The present invention provides a semiconductor device capable of preventing deterioration in carrier mobility of a semiconductor layer, which is a quality of the interface between the semiconductor layer and an insulating layer, and a method of manufacturing the semiconductor device. In the semiconductor...http://www.google.fr/patents/US20040038463?utm_source=gb-gplus-shareBrevet US20040038463 - Semiconductor device and method of manufacturing the same
Semiconductor device and method of manufacturing the same
Numéro de demande: 10/644,712 Numéro de publication: US 2004/0038463 A1 Date de dépôt: 20 août 2003 Brevet délivré: US6777354 ( Date de délivrance 17 août 2004)
