WO2015109273A3 - Coupling schemes for gimbaled scanning mirror arrays - Google Patents

Coupling schemes for gimbaled scanning mirror arrays Download PDF

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Publication number
WO2015109273A3
WO2015109273A3 PCT/US2015/011883 US2015011883W WO2015109273A3 WO 2015109273 A3 WO2015109273 A3 WO 2015109273A3 US 2015011883 W US2015011883 W US 2015011883W WO 2015109273 A3 WO2015109273 A3 WO 2015109273A3
Authority
WO
WIPO (PCT)
Prior art keywords
scanning mirror
mirror arrays
rotating members
coupling schemes
substrate
Prior art date
Application number
PCT/US2015/011883
Other languages
French (fr)
Other versions
WO2015109273A4 (en
WO2015109273A2 (en
Inventor
Yuval Gerson
Naftali Chayat
Noel Axelrod
Alexander Shpunt
Original Assignee
Apple Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Apple Inc. filed Critical Apple Inc.
Priority to CN201580005002.2A priority Critical patent/CN106415361B/en
Publication of WO2015109273A2 publication Critical patent/WO2015109273A2/en
Publication of WO2015109273A3 publication Critical patent/WO2015109273A3/en
Publication of WO2015109273A4 publication Critical patent/WO2015109273A4/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0154—Torsion bars

Abstract

A scanning device (64, 220, 230) includes a substrate (68), which is etched to define an array of two or more parallel rotating members (102) and a gimbal (72, 232) surrounding the rotating members. First hinges (106, 234) connect the gimbal to the substrate and defining a first axis of rotation, about which the gimbal rotates relative to the substrate. Second hinges (74) connect the rotating members to the support and defining respective second, mutually-parallel axes of rotation of the rotating members relative to the support, which are not parallel to the first axis.
PCT/US2015/011883 2014-01-19 2015-01-18 Coupling schemes for gimbaled scanning mirror arrays WO2015109273A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201580005002.2A CN106415361B (en) 2014-01-19 2015-01-18 Couple scheme for the scanning lens array equipped with universal joint

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201461929071P 2014-01-19 2014-01-19
US61/929,071 2014-01-19

Publications (3)

Publication Number Publication Date
WO2015109273A2 WO2015109273A2 (en) 2015-07-23
WO2015109273A3 true WO2015109273A3 (en) 2015-09-24
WO2015109273A4 WO2015109273A4 (en) 2015-10-22

Family

ID=52444648

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2015/011883 WO2015109273A2 (en) 2014-01-19 2015-01-18 Coupling schemes for gimbaled scanning mirror arrays

Country Status (2)

Country Link
CN (1) CN106415361B (en)
WO (1) WO2015109273A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9703096B2 (en) * 2015-09-30 2017-07-11 Apple Inc. Asymmetric MEMS mirror assembly
US9869858B2 (en) 2015-12-01 2018-01-16 Apple Inc. Electrical tuning of resonant scanning
US11181734B2 (en) 2018-12-18 2021-11-23 Beijing Voyager Technology Co., Ltd. Micromachined mirror assembly having micro mirror array and hybrid driving method thereof

Citations (8)

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Publication number Priority date Publication date Assignee Title
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US20040036936A1 (en) * 2002-07-02 2004-02-26 Tomohiro Nakajima Optical scanner and image forming apparatus
EP1411024A2 (en) * 2002-10-18 2004-04-21 Samsung Electronics Co., Ltd. 2-D actuator and manufacturing method thereof
EP1450198A2 (en) * 2003-02-17 2004-08-25 Seiko Epson Corporation Scanner
US20050157363A1 (en) * 2002-11-08 2005-07-21 Orcutt John W. Multilayer torsional hinged mirror with a recessed drive/sensing permanent magnet
WO2009107922A1 (en) * 2008-02-25 2009-09-03 Samsung Electronics Co, . Ltd. Micro electro-mechanical system mirror and scanning actuator employing the same
US20110205456A1 (en) * 2010-02-24 2011-08-25 Seiko Epson Corporation Image forming apparatus and rear projection display apparatus
WO2013140307A1 (en) * 2012-03-22 2013-09-26 Primesense Ltd. Gimbaled scanning mirror array

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7203394B2 (en) * 2003-07-15 2007-04-10 Rosemount Aerospace Inc. Micro mirror arrays and microstructures with solderable connection sites
IL165212A (en) 2004-11-15 2012-05-31 Elbit Systems Electro Optics Elop Ltd Device for scanning light
US8018579B1 (en) 2005-10-21 2011-09-13 Apple Inc. Three-dimensional imaging and display system
DE102007021920B8 (en) * 2007-05-10 2011-12-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Apparatus for designing a micromechanical device with adapted sensitivity, method for producing a micromechanical device and a micromechanical system
US8330804B2 (en) 2010-05-12 2012-12-11 Microsoft Corporation Scanned-beam depth mapping to 2D image
US9098931B2 (en) 2010-08-11 2015-08-04 Apple Inc. Scanning projectors and image capture modules for 3D mapping
JP5953657B2 (en) * 2011-05-17 2016-07-20 株式会社ニコン Spatial light modulator, exposure apparatus, and device manufacturing method
KR101709844B1 (en) 2012-02-15 2017-02-23 애플 인크. Apparatus and method for mapping

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US20040036936A1 (en) * 2002-07-02 2004-02-26 Tomohiro Nakajima Optical scanner and image forming apparatus
EP1411024A2 (en) * 2002-10-18 2004-04-21 Samsung Electronics Co., Ltd. 2-D actuator and manufacturing method thereof
US20050157363A1 (en) * 2002-11-08 2005-07-21 Orcutt John W. Multilayer torsional hinged mirror with a recessed drive/sensing permanent magnet
EP1450198A2 (en) * 2003-02-17 2004-08-25 Seiko Epson Corporation Scanner
WO2009107922A1 (en) * 2008-02-25 2009-09-03 Samsung Electronics Co, . Ltd. Micro electro-mechanical system mirror and scanning actuator employing the same
US20110205456A1 (en) * 2010-02-24 2011-08-25 Seiko Epson Corporation Image forming apparatus and rear projection display apparatus
WO2013140307A1 (en) * 2012-03-22 2013-09-26 Primesense Ltd. Gimbaled scanning mirror array

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
YANG L-J ET AL: "Phase synchronization of micro-mirror arrays using elastic linkages", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 95, no. 1, 15 December 2001 (2001-12-15), pages 55 - 60, XP004328632, ISSN: 0924-4247, DOI: 10.1016/S0924-4247(01)00710-5 *

Also Published As

Publication number Publication date
WO2015109273A4 (en) 2015-10-22
CN106415361A (en) 2017-02-15
WO2015109273A2 (en) 2015-07-23
CN106415361B (en) 2018-11-13

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