A piezoelectric resonator includes a substrate and a vibrator. The vibrator includes a thin-film portion having at least one piezoelectric thin-film layer disposed on the substrate and at least one pair of upper and lower electrodes disposed on the substrate. The vibrator has a structure in which the...http://www.google.fr/patents/US6914368?utm_source=gb-gplus-shareBrevet US6914368 - Piezoelectric resonator, and piezoelectric filter, duplexer, and communication apparatus, all including same
Piezoelectric resonator, and piezoelectric filter, duplexer, and ...
