Apparatus for optical inspection of a sample includes a radiation source, adapted to irradiate a spot on the sample with coherent radiation, and collection optics, adapted to collect the radiation scattered from the spot so as to form a beam of scattered radiation. A diffractive optical element (DOE)...http://www.google.fr/patents/US7433053?utm_source=gb-gplus-shareBrevet US7433053 - Laser inspection using diffractive elements for enhancement and suppression of surface features
Laser inspection using diffractive elements for enhancement and suppression ...
