A carrier head has a backing assembly with a substrate support surface, a housing connectable to a drive shaft to rotate with the drive shaft about a rotation axis, and a dampening material in a load path between the backing assembly and the housing. The dampening material reduces transmission of vibrations...http://www.google.fr/patents/US6848980?utm_source=gb-gplus-shareBrevet US6848980 - Vibration damping in a carrier head
