-40 μm, height 5-20 μm, line cycle 50 Micron; PDMS underlayer thickness is 20-40 microns, PDMS interlayer thickness is 10-30 microns.
6、 根据权利要求 5所述的微流道芯片,其中所述进液口线宽 300um,每一层设有 100出 液口; 中间层流道出液口宽度为 5微米, 高度为 5微米, 线周期为 100微米: 顶层流道出液 口与底层流道出液口宽度为 25微米, 高度为 15微米, 线周期为 50微米; PDMS底层厚度为 30微米, PDMS中间层厚度为 20微米。  6. The microchannel chip according to claim 5, wherein the liquid inlet line has a width of 300 um, and each layer is provided with 100 liquid outlets; the intermediate layer flow passage has a liquid outlet width of 5 micrometers and a height of 5 micrometers. The line period is 100 microns: the top channel outlet and the bottom channel have a width of 25 microns, a height of 15 microns, a line period of 50 microns, a PDMS bottom layer thickness of 30 microns, and a PDMS interlayer thickness of 20 microns. .
7、 根据权利要求 6所述的微流道芯片, 其中, 所述中间层流道为有机相流道, 顶层流 道与底层流道为水相流道。  7. The microchannel chip according to claim 6, wherein the intermediate layer flow channel is an organic phase flow channel, and the top layer flow channel and the bottom layer flow channel are water phase flow channels.
8、 根据权利要求 7所述的微流道芯片, 其中, 所述有机相由可与水互溶的有机溶剂和 不溶于水的溶质组成。  The microchannel chip according to claim 7, wherein the organic phase is composed of a water-miscible organic solvent and a water-insoluble solute.
9、 根据权利要求 8所述的微流道芯片, 其中, 所述有机溶剂选择甲醇、 乙醇, 异丙醇、 丁醇、 丙酮、 乙腈中一种或多种。  The microchannel chip according to claim 8, wherein the organic solvent is one or more selected from the group consisting of methanol, ethanol, isopropanol, butanol, acetone, and acetonitrile.
_ 10、 根据权利要求 8所述的微流道芯片, 其中, 所述溶质选择生物可降解聚合物和 被包封的疏水性药物。 The microchannel chip according to claim 8, wherein the solute selects a biodegradable polymer and an encapsulated hydrophobic drug.
11、 根据权利要求 10所述的微流道芯片,其中,所述生物可降解聚合物选择聚乳酸, 聚乳酸 -羟基乙酸共聚物, 聚乙二醇, 聚乙二醇-聚乳酸共聚物, 聚乙二醇-聚乳酸 -羟基乙酸 共聚物,聚己酸内酯, 聚乙二醇-聚己酸内酯共聚物, 聚葡糖酸酯, 聚酑, 多正酯类, 聚二氧 六环酮, 聚氰基丙烯酸垸酯中一种或多种。 11. The microchannel chip according to claim 10, wherein the biodegradable polymer is selected from the group consisting of polylactic acid, polylactic acid-glycolic acid copolymer, polyethylene glycol, polyethylene glycol-polylactic acid copolymer, Polyethylene glycol-polylactic acid-glycolic acid copolymer, polycaprolactone, polyethylene glycol-polycaprolactone copolymer, polygluconic acid ester, polyfluorene, polyorthoester, polydioxane One or more of cycloketone, polydecyl cyanoacrylate.
12、 根据权利要求 5所述的微流道芯片, 其中, 所述三层流道模具均采用光刻胶制 备。  The micro flow channel chip according to claim 5, wherein the three-layer flow path molds are all prepared by using a photoresist.
13、 根据权利要求 5所述的微流道芯片, 其中, 所述 PDMS由单体 A和交联剂 B按比 例混合而成; 所述 PDMS顶层采用的 PDMS质量比配比是 5-20: 1, PDMS中间层采用的 PDMS质 量比配比为 5-20 : 1, PDMS底层采用 PDMS质量比配比为 5-20 : 1 ; 所述 PDMS顶层、 PDMS中间 层、 PDMS底层采用的 PDMS配比均不相同。  The microchannel chip according to claim 5, wherein the PDMS is prepared by mixing the monomer A and the crosslinker B in proportion; and the PDMS mass ratio of the PDMS top layer is 5-20: 1. The PDMS quality ratio of the PDMS intermediate layer is 5-20: 1, the PDMS bottom layer adopts the PDMS mass ratio ratio of 5-20:1; the PDMS top layer, the PDMS intermediate layer, and the PDMS bottom layer adopt the PDMS ratio. They are all different.
14、 根据权利要求 5所述的微流道芯片, 其中, 所述 PDMS材料被替换为有机玻璃聚 甲基丙烯酸甲酯 P匪 A或乙烯基聚合物; 所述乙烯基聚合物选择聚苯乙烯 PS, 聚乙烯 PE, 聚 氯乙烯 PVC, 聚二氯乙烯 PVDC中一种或多种。  14. The microchannel chip according to claim 5, wherein the PDMS material is replaced with an organic glass polymethyl methacrylate P匪A or a vinyl polymer; the vinyl polymer selects polystyrene One or more of PS, polyethylene PE, polyvinyl chloride PVC, and polydichloroethylene PVDC.
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