Methods and apparatuses for planarizing a microelectronic substrate. In one embodiment, a planarizing pad for mechanical or chemical-mechanical planarization includes a base section and a plurality of embedded sections. The base section has a planarizing surface, and the base section is composed of a...http://www.google.fr/patents/US6758735?utm_source=gb-gplus-shareBrevet US6758735 - Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates
Methods and apparatuses for making and using planarizing pads for mechanical ...
