Embodiments of the invention provide a method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured...http://www.google.fr/patents/US7651306?utm_source=gb-gplus-shareBrevet US7651306 - Cartesian robot cluster tool architecture
