WO2014099918A1

WO2014099918A1 - Moat construction to reduce noise coupling to a quiet supply

Info

Publication number: WO2014099918A1
Application number: PCT/US2013/075681
Authority: WO
Inventors: Joel T. FICKE; David M. FRIEND; James D. STROM; Erik S. UNTERBORN
Original assignee: International Business Machines Corporation
Priority date: 2012-12-18
Filing date: 2013-12-17
Publication date: 2014-06-26
Also published as: US20140167213A1; US8994117B2

Abstract

A semiconductor chip having a P- substrate 101 and an N+ epitaxial layer 102 grown on the P- substrate 101 is shown. A P- circuit layer 103 is grown on top of the N+ epitaxial layer 102. A first moat 1 10A having an electrically quiet ground connected to a first N+ epitaxial region 102A is created by isolating the first N+ epitaxial region 102A with a first deep trench 140A. The first moat is surrounded 1 10A, except for a DC path, by a second moat 1 10B with a second N+ epitaxial region 102B, created by isolating the second N+ epitaxial region 102B with a second deep trench 140B. The second moat 1 10B may be arranged as a rectangular spiral around the first moat 110A.

Description

Moat Construction to Reduce Noise Coupling to a Quiet Supply Technical Field

001 This invention relates generally to providing a reduced noise coupling to a quiet (noise free) supply on a semiconductor chip.

Disclosure of the Invention

002 Electronic systems, such as computers, electronic gaming systems, and the like typically include semiconductor chips which contain digital circuitry. Often the digital circuitry is switched rapidly, causing large current transients and resulting electrical noise such as voltage variation on a supply voltage on the semiconductor chips. Circuits that are sensitive to electrical noise may perform poorly when subjected to variation on the supply voltage.

003 In an embodiment of the invention, a moat isolation structure is created on a semiconductor chip having a P- substrate. An N+ epitaxial layer is grown on the P- substrate. A first moat comprises a first N+ epitaxial region electrically isolated from a second N+ epitaxial region by a first deep trench surrounding a perimeter of the first moat. The first N+ epitaxial region is connected to a first supply voltage, such as an analog ground supply voltage that must be kept as noise free as possible. A second moat comprises a third N+ epitaxial region isolated from the second N+ epitaxial region by a second deep trench surrounding a perimeter of the second moat, the second moat surrounding the first moat except for a DC path in the second N+ epitaxial region extending from the first deep trench to an area outside of the second moat.

004 In an embodiment, the second moat may be formed in a spiral rectangular ring around the first moat. In an embodiment, the isolation moat structure may be created as a series of rectangular rings around the first moat, with gaps to provide a DC path extending from the first deep trench to an area outside of the second moat.

Brief Description of the Drawings

005 FIG. 1 shows a cross sectional view of a semiconductor chip with moats created by deep trench isolations.

006 FIG. 2 shows a top view of the semiconductor chip showing a first moat within a spiraled second moat as an embodiment of isolation of the first moat.

007 FIG. 3 shows an alternate embodiment of the semiconductor chip showing the first moat isolated by concentric rectangular partial rings of moats, each of the concentric rectangular rings having a gap.

008 FIG. 4 shows a process to create a design structure containing information that, when used by a suitable semiconductor fabrication process, will create a moat isolation structure.

Detailed Description

009 Electronic systems, such as computers, electronic gaming systems, and the like typically include semiconductor chips which have digital circuitry. Often the digital circuitry is switched rapidly, causing large current transients and resulting electrical noise such as voltage variation on supply voltage on the chips. Circuits that are sensitive to electrical noise may perform poorly when subjected to variations on supply voltages. Phase-locked loop circuits are one example of circuits that are sensitive to electrical noise.

010 Creation of a region (or regions) on a chip to isolate noise sensitive circuitry is taught in embodiments of the present invention.

01 1 A particular semiconductor chip has a P- substrate, an N+ epitaxial layer above the P- substrate, and circuit regions above the N+ epitaxial layer. The circuit region may comprise P- regions and recessed oxide regions. An NBMOAT is a structure having an N+ epi layer above which is a "circuit layer" that may have patterned source/drain regions in a P- layer. Recessed oxide is used to isolate the patterned source/drain regions in the P- layer. A deep trench completely surrounds and electrically isolates an N+ epi region within the NBMOAT. An NBMOAT herein is also called, simply, "moat".

012 NBMOATs may be created using deep trench DTMOAT structures; however layout ground rules may not allow creation of NBMOATs within NBMOATs, thereby preventing creation of concentric NBMOAT structures that would serve to reduce electrical noise in an inner NBMOAT in the concentric NBMOAT structure.

013 Taught herein is a first NBMOAT within which circuits sensitive to electrical noise are placed. A spiral second NBMOAT, the spiral open at a distal end from the first NBMOAT, is created around the first NBMOAT to create isolation similar to a concentric NBMOAT structure, but which provides a DC path from the DTMOAT surrounding the first NBMOAT to an area outside the second NBMOAT so that the NBMOAT structure can be checked with existing ground rule checking tools which may not support an "NBMOAT inside another NBMOAT".

014 Referring now to Fig. 1 , a chip 100 is shown to comprise a P- substrate 101 . An N+ epi (epitaxial layer) 102 (portions shown as N+ epi 102A, 102B, 102C) is formed on top of P- substrate 101 . A P- epi layer 103 (portions shown as P- epi layer 103A, 103B) is formed on top of N+ epi 102 (It is understood that N+ epi 102 and P-103 are grown over the entire semiconductor chip. Portions of N+ epi 102

(102A, 102B, 102C) are isolated one from another with deep trench isolation (DTMOAT) structures 140. Similar isolation by DTMOAT 140 structures for isolating P- 103 areas). It is also understood that SX contacts 132 puncture (or pierce) P- 103 but do not isolate regions of P-103. STI (shallow trench isolation) 105 areas are formed using ROX (Recessed Oxide) masks to provide isolation where desired by the designer. Oxide layers 122 and 121 may be placed above the P-103 layer. It will be understood that Oxide layers 122 and/or 121 may include additional insulating materials besides oxide materials. Oxide 121 layer is a layer where M1 (metal 1 ) 1 15 is formed and insulated electrically by oxide such as SiO2.

015 P- 103A and N+ epi 102A are denoted with the "A" for easy reference to those particular P- 103 and N+ epi 102 regions. P- 103A and N+ epi 102A are electrically isolated from other P- 103 and N+ epi 102 regions by DTMOAT 140A which completely surrounds P- 103A and N+ epi 102A. Likewise N+ epi 102C and P- 103B are electrically isolated by being completely surrounded by a DTMOAT 140B. Generically, a DTMOAT is referred to as DTMOAT 140, with letters appended to refer to a particular DTMOAT 140.

01 6 An N+ implant 131 is formed in N+ epi 102, using a mask and implant after formation of N+ epi 102 (N+ epi 102 shown as N+ epi 102A, 102B, 102C but is generically referred to as N+ epi 102). A contact (SX contact 132) is formed through P- 103 and oxide 122 to electrically connect a particular N+ epi 102 with a particular M1 (metal 1 ) 1 15 that is created in Oxide 121 layer. N+ epi 102 may be required by electrical ground rules to be connected to a Gnd supply (e.g., logic Gnd, or a quiet Gnd created in embodiments of the invention). Exemplary SX contacts 132 (132A, 132B) are shown in Fig. 1 . See Figs. 1 , 2, and 3 for SX contact 132A in NBMOAT 1 10A, SX contact 132B to contact N+ epi 102B (Fig. 1 ), SX contact 132B shown in Figs. 2 and 3. SX contact 132B is used to contact N+ epi 102C of NBMOAT 1 10B. SX contacts 132D, 132E, 132F are used to contact N+ epi in NBMOATs 1 10C, 1 10D, 1 10E in Fig. 3 to a ground supply.

017 P- 103 is coupled to a Gnd supply using a particular M1 1 15 connected to a Gnd supply voltage and a contact 125 as shown. There may be more than one "Gnd" supply on chip 100, for example a logic ground that may be electrically noisy due to switching transients of logic circuitry, and an analog Gnd (AGND) that needs to be kept relatively noise-free (electrically quiet) and isolated from logic Gnd. A P+ implant may be used to improve connection of P- 103 to contact 125.

018 NBMOAT 1 10 (two shown, NBMOATs 1 10A, 1 10B; NBMOAT 1 10 used to generically refer to an NBMOAT) are areas completely surrounded by a DTMOAT 140 (DTMOATs 140 are deep trench structures that isolate a first region of N+ epi 102 from a second region of N+ epi 102. For example, N+ epi 102A, N+ epi 102B, and N+ epi 102C are electrically isolated in Fig. 1 by DTMOAT 140 deep trench structures. P- 103 regions in an NBMOAT 1 10 are also isolated by DTMOATs 140 from P-103 regions outside the NBMOAT 1 10). A number of DTMOATs 140 are referenced in Fig. 2.

019 DTMOAT 140, in embodiments, may, for ground rule requirements, have to be electrically connected to a supply voltage. A first embodiment of DTMOAT 140, shown as 140X, has DT dielectric 142X cover the entire side portions of conductor 141 and no electrical connection is made to conductor 141 in DTMOAT 140X.

However, in DTMOAT 140Y, DT dielectric 142Y has been etched away or otherwise not formed, near a top of conductor 141 . An electrical connection may be made to a supply voltage (e.g., Vdd) by forming an N+ region in P- 103 prior to etching

DTMOAT 140B and connecting the N+ region to Vdd using a contact such as contact 125. The Vdd to connected N+ region will thereby be coupled to conductor 141 in DTMOAT 140Y. DTMOAT 140 is used to generically refer to a DTMOAT; as with NBMOAT 1 10, letters may be appended to denote a particular DTMOAT 140.

020 Areas between a first NBMOAT 1 10 and a second NBMOAT 1 10 (shown as

1 10A, 1 10B) may have STI (shallow trench isolation) 105 or P- 103 areas according to masks produced by the designer. For example, a RX (recessed oxide) mask may define areas that are P- 103 and which areas are STI 105.

021 With reference now to Figs. 1 and 2, an NBMOAT isolation structure 201 comprising NBMOAT 1 10B designed as a spiral around NBMOAT 1 10A.

DTMOATs 140 (140A, 140B) electrically isolate N+ epi 102 and P- 103 regions as explained with reference to Fig. 1 earlier. NBMOAT 1 10A has N+ epi 102 epi region (102A, Fig. 1 ) connected to analog ground (AGND) 250 using an M1 1 15 connected to AGND, with SX contact 132A transferring the AGND voltage to the N+ Implant

131 in NBMOAT 1 10A. AGND 250 may be brought onto semiconductor chip 100 using one or more designated pins on semiconductor chip 100.

022 SX contact 132B connects Gnd to areas on semiconductor chip 100 that are not in an NBMOAT isolation structure 201 . SX contact 132C connects Gnd to NBMOAT 1 10B, preferably near a portion of NBMOAT 1 10B at or near an end of NBMOAT 1 10B distal from NBMOAT 1 10A.

023 Consider now the electrical isolation provided by NBMOAT 1 10B for the N+ epi 102A of NBMOAT 1 10A. Gnd (logic Gnd) 251 may be expected to be noisy due to switching transients of logic circuitry (latches, combinatorial logic, clock buffers, SRAMs (static random access memory)). Gnd 251 is connected to N+ epi 102C of NBMOAT 1 10B as shown, using SX contact 132C. N+ epi 102 has a significant resistivity, for example, 15 ohms/square in an exemplary technology. The spiral structure of NBMOAT 1 10B provides a relatively long, narrow, N+ epi 102C, and series resistance may be on the order of 100 Kohms for an N+ epi 102C having approximately 6000 squares in length. This example of resistivity, width, and length is for exemplary purposes and other values for width, length, and resistivity are contemplated.

024 Resistors 21 1 in NBMOAT 1 10B represent the distributed resistance of N+ epi 102C in NBMOAT 1 10B. This relatively high resistance will attenuate noise on Gnd 251 coupled into SX contact 132C. Likewise, N+ epi 102B (Fig. 1 ) between spiral portions of NBMOAT 1 10B have similar resistance, also represented by resistors 21 1 (which may or may not be equal resistance to resistors 21 1 in

NBMOAT 1 10B, depending on relative widths of the spiral portions of NBMOAT

1 10B and the width of spacing between the spiral portions of NBMOAT 1 10B, as will be appreciated by those of skill in the art. In an embodiment of the invention, NBMOAT 1 10B is as narrow as layout ground rules permit, in order to maximize series resistance of the N+ epi 102C from a distal to a proximal end, relative to NBMOAT 1 10A, of NBMOAT 1 10B. Likewise, in an embodiment, separation of spiral arms of NBMOAT 1 10B are also designed to be as narrow as layout ground rules permit in order to maximize series resistance of DC path 220 through N+ epi 1 10B (see Fig. 1 ).

025 Capacitive coupling from noise on N+ epi 102 in region 212 to N+ epi 102A in NBMOAT 1 10A may be reduced due to the spiral structure of NBMOAT 1 10B causing capacitances to be series connected. Series capacitors 210 are shown (for simplicity, only series capacitors 210 on bottom portions of the spiral are referenced). Capacitors 210 are capacitances from a first side of a DTMOAT 140 to a second side of DTMOAT 140. Each capacitor 210 comprises a first capacitance from a first N+ epi 102 to a conductor 141 in the DTMOAT 140 in series with a second capacitance from the conductor 141 in the DTMOAT 140 to a second N+ epi 102. DT dielectric 142 (142X, 142Y shown in variants of DTMOATs 140 (140X, 140Y) in Fig. 1 ) is a dielectric of the two series capacitors in each capacitor 210. Each capacitor 210 is effectively coupled in series as shown in Fig. 2. In the example of Fig. 2, effective capacitance from N+ epi 102 in area 212 to N+ epi 102A in NBMOAT 1 1 OA is

Ceffective = 4 ^* C210 / 7

026 The "4" is for four sides; C210 is capacitance of a capacitor 210; and there are seven series capacitors (recall also that each capacitor 210 is already two series connected capacitors as described above). Area 212 is an area on chip 100 in which relatively noise insensitive logic circuitry is placed. NBMOAT 1 10A is reserved for circuitry that is more sensitive to noise. Circuitry in NBMOAT 1 10A may be digital logic or analog circuitry. The equation above is of course a greatly simplified approximation, as the spiral arms of NBMOAT 1 10B decrease in length at each more inner arm portion of the spiral. Furthermore, there exists additional

capacitance (junction capacitance) between each N+ epi 102B, N+ epi 102C and P- substrate 101 .

027 NBMOAT 1 10B is "spiraled" around NBMOAT 1 10A, yet has an "opening" extending from the DTMOAT 140A all the way between the spirals of NBMOAT

1 10B (logic Gnd DC path 220, Fig. 2) therefore, the layout ground rules may be checked.

028 Alternate embodiments of NBMOAT isolation structure 201 are contemplated. For example, Fig. 3 shows a chip 100 having NBMOAT isolation structure 201 A, which includes many of the advantages of NBMOAT isolation structure 201 .

Particular referenced structures may be as referenced in Figs. 1 and 2.

029 NBMOAT isolation structure 201 A comprises NBMOAT 1 10A, which may be identical to NBMOAT 1 10A of Fig. 2. However, instead of a spiraled NBMOAT 1 10B as was shown in Fig. 2, a number of concentric NBMOAT rectangular "rings", with gaps 221 in the rings is shown in NBMOAT isolation structure 201 A. An outer NBMOAT 1 10C ring has a gap 221 through which logic ground DC path 220 passes in the N+ epi 102B (Fig. 1 ). The gaps 221 may provide layout ground rule checking capability. NBMOAT 1 10D is an NBMOAT rectangular ring, also with a gap 221 for DC path 220A. NBMOAT 1 10E is yet another NBMOAT concentric rectangular ring, also having a gap 221 . For a given chip area, NBMOAT isolation structure 201 A has almost as much capacitive attenuation (i.e., series capacitances) as NBMOAT isolation structure 201 , but may have a lower value series resistive path 220A from region 212 to NBMOAT 1 10A. Likewise, since N+ epi 102 regions may be connected to Gnd, connection of logic Gnd 251 to SX contacts 132D, 132E and 132F will tend to bring the relatively noisy Gnd 251 further inside NBMOAT isolation structure 201 A than Gnd 251 is brought into NBMOAT isolation structure 201 .

030 In NBMOAT isolation structure 201 A of Fig. 3, it will be noted that SX contacts 132D, 132E, and 132F are near the respective gaps 221 of NBMOATs

1 10C, 1 10D, and 1 10E to provide as much series resistance as possible along the distributed resistance (see resistors 21 1 , Fig. 2, which represent distributed resistance of NBMOAT 1 10B in Fig. 2) of the N+ epi regions of NBMOATs 1 10C, 1 10D, and 1 10E. Preferably, SX contacts 132D, 132E, and 132F are as formed as close to the gap ends of NBMOATs 1 10C, 1 10D, 1 10E as layout ground rules allow, but further distances are contemplated.

031 In the NBMOAT isolation structure 201 A of Fig. 3 it will also be noted that the gaps 221 of the concentric rectangular rings alternate from one side to an opposite side of NBMOAT 1 10A to provide as high a resistance as possible for DC path 220. Other positioning of the gaps 221 is contemplated, but such positioning would have a lower resistance DC path 220 through the second N+ epitaxial region.

032 The above spiral and rectangular ring embodiments are merely examples of NBMOAT isolation structures 201 . It is contemplated that NBMOAT 1 10A may be of irregular shape, e.g., not a rectangle, or perhaps comprising first and second rectangular portions. The surrounding NBMOAT structure may not be one or more rectangular rings with gaps or a spiral, but may have irregularly shaped sections.

033 Fig. 4 illustrates multiple design structures 400 including an input design structure 420 that is preferably processed by a design process. Design structure 420 may be a logical simulation design structure generated and processed by design process 410 to produce a logically equivalent functional representation of a hardware device, such as semiconductor chip 100 (Fig. 1 ) including NBMOAT isolation structure 201 . Design structure 420 may alternatively include data or program instructions that, when processed by design process 410, generate a functional representation of the physical structure of a hardware device. Whether representing functional or structural design features, design structure 420 may be generated using electronic computer-aided design, such as that implemented by a core developer/designer. When encoded on a machine-readable data transmission, gate array, or storage medium, design structure 420 may be accessed and processed by one or more hardware or software modules within design process 410 to simulate or otherwise functionally represent an electronic component, circuit, electronic or logic module, apparatus, device, or system such as those shown in FIGs. 1 , 2 and 3. As such, design structure 420 may include files or other data structures including human or machine-readable source code, complied structures, and computer-executable code structures that, when processed by a design or simulation data processing system, functionally simulate or otherwise represent circuits or other levels of hardware logic design. Such data structures may include hardware-description language design entities or other data structures conforming to or compatible with lower-level HDL design languages such as Verilog and VHDL, or higher level design languages such as C or C++.

034 Design process 410 preferably employs and incorporates hardware or software modules for synthesizing, translating, or otherwise processing a design/simulation functional equivalent of the components, circuits, devices, or logic structures shown in FIGs. 1 , 2, and 3 to generate a Netlist 480 which may contain design structures such as design structure 420. Netlist 480 may comprise, for example, compiled or otherwise processed data structures representing a list of wires, discrete components, logic gates, control circuits, I/O devices, models, etc. that describe the connections to other elements and circuits in an integrated circuit design. Netlist 480 may be synthesized using an iterative process in which Netlist 480 is resynthesized one or more times depending on design specifications and parameters for the device. As with other design structure types described herein, Netlist 480 may be recorded on a machine-readable data storage medium or programmed into a programmable gate array. The medium may be a non-volatile storage medium such as a magnetic or optical disk drive, a programmable gate array, a compact flash, or other flash memory. Additionally, the medium may be a system or cache memory, buffer space, or electrically or optically conductive devices and materials on which data packets may be transmitted and intermediately stored via the internet, or other suitable networking means.

035 Design process 410 may include hardware and software modules for processing a variety of input data structure types including Netlist 480. Such data structure types may reside, for example, within library elements 430 and include a set of commonly used elements, circuits, and devices, including models, layouts, and symbolic representations, for a given manufacturing technology (e.g., different technology nodes, 32 nm, 45 nm, 90 nm, etc.). The data structure types may further include design specifications 440, characterization data 450, verification data 460, design rules 470, and test data files 485 which may include input test patterns, output test results, and other testing information. Design process 410 may further include, for example, standard mechanical design processes such as stress analysis, thermal analysis, mechanical event simulation, process simulation for operations such as casting, molding, and die press forming, etc. One of ordinary skill in the art of mechanical design can appreciate the extent of possible mechanical design tools and applications used in design process 410, without deviating from the scope of the teachings of the present disclosure. Design process 410 may also include modules for performing standard circuit design processes such as timing analysis, verification, design rule checking, place and route operations, etc.

036 Design process 410 employs and incorporates logic and physical design tools such as HDL compilers and simulation model build tools to process design structure 420 together with some or all of the depicted supporting data structures, along with any additional mechanical design or data, to generate a second design structure 490. Design structure 490 resides on a storage medium or programmable gate array in a data format used for the exchange of data of mechanical devices and structures (e.g., information stored on an IGES, DXF, Parasolid XT, JT, DRG, or any other suitable format for storing or rendering such mechanical design structures). Similar to design structure 420, design structure 490 preferably comprises one or more files, data structures, or other computer-encoded data or instructions that reside on transmission or data storage media and that, when processed by an ECAD system, generate a logically or otherwise functionally equivalent form of one or more of the embodiments of the invention shown in FIGs. 1 , 2 and 3. In one embodiment, design structure 490 may comprise a compiled, executable HDL simulation model that functionally simulates the devices shown in FIGs. 1 , 2, and 3. 037 Design structure 490 may also employ a data format used for the exchange of layout data of integrated circuits and/or symbolic data format (e.g., information stored in a GDSII, GL1 , OASIS, map files, or any other suitable format for storing such design data structures). Design structure 490 may comprise information such as symbolic data, map files, test data files, design content files, manufacturing data, layout parameters, wires, levels of metal, vias, shapes, data for routing through the manufacturing line, and any other data required by a manufacturer or other designer/developer to produce a device or structure as described above and shown in FIGs. 1 , 2, and 3. Design structure 490 may then proceed to a state 495 where, for example, design structure 490 proceeds to tape-out, is released to manufacturing, is released to a mask house, is sent to another design house, is sent back to the customer, etc.

Statement of Industrial Applicability

The present invention can find application in a wide array of electrical and electronic devices, which themselves have various potential industrial and commercial applications.

Claims

CLAIMS What is claimed is:

1 . A moat isolation structure on a semiconductor chip having a P- substrate and an N+ epitaxial grown on the P- substrate, the moat isolation structure comprising: a first moat comprising a first N+ epitaxial region electrically isolated from a second N+ epitaxial region by a first deep trench surrounding a perimeter of the first moat, the first N+ epitaxial region connected to a first supply voltage; a second moat comprising a third N+ epitaxial region isolated from the second N+

epitaxial region by a second deep trench surrounding a perimeter of the second moat, the second moat surrounding the first moat except for a DC path in the second N+ epitaxial region extending from the first deep trench to an area outside of the second moat.

2. The moat isolation structure of claim 1 , the second moat formed in a spiral

around the first moat;

3. The moat isolation structure of claim 2, further comprising a connection between a second voltage supply and the third N+ epitaxial region, the connection closer to an end of the spiral distal to the first moat than an end of the spiral proximal to the first moat.

4. The moat isolation structure of claim 3, the second moat spiral portions being as narrow as layout ground rules permit to maximize series resistance of the third N+ epitaxial region from a first end of the spiral to a second end of the spiral.

5. The moat isolation structure of claim 4, adjacent portions of the spiral being designed to be as close together as layout ground rules permit to maximize series resistance of the second N+ epitaxial region in the DC path.

6. The moat isolation structure of claim 1 , the second moat forming a first

rectangular ring around the first moat, except for a first gap to provide the DC path in the second N+ epitaxial region, the third N+ epitaxial region connected to the second supply voltage near the first gap.

7. The moat isolation structure of claim 6, the second moat being as narrow as allowed by layout ground rules to maximize resistance in the third N+ epitaxial region from a first and of the second moat to a second end of the second moat.

8. The moat isolation structure of claim 6, further comprising a third moat forming a second rectangular ring around the second moat, except for a second gap to provide the DC path in the second N+ epitaxial region, the third moat having a fourth N+ epitaxial region, the fourth N+ epitaxial region connected to the second supply voltage near the second gap.

9. The moat isolation structure of claim 8, the second gap being on an opposite side of the first moat from the first gap.

10. The moat isolation structure of claim 8, a width of the third moat being as narrow as allowed by layout ground rules to maximize resistance in a fourth N+ epitaxial region from a first end of the fourth N+ epitaxial region to a second end of the fourth epitaxial region.

1 1 The moat isolation of claim 8, the third moat being as close to the second moat as layout ground rules allow to maximize series resistance of the DC path.

12. A design structure tangibly embodied in a machine-readable storage medium used in a design process of a semiconductor chip, the design structure having elements that, when processed in a semiconductor manufacturing facility, produce a semiconductor chip that comprises:

A moat isolation structure on the semiconductor chip, the moat isolation structure

comprising: a first moat comprising a first N+ epitaxial region electrically isolated from a second N+ epitaxial region by a first deep trench surrounding a perimeter of the first moat, the first N+ epitaxial region connected to a first supply voltage; a second moat comprising a third N+ epitaxial region isolated from the second N+ epitaxial region by a second deep trench surrounding a perimeter of the second moat, the second moat surrounding the first moat except for a DC path in the second N+ epitaxial region extending from the first deep trench to an area outside of the second moat.