WO2014066905A3 - Reducing background fluorescence in mems materials by low energy ion beam treatment - Google Patents

Reducing background fluorescence in mems materials by low energy ion beam treatment Download PDF

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Publication number
WO2014066905A3
WO2014066905A3 PCT/US2013/067126 US2013067126W WO2014066905A3 WO 2014066905 A3 WO2014066905 A3 WO 2014066905A3 US 2013067126 W US2013067126 W US 2013067126W WO 2014066905 A3 WO2014066905 A3 WO 2014066905A3
Authority
WO
WIPO (PCT)
Prior art keywords
ion beam
low energy
background fluorescence
energy ion
reducing background
Prior art date
Application number
PCT/US2013/067126
Other languages
French (fr)
Other versions
WO2014066905A2 (en
Inventor
Martin Huber
Bason E. Clancy
Adam R. Hall
Original Assignee
Quantapore, Inc.
University Of North Carolina At Greensboro
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/662,532 external-priority patent/US20140335513A9/en
Application filed by Quantapore, Inc., University Of North Carolina At Greensboro filed Critical Quantapore, Inc.
Publication of WO2014066905A2 publication Critical patent/WO2014066905A2/en
Priority to US14/659,432 priority Critical patent/US9651539B2/en
Publication of WO2014066905A3 publication Critical patent/WO2014066905A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00206—Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores

Abstract

Methods for fabricating materials useful for optical detection in microfluidic and nanofluidic devices, such as those used in nanopore-based nucleic acid sequencing are described herein. In certain variations, a method of reducing background fluorescence in a MEMS material may include the step of treating a surface of the MEMS material with a low energy ion beam.
PCT/US2013/067126 2012-10-28 2013-10-28 Reducing background fluorescence in mems materials by low energy ion beam treatment WO2014066905A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US14/659,432 US9651539B2 (en) 2012-10-28 2015-03-16 Reducing background fluorescence in MEMS materials by low energy ion beam treatment

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US13/662,532 2012-10-28
US13/662,532 US20140335513A9 (en) 2009-09-30 2012-10-28 Hybrid nanopore device with optical detection and methods of using same
US201361819606P 2013-05-05 2013-05-05
US61/819,606 2013-05-05

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US13/662,532 Continuation-In-Part US20140335513A9 (en) 2009-09-30 2012-10-28 Hybrid nanopore device with optical detection and methods of using same

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US14/659,432 Continuation US9651539B2 (en) 2012-10-28 2015-03-16 Reducing background fluorescence in MEMS materials by low energy ion beam treatment

Publications (2)

Publication Number Publication Date
WO2014066905A2 WO2014066905A2 (en) 2014-05-01
WO2014066905A3 true WO2014066905A3 (en) 2015-07-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2013/067126 WO2014066905A2 (en) 2012-10-28 2013-10-28 Reducing background fluorescence in mems materials by low energy ion beam treatment

Country Status (1)

Country Link
WO (1) WO2014066905A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107109472B (en) * 2014-10-10 2021-05-11 昆塔波尔公司 Nanopore-based polymer analysis using mutually quenching fluorescent labels

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2158476B8 (en) 2007-05-08 2019-10-09 Trustees of Boston University Chemical functionalization of solid-state nanopores and nanopore arrays and applications thereof
US9651539B2 (en) 2012-10-28 2017-05-16 Quantapore, Inc. Reducing background fluorescence in MEMS materials by low energy ion beam treatment
AU2014268322B2 (en) 2013-05-24 2019-01-24 Quantapore, Inc. Nanopore-based nucleic acid analysis with mixed FRET detection
WO2016065339A1 (en) 2014-10-24 2016-04-28 Quantapore, Inc. Efficient optical analysis of polymers using arrays of nanostructures
JP6967006B2 (en) 2016-01-15 2021-11-17 クアンタポール， インコーポレイテッド Nanopore analysis based on reduced background optics
JP2019513387A (en) * 2016-04-14 2019-05-30 クアンタポール， インコーポレイテッド Mixed optical signals in polymer analysis using nanopores
CN109477813A (en) 2016-07-05 2019-03-15 昆塔波尔公司 Based on optical nano-pore sequencing
CN109811046A (en) * 2019-01-18 2019-05-28 广东工业大学 A kind of three layers of nano-pore structure and the preparation method and application thereof that size is controllable

Citations (6)

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Publication number Priority date Publication date Assignee Title
US20020025529A1 (en) * 1999-06-28 2002-02-28 Stephen Quake Methods and apparatus for analyzing polynucleotide sequences
US20020034762A1 (en) * 1998-05-27 2002-03-21 Vysis, Inc., A Delaware Corporation Biological assays for analyte detection
US20040002089A1 (en) * 2000-08-29 2004-01-01 Benoit Dubertret Methods employing fluorescence quenching by metal surfaces
US20040137158A1 (en) * 2003-01-15 2004-07-15 Kools Jacques Constant Stefan Method for preparing a noble metal surface
US20090148348A1 (en) * 2005-08-11 2009-06-11 Eksigent Technologies, Llc Plastic surfaces and apparatuses for reduced adsorption of solutes and methods of preparing the same
US20090314939A1 (en) * 2008-06-20 2009-12-24 Carl Zeiss Smt Inc. Sample decontamination

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020034762A1 (en) * 1998-05-27 2002-03-21 Vysis, Inc., A Delaware Corporation Biological assays for analyte detection
US20020025529A1 (en) * 1999-06-28 2002-02-28 Stephen Quake Methods and apparatus for analyzing polynucleotide sequences
US20040002089A1 (en) * 2000-08-29 2004-01-01 Benoit Dubertret Methods employing fluorescence quenching by metal surfaces
US20040137158A1 (en) * 2003-01-15 2004-07-15 Kools Jacques Constant Stefan Method for preparing a noble metal surface
US20090148348A1 (en) * 2005-08-11 2009-06-11 Eksigent Technologies, Llc Plastic surfaces and apparatuses for reduced adsorption of solutes and methods of preparing the same
US20090314939A1 (en) * 2008-06-20 2009-12-24 Carl Zeiss Smt Inc. Sample decontamination

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
GALLA ET AL.: "Microfluidic carbon-blackened polydimethylsiloxane device with reduced ultra violet background fluorescence for simultaneous two-color ultra violet/visible- laser induced fluorescence detection in single cell analysis", BIOMICROFLUIDICS, vol. 6, 12 January 2012 (2012-01-12), pages 014104 *
HSIEH ET AL.: "Effective Enhancement of Fluorescence Detection Efficiency in Protein Microarray Assays: Application of a Highly Fluorinated Organosilane as the Blocking Agent on the Background Surface by a Facile Vapor-Phase Deposition Process", ANAL. CHEM., vol. 81, 2009, pages 7908 - 7916 *
LEE ET AL.: "High aspect ratio polymer microstructures and cantilevers for bioMEMS using low energy ion beam and photolithography", SENSORS AND ACTUATORS A, vol. 71, 1998, pages 144 - 149 *
LU ET AL.: "PARYLENE BACKGROUND FLUORESCENCE STUDY FOR BIOMEMS APPLICATIONS", TRANSDUCERS, 21 June 2009 (2009-06-21), DENVER, CO, USA, pages 178 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107109472B (en) * 2014-10-10 2021-05-11 昆塔波尔公司 Nanopore-based polymer analysis using mutually quenching fluorescent labels

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Publication number Publication date
WO2014066905A2 (en) 2014-05-01

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